CN105891549A - Atomic force microscope-based multifunctional combined probe system - Google Patents
Atomic force microscope-based multifunctional combined probe system Download PDFInfo
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- CN105891549A CN105891549A CN201610214796.XA CN201610214796A CN105891549A CN 105891549 A CN105891549 A CN 105891549A CN 201610214796 A CN201610214796 A CN 201610214796A CN 105891549 A CN105891549 A CN 105891549A
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- probe
- atomic force
- force microscope
- system based
- multifunctional combination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The present invention discloses an atomic force microscope-based multifunctional combined probe system. The system can switch the probes having different functions in various set working environments by the program control and in an in situ switching manner, thereby in situ realizing the functions, such as the microscopic friction and wear experiments, the surface topography scanning, the crystal structure evolution and detection, the friction energy dissipation measurement, etc., in a same experiment area. When the system switches the probes in the in situ switching manner, the working environment does not need to be destroyed, thereby avoiding the pollution of the external environment to the sample surfaces effectively.
Description
Technical field
The invention belongs to field of precision instruments, particularly relate to a kind of multifunctional combination probe system based on atomic force microscope, should
System can in the working environment of various settings to same Experimental Area in-situ accomplishes Micro Lub wear test, surface topography scanning,
Crystal structure develops the functions such as detection and frictional energy dissipation measurement.
Background technology
Atomic force microscope be a kind of by detection sample and probe between weak interaction study including insulator
The precision instrument of solid material surface structure.Atomic force microscope has played weight in the field such as material science, life sciences
Act on, promoted the development of nanosecond science and technology, be to carry out the important instrument of research under micro/nano-scale.Under normal circumstances, atomic force
Microscope can only install the probe that a root functionality is single.Along with the fretting wear under micro/nano-scale is studied progressively deeply, grind at some
In studying carefully, need to change other probes with difference in functionality in situ on the premise of not destruction work environment.With under vacuum environment
As a example by frictional wear experiment, first, select the probe that radius of curvature is less that sample surfaces Experimental Area is carried out topography scan.So
After, the probe selecting radius of curvature bigger carries out friction and wear test to sample surfaces Experimental Area.Then select curvature half then,
The less probe in footpath carries out topography scan to the sample surfaces Experimental Area after fretting wear.Finally, then to sample surfaces test block
Territory carries out chemical composition sign, comprehensively analyzes the data such as the coefficient of friction in experiment and the surface topography before and after experiment, chemical composition,
Infer the friction and wear mechanics drawn mill auxiliary material.But, changing the probe with difference in functionality and characterizing chemical composition
Time, original vacuum environment will certainly be destroyed, introduce many uncertain factors (such as the oxygen in air and steam etc.), cause
Sample surfaces pollutes, thus cannot obtain true and reliable experimental data, and the operation of above-mentioned experimentation is complicated, inefficient,
Seriously hinder the friction and wear mechanics research under micro/nano-scale.
Summary of the invention
For above-mentioned technical problem, the present invention provides a kind of multifunctional combination probe system based on atomic force microscope, this system
Can be had the probe of difference in functionality by programme-control switching in situ in the working environment of various settings, thus in same test block
The scanning of territory in-situ accomplishes Micro Lub wear test, surface topography, crystal structure develop the merits such as detection and frictional energy dissipation measurement
Energy.When this system switches probe in position, it is not necessary to destruction work environment, it is prevented effectively from the external environment pollution to sample surfaces.
For above-mentioned technical problem, the technical scheme is that a kind of multifunctional combination of based on atomic force microscope probe system
System, the cavity upper cover that including vacuum cavity, is arranged on vacuum cavity and be arranged on the optical window top cover covered on cavity；Optical window top
Place logical light between lid and cavity upper cover and lead to light lamella lucida；Vacuum cavity internally installed probe switching platform and sample stage.Wherein,
Probe switching platform is arranged on above sample stage.
Further, described probe switching platform is rotary.
