CN101221116B - Plate type three-dimensional locating/scanning device - Google Patents
Plate type three-dimensional locating/scanning device Download PDFInfo
- Publication number
- CN101221116B CN101221116B CN2007103042379A CN200710304237A CN101221116B CN 101221116 B CN101221116 B CN 101221116B CN 2007103042379 A CN2007103042379 A CN 2007103042379A CN 200710304237 A CN200710304237 A CN 200710304237A CN 101221116 B CN101221116 B CN 101221116B
- Authority
- CN
- China
- Prior art keywords
- piezoelectric ceramic
- electrodes
- insulating trip
- ceramic tubes
- ceramic tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention relates to a flat-plate three-dimensional locating/scanning device based on a piezoceramics tube. The structure component of the invention mainly includes a rectangle fixing frame, eight piezoceramics tubes, sixteen insulating sheets, eight elastic sheets, four fixing seats and a sample platform. The two ends of each piezoceramics tube are stuck with one insulating sheet. The insulating sheets arranged at one end and the piezoceramics tubes are fixed on one fixing seat of the rectangle fixing frame; the insulating sheets arranged at the other end are stuck with one end of the elastic sheet. The sample platform in a central position is fixed at the other ends of the eight elastic sheets to form flexible supporting structure. The invention combines and connects four electrodes of the outer walls (or inner walls) of the eight piezoceramics tubes into three pairs of electrodes according to a specific mode, the electrodes of the inner walls (or the outer walls) of the piezoceramics tubes are connected to the ground and three pairs of electrodes are respectively connected with three pairs of drive voltages so as to realize three-dimensional locating and scanning. The invention also has nanometer scanning range and nanometer resolution.
Description
Technical field
The present invention relates to location/scanning technique field, particularly a kind of plate type three-dimensional location/scanister belongs to scanning probe microscopy.
Background technology
Along with development of science and technology, fields such as microelectronic engineering, precision engineering, bioengineering and nanosecond science and technology press for this gordian technique of nanometer positioning/scanning.Especially in present flourish nanosecond science and technology field, nanometer positioning/scanning technique is inseparable with scanning probe microscopy, is one of core technology that realizes nanometer imaging, measurement and processing.
Scanning probe microscopy (SPM) is the important tool of present nanometer detection and sign, and it mainly comprises scanning tunnel microscope, scanning force microscopy and Near-field Optical Microscope etc.Carry out micro-imaging because scanning probe microscopy all is the Z that adopts probe (or sample) to control between probe and the sample in point by point scanning on the X-Y direction, simultaneously to the mode of distance, so three-dimensional localization/scanister is a core component indispensable among the SPM.Because piezoceramic material has stable performance, easy to use and higher advantages such as resolution, bearing accuracy and dynamic responding speed, become the main material of making SPM three-dimensional localization/scanister at present.
In the prior art, it is several that three-dimensional localization/scanister made from piezoceramic material mainly contains tripod type, single tube type and cross cooperation single tube type etc.As shown in Figure 1a be tripod type three-dimensional localization/scanister principle schematic, tripod type device by three independently the rectangular parallelepiped piezoceramic material cross in mutually orthogonal mode and combine, probe is installed in the top that crosses of tripod, three piezoelectric elements stretch independently under driven and shrink, make probe at x, y, three direction motions of z, thereby realize the three-dimensional localization/scanning of probe, Fig. 1 b has provided single tube type three-dimensional localization/scanister principle schematic, its three-dimensional localization/scanister is realized by piezoelectric ceramic tube, the electrode of piezoelectric ceramic tube outside is divided into four parts that area equates, and inside pipe wall is single overall electrode.Apply voltage on the cube electrode therein, this part of pipe will stretch or shrink, and causes ceramic pipe to the direction bending perpendicular to tubular axis.By on two adjacent electrodes, applying the scanning that voltage just can be realized the X-Y direction in certain sequence.Motion on the Z direction can be by making pipe integral stretch or shrinking and realize in the tube wall electrode application voltage.The voltage that two other electrode of tube outer wall also can apply contrary sign simultaneously stretches pipe one side, relative opposite side shrinks, to increase sweep limit, shown in Fig. 1 c is that " ten " cabinet frame cooperates single tube type three-dimensional localization/scanister principle schematic, it adopts " ten " font piezoceramic material to realize X-Y scanning, and the motion on the Z direction is realized by a piezoelectric ceramic tube that is in " ten " font center.
