CN101229538B - Film coating device and bubble detecting method thereof - Google Patents
Film coating device and bubble detecting method thereof Download PDFInfo
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- CN101229538B CN101229538B CN2008100051718A CN200810005171A CN101229538B CN 101229538 B CN101229538 B CN 101229538B CN 2008100051718 A CN2008100051718 A CN 2008100051718A CN 200810005171 A CN200810005171 A CN 200810005171A CN 101229538 B CN101229538 B CN 101229538B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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Abstract
The object of the invention is to detect accurately air bubble in the coating of a coating equipment that includes a coating tank(1), a coating pump(2), a coating mouth (3) through which coating carried by the coating pump(2) pressure is ejected to a coated film part(12), accessory tubes (11A to 11E), and a tube(14). Pressure sensor (7) performs pressure detection of the coating in the accessory tube (11C), and a control apparatus (8) detects air-foam in the coating according to the pressure obtained from the pressure sensor(7).
Description
Technical field
The present invention relates to a kind of coating device that is used on LCD (liquid crystal display), PDP (plasma display panel) etc. are coated with the surface of membrane element, utilizing coating to form and films and the bubble detecting method of this coating device.
Background technology
Form when filming,, then can give to film to impact utilizing mould film applicator coating devices such as (die coater) on being coated with the surface of membrane element, to be coated with coating, thereby cause the generation of inferior waste product because of the change of the condition of filming if in coating, be mixed with bubble.In the past, as the bubble detecting method in the coating, except range estimation was confirmed, also known had a method (patent documentation 1) of utilizing laser (laser light) to detect the bubble in the coating with optical means.
But coating is generally high viscosity, is difficult to detect micro-bubble accurately by range estimation and optical means.
Patent documentation 1: the Japan Patent spy opens the 2005-144376 communique
Summary of the invention
Problem of the present invention is to detect accurately the bubble in the coating.
The 1st form of the present invention provides a kind of coating device, comprising: the coatings tank of storage coating; Pressure transmits the paint pump (application liquid pump) of the described coating in this coatings tank; The described coating that will be sent by this paint pumping pressure is towards being coated with the coating mouth (applicationnozzle) that membrane element spues; And the pipe arrangement that connects described coatings tank, described paint pump and described coating mouth, it is characterized in that, comprising: the pressure sensor (pressuresensor) that the pressure of the described coating in the described pipe arrangement is detected; And the control device of the action of described paint pump being controlled and detected according to the detected pressure of described pressure sensor the bubble in the described coating.
Particularly, described control device reaches time till the predetermined reference pressure value from the pressure of the described coating of commencing signal to the described pipe arrangement that spues that described paint pump output indication disgorging motion is begun when not having bubble in advance, be that reference time is remembered, and to from exporting the time till described commencing signal to the detected pressure of described pressure sensor that spues reaches described reference pressure value, be that actual measurement time and described reference time compare, when the described actual measurement time surpasses described reference time, be judged as in described coating and have bubble.
Detect bubble owing to actual measurement time that the measured pressure of working pressure sensor inspection is obtained and reference time compare, therefore compare with optical means, can detect micro-bubble accurately with range estimation.
More specifically, described reference pressure value is the force value in the rising before the pressure of described paint pump having been exported the described coating in the described pipe arrangement behind the described commencing signal that spues reaches certain pressure when not having bubble.
Set the reference pressure value for by the pressure in will rising, can detect static bubble and mobile bubble both sides reliably.
Scheme instead, described control device is the pressure of the described coating in the described pipe arrangement in the moment of having passed through predetermined fiducial time from the commencing signal that spues that described paint pump output indication disgorging motion is begun when not having bubble in advance, promptly remember with reference to force value, and to utilizing the detected pressure of described pressure sensor from exporting the moment that the described commencing signal that spues passed through described fiducial time, be the observed pressure value and describedly compare with reference to force value, when described observed pressure value is lower than describedly during with reference to force value, be judged as in described coating and have bubble.
Owing to by the detected observed pressure value of pressure sensor is detected bubble with comparing with reference to force value, therefore compare with optical means, can detect bubble accurately with range estimation.