Further, described probe switching platform include for realize difference in functionality probe in-situ switching piezoelectricity rotation positioning platform,
The probe being arranged under piezoelectricity rotation positioning platform carries dynamic disk and the many groups of tools that can mutually switch being mounted under the dynamic disk of probe load
There is the probe assembly of difference in functionality.
Further, described optical window top cover becomes inner concavity.
Further, the middle part of described cavity upper cover is provided with the light hole of semicircle shape and for installing the convex of piezoelectricity rotation positioning platform
Platform.
Further, described probe carries and is uniformly provided with for installing probe assembly blind hole on dynamic disk.
Further, described probe assembly includes the probe bracket for fixing probe and spring pressuring plate and probe.
Further, described probe includes that probe that surface topography scans, the probe of Micro Lub wear test, needle point strengthen and draws
The probe of graceful spectrum and treat the probe of expanded function.
Further, described logical light leads to light lamella lucida is quartz glass.
Beneficial effects of the present invention is as follows:
1, this system can have the probe of difference in functionality by programme-control switching in situ, thus the most real in same Experimental Area
Existing Micro Lub wear test, surface topography scanning, crystal structure develop the functions such as detection and frictional energy dissipation measurement, have
Probe switching is the most convenient, positioning precision is high and the advantage of not destruction work environment.
2, optical window design of cover becomes inner concavity, can significantly increase its superjacent air space, it is simple to other equipment integrated.
3, under probe assembly is arranged on the dynamic disk of probe load, ensure that probe carries the depth of parallelism of dynamic disk above and below by Precision Machining,
Thus ensure there is the probe of difference in functionality at grade.
4, probe switching platform switches probe, the work space of effectively save inside cavity by rotation mode.
Accompanying drawing explanation
Fig. 1 is the structural representation at a visual angle of the embodiment of the present invention；
Fig. 2 is the explosive view at a visual angle of the embodiment of the present invention；
Fig. 3 is the internal structure schematic diagram of the embodiment of the present invention；
Fig. 4 is the internal structure schematic diagram of cavity upper cover；
Fig. 5 is the structural representation at one visual angle of probe switching platform；
Fig. 6 is the structural representation of piezoelectricity rotation positioning platform；
Fig. 7 is the structural representation at another visual angle of probe switching platform；
Fig. 8 is that probe carries dynamic disc structure schematic diagram；
Fig. 9 is the structural representation of probe assembly.
Wherein, vacuum cavity 1, cavity upper cover 2, boss 2.1, light hole 2.2, optical window top cover 3, quartz glass 4, probe
Switching platform 5, piezoelectricity rotation positioning platform 5.1, blind hole 5.2.1, probe carries dynamic disk 5.2, probe assembly 6, probe torr
Frame 6.1, spring pressuring plate 6.2, probe 6.3.
Detailed description of the invention
The invention will be further elaborated with specific embodiment below in conjunction with the accompanying drawings.
As Figure 1-3, a kind of can in the working environment of various settings same Experimental Area in-situ accomplishes Micro Lub wear and tear
The multifunctional combination probe of the difference in functionalitys such as experiment, surface topography scanning, crystal structure differentiation detection and frictional energy dissipation measurement
System.Embodiments of the invention, multifunctional combination probe system based on atomic force microscope, including vacuum cavity 1, install
Cavity upper cover 2 on vacuum cavity 1 and the optical window top cover 3 being arranged on cavity upper cover 2, cavity upper cover 2 is by screw even
Connecing and be arranged on vacuum cavity 1, vacuum cavity 1 and cavity upper cover 2 are equipped with the rubber seal groove for sealing, and pass through
Rubber seal seals.Optical window top cover 3 is connected by screw and is arranged on cavity upper cover 2, and optical window top cover 3 becomes inner concavity,
Significantly increase optical window top cover 3 superjacent air space, it is simple to other equipment integrated above cavity.
