CN109495025A - Double drive gantry platform drive system, method, equipment and computer-readable memory - Google Patents
Double drive gantry platform drive system, method, equipment and computer-readable memory Download PDFInfo
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- CN109495025A CN109495025A CN201811442651.0A CN201811442651A CN109495025A CN 109495025 A CN109495025 A CN 109495025A CN 201811442651 A CN201811442651 A CN 201811442651A CN 109495025 A CN109495025 A CN 109495025A
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- crossbeam
- decoupling
- detection unit
- moving component
- guide rail
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
- H02P6/04—Arrangements for controlling or regulating the speed or torque of more than one motor
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
- H02P6/10—Arrangements for controlling torque ripple, e.g. providing reduced torque ripple
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Abstract
The present invention provides a kind of double drive gantry platform drive systems, method, equipment and computer-readable memories, the drive system includes first position detection unit, second position detection unit, offset acquiring unit, deflection angle control unit and decoupling control unit, wherein: the first position detection unit, for obtaining first position；The second position detection unit, for obtaining the second position；The offset acquiring unit, for obtaining the deflection angle of the crossbeam；The deflection angle control unit, for compensating acquisition yaw moment to drift angle instruction；The decoupling control unit obtains the first torque and the second torque using decoupling variable decoupling, and the decoupling variable includes the yaw moment.The present invention compensates acquisition yaw moment to drift angle instruction according to the deflection angle of crossbeam, and using the yaw moment as the parameter of cross decoupling, compensates for the modeling error in practical application, realizes high speed, high-precision gantry pair controls system.
Description
Technical field
The present embodiments relate to PMSM Drive System fields, more specifically to a kind of double drive gantry
Platform drive system, method, equipment and computer-readable memory.
Background technique
Double drive gantry platform (Dual-Drive Gantry Machine) is widely used in light emitting diode, semiconductor, puts down
Face shows, is cut by laser and the precision manufactureings industrial circles such as machine tooling.
As shown in Figure 1, be the typical double schematic diagrames for driving gantry platforms, this pair drive gantry platform including two sliding rails 11,
Crossbeam 12, sliding block 13 and processing head or Z-axis mechanism 14.Above-mentioned two sliding rails 11 are arranged in the x-direction with a fixed spacing, crossbeam 12
Across on sliding rail 11, two ends of crossbeam 12 are respectively provided with moving component and respectively drive two moving components in sliding rail
Two motors run on 11 can control crossbeam 12 to move in the x-direction by above-mentioned motor.Sliding block 13 is installed on leading for crossbeam 12
On rail, a motor control sliding block 13 moves in the y-direction.Processing head or z-axis mechanism 14 are installed on sliding block 13.Above-mentioned motor can
It is run using linear motor direct drive, the rotating electric machine cooperation structures such as ball-screw or rack-and-pinion driving fortune can also be used
Row.
Since double drive gantry platforms have large span, high rigidity, the architectural characteristic of close coupling, Yao Shixian high-precision high-speed is same
Step control, proposes rigors to the decoupling ability of control device.
Relatively small for gantry span, mechanical symmetrical, rigidity and the lower application of rate request, can be used and be based on
The cross decoupling mode of position synchronism deviation adjusts the loop gain of gantry axis driver repeatedly, achievees the purpose that steadily to control.
If it is desired to further increasing the speed of service, master-slave control mode can be used, i.e., Spindle control crossbeam is in the position in the direction y, from axis
Using position control or torque control model, main shaft is followed to run.Larger for span, machinery has a certain difference, fortune
Under scanning frequency degree and the higher situation of required precision, need using cross decoupling and compensation control mode based on model.
However, the above-mentioned cross decoupling scheme based on position synchronism deviation, that there are decoupling abilities is not strong, to mechanical structure according to
The problem of relying that larger, parameter testing is complicated and being also easy to produce beat vibration.
For master-slave control mode, then have the following problems: can not active suppression crossbeam itself elastic vibration mode；
Crossbeam, sliding block and the movement of load can not be eliminated, gantry synchronous operation is caused to disturb；To mechanical erection symmetry requirement compared with
It is high；In high acceleration and deceleration high-speed cruising, mechanical wear is larger.