Particularly, set for described fiducial time: when not having bubble, make after that through the moment that should fiducial time the pressure of the described coating in the described pipe arrangement is in the state in the rising that reaches before the certain pressure to the described commencing signal that spues of described paint pump output.
By such setting fiducial time, can detect static bubble and mobile bubble both sides reliably.
Described pressure sensor is arranged on the described pipe arrangement, and the position of described pressure sensor on described pipe arrangement be with respect to the more close described coating mouth of described paint pump, thereby can detect mobile bubble more reliably.
The 2nd form of the present invention provides a kind of bubble detecting method, is used for following coating device, and this coating device comprises: the coatings tank of storage coating; Pressure transmits the paint pump of the described coating in this coatings tank; The described coating that will be sent by this paint pumping pressure is towards being coated with the coating mouth that membrane element spues; And connect described coatings tank, the pipe arrangement of described paint pump and described coating mouth, described bubble detecting method detects the bubble in the described coating in the described pipe arrangement, it is characterized in that, be provided with the pressure sensor that the pressure to the described coating in the described pipe arrangement detects, reach time till the predetermined reference pressure value from the pressure of the described coating of commencing signal to the described pipe arrangement that spues that described paint pump output indication disgorging motion is begun when not having bubble in advance, be that reference time is remembered, and to from exporting the time till described commencing signal to the detected pressure of described pressure sensor that spues reaches described reference pressure value, be that actual measurement time and described reference time compare, when the described actual measurement time surpasses described reference time, be judged as in described coating and have bubble.
The 3rd form of the present invention provides a kind of bubble detecting method, is used for following coating device, and this coating device comprises: the coatings tank of storage coating; Pressure transmits the paint pump of the described coating in this coatings tank; The described coating that will be sent by this paint pumping pressure is towards being coated with the coating mouth that membrane element spues; And connect described coatings tank, the pipe arrangement of described paint pump and described coating mouth, described bubble detecting method detects the bubble in the described coating in the described pipe arrangement, it is characterized in that, be provided with the pressure sensor that the pressure to the described coating in the described pipe arrangement detects, the pressure of the described coating in the described pipe arrangement in the moment of having passed through predetermined fiducial time from the commencing signal that spues that described paint pump output indication disgorging motion is begun when not having bubble in advance, promptly remember with reference to force value, and to utilizing the detected pressure of described pressure sensor from exporting the moment that the described commencing signal that spues passed through described fiducial time, be the observed pressure value and describedly compare with reference to force value, when described observed pressure value is lower than describedly during with reference to force value, be judged as in described coating and have bubble.
Adopt the present invention,, therefore compare with optical means with range estimation owing to detect bubble according to the pressure of the coating in the detected pipe arrangement of pressure sensor, can be with the bubble in the higher accuracy detection coating.
Description of drawings
Fig. 1 is the schematic diagram of expression coating device of the present invention.
Fig. 2 is the schematic diagram of pressure and time relation when being illustrated in bubble and not sneaking in the coating.
Fig. 3 is the schematic diagram of pressure and time relation when being illustrated in static bubble and having sneaked in the coating.
Fig. 4 is the schematic diagram of pressure and time relation when being illustrated in the bubble that flows and having sneaked in the coating.
Fig. 5 is used for the schematic diagram that the bubble detecting method to the 1st example describes.
Fig. 6 is used for the flow chart that the action to the coating device of the 1st example describes.
Fig. 7 is used for the schematic diagram that the bubble detecting method to the 2nd example describes.
Fig. 8 is used for the flow chart that the action to the coating device of the 2nd example describes.
(symbol description)
1 coatings tank
2 paint pumps
The 2a cylinder body
The 2b piston
The 2c driving mechanism
3 coating mouths
4 triple valves
4a～4c port
5 brace tables
6 Pressure Relief Valve
7 pressure sensors
8 control device
11A～11E pipe arrangement
12 are coated with membrane element
13 film
14 pipes
PsD reference pressure value
Pref is with reference to force value
Pme observed pressure value
Tsd fiducial time
The Tref reference time
The Tme actual measurement time
The specific embodiment
(the 1st example)
Fig. 1 is the diagrammatic illustration figure of the coating device of this example.This coating device roughly comprises: coatings tank 1, paint pump 2, coating mouth 3, triple valve 4, brace table 5, Pressure Relief Valve 6, pressure sensor 7 and control device 8.