The middle part of cavity upper cover 2 is provided with the light hole 2.2 of semicircle shape and for installing the boss of piezoelectricity rotation positioning platform 5.1
2.1, piezoelectricity rotation positioning platform 5.1 is connected by screw on boss 2.1.Place between optical window top cover 3 and cavity upper cover 2
There is the quartz glass 4 for transmission laser；Vacuum cavity 1 is internally provided with probe switching platform 5 and sample stage, and probe switches
Platform 5 is arranged on above sample stage.
As shown in 4-8, probe switching platform 5 includes the piezoelectricity rotation positioning platform for realizing the switching of difference in functionality probe in-situ
5.1, the probe being arranged under piezoelectricity rotation positioning platform 5.1 carries dynamic disk 5.2, and probe carries and is equipped with many groups on dynamic disk 5.2
The probe assembly 6 with difference in functionality that can mutually switch, probe carries and is uniformly provided with many groups for installing probe on dynamic disk 5.2
Assembly blind hole 5.2.1, probe assembly 6 is connected with blind hole 5.2.1 by screw.
The dynamic disk 5.2 of probe load is connected by screw and is arranged on piezoelectricity rotation positioning platform 5.1, is carried dynamic by Precision Machining probe
Disk 5.2 ensures that probe carries the depth of parallelism of dynamic disk 5.2 above and below, thus ensures the probe assembly 6 with difference in functionality
At grade, probe assembly 6 drives probe to carry dynamic disk 5.2 by piezoelectricity rotation positioning platform 5.1, and probe carries dynamic circle
Dish 5.2 drives probe assembly 6 to carry out in situ to switch.Probe switching platform 5 switches probe by rotation mode, can be effectively
Save the work space within vacuum cavity 1.
As it is shown in figure 9, probe assembly 6 includes the probe bracket 6.1 for fixing probe and spring pressuring plate 6.2 and probe
6.3.Probe 6.3 includes probe that surface topography scans, the probe of Micro Lub wear test, the spy of Tip-Enhanced Raman Spectroscopy
Pin and treat the probe of expanded function.
The operation principle of this system is to be had the spy of difference in functionality in the working environment of same setting by programme-control switching in situ
Pin, thus same Experimental Area in-situ accomplishes Micro Lub wear test, surface topography scanning, crystal structure develop detection and
The functions such as frictional energy dissipation measurement, can install many group probe assemblies 6 simultaneously.
Concrete connection installs and work process is as follows: (probe of difference in functionality is included probe, microcosmic that surface topography scans
The probe of frictional wear experiment and the probe of Tip-Enhanced Raman Spectroscopy) it is arranged on probe bracket；Place sample and by equipment
It is adjusted to duty (carry out Tip-Enhanced Raman Spectroscopy experiment and need integrated Raman optical system), by programme-control, by surface
The probe of topography scan or the probe of Tip-Enhanced Raman Spectroscopy navigate to sample surfaces Experimental Area and test, and obtain sample
The pattern of Experimental Area, surface or Raman spectrum；After carrying out previous step experiment, Micro Lub will be used for by control program and wear and tear
The probe of experiment navigates to sample surfaces Experimental Area and carries out Micro Lub wear test；After carrying out Micro Lub wear test, then
The probe scanned by surface topography by programme-control or the probe switching of Tip-Enhanced Raman Spectroscopy navigate to sample surfaces experiment
Region, obtains the pattern after Micro Lub wear test or Raman spectrum.Above-mentioned work process is all logical in same working environment
Cross programme-control switching in situ and there is the probe of difference in functionality so that multiple-working mode can have been worked in coordination with in succession, it is not necessary to beats
Begin to speak body change probe.Probe switching is completed by programme-control, and flexible operation is convenient, positioning precision is high.This system ensure that
The stability of experimental situation and reliability, shorten experimental period so that experimental result is more reliable, conventional efficient is higher.