Though SPM is the important tool of carrying out nanometer detection and sign at present, its range of observation is very limited, generally can only carry out scanning imagery in the zone of micron dimension, and is basic as the blind men size up the elephant during observation.SPM and conventional optical microscope (OM) are combined, and structure scan-probe and optical microphotograph associating (SPM-OM) system are development trends in recent years.The target or the interesting areas that need research are sought and locked to the ability that this system utilizes optical microscope to observe, search on a large scale as early as possible, carries out high resolving power SPM imaging then, is to carry out the especially effective means of biological sample research of nano material.
Being widely used in the research of living things system because be inverted optical microscope, is one of preferred plan of design SPM-OM system so SPM is configured on the optical microscope sample stage.Because it is generally shorter to be inverted on the sample stage Z-operating distance limited to the space and the optical microphotograph object lens, axially (Z-to) size of above-mentioned several three-dimensional localization/scanister is bigger, and the center do not have light hole, obviously can not be used for the SPM-OM system.Therefore, to have a Z-plate type three-dimensional location/scanister little to size, that have light hole very necessary in development.
Summary of the invention
The purpose of this invention is to provide a kind of plate type three-dimensional location/scanister based on piezoelectric ceramic tube, in order to carrying out high resolving power SPM imaging, for carry out nano material especially biological sample research effective tool is provided.
The structure of plate type three-dimensional location/scanister of the present invention is formed and is mainly comprised: 1 rectangle fixed mount, 8 piezoelectric ceramic tubes, 16 insulating trips, 8 flexure strips, 4 holders and 1 sample stage.The all bonding insulating trip in the two ends of each piezoelectric ceramic tube, and two ends are connected with flexure strip with holder respectively; 4 holders are in an end of four frames in the rectangle fixed mount respectively; Flexure strip is connected with the sample stage of center, forms flexible support mechanism.
The outer wall of all piezoelectric ceramic tubes has four equal electrodes, be connected respectively to+X ,-X ,+Y ,-Y ,+Z ,-three pairs of scanning voltage output terminals of Z; The whole ground connection of inwall electrode of 8 piezoelectric ceramic tubes.In like manner, if the inwall of all piezoelectric ceramic tubes is divided into four equal electrodes, X, Y, Z to connection constant, whole ground connection of wall electrode then.
The principle of work of described plate type three-dimensional location/scanister is: when to electrode application voltage on the piezoelectric ceramic tube outer wall, this side of pipe is elongation or contraction just, and the opposite side that electrode is relative therewith shrinks or elongation, causes ceramic pipe to the direction bending perpendicular to tubular axis.Therefore, during four ceramic pipe two lateral electrodes, ceramic pipe will drive specimen holder along the X-scanning direction about the X scanning voltage puts on simultaneously; When the Y scanning voltage is applied to up and down four ceramic pipe two lateral electrodes simultaneously, ceramic pipe will drive specimen holder along the Y-scanning direction; Equally, when the Z scanning voltage is applied to all ceramic pipe tops and bottom electrode, ceramic pipe will drive specimen holder along the Z-scanning direction; Thereby realize three-dimensional localization and scanning, and sweep limit and nanometer resolution with micron dimension.
The invention has the advantages that:
(1) Z is little to size, is applicable to scan-probe and optical microphotograph combined system;
(2) centre of sample stage is provided with light hole, satisfies the demand of optical microscope to sample stage of being inverted, and realizes the sample illumination;
(3) each direction is four piezoelectric ceramic tubes, and the sample load that can carry is bigger, can reach 100～150g;
(4) X to, Y to, Z to sweep limit wide, can reach 20～80 microns.
Description of drawings
Fig. 1 a is existing tripod type three-dimensional localization/scanister principle schematic;
Fig. 1 b is existing single tube type three-dimensional localization/scanister principle schematic;
Fig. 1 c is that existing cross cooperates single tube type three-dimensional localization/scanister principle schematic;
Fig. 2 a plate type three-dimensional location/scanister of the present invention is formed the vertical view of structure;
Shown in Fig. 2 b is second end and the bonding structural drawing of sample stage of flexure strip;
Shown in Fig. 2 c is the structural drawing that second end of flexure strip is connected with the sample stage screw.