Storage has coating in coatings tank 1, and coatings tank 1 links to each other with port (port) 4a of triple valve 4 by the first pipe arrangement 11A.As coating, for example can use the PDP glass pulp (glass paste for PDP) of on glass substrate, filming.But coating is not limited thereto, can be according to the kind that is coated with membrane element 12 from selected suitable coating the known various coating in the past.
Coating mouth 3 is gap nozzles (slit nozzle) of known configurations, coating mouth 3 is towards putting at platform that granite is made, be that quilts such as PDP on the brace table 5 are coated with membrane element 12 and spue and move in the coating that is sent by paint pump 2 pressure, thereby films 13 being coated with to form on the membrane element 12.Coating mouth 3 utilizes not shown lowering or hoisting gear and drive unit to carry out lifting and moves.Coating mouth 3 is by the 3rd pipe arrangement 11C, link to each other with the port 4c of triple valve 4 with the 4th pipe arrangement 11D with the pipe (tube) 14 of the position deflection accordingly of coating mouth 3.
End branch from the way of pipe arrangement 11C of the 5th pipe arrangement 11E that pressure releasing is used.The other end of the 5th pipe arrangement 11E is an openend, to atmosphere opening.Pipe arrangement 11E is provided with the Pressure Relief Valve 6 by formations such as normally closed switching mode (ON/OFF type) magnetic valves.
In coating mouth 3 sides of pipe arrangement 11C, particularly be that the pressure sensor 7 that is used for the known configurations that the pressure to the coating of pipe arrangement detects is installed between the branch part of the pipe arrangement 11E of pipe arrangement 11C and coating mouth 3.On the position of the close coating mouth 3 by pressure sensor 7 being arranged on pipe arrangement 11C, can detect mobile bubble described later more reliably.
8 pairs of control device comprise that the action of the coating device integral body of paint pump 2, coating mouth 3, triple valve 4 and Pressure Relief Valve 6 controls.From coatings tank 1 when paint pump 2 attracts coating, port 4a, 4b are communicated with, and make port 4c and other port 4a, 4b blocking, utilize driving mechanism 2c that piston 2b is moved towards the direction of volume increase in cylinder body 2a.Coating in the coatings tank 1 attracted in the paint pump 2 via pipe arrangement 11A, triple valve 4 and pipe arrangement 11B.With coating from paint pump 2 when coating mouth 3 pressure transmit, port 4b, 4c are communicated with, and port 4a and other port 4b, 4c are interdicted, utilize driving mechanism 2c that piston 2b is moved towards the direction that volume reduces in cylinder body 2a.Coating transmits to coating mouth 3 pressure via pipe arrangement 11B, triple valve 4, the 4th pipe arrangement 11D, pipe 14 and the 3rd pipe arrangement 11C from paint pump 2.The coating that is transmitted by pressure spues towards being coated with membrane element 12 from coating mouth 3, becomes to film 13 thereby film.
The principle that bubble is detected describes below.
Fig. 2 represents is pressure curve (relation between the detected pressure of the time when implementing pressure with paint pump 2 and transmitting action and pressure sensor 7) when not having bubble in pipe arrangement 11C, the 11D in triple valve 4 downstreams and pipe 14.In Fig. 2, increase from the order of discharge-amount (following abbreviation discharge-amount) the pressing force curve L1 of the coating in the unit interval of coating mouth 3, L2, L3, L4, the pressure that spues of paint pump 2 also correspondingly raises.In addition, at moment tdis, from the commencing signal that spues that 8 pairs of paint pumps of control device, 2 output indication disgorging motions begin, paint pump 2 beginning disgorging motions.The moment tdis of commencing signal of below output being spued is called " spuing the zero hour ".According to Fig. 2, the rising form of pressure curve L1～L4 is according to the difference of discharge-amount and difference, but no matter is which the bar curve among pressure curve L1～L4, and pressure sensor 7 detected pressure finally all become certain value.
