CN112379130A - Low-temperature multi-parameter scanning probe microscope capable of automatically switching probes in situ - Google Patents
Low-temperature multi-parameter scanning probe microscope capable of automatically switching probes in situ Download PDFInfo
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- CN112379130A CN112379130A CN202011282233.7A CN202011282233A CN112379130A CN 112379130 A CN112379130 A CN 112379130A CN 202011282233 A CN202011282233 A CN 202011282233A CN 112379130 A CN112379130 A CN 112379130A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/02—Multiple-type SPM, i.e. involving more than one SPM techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
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Abstract
A scanning probe microscope capable of automatically switching probes in situ, comprising: the probe cavity is used for fixing a probe conversion table, and the probe conversion table comprises a rotary automatic needle changing system or a translation automatic needle changing system; the sample table unit comprises a sample table cavity and three working modes of piezoelectric nano displacement tables, wherein the sample table cavity is used for fixing the sample table. The upper half part of the scanning probe microscope independently controls the function of switching the probe, and the lower half part independently controls the functions of lifting the sample, quickly searching the scanning position of the sample and scanning control. The two parts are connected stably and are convenient to detach, the probe is convenient to replace, and a sample is convenient to mount.
Description
Technical Field
The invention relates to the technical field of design of precision instruments, in particular to a low-temperature multi-parameter scanning probe microscope capable of automatically switching probes in situ.
Background
Scanning probe microscopes are a general term for a series of microscopes that use various interactions between different probes and a sample to probe the physical properties of various points of the sample and scan images. The first microscope was introduced in 1981 as a scanning tunneling microscope invented by Gerd Bennig in conjunction with Heinrich Rohrer. The scanning probe microscope plays a very important role in physics experimental research because of the advantages of high resolution, real-time detection, less harsh working environment compared with a scanning electron microscope and the like due to the high resolution of the scanning probe microscope. In addition to the tunnel scanning microscope, through the development of the scanning probe microscope in the last four decades, many tools are derived from the scanning probe microscope, such as an atomic force microscope, a magnetic force microscope, a piezoelectric force microscope, a scanning hall microscope, a scanning single electron transistor microscope, and the like, and are used for comprehensively measuring various parameters such as 'electricity', 'magnetism' and 'force'.
The probe of the scanning probe microscope is worn to different degrees after being used for a period of time, so that scanning images are distorted, the control precision of the probe is influenced, and the probe needs to be frequently replaced when the scanning probe microscope is operated. The industrial full-automatic atomic force microscope with partial models developed by commercial atomic force microscope manufacturers can be matched with an automatic probe changing module, probes can be automatically picked up from a probe storage box, and accurate alignment and positioning of the probes are realized by adopting an image recognition technology. In-situ switching between multiple probes loaded on the same plane can also be accomplished using a translation stage. The existing automatic probe changing device of the scanning probe microscope has large volume, can only work in room temperature and atmospheric environment, and can only change probes of the same type.
Each probe in a scanning probe microscope is usually dedicated to the measurement of a specific physical parameter and often does not have the full information needed to understand a physical phenomenon. One solution is to replace different types of probes, such as conductive probes, microwave probes, magnetic probes, etc., when scanning imaging is performed on different physical quantities of a sample, to meet different experimental requirements, and to measure multiple parameters to obtain a more comprehensive understanding of the sample or physical phenomena. However, when the microscope is in some special environments such as vacuum and low temperature, if the same sample needs to be tested for a long time or different scanning modes need to be switched, the need of replacing the probe will bring some inconvenience, so that the measurement cost is increased or different scanning modes are switched to measure different physical parameters, the need of replacing the probe will destroy the current experimental environment to the room temperature atmospheric environment, which will bring some great inconvenience, and the measurement cost is greatly increased.
Disclosure of Invention
It is therefore an objective of the claimed invention to provide a low-temperature multi-parameter scanning probe microscope capable of automatically switching probes in situ, so as to partially solve at least one of the above-mentioned problems.