Among the figure:
1 rectangle fixed mount, 101 holder A, 102 holder B, 103 holder C
104 holder D, 201 piezoelectric ceramic tube A, 202 piezoelectric ceramic tube B, 203 piezoelectric ceramic tube C
204 piezoelectric ceramic tube D, 205 piezoelectric ceramic tube E, 206 piezoelectric ceramic tube F, 207 piezoelectric ceramic tube G
208 piezoelectric ceramic tube H, 301 insulating trip A, 302 insulating trip B, 303 insulating trip C
304 insulating trip D, 305 insulating trip E, 306 insulating trip F, 307 insulating trip G
308 insulating trip H, 309 insulating trip I, 310 insulating trip J, 311 insulating trip K
312 insulating trip L, 313 insulating trip M, 314 insulating trip N, 315 insulating trip O
316 insulating trip P, 401 flexure strip A, 402 flexure strip B, 403 flexure strip C
404 flexure strip D, 405 flexure strip E, 406 flexure strip F, 407 flexure strip G
408 flexure strip H, 501 sample stage, 502 light holes, 503 screws
601 frame A, 602 frame B, 603 frame C, 604 frame D
Embodiment
The present invention is described in further detail below in conjunction with drawings and Examples.
The present invention is a kind of plate type three-dimensional location/scanister, described device is made up of 1,8 piezoelectric ceramic tube A201～H208 of rectangle fixed mount, 16 insulating trip A301～P316,8 flexure strip A401～H408, four holder A101～D104 and sample stage 501, and the vertical view that plate type three-dimensional location/scanister is formed structure as shown in Figure 2.Four frame A601, B602 of rectangle fixed mount 1, the last end of C603, D604 connect four holder A101, B102, C103, D104 respectively in turn, between per two holders two piezoelectric ceramic tubes parallel with frame are set respectively, the all bonding separately insulating trip in the two ends of each piezoelectric ceramic tube, the insulating trip of piezoelectric ceramic tube first end is connected with holder, the insulating trip of second end is connected with first end of flexure strip, second end of flexure strip connects sample stage, forms flexible support mechanism.The concrete annexation of described plate type three-dimensional location/scanister is as follows:
Rectangle fixed mount 1 is by four frame A601, B602, C603, the D604 head and the tail are connected to form in turn, near the end points of frame A601～D604, four holder A101 are set respectively, B102, C103, D104, vertical view shown in Fig. 2 a, 8 piezoelectric ceramic tube A201～H208 are positioned at X-Y plane, first end (upper end) and second end (lower end) of piezoelectric ceramic tube A201 are bonded with insulating trip A301 and insulating trip B302 respectively, insulating trip A301 and holder A101 are bonding, insulating trip B302 and flexure strip A401 first end (left end) are bonding, the tube axial direction of piezoelectric ceramic tube A201 is parallel with the frame A601 at holder A101 place, axial vertical with flexure strip A401; In like manner, the bonding insulating trip C303 in the upper end of piezoelectric ceramic tube B202, the bonding insulating trip D304 in lower end, insulating trip C303 and flexure strip B402 are bonding, insulating trip D304 and holder B102 are bonding, and the tube axial direction of piezoelectric ceramic tube B202 is parallel with the frame A601 at holder A101 place, axial vertical with flexure strip B402, flexure strip A401 is parallel with flexure strip B402, the bonding sample stage 501 of the other end of flexure strip A401 and flexure strip B402; By same bonding way, piezoelectric ceramic tube C203～H208 is bonded with insulating trip E305～P316 respectively, by insulating trip E305～P316 and holder B102, C103, D104, A101's is bonding in turn, bonding in turn with flexure strip C403～H408, form rectangle mechanism, the end of flexure strip A401～H408 and insulating trip B302, C303, F306, G307, J310, K311, N314,0315 is bonding, the other end is bonded in the supporting construction that forms a flexibility on the sample stage 501 respectively, shown in Fig. 2 b, flexure strip A401, B402 is direct and sample stage 501 is bonding.Flexure strip A401～H408 also can be to be connected by screw 503 with the connected mode of sample stage 501, shown in Fig. 2 c, flexure strip A401, B402 bending back is connected with sample stage 501 screws 503.The center of sample stage 501 has light hole 502, is used for transmission illumination light.