Below, Fig. 3 represents is pressure curve when making bubble sneak among the pipe arrangement 11E between triple valve 4 and the Pressure Relief Valve 6.Because the bubble of sneaking among the pipe arrangement 11E is not discharged from coating mouth 3 with coating, is illiquidity and even static bubble therefore.The bubble that to sneak into below in the coating among the pipe arrangement 11E is called " static bubble ".In Fig. 3, what pressure curve L1 ' represented is the occasion of not sneaking into static bubble.What pressure curve L2 '～L4 ' represented is the occasion of having sneaked into static bubble, and the mixed volume pressing force curve L2 ' of static bubble, the order of L3 ', L4 ' increase.Discharge-amount from the coating in the unit interval of coating mouth 3 is all identical for all pressure curve L1 '～L4 '.
Can be clear and definite by Fig. 3, no matter having does not have static bubble, and pressure sensor 7 detected pressure finally all become necessarily.But, when having sneaked into static bubble (pressure curve L2 '～L4 ') from spue the zero hour tdis to pressure become time T 2 '～T4 ' required before certain when not having static bubble (pressure curve L1 ') from spue the zero hour tdis to become time T 1 ' required before certain to pressure long.In addition, the mixed volume of static bubble is many more, and it is just long more that promptly the order of pressing force curve L2 ', L3 ', L4 ' reaches the before required time of certain pressure.Hence one can see that, can utilize the compressibility of bubble to carry out the automatic detection of static bubble.
Fig. 4 represents is to make that bubble is sneaked in pipe arrangement 11C, the pipe arrangement 11D or the coating in the pipe 14 between triple valve 4 and the coating mouth 3, the pressure curve when implementing disgorging motion by paint pump 2 doublely.Because the bubble of sneaking in pipe arrangement 11C, pipe arrangement 11D or the pipe 14 can be discharged from coating mouth 3 with coating, therefore is to have mobile bubble.Below, the bubble of sneaking in pipe arrangement 11C, pipe arrangement 11D or the pipe 14 is called " bubble flows ".In Fig. 4, pressure curve L1 " what represent is the occasion of not sneaking into bubble.Pressure curve L2 ", L3 " expression is the occasion of having sneaked into mobile bubble, pressure curve L2 " be disgorging motion for the first time, pressure curve L3 " be disgorging motion for the second time.From the discharge-amount of the coating in the unit interval of coating mouth 3 for all pressure curve L1 "～L3 " all identical.
Can be clear and definite by Fig. 4, the bubble that no matter whether flows, pressure sensor 7 detected pressure finally all become necessarily.But, when having sneaked into mobile bubble (pressure curve L2 ", L3 ") from spue the zero hour tdis to pressure become certain before required time T 2 ", T3 " than do not exist when flowing bubble (pressure curve L1 ") from spue the zero hour tdis to pressure become certain before required time T 1 " length.In addition, by the disgorging motion first time, a certain amount of mobile bubble is discharged from coating mouth 3 with coating, therefore with reach certain pressure the first time during disgorging motion before required time T 2 " compare, reach required time T 3 before the certain pressure for the second time during disgorging motion " shorten.Thus, the same during with static bubble, can utilize the flow automatic detection of bubble of the compressibility of bubble.
When having sneaked into static bubble and when having sneaked into mobile bubble, the absolute value of the pressure that under the disgorging motion of paint pump 2, finally reaches (absolute pressure value) difference.Therefore, if when bubble detects with reference to this absolute pressure value, then very difficultly accurately static bubble and mobile bubble both sides are detected.Therefore, utilize the carrying out bubble and detect to reaching pressure before the absolute pressure value zone rising of pressure curve in the present invention from the zero hour tdis of spuing.Below with reference to Fig. 5 the method that bubble detects is described.