Summary of the invention
The embodiment of the present invention is directed to the above-mentioned cross decoupling scheme based on position synchronism deviation, that there are decoupling abilities is not strong,
To mechanical structure rely on it is larger, parameter testing is complicated and be also easy to produce beat vibration the problem of and master-slave control mode can not
The elastic vibration mode of active suppression crossbeam itself can not eliminate crossbeam, sliding block and the movement of load, make to gantry synchronous operation
At disturbance, it is higher to mechanical erection symmetry requirement, in high acceleration and deceleration high-speed cruising, the larger problem of mechanical wear provides
A kind of pair is driven gantry platform drive system, method, equipment and computer-readable memory.
The technical solution that the embodiment of the present invention solves above-mentioned technical problem is to provide a kind of double drive gantry platform driving systems
System, double gantry platforms that drive include first for driving the first moving component of crossbeam first end to move on the first guide rail
Motor, the second motor for driving the second moving component of crossbeam second end to move on the second guide rail and in the crossbeam
The sliding block of upper movement, the drive system include first position detection unit, second position detection unit, offset acquisition list
Member, deflection angle control unit and decoupling control unit, in which:
The first position detection unit, for obtaining first moving component first on first guide rail
It sets；
The second position detection unit, for obtaining second of second moving component on second guide rail
It sets；
The offset acquiring unit, for obtaining the deflection angle of the crossbeam according to the first position, the second position；
The deflection angle control unit compensates acquisition beat to drift angle instruction for the deflection angle using the crossbeam
Torque；
The decoupling control unit, for obtaining the first torque and the second torque, the decoupling using decoupling variable decoupling
Variable includes the yaw moment；The operation of first servo controller first motor according to first torque actuated,
Second servo controller, second motor operation according to second torque actuated.
Preferably, the drive system includes the third place detection unit and center of gravity acquiring unit, in which:
The third place detection unit, for obtaining the sliding block in the third place of the crossbeam；
The center of gravity acquiring unit, it is described for obtaining the whole position of centre of gravity of the crossbeam according to the third place
Decoupling variable includes the whole position of centre of gravity of the crossbeam.
Preferably, the drive system includes translation position control unit；
The offset acquiring unit is also used to be obtained according to the deflection angle of the first position, the second position and crossbeam
Translation compensation value；
The translation position control unit, for compensating acquisition thrust to translation instruction using the translation compensation value
Instruction, the decoupling variable includes the thrust command.
Preferably, the first position detection unit includes the first compensation subelement, the second position detection unit packet
Include the second compensation subelement, in which:
The first compensation subelement, for detected to the first position detection unit using the first offset
The position of first moving component compensates, and generates the first position；
The second compensation subelement, for detected to the second position detection unit using the second offset
The position of second moving component compensates, and generates the second position.
The embodiment of the present invention also provides a kind of double drive gantry platform driving methods, and double gantry platforms that drive include for driving
First motor that first moving component of dynamic crossbeam first end moves on the first guide rail, second for driving crossbeam second end
The second motor that moving component moves on the second guide rail and the sliding block moved on the crossbeam, which comprises
First position and second moving component of first moving component on first guide rail is obtained to exist
The second position on second guide rail；
The deflection angle of the crossbeam is obtained according to the first position, the second position, and uses the deflection angle of the crossbeam
Acquisition yaw moment is compensated to drift angle instruction；
The first torque and the second torque are obtained using decoupling variable decoupling, the decoupling variable includes the yaw moment,
And it is run as first servo controller first motor according to first torque actuated, by second SERVO CONTROL
Device second motor operation according to second torque actuated.
Preferably, the method also includes:
The sliding block is obtained in the third place of the crossbeam, and obtains the entirety of the crossbeam according to the third place
Position of centre of gravity；The decoupling variable includes the whole position of centre of gravity of the crossbeam.
Preferably, the method also includes:
Translation compensation value is obtained according to the deflection angle of the first position, the second position and crossbeam, and using described flat
It moves offset and acquisition thrust command is compensated to translation instruction；The decoupling variable includes the thrust command.