The outer wall of all piezoelectric ceramic tube A201～H208 is divided into four equal electrodes respectively.Wherein, the left electrodes of the left electrodes of the left side two piezoelectric ceramic tube A201, B202 and the right side two piezoelectric ceramic tube E205, F206 is connected to+X scanning voltage output terminal jointly; The right electrodes of the right electrodes of the left side two piezoelectric ceramic tube A201, B202 and the right side two piezoelectric ceramic tube E205, F206 is connected to-X scanning voltage output terminal jointly; Above the last lateral electrode of two piezoelectric ceramic tube G207, H208 and the last lateral electrode of following two piezoelectric ceramic tube C203, D204 be connected to jointly+Y scanning voltage output terminal; Above the downside electrode of two piezoelectric ceramic tube G207, H208 and the downside electrode of following two piezoelectric ceramic tube C203, D204 be connected to jointly-Y scanning voltage output terminal; The top electrodes of 8 piezoelectric ceramic tube A201～H208 is connected with+Z scanning voltage output terminal, and bottom electrode is connected to-Z scanning voltage output terminal on; The whole ground connection of inwall electrode of 8 piezoelectric ceramic tube A201～H208.In like manner, if the inwall of all piezoelectric ceramic tubes is divided into four equal electrodes, X, Y, Z to connection constant, whole ground connection of wall electrode then.
When to electrode application voltage on the piezoelectric ceramic tube outer wall, pipe this side elongation or contraction, and the opposite side that electrode is relative therewith shrinks or elongation, causes piezoelectric ceramic tube to the direction bending perpendicular to tubular axis.Therefore, during four piezoelectric ceramic tube two lateral electrodes, piezoelectric ceramic tube will drive specimen holder along the X-scanning direction about the X scanning voltage puts on simultaneously; When the Y scanning voltage is applied to up and down four piezoelectric ceramic tube two lateral electrodes simultaneously, piezoelectric ceramic tube will drive specimen holder along the Y-scanning direction; Equally, when the Z scanning voltage is applied to all piezoelectric ceramic tube tops and bottom electrode, piezoelectric ceramic tube will drive specimen holder along the Z-scanning direction; Thereby realize three-dimensional localization and scanning, and sweep limit and nanometer resolution with micron dimension.
Embodiment:
A kind of have 8 piezoelectric ceramic tube A201～H208,16 insulating trip A301～P316,8 flexure strip A401～H408,4 holder A101～D104, plate type three-dimensional location/the scanister of a rectangle fixed mount 1 and a sample stage 501, the external diameter 8mm of all piezoelectric ceramic tube A201～H208, length 35mm, wall thickness 0.5mm, the all bonding insulating trip in each piezoelectric ceramic tube two ends, all insulating trips all are diameter 8.5mm, the round ceramic insulating trip of thick 1mm, wherein the insulating trip of each piezoelectric ceramic tube first end is bonded on a 12mm * 12mm * 12mm metal holder, first end of the insulating trip of second end and flexure strip is bonding, second end and the sample stage of flexure strip are bonding, elasticity length of a film 28mm, wide 6mm, thick 0.5mm, be copper sheet, second end of eight flexure strips is all bonding with sample stage 501 or be connected with screw 503, form a flexible support mechanism, shown in Fig. 2 b is second end and the bonding structural drawing of sample stage of flexure strip, and shown in Fig. 2 c is the structural drawing that second end of flexure strip is connected with the sample stage screw; Sample stage 501 is that 42mm * 42mm * 8mm and centre have the aluminium quality sample platform that diameter is the light hole hole 502 of 30mm.
The physical dimension of rectangle fixed mount is that 120mm * 120mm, inside casing are of a size of 100mm * 100mm, thickness is the aluminum rectangle fixed mount of 15mm.
The rectangle fixed mount can be materials such as metal, pottery or engineering plastics framework; Insulating trip is insulating ceramics, processable ceramic, teflon or organic glass; Flexure strip can be materials such as sheet metal or plastics.If flexure strip is nonmetal, then second end of piezoelectric ceramic tube directly and flexure strip first end bonding, promptly each piezoelectric ceramic tube can be saved a ceramic insulation sheet.