In Fig. 5, what pressure curve Lsd represented is the occasion that static bubble and mobile bubble are not all sneaked into, and what pressure curve Lb represented is the occasion that has at least a side to sneak in static bubble and the mobile bubble.In addition, in Fig. 5, reference pressure value Psd is predefined force value.Particularly, reference pressure value Psd be when not having bubble (pressure curve Lsd) the spue pressure of the coating in commencing signal (the tdis zero hour spues) back pipe arrangement 11B～11E and the pipe 14 of output reaches force value in the certain pressure rising before to paint pump 2.Working pressure sensor 7 is in advance to surveying from the time that the pressure of the coating of the tdis zero hour to pipe arrangement 11B～11E and the pipe 14 that spues reaches till the reference pressure value Psd when not having bubble.This time is remembered in control device 8 in advance as reference time Tref.
Implementing coating with paint pump 2 when the pressure of coating mouth 3 transmits action in the reality, 8 pairs of control device detect to the time (actual measurement time T me) that pressure sensor 7 detected pressure reach till the reference pressure value Psd from the zero hour tdis of spuing.In addition, when this actual measurement time T me surpasses reference time Tref, promptly when not having bubble mutually specific pressure rise when slow, be judged as in the coating of at least one side in pipe arrangement 11B～11E and pipe 14 and sneaked into bubble.
Below with reference to Fig. 6 the action of the coating device of this example is described.In being coated with membrane process (step S6-1), at first paint pump 2 attracts the coating in the coatings tanks 1.Then, the commencing signal that will spue is exported to paint pump 2 (step S6-2), and the pressure of paint pump 2 beginning coating transmits action.When output spued commencing signal (the tdis zero hour spues), control device 8 picked up counting and utilizes pressure sensor 7 to carry out piezometry (step S6-3, S6-4).Timing and piezometry last till that the detected pressures Pde of pressure sensor 7 reaches (step S6-5) till the reference pressure Psd.When detected pressures Pde reached reference pressure Psd, control device 8 made timing and piezometry stop (step S6-6, S6-7).The difference of moment when timing stops with the tdis zero hour that spues is actual measurement time T me.Control device 8 pairs of actual measurement time T me and fiducial time Tref compare (step S6-8).
In step S6-8, surpass fiducial time during Tref at actual measurement time T me, be judged as to detecting bubble (at least one side in static bubble and the mobile bubble) (step S6-9).At this moment, owing to can't carry out next time the membrane process that is coated with, the sky under therefore implement to bleed the automatically action (S6-10) and the condition of filming spue (step S6-11).On the other hand, in step S6-8, be when fiducial time, Tref was following at actual measurement time T me, be judged as and do not detect bubble (step S6-12), and forward the membrane process that is coated with next time to.
In the action of bleeding automatically of step S6-10, at first make under Pressure Relief Valve 6 opened state by paint pump 2 enforcement pressure transmission actions, with the openend discharge of the static bubble among the pipe arrangement 11D from pipe arrangement 11D.Then, after Pressure Relief Valve 6 being got back to close the valve state, implement pressure and transmit action, the mobile bubble among the pipe arrangement 11C is discharged from coating mouth 3 by paint pump 2.In the sky of step S6-11 spues, under the situation that is not coated with membrane element 12, implement pressure and transmit action by paint pump 2.Carry out step S6-10 and step S6-11 repeatedly, become below Tref fiducial time up to actual measurement time T me in step S6-8.
In the coating device of this example, owing to compare by actual measurement time T me that working pressure sensor 7 detected pressure are obtained and reference time Tref and to detect bubble, therefore compare with optical means with range estimation, can detect the bubble of trace accurately.In addition, because reference time Tref is the pressure of the pressure curve when not having bubble in rising value, reference pressure value determine, therefore can detect static bubble and mobile bubble both sides reliably.
(the 2nd example)
The coating device of the present invention's the 2nd example and the difference of the 1st example are the bubble detecting method that control device 8 is implemented.