Those of ordinary skill in the art is it will be appreciated that embodiment described here is to aid in the former of the reader understanding present invention
Reason, it should be understood that protection scope of the present invention is not limited to such special statement and embodiment.The ordinary skill of this area
Personnel can according to these technology disclosed by the invention enlightenment make various other various concrete deformation without departing from essence of the present invention and
Combination, these deformation and combination are the most within the scope of the present invention.
Claims (9)
1. a multifunctional combination probe system based on atomic force microscope, it is characterised in that: include vacuum cavity (1), peace
The cavity upper cover (2) being contained on vacuum cavity (1) and the optical window top cover (3) being arranged on cavity upper cover (2)；Optical window top cover
(3) and place between cavity upper cover (2) and lead to light lamella lucida；Vacuum cavity (1) internally installed probe switching platform (5) and
Sample stage.
Multifunctional combination probe system based on atomic force microscope the most according to claim 1, it is characterised in that: described
Probe switching platform (5) is rotary.
Multifunctional combination probe system based on atomic force microscope the most according to claim 1, it is characterised in that: described
Probe switching platform (5) includes the piezoelectricity rotation positioning platform (5.1) for realizing the switching of difference in functionality probe in-situ, is arranged on
Probe under piezoelectricity rotation positioning platform (5.1) carries to move disk (5.2) and be mounted in probe and carries many groups under dynamic disk (5.2)
The probe assembly (6) with difference in functionality that can mutually switch.
Multifunctional combination probe system based on atomic force microscope the most according to claim 1, it is characterised in that: described
Optical window top cover (3) becomes inner concavity.
Multifunctional combination probe system based on atomic force microscope the most according to claim 1, it is characterised in that: described
The middle part of cavity upper cover (2) is provided with the light hole (2.2) of semicircle shape and is used for installing the convex of piezoelectricity rotation positioning platform (5.1)
Platform (2.1).
Multifunctional combination probe system based on atomic force microscope the most according to claim 3, it is characterised in that: described
Probe carries and is uniformly provided with many groups for installing probe assembly blind hole (5.2.1) on dynamic disk (5.2).
Multifunctional combination probe system based on atomic force microscope the most according to claim 1 and 2, it is characterised in that:
Described probe assembly (6) includes the probe bracket (6.1) for fixing probe and spring pressuring plate (6.2) and probe (6.3).
Multifunctional combination probe system based on atomic force microscope the most according to claim 7, it is characterised in that: described
Probe (6.3) includes probe that surface topography scans, the probe of Micro Lub wear test, the probe of Tip-Enhanced Raman Spectroscopy
And treat the probe of expanded function.
Multifunctional combination probe system based on atomic force microscope the most according to claim 1, it is characterised in that: described
It is quartz glass (4) that logical light leads to light lamella lucida.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610214796.XA CN105891549A (en) | 2016-04-08 | 2016-04-08 | Atomic force microscope-based multifunctional combined probe system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610214796.XA CN105891549A (en) | 2016-04-08 | 2016-04-08 | Atomic force microscope-based multifunctional combined probe system |
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| Publication Number | Publication Date |
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| CN105891549A true CN105891549A (en) | 2016-08-24 |
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| CN201610214796.XA Pending CN105891549A (en) | 2016-04-08 | 2016-04-08 | Atomic force microscope-based multifunctional combined probe system |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106353535A (en) * | 2016-10-10 | 2017-01-25 | 中国科学院深圳先进技术研究院 | In-situ photoelectric multifunctional coupling atomic force microscope testing system |