Piezoelectric ceramic tube A201～H208 outer wall is divided into four equal electrodes respectively; Wherein, the left electrodes of the left electrodes of the left side two piezoelectric ceramic tube A201, B202 and the right side two piezoelectric ceramic tube E205, F206 is connected to+X scanning voltage output terminal jointly; The right electrodes of the right electrodes of the left side two piezoelectric ceramic tube A201, B202 and the right side two piezoelectric ceramic tube E205, F206 is connected to-X scanning voltage output terminal jointly; Above the last lateral electrode of two piezoelectric ceramic tube G207, H208 and the last lateral electrode of following two piezoelectric ceramic tube C203, D204 be connected to jointly+Y scanning voltage output terminal; Above the downside electrode of two piezoelectric ceramic tube G207, H208 and the downside electrode of following two piezoelectric ceramic tube C203, D204 be connected to jointly-Y scanning voltage output terminal; The top electrodes of 8 piezoelectric ceramic tube A201～H208 is connected with+Z scanning voltage output terminal, and bottom electrode is connected to-Z scanning voltage output terminal on; The whole ground connection of inwall electrode of 8 piezoelectric ceramic tube A201～H208.
When to the electrode application voltage of piezoelectric ceramic tube outer wall, the elongation of pipe one side, and opposite side shrinks, cause piezoelectric ceramic tube to direction bending perpendicular to tubular axis, apply voltage by certain time sequence, the scanning of specimen holder be can realize, thereby three-dimensional localization and scanning realized along X-direction, Y-direction, Z-direction.For described plate type three-dimensional location/scanister, can realize the sweep limit of 20～30 microns in X-Y-Z direction, bigger if desired sweep limit, the physical dimension of change piezoelectric ceramic tube that can also be suitable is applicable to scan-probe and optical microphotograph combined system.Formed flexible support mechanism is to connect a sample stage with 8 flexure strips, can carry the above load of 100～150g.
Claims (6)
1. plate type three-dimensional location/scanister, comprise: 1 rectangle fixed mount, 8 piezoelectric ceramic tubes, 16 insulating trips, 8 flexure strips, 4 holders and 1 sample stage, the rectangle fixed mount is connected to form in turn by four frame head and the tail, end at each frame connects a holder respectively in turn, between every two adjacent holders two piezoelectric ceramic tubes are set respectively, the all bonding separately insulating trip in the two ends of each piezoelectric ceramic tube, and the insulating trip of each piezoelectric ceramic tube first end is connected with holder, and the insulating trip of second end is connected with first end of flexure strip; Sample stage is arranged on the center of rectangle fixed mount, and the limit that 4 sides of sample stage are corresponding with the rectangle fixed mount respectively is parallel; Second end of each flexure strip is connected with the center of sample stage respective side, forms flexible support mechanism; The dead in line of two piezoelectric ceramic tubes between described every adjacent two holders, and described axis is all parallel with adjacent frame, vertical with plane, flexure strip place; The outer wall of all piezoelectric ceramic tubes or inwall have four equal electrodes, be connected respectively to+X ,-X ,+Y ,-Y ,+Z ,-three pairs of scanning voltage output terminals of Z, when described outer wall had four equal electrodes, the concrete connected mode of piezoelectric ceramic tube was: the left electrodes of two piezoelectric ceramic tubes of the left electrodes of two piezoelectric ceramic tubes in the left side and the right side is connected to+X scanning voltage output terminal jointly; The right electrodes of two piezoelectric ceramic tubes of the right electrodes of two piezoelectric ceramic tubes in the left side and the right side is connected to-X scanning voltage output terminal jointly; Above the last lateral electrode of two piezoelectric ceramic tubes and the last lateral electrode of following two piezoelectric ceramic tubes be connected to jointly+Y scanning voltage output terminal; Above the downside electrode of two piezoelectric ceramic tubes and the downside electrode of following two piezoelectric ceramic tubes be connected to jointly-Y scanning voltage output terminal; The top electrodes of 8 piezoelectric ceramic tubes is connected with+Z scanning voltage output terminal, and bottom electrode is connected to-Z scanning voltage output terminal on; The whole ground connection of inwall electrode of 8 piezoelectric ceramic tubes; In like manner, when described inwall had four equal electrodes, the X of piezoelectric ceramic tube, Y, Z were constant to connecting, 8 whole ground connection of piezoelectric ceramic tube wall electrode.