With reference to Fig. 7 the bubble detecting method of this example is described.In Fig. 7, what pressure curve Lsd represented is the occasion that static bubble and mobile bubble are not all sneaked into, and what pressure curve Lb represented is the occasion that has at least a side to sneak in static bubble and the mobile bubble.In addition, in Fig. 7, fiducial time, Tsd was the predefined time.Particularly, fiducial time, Tsd set for: when not having bubble (pressure curve Lsd), make to paint pump 2 output spue behind the commencing signal (the tdis zero hour spues) through should fiducial time moment of Tsd, the pressure of the coating in pipe arrangement 11B～11E and the pipe 14 is in the state in the rising that reaches before the certain pressure.When not having bubble, utilize pressure sensor 7 in advance to passing through the pipe arrangement 11B～11E in the moment of Tsd fiducial time and the pressure of the coating in the pipe 14 is measured, and this pressure is remembered in control device 8 in advance as reference pressure value P ref from the zero hour tdis of spuing.
Implementing coating with paint pump 2 when the pressure of coating mouth 3 transmits action, 8 pairs of control device are passing through the pressure in the moment of Tsd fiducial time and are surveying from the zero hour tdis of spuing.When this pressure that determines (observed pressure value Pme) is lower than with reference to pressure value P ref, promptly when not having bubble mutually specific pressure rise when slow, be judged as in the coating of at least one side in pipe arrangement 11B～11E and pipe 14 and sneaked into bubble.
Below with reference to Fig. 8 the action of the coating device of this example is described.In being coated with membrane process (step S8-1), at first paint pump 2 attracts the coating in the coatings tanks 1.Then, the commencing signal that will spue is exported to paint pump 2 (step S8-2), and the pressure of paint pump 2 beginning coating transmits action.When output spues commencing signal (the tdis zero hour spues), control device 8 pick up counting (step S8-3).If reach Tsd fiducial time (step S8-4) from the elapsed time Te of the tdis zero hour that spues, then control device 8 utilizes pressure sensor 7 to carry out piezometry (step S8-5).The pressure that determines in this step S8-5 is observed pressure value Pme.In addition, control device 8 stops timing (step S8-6).Then, 8 pairs of observed pressure values of control device Pme with compare (step S8-7) with reference to pressure value P ref.
In step S8-7, when observed pressure value Pme is lower than reference pressure value Pref, is judged as and detects bubble (at least one side in static bubble and the mobile bubble) (step S8-8).At this moment, owing to can't carry out next time the membrane process that is coated with, the sky under therefore implement to bleed the automatically action (S8-9) and the condition of filming spue (step S8-10).On the other hand, in step S8-7, be when above, be judged as and do not detect bubble (step S8-11), and forward the membrane process that is coated with next time to reference to pressure value P ref at observed pressure value Pme.
In the coating device of this form,, can detect micro-bubble accurately owing to, therefore compare with optical means with range estimation by the observed pressure value Pme that determines with pressure sensor 7 is detected bubble with comparing with reference to pressure value P ref.In addition, owing to be value during the pressure of the pressure curve when not having bubble rises, therefore can detect static bubble and mobile bubble both sides reliably with reference to pressure value P ref.
Other formation of the 2nd example is identical with the 1st example with effect.
Claims (4)
1. coating device comprises:
The coatings tank of storage coating;
Pressure transmits the paint pump of the described coating in the described coatings tank;
The described coating that will be sent by described paint pumping pressure is towards being coated with the coating mouth that membrane element spues; And
The pipe arrangement that connects described coatings tank, described paint pump and described coating mouth,
It is characterized in that, comprising:
Pressure sensor, this pressure sensor detects the pressure of the described coating in the described pipe arrangement; And
Control device, this control device is controlled the action of described paint pump, and detects bubble in the described coating according to the detected pressure of described pressure sensor,
Described control device is remembered reference time in advance, and actual measurement time and described reference time are compared, and when the described actual measurement time surpasses described reference time, be judged as in described coating and have bubble,
Described reference time is meant when not having bubble from the pressure of the described coating of commencing signal to the described pipe arrangement that spues that described paint pump output indication disgorging motion is begun and reaches time till the predetermined reference pressure value,
The described actual measurement time is meant from exporting the time till described commencing signal to the detected pressure of described pressure sensor that spues reaches described reference pressure value.