To achieve the above object, as an aspect of the present invention, there is provided a scanning probe microscope capable of automatically switching probes in situ, including:
the probe cavity is used for fixing a probe conversion table, and the probe conversion table comprises a rotary automatic needle changing system or a translation automatic needle changing system;
the sample table unit comprises a sample table cavity and three working modes of piezoelectric nano displacement tables, wherein the sample table cavity is used for fixing the sample table.
The rotary automatic needle changing system comprises a plurality of different probe modules, namely a microwave probe which vibrates in a vertical vibration mode driven by a tuning fork, a laser interferometer which inputs and outputs light waves through an optical fiber, and a superconducting quantum interferometer in a horizontal vibration mode driven by the tuning fork.
The rotary automatic needle changing system further comprises a rotary platform, wherein the rotary platform is matched with an angle sensor and used for positioning after calibration.
Wherein, rotary platform sets up as an organic whole with the pivot, by piezoceramics revolving stage centre gripping and drive, and piezoceramics revolving stage passes through the screw fixation to the probe chamber.
The piezoelectric ceramic rotating platform rotates at a specific angle, the other probe module rotates to be close to the sample, the original probe module rotates to be away from the sample, and in-situ automatic switching of different probe modules in a rotating mode is completed; when the probe is rotated to leave the sample, the tip of the original probe is raised by a small distance, and the sample wiring is effectively prevented from being touched in a small space.
Wherein, the different probe modules of the automatic probe system that trades of translation formula are fixed to the probe dish, the probe dish passes through spring clamp and sapphire hemisphere pearl centre gripping and drive by many piezoceramics pipes.
Wherein the distance between the probes in the probe plate is larger than the size of the measured sample.
The piezoelectric ceramic tubes move in a horizontal direction to drive the probe disc to move, then the piezoelectric ceramic tubes retract rapidly in turn, and the process is repeated for a certain period number to realize all-directional horizontal movement of millimeter stroke of the probe disc.
The relationship between the horizontal movement distance and the periodicity is calibrated in advance, the resolution of the horizontal movement depends on the distance of single movement of the piezoelectric ceramic tubes, and the horizontal movement is controlled by the driving voltage, so that the in-situ automatic switching of different probe modules in the translation mode is completed.
Based on the technical scheme, compared with the prior art, the low-temperature multi-parameter scanning probe microscope capable of automatically switching the probe has at least one or part of the following beneficial effects:
1. the upper half part of the scanning probe microscope independently controls the function of switching the probe, and the lower half part independently controls the functions of lifting the sample, quickly searching the scanning position of the sample and scanning control. The two parts are connected stably and are convenient to detach, the probe is convenient to replace, and a sample is convenient to mount.
2. According to the scanning probe microscope, when the converted new probe and the original probe before conversion reach the working distance with the sample or contact the sample in the contact mode, the deviation of the scanning point position depends on the deviation of the probe installation, the deviation can be controlled to be micrometer magnitude when the scanning probe microscope is installed, and the deviation can be corrected when the probe is converted for the first time, so that the in-situ automatic switching of different probe modules is realized.
3. The automatic needle changing system of the scanning probe microscope has small volume, the using environment is not limited to room temperature and atmospheric environment, and the automatic needle changing system is also suitable for special environments such as vacuum, low temperature and the like.
Drawings
FIG. 1 is a view illustrating an overall assembly of a scanning probe microscope using a rotary stage as an automatic needle changer according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a rotary automatic needle changing system according to an embodiment of the present invention;
FIG. 3 is an overall assembly view of a scanning probe microscope using a translation stage as an automatic needle changer according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a translation type automatic needle changing system in an embodiment of the present invention;
fig. 5 is an assembly view of a piezoelectric nano-displacement stage for three modes of operation.
In the above drawings, the reference numerals have the following meanings:
1. a probe cavity connection socket; 2. A piezoelectric ceramic rotary table; 3. Rotating the platform;
4. a rotating shaft; 5. A probe cavity; 6-8, different probe modules; 9. Loading a sample plate;
10. a middle sample tray; 11. a lower sample plate; 12. a lifting column; 13. an insulating tube;
14. a piezoelectric ceramic tube; 15. a piezoelectric ceramic scanning stage; 16. A scanner table connector;
17. a piezoelectric ceramic scanning stage; 18. An insulating connector; 19. A sample stage cavity;
20. a sample stage cavity socket;
21. an insulating connector; 22. A probe cavity; 23. A piezoelectric ceramic tube;
24. an insulating disk; 25. A probe plate; 26. A sapphire hemi-bead ball;
27. a spring clip.