Preferably, the first position and described second for obtaining first moving component on first guide rail
The second position of the moving component on second guide rail, comprising:
The position of first moving component is detected by first position detecting device, and is detected and filled by the second position
Set the position for detecting second moving component；
The output of the first position detecting device is compensated and obtains the first position, and to the second
The output for setting detection device, which compensates, obtains the second position.
The embodiment of the present invention also provides a kind of double drive gantry platform driving equipments, including memory and processor, described to deposit
The computer program that can be executed in the processor is stored in reservoir, and real when the processor execution computer program
Now the step of method as described above.
The embodiment of the present invention also provides a kind of computer readable storage medium, stores on the computer readable storage medium
There is computer program, when the computer program is executed by processor, the step of realizing method as described above.
Double drive gantry platform drive system, method, equipment and the computer-readable memory of the embodiment of the present invention, according to cross
The deflection angle of beam compensates acquisition yaw moment to drift angle instruction, and using the yaw moment as the parameter of cross decoupling,
The modeling error in practical application is compensated for, realizes high speed, high-precision gantry pair controls system.The present invention is also by whole to crossbeam
Body position of centre of gravity, translation position, mechanical erection difference compensate, and further improve gantry pair and control precision processed.
Detailed description of the invention
Fig. 1 is typical double schematic diagrames for driving gantry platform；
Fig. 2 is the schematic diagram of double crossbeams for driving gantry platform and sliding block；
Fig. 3 is ideal double drive gantry platform courses model schematics；
Fig. 4 is the schematic diagram for double drive gantry platform drive system that first embodiment of the invention provides；
Fig. 5 is the schematic diagram for double drive gantry platform drive system that second embodiment of the invention provides；
Fig. 6 is the schematic diagram for double drive gantry platform drive system that third embodiment of the invention provides；
Fig. 7 is the schematic diagram for double drive gantry platform drive system that fourth embodiment of the invention provides；
Fig. 8 is the schematic diagram for double drive gantry platform driving method that fifth embodiment of the invention provides；
Fig. 9 is the schematic diagram for double drive gantry platform driving method that sixth embodiment of the invention provides；
Figure 10 is the schematic diagram for double drive gantry platform driving method that seventh embodiment of the invention provides；
Figure 11 is the schematic diagram for double drive gantry platform driving method that eighth embodiment of the invention provides；
Figure 12 is double schematic diagrames for driving gantry platform driving equipment provided in an embodiment of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Fig. 2 is the physical parameter schematic diagram of double crossbeams 21 for driving gantry platform and sliding block 22, middle cross beam 21 and sliding block 22
For the movable part in double drive gantry platforms.There is the first end of crossbeam 21 first moving component (such as wheel), second end to have
Second moving component (such as wheel), and above-mentioned first moving component drives operation, second on the first guide rail by first motor
Moving component is run on the second guide rail by the second motor driven, to realize the operation of crossbeam 21 in X direction；Sliding block 22 is logical
Third motor driven is crossed to run on crossbeam along Y-direction.