2. plate type three-dimensional location/scanister according to claim 1 is characterized in that: described rectangle fixed mount is metal, pottery or engineering plastics framework.
3. plate type three-dimensional location/scanister according to claim 1 is characterized in that: described insulating trip is processable ceramic, teflon or organic glass.
4. plate type three-dimensional location/scanister according to claim 1 is characterized in that: described flexure strip is sheet metal or plastics.
5. plate type three-dimensional location/scanister according to claim 1 is characterized in that: between described piezoelectric ceramic tube and the insulating trip, between insulating trip and the flexure strip, between insulating trip and the holder, between flexure strip and the sample stage all by gluing fixing.
6. plate type three-dimensional location/scanister according to claim 1 is characterized in that: there is a light hole at the center of described sample stage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007103042379A CN101221116B (en) | 2007-12-26 | 2007-12-26 | Plate type three-dimensional locating/scanning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2007103042379A CN101221116B (en) | 2007-12-26 | 2007-12-26 | Plate type three-dimensional locating/scanning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101221116A CN101221116A (en) | 2008-07-16 |
| CN101221116B true CN101221116B (en) | 2010-08-11 |
Family
ID=39631090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2007103042379A Expired - Fee Related CN101221116B (en) | 2007-12-26 | 2007-12-26 | Plate type three-dimensional locating/scanning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101221116B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770156A (en) * | 2016-11-24 | 2017-05-31 | 厦门大学 | A kind of nano scanning station suitable for Tip-Enhanced Raman Spectroscopy |
-
2007
- 2007-12-26 CN CN2007103042379A patent/CN101221116B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101221116A (en) | 2008-07-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4014054B2 (en) | Flat scanning stage for scanning probe microscopes | |
| CN102540442B (en) | Plane parallel three-degree-of-freedom precise operating platform | |
| CN108155078B (en) | Transmission electron microscope sample rod capable of rotating sample by 360 degrees | |
| CN103235407A (en) | Multi-sample stage allowing for automatic movement of inverted microscopes | |
| CN114815208B (en) | Super-resolution imaging system and method based on micro-bottle lens | |
| US11159103B2 (en) | Six-degree-of-freedom large-stroke uncoupling large hollow series-parallel piezoelectric micro-motion platform | |
| CN101793911B (en) | Nano indentation system based on scanning electron microscope | |
| CN102384986A (en) | Scanning tunneling microscope having large-scope and high depth-to-width ratio measurement capabilities | |
| CN201429627Y (en) | Large-sample and large-scale high-resolution atomic force microscopy detection device | |
| CN101403679B (en) | Double-step jigsaw puzzle scanner of scanning probe microscope | |
| CN101221116B (en) | Plate type three-dimensional locating/scanning device | |
| CN101576466B (en) | Combined three-dimensional high-speed scanning device | |
| CN100587459C (en) | Nano material drawing device in scanning electron microscope driven by piezoelectric ceramic piece | |
| CN112379130A (en) | Low-temperature multi-parameter scanning probe microscope capable of automatically switching probes in situ | |
| CN102707094B (en) | Method and device for detecting atomic force microscopic scanning of tri-scanner atomic | |
| CN101556236B (en) | Cross transpose fully low pressure low temperature drift cold scanning probe microscope body | |
| CN104849499B (en) | A kind of quick scanning atomic force microscopic detection method and system | |
| CN115773445A (en) | Multi-degree-of-freedom gantry air floatation motion system for precise optical detection imaging | |
| CN111613507A (en) | Electron microscope in-situ sample rod with high-resolution multi-dimensional manipulation and electrical measurement | |
| CN106706424A (en) | Uniaxial strain loading table for micro-nano material multi-field coupling testing | |
| Cai et al. | An alternative flat scanner and micropositioning method for scanning probe microscope | |
| CN212277149U (en) | Electron microscope in-situ sample rod with high-resolution multi-dimensional manipulation and electrical measurement | |
| CN211828684U (en) | Two-dimensional material transfer assembly system | |
| CN218099763U (en) | Optical super-resolution imaging system with composite lens | |
| CN201159708Y (en) | Nano material piezoelectric ceramic stretching device for scanning electron microscope |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100811 Termination date: 20121226 |