Detailed Description
The invention relates to the fields of scanning microscopy, automatic control technology, precise instrument design and the like, and can be applied to nano science, surface science, low-temperature physical science and the like. In scanning probe microscopes, especially cryogenic scanning probe microscopes, it is important to measure various physical parameters of "electrical", "magnetic" and "force" in real time and in situ, so that a more comprehensive understanding of the sample or physical phenomena can be obtained. No such scanning probe microscope exists today. The invention provides an automatic probe switching system which can automatically switch probes in situ to realize imaging of different physical parameters. Is expected to be widely applied in nano science, surface science and low-temperature physical science.
Specifically, the invention discloses a scanning probe microscope capable of automatically switching probes in situ, which comprises:
the probe cavity is used for fixing a probe conversion table, and the probe conversion table comprises a rotary automatic needle changing system or a translation automatic needle changing system;
the sample table unit comprises a sample table cavity and three working modes of piezoelectric nano displacement tables, wherein the sample table cavity is used for fixing the sample table.
The rotary automatic needle changing system comprises a plurality of different probe modules, namely a microwave probe which vibrates in a vertical vibration mode driven by a tuning fork, a laser interferometer which inputs and outputs light waves through an optical fiber, and a superconducting quantum interferometer in a horizontal vibration mode driven by the tuning fork. The probe modules are not limited to the three listed above, and may be replaced with other modules.
The rotary automatic needle changing system further comprises a rotary platform, wherein the rotary platform is matched with an angle sensor and used for positioning after calibration.
Wherein, rotary platform sets up as an organic whole with the pivot, by piezoceramics revolving stage centre gripping and drive, and piezoceramics revolving stage passes through the screw fixation to the probe chamber.
The piezoelectric ceramic rotating platform rotates at a specific angle, the other probe module rotates to be close to the sample, the original probe module rotates to be away from the sample, and in-situ automatic switching of different probe modules in a rotating mode is completed; when the probe is rotated to leave the sample, the tip of the original probe is raised by a small distance, and the sample wiring is effectively prevented from being touched in a small space.
Wherein, the different probe modules of the automatic probe system that trades of translation formula are fixed to the probe dish, the probe dish passes through spring clamp and sapphire hemisphere pearl centre gripping and drive by many piezoceramics pipes.
Wherein the distance between the probes in the probe plate is larger than the size of the measured sample.
The piezoelectric ceramic tubes move in a horizontal direction to drive the probe disc to move, then the piezoelectric ceramic tubes retract rapidly in turn, and the process is repeated for a certain period number to realize all-directional horizontal movement of millimeter stroke of the probe disc.
The relationship between the horizontal movement distance and the periodicity is calibrated in advance, the resolution of the horizontal movement depends on the distance of single movement of the piezoelectric ceramic tubes, and the horizontal movement is controlled by the driving voltage, so that the in-situ automatic switching of different probe modules in the translation mode is completed.
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
As shown in fig. 1 and 2, the scanning probe microscope assembly using the rotary stage as the automatic needle changing device and the rotary automatic needle changing system are schematically shown in the drawings. The upper half is a probe cavity 5 for holding a probe conversion stage, and associated wiring is connected to the probe cavity wiring receptacle 1. The lower half is a sample stage chamber 19 for holding a sample stage, and associated wiring is connected to a sample stage chamber receptacle 20.