In above-mentioned double drive gantry platforms, the first guide rail and the second guide rail are arranged in parallel, and above-mentioned first guide rail and second is led
Spacing between rail is L.The center of crossbeam 21 is in point O, and the quality of the crossbeam 21 is Mx, inertia Ix, position of centre of gravity
In point Gx(generally point GxIt is overlapped with point O)；The quality of sliding block 22 is then My, inertia Iy, position of centre of gravity be in point Gy.By sliding block
22 and crossbeam 21 consider as one (i.e. beam mechanism), then the mass M of beam mechanism entirety are as follows:
M=Mx+My (1)
If the position of centre of gravity G of sliding block 22yIn the direction y, coordinate isThen the position of centre of gravity of beam mechanism entirety is sat in the direction y
It is designated as YG, and it meets following calculating formula (2):
It is Y that the position of centre of gravity of beam mechanism entirety, which can be obtained, in the direction y coordinate according to calculating formula (2)GAre as follows:
Accordingly, the whole rotation inertia J relative to position of centre of gravity of beam mechanism are as follows:
Also, the distance between beam mechanism entirety center of gravity and the first center line of guide rail L1, with the second center line of guide rail it
Between distance L2Respectively
L1=L/2+YG (5)
L2=L/2-YG (6)
In conjunction with Fig. 3, if acting on the electromagnetic force difference at 21 both ends of crossbeam (i.e. the first moving component and the second moving component)
For f1And f2(if it is rotating electric machine plus screw structure, the electromagnetic torque of motor can be converted to the motive force of screw rod), and crossbeam
The displacement of 21 centers of gravity is x, then meets:
WhereinThe second dervative that displacement for 21 center of gravity of crossbeam is x.If the equivalent elastic coefficient for restraining beam mechanism is
K, viscosity D, crossbeam deflection angle are θ, then following calculating formula (8) is set up:
It is above-mentionedFor the first derivative of crossbeam deflection angle theta,For the second dervative of crossbeam deflection angle theta.Also, crossbeam 21 is left
The displacement X of right both ends (i.e. the first moving component and the second moving component)1、X2It is respectively as follows:
x1=x+L1×tgθ (9)
x2=x-L2×tgθ (10)
When 22 weight of sliding block is larger, the whole center of gravity that the movement of the sliding block 22 will cause beam member generates biggish inclined
From.In this case, control the driver of first motor and the second motor operation load can have with moving for sliding block 22 compared with
Big variation, the closed-loop control of servo side it is difficult to ensure that two sides synchronism.To realize accurate control, the embodiment of the present invention is by crossbeam 21
End positions signal and the position signal of y-axis feedback are to host computer (i.e. host controller), to beam member in host computer
Whole position of centre of gravity and deflection angle carry out feedback control.Displacement X in 21 two sides of crossbeam1And X2It, can be by counting in known situation
Formula (9), (10) solve and obtain:
Tg θ=(x1-x2)/L (11)
The whole center of gravity of beam member is acquired by calculating formula (3) again in the direction y position yGAfterwards, the whole center of gravity of beam member
In the direction x position xGAre as follows:
xG=(x1+x2)/2-yG×tgθ (12)
Specifically, as shown in figure 4, being above-mentioned double drive systems for driving gantry platform that first embodiment of the invention provides
Schematic diagram, above-mentioned double first motors for driving gantry platform are driven by the first servo controller (running on torque control model) transports
Row, the second motor are then driven by the second servo controller (running on torque control model) and are run, double drives dragon in the present embodiment
The flat drive system of door includes first position detection unit 41, second position detection unit 42, offset acquiring unit 43, deflection angle
Control unit 45 and decoupling control unit 40.In specific implementation, above-mentioned offset acquiring unit 43, deflection angle control unit
45 and decoupling control unit 40 can be integrated into host computer, and combine the software realization for running on host computer.
Above-mentioned first position detection unit 41 may include the encoder that is installed in double first motors for driving gantry (or from upper
State encoder and receive signal), angle is rotated according to the rotor of first motor to obtain the first moving component on the first guide rail
First position X1.Certainly, in practical applications, first position detection unit 41 can also directly detect the first moving component
Moving distance on one guide rail obtains first position X1。
Similarly, second position detection unit 42 may include be installed on double the second motors for driving gantry encoder (or
Signal is received from above-mentioned encoder), angle is rotated according to the rotor of the second motor and is led to obtain the second moving component second
Second position X on rail2.Certainly, in practical applications, second position detection unit 42 can also directly detect the second moving component
Moving distance on the second guide rail obtains second position X2。
Offset acquiring unit 43 is used for according to above-mentioned first position X1, second position X2Obtain the deflection angle of crossbeam.Specifically
The deflection angle theta of crossbeam can be calculated in ground, the offset acquiring unit 43 according to above-mentioned calculating formula (11).
Deflection angle control unit 45 is used to instruct (by the drift angle in host computer drift angle using the deflection angle theta of above-mentioned crossbeam
Generating unit 44 is instructed to generate, the usual value is zero) to compensate to obtain yaw moment T2*.