| CN106918723A (en) * | 2017-01-19 | 2017-07-04 | 西南交通大学 | A kind of multiprobe detection method under controlled atmosphere based on AFM |
| CN107192854A (en) * | 2017-04-18 | 2017-09-22 | 天津大学 | The Z scanner and probe unit and probe unit erector of AFM |
| CN108427016A (en) * | 2018-04-16 | 2018-08-21 | 西南交通大学 | Numerical control rotary probe switching device based on environment controllable type atomic force microscope |
| CN109406831A (en) * | 2017-09-08 | 2019-03-01 | 西南交通大学 | A kind of design of rectangle micro-cantilever beam probe and processing method applied to the measurement of nanoscale single-contact ultralow friction coefficient |
| CN109917156A (en) * | 2019-04-01 | 2019-06-21 | 西南交通大学 | A kind of specimen rotating holder device based on atomic force microscope |
| CN110537129A (en) * | 2017-02-15 | 2019-12-03 | 马昆麦崔斯股份有限公司 | Closed mesa Raman spectrometry device |
| CN111257598A (en) * | 2020-02-13 | 2020-06-09 | 西南交通大学 | Device for conveying sample between vacuum scanning probe microscope and vacuum pipeline |
| CN112379130A (en) * | 2020-11-16 | 2021-02-19 | 中国科学技术大学 | Low-temperature multi-parameter scanning probe microscope capable of automatically switching probes in situ |
| CN113109593A (en) * | 2021-04-20 | 2021-07-13 | 西南交通大学 | Swing type multi-mode combined probe testing device applied to scanning probe microscope |
| CN117741185A (en) * | 2023-12-18 | 2024-03-22 | 南京信息工程大学 | Integrated multi-head rapid switching type scanning probe microscope and scanning method |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106353535A (en) * | 2016-10-10 | 2017-01-25 | 中国科学院深圳先进技术研究院 | In-situ photoelectric multifunctional coupling atomic force microscope testing system |
| CN106918723A (en) * | 2017-01-19 | 2017-07-04 | 西南交通大学 | A kind of multiprobe detection method under controlled atmosphere based on AFM |
| CN110537129A (en) * | 2017-02-15 | 2019-12-03 | 马昆麦崔斯股份有限公司 | Closed mesa Raman spectrometry device |
| CN107192854B (en) * | 2017-04-18 | 2020-12-04 | 天津大学 | Z scanner and probe device of atomic force microscope and probe device mounting device |
| CN107192854A (en) * | 2017-04-18 | 2017-09-22 | 天津大学 | The Z scanner and probe unit and probe unit erector of AFM |
| CN109406831A (en) * | 2017-09-08 | 2019-03-01 | 西南交通大学 | A kind of design of rectangle micro-cantilever beam probe and processing method applied to the measurement of nanoscale single-contact ultralow friction coefficient |
| CN108427016A (en) * | 2018-04-16 | 2018-08-21 | 西南交通大学 | Numerical control rotary probe switching device based on environment controllable type atomic force microscope |
| WO2019200983A1 (en) * | 2018-04-16 | 2019-10-24 | 西南交通大学 | Numerically controlled rotary probe switching device based on environmentally controllable atomic force microscope |
| US10739377B2 (en) | 2018-04-16 | 2020-08-11 | Southwest Jiaotong University | Numerically controlled rotary probe switching device based on environment-controllable atomic force microscope |
| CN109917156A (en) * | 2019-04-01 | 2019-06-21 | 西南交通大学 | A kind of specimen rotating holder device based on atomic force microscope |
| CN109917156B (en) * | 2019-04-01 | 2020-07-10 | 西南交通大学 | Rotary sample stage device based on atomic force microscope |
| CN111257598A (en) * | 2020-02-13 | 2020-06-09 | 西南交通大学 | Device for conveying sample between vacuum scanning probe microscope and vacuum pipeline |
| CN111257598B (en) * | 2020-02-13 | 2021-01-05 | 西南交通大学 | Device for conveying sample between vacuum scanning probe microscope and vacuum pipeline |
| CN112379130A (en) * | 2020-11-16 | 2021-02-19 | 中国科学技术大学 | Low-temperature multi-parameter scanning probe microscope capable of automatically switching probes in situ |
| CN113109593A (en) * | 2021-04-20 | 2021-07-13 | 西南交通大学 | Swing type multi-mode combined probe testing device applied to scanning probe microscope |
| CN117741185A (en) * | 2023-12-18 | 2024-03-22 | 南京信息工程大学 | Integrated multi-head rapid switching type scanning probe microscope and scanning method |
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