Wherein, the automatic needle system of trading of rotation type specifically includes: a plurality of different probe modules to be used for the scanning probe microscope, exemplified by a tuning fork-driven microwave probe 6 of vertical vibration mode, a laser interferometer 7 for input and output through an optical fiber, and a tuning fork-driven superconducting quantum interferometer 8 of horizontal vibration mode, are fixed to a probe conversion stage by screws: the platform 3 is rotated. The rotary platform is matched with an angle sensor and has a positioning function after being calibrated. The rotary platform 3 and the rotating shaft 4 are integrated and are clamped and driven by the piezoelectric ceramic rotary platform 2, and the piezoelectric ceramic rotary platform 2 is fixed to the probe cavity 5 through screws. The piezoelectric ceramic rotating platform 2 rotates by a specific angle, the other probe module rotates to be close to the sample, the original probe module rotates to leave the sample, and the in-situ automatic switching of different probe modules in the rotating mode is completed. When the probe is rotated to leave the sample, the original probe tip is raised by a small distance, and the sample wiring is effectively prevented from being touched in a small space. The rotary platform 3 is used as a probe conversion platform, a probe groove is processed according to the size and the number of the probe modules, a screw hole for fixing the probe modules is formed in the probe groove, and the probe groove extends to the other end of the rotary platform 3, so that wiring of the probe modules is facilitated. In this example, the width of each probe module is controlled to be within 5mm, and the probe module is made as light as possible. This mode is applicable to samples of different sizes.
As shown in fig. 3 and 4, there are respectively an assembly drawing of a scanning probe microscope using a translation stage as an automatic needle changing device and a structural schematic drawing of a translation type automatic needle changing system; wherein the different probe modules 6, 7, 8 of the scanning probe microscope are fixed to the probe disc 25 by screws. The probe plate 25 is held and driven by four piezo-ceramic tubes 23 via spring clips 27 and sapphire hemi-spheres 26. The four piezoelectric ceramic tubes 23 move uniformly in a certain horizontal direction to drive the probe disc 25 to move, then the four piezoelectric ceramic tubes 23 retract rapidly in turn, and the process is repeated for a certain period number to realize all-directional horizontal movement of the millimeter stroke of the probe disc 25. The relationship between the horizontal movement distance and the periodicity can be calibrated in advance, the resolution of the horizontal movement depends on the single movement distance of the four piezoelectric ceramic tubes 23, and the horizontal movement is controlled by the driving voltage, so that the in-situ automatic switching of different probe modules in the translation mode is completed. The probe plate 25 may also be fitted with displacement sensors for positioning.
Since the distance between the probes in the probe plate 25 is 5mm in this example and needs to be larger than the size of the sample to be measured, this mode is suitable for smaller samples, and this example is suitable for samples of 5mm x 5mm and below. The probe plate is processed by smooth quartz glass or is processed by a metal material and then mirror-polished. Four uniformly sized piezo-ceramic tubes 23 with four-way electrodes were secured to the ceramic-machined insulated connector 21 by epoxy glue, in this case four piezo-ceramic tubes of 35mm length, 7mm outer diameter and 0.5mm wall thickness were used. The insulating connector 21 is connected to the probe cavity 22 by screws. The lowest end of each piezoelectric ceramic tube 23 is fixed with a small insulating disc 24 which is processed by ceramic through epoxy resin glue, then the lower end is respectively fixed with a spring clamp 27, and the upper part and the lower part of the inner side of each spring clamp are respectively adhered with a sapphire semispherical bead 26. A total of 8 sapphire hemi-beads 26 grip the probe plate 25. The edge of the probe plate 25 is located at a distance of the order of millimeters from the ends of the spring clips 27 and the center of the sapphire hemi-beads 26, which determine the range of movement of the probe plate 25, and should be set according to the farthest distance that the probes are mounted to each other.
The probe plate 25 herein can perform the function of automatically changing the probe, and can also perform the function of quickly searching the sample scanning position instead of the functions of the upper sample plate 9 and the middle sample plate 10.
The driving device based on the piezoelectric ceramic tube can be replaced by other displacement tables with millimeter strokes to drive the probe disc 25 to complete automatic needle replacement.
The sample stage device at the lower half part of the scanning probe microscope can be replaced by various manual or automatic scanning stages and displacement stages which are suitable for the scanning probe microscope, and the automatic needle changing device at the upper half part can be independently disassembled and assembled and has adaptability.