Decoupling variable one of of the above-mentioned yaw moment T2* as decoupling control unit 40, is decoupled by decoupling control unit 40
Obtain the first torque f1* with the second torque f2*.(i.e. other decoupling variables are constant), the value of yaw moment T2* under square one
It is bigger, the second torque f2* with the first torque f1* difference is bigger.First servo controller is according to amplified through the first amplifier
First torque f1Drive first motor operation, the second servo controller according to through the amplified second torque f of the second amplifier2It drives
Dynamic second motor operation, to realize double drive controls for driving gantry platform.
As shown in figure 5, being the schematic diagram of the drive system for double drive gantry platform that second embodiment of the invention provides, the drive
Dynamic system is in addition to including first position detection unit 41, second position detection unit 42, offset acquiring unit 43, deflection angle control
It further include the third place detection unit 47 and center of gravity acquiring unit 46 outside unit 45 and decoupling control unit 40 processed, it is above-mentioned heavy
Heart acquiring unit 46 equally can be integrated into host computer.
The third place detection unit 47 is for obtaining sliding block in the third place of crossbeam.Specifically, the third place detection is single
Member 47 may include the encoder (or receiving signal from above-mentioned encoder) being installed on double third motors for driving gantry, according to the
The rotor of three motors rotates angle to obtain the third place of the sliding block on crossbeam.Certainly, in practical applications, the third place is examined
Moving distance of the sliding block on crossbeam can also be detected directly to obtain the third place by surveying unit 47.
Center of gravity acquiring unit 46 is used to obtain the whole position of centre of gravity of crossbeam according to the third place, and specifically, which obtains
Take unit 46 that can obtain the whole position of centre of gravity of crossbeam according to above-mentioned calculating formula (3).The decoupling variable packet of decoupling control unit 40
Include the whole position of centre of gravity of above-mentioned crossbeam.Under square one, the whole position of centre of gravity value of crossbeam is bigger, the second torque f2* with
First torque f1* difference is bigger.
As shown in fig. 6, being the schematic diagram of the drive system for double drive gantry platform that third embodiment of the invention provides, the drive
Dynamic system is in addition to including first position detection unit 41, second position detection unit 42, offset acquiring unit 43, deflection angle control
It further include the control of translation position outside unit 45 processed, decoupling control unit 40, the third place detection unit 47 and center of gravity acquiring unit 46
Unit 49 processed, and the translation position control unit 49 equally can be integrated into host computer.
In the present embodiment, offset acquiring unit 43 is also used to according to first position X1, second position X2And crossbeam
Deflection angle obtains translation compensation value xf(i.e. the barycentre offset of beam member).
Translation position control unit 49, which is used to compensate acquisition thrust to translation instruction using the translation compensation value, to be referred to
F1* is enabled, the decoupling variable of decoupling control unit 40 includes above-mentioned thrust command F1*.Specifically, translation instruction generating unit 48 is transported
It calculates and generates position control instruction x*；Position control unit is translated by first position X1, second position X2Calculate that acquire position anti-
Common mode component is presented, and according to the barycentre offset x of position feedback common mode component and beam memberfOperation obtains beam member center of gravity
Physical location xG, finally by position control instruction x* and beam member center of gravity physical location xGPosition deviation is obtained after subtracting each other, and will
Position deviation and center of gravity physical location feedback signal xGIt carries out operation and obtains torque instruction (i.e. thrust command) F1*.
In the case of position sensor or undesirable gearing (such as: straight grid ruler and guide rail are not parallel, the spiral shell of screw rod
Away from uneven etc.) under, error function g can be exported by testing scheme appropriate1() and g2(), then thus find out theirs
Inverse g1 -1() and g2 -1(), and by error compensation function g1 -1() and g2 -1() is placed in encoder feedback channel, then into
The normal feedback control of row.Accordingly, as shown in fig. 7, being double drive gantry platform drive system that fourth embodiment of the invention provides
Schematic diagram.Double drive gantry platform drive system of the present embodiment includes first position detection unit 41, second position detection list
First 42, offset acquiring unit 43, deflection angle control unit 45, decoupling control unit 40, and first position detection unit 41 is wrapped
The first compensation subelement 411 is included, second position detection unit 42 includes the second compensation subelement 421, in which: above-mentioned first compensation
Subelement 411 can be can also be used individually hard by being integrated into the software sharing of first position detection unit 41 (such as encoder)
Part and software realization；Similarly, the second compensation subelement 421 can be by being integrated into such as encoder of second position detection unit 42)
Software sharing, individual hardware and software can also be used and realize.