2. coating device as claimed in claim 1, it is characterized in that described reference pressure value is the force value in the rising before the pressure of described paint pump having been exported the described coating in the described pipe arrangement behind the described commencing signal that spues reaches certain pressure when not having bubble.
3. coating device as claimed in claim 1 is characterized in that described pressure sensor is arranged on the described pipe arrangement, and with respect to the more close described coating mouth side of described paint pump.
4. a bubble detecting method is used for following coating device, and this coating device comprises: the coatings tank of storage coating; Pressure transmits the paint pump of the described coating in the described coatings tank; The described coating that will be sent by described paint pumping pressure is towards being coated with the coating mouth that membrane element spues; And the pipe arrangement that connects described coatings tank, described paint pump and described coating mouth, described bubble detecting method detects the bubble in the described coating in the described pipe arrangement, it is characterized in that,
Be provided with the pressure sensor that the pressure to the described coating in the described pipe arrangement detects,
In advance reference time is remembered, and actual measurement time and described reference time is compared, when the described actual measurement time surpasses described reference time, be judged as in described coating and have bubble,
Described reference time is meant when not having bubble from the pressure of the described coating of commencing signal to the described pipe arrangement that spues that described paint pump output indication disgorging motion is begun and reaches time till the predetermined reference pressure value,
The described actual measurement time is meant from exporting the time till described commencing signal to the detected pressure of described pressure sensor that spues reaches described reference pressure value.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007015045A JP4975454B2 (en) | 2007-01-25 | 2007-01-25 | Coating device and bubble detection method in coating device |
| JP2007015045 | 2007-01-25 | ||
| JP2007-015045 | 2007-06-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010102031167A Division CN101850320B (en) | 2007-01-25 | 2008-01-24 | Application device and method for detecting an air bubble in the application device |
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| Publication Number | Publication Date |
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| CN101229538A CN101229538A (en) | 2008-07-30 |
| CN101229538B true CN101229538B (en) | 2010-12-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010102031167A Active CN101850320B (en) | 2007-01-25 | 2008-01-24 | Application device and method for detecting an air bubble in the application device |
| CN2008100051718A Active CN101229538B (en) | 2007-01-25 | 2008-01-24 | Film coating device and bubble detecting method thereof |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010102031167A Active CN101850320B (en) | 2007-01-25 | 2008-01-24 | Application device and method for detecting an air bubble in the application device |
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| JP (1) | JP4975454B2 (en) |
| KR (1) | KR100952810B1 (en) |
| CN (2) | CN101850320B (en) |
| TW (1) | TWI349583B (en) |
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| EP2362102B1 (en) | 2010-02-18 | 2012-10-03 | Grundfos Management A/S | Metering pump aggregate |
| CN101954339B (en) * | 2010-10-28 | 2012-10-10 | 中天科技光纤有限公司 | Feeding system for preventing bubble generation during optical fiber coating |
| JP6264811B2 (en) * | 2013-09-27 | 2018-01-24 | 日本電気株式会社 | Coating apparatus and coating method |
| TWI554408B (en) * | 2014-03-21 | 2016-10-21 | 鴻積科機股份有限公司 | Glue film sticking device with a function of removing bubbles |
| KR200477660Y1 (en) * | 2015-01-22 | 2015-07-06 | 주식회사 지앤씨 | Leak detecting apparatus of pipeline for semiconductor fabrication |
| KR101927920B1 (en) * | 2016-11-24 | 2018-12-11 | 세메스 주식회사 | Substrate treating apparatus and substrate treating method |
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Also Published As
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| CN101850320B (en) | 2012-08-15 |
| TW200902164A (en) | 2009-01-16 |
| CN101229538A (en) | 2008-07-30 |
| KR20080070551A (en) | 2008-07-30 |
| CN101850320A (en) | 2010-10-06 |
| TWI349583B (en) | 2011-10-01 |
| KR100952810B1 (en) | 2010-04-14 |
| JP4975454B2 (en) | 2012-07-11 |
| JP2008178817A (en) | 2008-08-07 |
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