The sample stage part of the scanning probe microscope is composed of a sample stage cavity 19 and three working modes of piezoelectric nano displacement stages, wherein, as shown in fig. 5, the three working modes of piezoelectric nano displacement stages are assembled. Two closed-loop piezoelectric ceramic scanning tables 15 and 17 which are orthogonally arranged in the XY direction and connected through a scanning table connector 16 realize the function of atomic-scale scanning. The upper piezo ceramic scanning stage 15 is screwed to the sample stage chamber 19 and the lower piezo ceramic scanning stage 17 is screwed to the ceramic machined insulating connector 18. Four piezoelectric ceramic tubes 14 with the same size are fixed to the insulating connector 18 through epoxy resin glue, a smooth insulating tube 13 made of ceramic is sleeved inside the piezoelectric ceramic tubes 14, and the polished lifting column 12 is clamped through a smooth bent spring piece. Four lifting columns 12 are fixed to the lower sample plate 11 by screws, on which the stacked upper and middle sample plates 9, 10 are supported by three sapphire hemispherical beads per layer. And guide grooves which are orthogonal in XY directions are respectively cut on the upper sample plate 9 and the middle sample plate 10, and the sapphire hemispherical beads which play a supporting role are accurately embedded into the guide grooves. A certain pressure is provided between the upper sample plate 9 and the lower sample plate 11 by a spring or a leaf spring. The partial structure adopts alternate stepping periodic motion in the z-axis direction and adopts displacement-rapid recovery periodic motion in the xy direction, thereby realizing mm-level sample search. Four piezo-ceramic tubes 14 may also be used for sub-nanometer fine scanning.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A scanning probe microscope capable of automatically switching probes in situ, comprising:
the probe cavity is used for fixing a probe conversion table, and the probe conversion table comprises a rotary automatic needle changing system or a translation automatic needle changing system;
the sample table unit comprises a sample table cavity and three working modes of piezoelectric nano displacement tables, wherein the sample table cavity is used for fixing the sample table.
2. A scanning probe microscope in accordance with claim 1 wherein the rotary automatic probe changing system comprises a plurality of different probe modules, respectively a microwave probe vibrating in a tuning fork driven vertical vibration mode, a laser interferometer for input and output of light waves through an optical fiber, and a superconducting quantum interferometer in a tuning fork driven horizontal vibration mode.
3. The scanning probe microscope of claim 1, wherein the rotary automatic needle changing system further comprises a rotary platform, and the rotary platform is equipped with an angle sensor and is calibrated for positioning.
4. A scanning probe microscope in accordance with claim 3 wherein the rotary stage is integral with the spindle and is held and driven by a piezo ceramic rotary stage which is screwed to the probe cavity.
5. The scanning probe microscope of claim 2, wherein the piezo-ceramic rotary stage rotates a specific angle, another probe module rotates to approach the sample, and the original probe module rotates away from the sample, thereby completing the in-situ automatic switching of different probe modules in the rotation mode; when the probe is rotated to leave the sample, the tip of the original probe is raised by a small distance, and the sample wiring is effectively prevented from being touched in a small space.
6. A scanning probe microscope in accordance with claim 1 wherein the different probe modules of the translating auto-probe-changing system are fixed to a probe plate that is held and driven by a plurality of piezo ceramic tubes through spring clips and sapphire hemi-spheres.
7. A scanning probe microscope according to claim 6 wherein the distance between the probes in the probe plate and the probes is greater than the size of the sample being measured.
8. A scanning probe microscope according to claim 6 wherein the piezo ceramic tubes move in unison horizontally to move the probe plate, and then the piezo ceramic tubes retract rapidly in turn, repeating the above process for a number of cycles to achieve each direction of millimeter travel of the probe plate.
9. The scanning probe microscope of claim 8, wherein the relationship between the distance of the horizontal movement and the number of cycles is calibrated in advance, the resolution of the horizontal movement depends on the distance of a single movement of the piezoelectric ceramic tubes, and the horizontal movement is controlled by the driving voltage, so as to complete the in-situ automatic switching of different probe modules in the translation mode.
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Cited By (2)
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| CN113109593A (en) * | 2021-04-20 | 2021-07-13 | 西南交通大学 | Swing type multi-mode combined probe testing device applied to scanning probe microscope |
| CN117741185A (en) * | 2023-12-18 | 2024-03-22 | 南京信息工程大学 | Integrated multi-head rapid switching type scanning probe microscope and scanning method |
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Application publication date: 20210219 |