Above-mentioned first compensation subelement 411 is used for detected to first position detection unit 41 using the first offset
The position of first moving component compensates, and generates first position.Second compensation subelement 421 is then for using the second compensation
Value compensates the position of detected second moving component of second position detection unit 42, and generates the second position.
Wherein, above-mentioned first offset can pass through error compensation function g1 -1(), which calculates, to be obtained, and the second offset can then lead to
Cross error compensation function g2 -1(), which calculates, to be obtained, and error function g1() and g2() is that double mechanical erections for driving gantry are poor
It is different, it can specifically be obtained according to study or other modes.
As shown in figure 8, be the schematic diagram for double drive gantry platform driving method that fifth embodiment of the invention provides, it is above-mentioned double
Driving gantry platform includes that the first motor for driving the first moving component of crossbeam first end to move on the first guide rail (is led
Spindle motor), the second motor for driving the second moving component of crossbeam second end to move on the second guide rail is (i.e. from axis electricity
Machine) and third motor for driving sliding block to move on crossbeam, and by the first servo controller, (it runs on first motor
Torque control model) driving is run, the second motor is driven by the second servo controller (it runs on torque control model) and run,
The described method includes:
Step S81: first position of first moving component on the first guide rail, the second moving component are obtained in the second guide rail
On the second position.Specifically, above-mentioned first position and the second position can be by being separately mounted to first motor and the second motor
Encoder obtain, can also be obtained by other positions detection device.
Step S82: the deflection angle of crossbeam is obtained according to first position, the second position, and using the deflection angle of crossbeam to inclined
Angle instruction compensates acquisition yaw moment.
Step S87: the first torque and the second torque are obtained using decoupling variable decoupling, above-mentioned decoupling variable includes described inclined
Put torque.
Step S88: it is run by the first servo controller according to the first torque actuated first motor, by the second servo controller
The second motor operation according to the second torque actuated.Above-mentioned first servo controller and the second servo controller be separately operable in
Torque mode.
As shown in figure 9, being the schematic diagram for double drive gantry platform driving method that sixth embodiment of the invention provides, this implementation
Example double drive gantry platform driving method include:
Step S81: first position of first moving component on the first guide rail, the second moving component are obtained in the second guide rail
On the second position.Specifically, above-mentioned first position and the second position can be by being separately mounted to first motor and the second motor
Encoder obtain, can also be obtained by other positions detection device.
Step S82: the deflection angle of crossbeam is obtained according to first position, the second position, and using the deflection angle of crossbeam to inclined
Angle instruction compensates acquisition yaw moment.
Step S85: sliding block is obtained in the third place of crossbeam.In this step, double the of gantry can be driven by being installed in
The rotor that encoder (or receiving signal from above-mentioned encoder) on three motors obtains third motor rotates angle, to obtain cunning
The third place of the block on crossbeam.Certainly, in practical applications, the step can also directly detect movement of the sliding block on crossbeam away from
From obtaining the third place.
Step S86: the whole position of centre of gravity of crossbeam is obtained according to the third place, such as passes through calculating formula (3).
Step S87: the first torque and the second torque are obtained using decoupling variable decoupling, above-mentioned decoupling variable includes described inclined
Put torque and whole position of centre of gravity.
Step S88: it is run by the first servo controller according to the first torque actuated first motor, by the second servo controller
The second motor operation according to the second torque actuated.Above-mentioned first servo controller and the second servo controller be separately operable in
Torque mode.
Wherein, above-mentioned steps S81-S82 and step S85-S86 can be performed simultaneously, can also be by step S81, S82, S85, S86
Sequence execute, or by S85, S86, S81, S82 sequence execute.
It as shown in Figure 10, is the schematic diagram for double drive gantry platform driving method that seventh embodiment of the invention provides, this reality
The double drive gantry platform driving method for applying example includes:
Step S81: first position of first moving component on the first guide rail, the second moving component are obtained in the second guide rail
On the second position.Specifically, above-mentioned first position and the second position can be by being separately mounted to first motor and the second motor
Encoder obtain, can also be obtained by other positions detection device.
Step S82: the deflection angle of crossbeam is obtained according to first position, the second position, and using the deflection angle of crossbeam to inclined
Angle instruction compensates acquisition yaw moment.
Step S83: the deflection of the first position, the second position and the crossbeam according to step S82 that are obtained according to step S81
Angle obtains translation compensation value.
Step S84: acquisition thrust command is compensated to translation instruction using above-mentioned translation compensation value.
Step S85: sliding block is obtained in the third place of crossbeam.
Step S86: the whole position of centre of gravity of crossbeam is obtained according to the third place, such as passes through calculating formula (3).
Step S87: the first torque and the second torque are obtained using decoupling variable decoupling, above-mentioned decoupling variable includes described inclined
Put torque, whole position of centre of gravity and thrust command.
Step S88: it is run by the first servo controller according to the first torque actuated first motor, by the second servo controller
The second motor operation according to the second torque actuated.Above-mentioned first servo controller and the second servo controller be separately operable in
Torque mode.
Wherein, above-mentioned steps S81-S84 and step S85-S86 can be performed simultaneously, can also by step S81, S82, S83,
The sequence of S84, S85, S86 execute, or execute by the sequence of S85, S86, S81, S82, S83, S84.
For the situation field that above-mentioned double drive gantry platform driving methods are undesirable applied to position sensor or gearing
Scape (such as: straight grid ruler and guide rail are not parallel, and the screw pitch of screw rod is uneven etc.), as shown in figure 11, in eighth embodiment of the invention
In the double drive gantry platform driving method provided, feedback position can be compensated, i.e., the step S81 in above-mentioned Fig. 8 specifically may be used
It is accomplished by the following way；
Step S811: the position of the first moving component is detected by first position detecting device, and passes through the second position
Detection device detects the position of the second moving component；
Step S812: compensating the output of first position detecting device using the first offset and obtain first position,
And the output of second position detecting device is compensated using the second offset and obtains the second position.Above-mentioned first mends
Repaying value can be by error compensation function g1 -1(), which calculates, to be obtained, and the second offset can then pass through error compensation function g2 -1() meter
It calculates and obtains, wherein error function g1() and g2() is double mechanical erection differences for driving gantry, specifically can according to study or its
He obtains mode.
As shown in figure 12, the embodiment of the present invention also provides a kind of double drive gantry platform driving equipments, this pair drives gantry platform
Driving equipment can be integrated into host computer, and with spindle controller and from axis controller together with realize and double drive the driving control of gantry platforms
System.It includes memory 121 and processor 122 that this pair, which drives gantry platform driving equipment, and being stored in memory 121 can be in processor
The computer program run in 122, processor 122 run above-mentioned computer program and realize that double gantry platforms that drive as described above drive
The step of dynamic method.Double drive gantry platform driving equipments and above-mentioned double gantry platform driving methods that drive in the present embodiment belong to together
One design, specific implementation process is shown in corresponding embodiment of the method in detail, and the technical characteristic in embodiment of the method is in this equipment
Corresponding in embodiment to be applicable in, which is not described herein again.
The embodiment of the present invention also provides a kind of computer readable storage medium, and computer journey is stored on the storage medium
Sequence, the and when computer program is executed by processor, the step of realizing method as described above.The storage of the embodiment of the present invention is situated between
Matter and above-mentioned double gantry platform driving methods that drive belong to same design, and specific implementation process is shown in that corresponding method is implemented in detail
Example, and the technical characteristic in embodiment of the method is corresponding applicable in the present embodiment, which is not described herein again.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
In the technical scope disclosed by the present invention, any changes or substitutions that can be easily thought of by anyone skilled in the art,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with scope of protection of the claims
Subject to.
Claims (10)
1. a kind of double drive gantry platform drive systems, double gantry platforms that drive include for driving the first of crossbeam first end to transport
First motor that dynamic component moves on the first guide rail, for driving the second moving component of crossbeam second end in the second guide rail
The second mobile motor and the sliding block moved on the crossbeam, which is characterized in that the drive system includes first position
Detection unit, second position detection unit, offset acquiring unit, deflection angle control unit and decoupling control unit, in which:
The first position detection unit, for obtaining first position of first moving component on first guide rail；
The second position detection unit, for obtaining the second position of second moving component on second guide rail；
The offset acquiring unit, for obtaining the deflection angle of the crossbeam according to the first position, the second position；
The deflection angle control unit compensates drift angle instruction for the deflection angle using the crossbeam and obtains beat power
Square；
The decoupling control unit, for obtaining the first torque and the second torque, the decoupling variable using decoupling variable decoupling
Including the yaw moment；First servo controller first motor according to first torque actuated runs, is described
Second servo controller, second motor operation according to second torque actuated.
2. double drive gantry platform drive systems according to claim 1, which is characterized in that the drive system includes third
Position detection unit and center of gravity acquiring unit, in which:
The third place detection unit, for obtaining the sliding block in the third place of the crossbeam；
The center of gravity acquiring unit, for obtaining the whole position of centre of gravity of the crossbeam, the decoupling according to the third place
Variable includes the whole position of centre of gravity of the crossbeam.
3. double drive gantry platform drive systems according to claim 2, which is characterized in that the drive system includes translation
Position control unit；
The offset acquiring unit is also used to be obtained according to the deflection angle of the first position, the second position and crossbeam and translate
Offset；
The translation position control unit refers to for compensating acquisition thrust to translation instruction using the translation compensation value
It enables, the decoupling variable includes the thrust command.
4. double drive gantry platform drive systems according to any one of claim 1-3, which is characterized in that described first
Setting detection unit includes the first compensation subelement, and the second position detection unit includes the second compensation subelement, in which:
The first compensation subelement, for detected to the first position detection unit described using the first offset
The position of first moving component compensates, and generates the first position；
The second compensation subelement, for detected to the second position detection unit described using the second offset
The position of second moving component compensates, and generates the second position.
5. a kind of double drive gantry platform driving methods, double gantry platforms that drive include for driving the first of crossbeam first end to transport
First motor that dynamic component moves on the first guide rail, for driving the second moving component of crossbeam second end in the second guide rail
The second mobile motor and the sliding block moved on the crossbeam, which is characterized in that the described method includes:
First position and second moving component of first moving component on first guide rail are obtained described
The second position on second guide rail；
The deflection angle of the crossbeam is obtained according to the first position, the second position, and using the deflection angle of the crossbeam to inclined
Angle instruction compensates acquisition yaw moment；
The first torque and the second torque are obtained using decoupling variable decoupling, the decoupling variable includes the yaw moment, and by
First servo controller first motor according to first torque actuated is run, by the second servo controller root
According to the second motor operation described in second torque actuated.
6. double drive gantry platform driving methods according to claim 5, which is characterized in that the method also includes:
The sliding block is obtained in the third place of the crossbeam, and obtains the whole center of gravity of the crossbeam according to the third place
Position；The decoupling variable includes the whole position of centre of gravity of the crossbeam.
7. double drive gantry platform driving methods according to claim 6, which is characterized in that the method also includes:
Translation compensation value is obtained according to the deflection angle of the first position, the second position and crossbeam, and is mended using the translation
It repays value and acquisition thrust command is compensated to translation instruction；The decoupling variable includes the thrust command.
8. double drive gantry platform driving method according to any one of claim 5-7, which is characterized in that the acquisition institute
State the first moving component on first guide rail first position and second moving component on second guide rail
The second position, comprising:
The position of first moving component is detected by first position detecting device, and is examined by second position detecting device
Survey the position of second moving component；
The output of the first position detecting device is compensated and obtains the first position, and the second position is examined
The output for surveying device, which compensates, obtains the second position.
9. a kind of double drive gantry platform driving equipments, which is characterized in that including memory and processor, stored in the memory
There is the computer program that can be executed in the processor, and realizes that such as right is wanted when the processor execution computer program
The step of seeking any one of 5-8 the method.
10. a kind of computer readable storage medium, which is characterized in that be stored with computer on the computer readable storage medium
Program when the computer program is executed by processor, is realized such as the step of any one of claim 5 to 8 the method.
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