CN109406831A - A kind of design of rectangle micro-cantilever beam probe and processing method applied to the measurement of nanoscale single-contact ultralow friction coefficient - Google Patents
A kind of design of rectangle micro-cantilever beam probe and processing method applied to the measurement of nanoscale single-contact ultralow friction coefficient Download PDFInfo
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- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
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- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
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Abstract
The present invention provides a kind of designs of rectangle micro-cantilever beam probe and processing method applied to the measurement of nanoscale single-contact ultralow friction coefficient, initially set up the friction coefficient measurement theoretical model with universality；In conjunction with the architectural characteristic of rectangle micro-cantilever beam probe, the friction coefficient measurement theoretical model for being suitable for rectangle micro-cantilever beam probe is established；On this basis, in conjunction with coefficient of friction resolution ratio, the maximum positive voltage power that can be loaded or the constraint conditions such as measurable minimum friction and atomic force microscope characteristic, design meets the rectangle micro-cantilever beam probe of measurement request；It is last to process rectangle micro-cantilever beam probe according to design size.Friction coefficient measurement resolution ratio can be significantly improved using method proposed by the present invention design, the probe processed, realize the ultralow friction coefficient measurement of 0.0001 and the above magnitude resolution ratio, guarantee the authenticity and reliability of superslide process quantitative analysis, provides a kind of important measurement means to go deep into system research superslide theory and technology.
Description
Technical field
The invention belongs in technology of instrument and meter analysis and survey control technology field, and in particular to one kind be applied to receive
The design of rectangle micro-cantilever beam probe and processing method of meter level single-contact ultralow friction coefficient measurement.
Background technique
Friction is the generally existing physical phenomenon of the material world, and life and production with the mankind have extremely close pass
System.All equipment moving components all refer to friction, abrasion and lubrication.With the rapid growth of the world economy, every profession and trade friction mill
It loses caused by damage and also increases accordingly, energy crisis is increasingly serious.It is shown according to foreign statistic data, friction consumes the whole world
The 30% disposable energy fails there are about 80% element part because of abrasion.According to incompletely statistics, China every year due to
Economic loss caused by fretting wear reaches upper trillion yuan.Excavate New Friction-reducing and lubrication technology, it has also become energy saving and resource
Important research field.
In recent years, solution this problem of energy consumption that is found to be of superslide phenomenon provides new important channel.Generally recognize
For the coefficient of sliding friction is superslide state in the lubricating status of 0.001 magnitude or lower (referred to as ultralow friction coefficient).In superslide
Under state, for the more conventional oil lubrication of coefficient of friction at the reduction of the order of magnitude, wear rate is extremely low, close to zero.The reality of superslide state
Now with it is commonly used, it will the energy and resource consumption is greatly lowered, significantly improves the military service quality of critical moving components.
The factor for influencing superslide state is numerous, and intercouples, and seriously constrains deeply grinding for superslide theory and technology
Study carefully.It is dry that nanoscale single-contact (i.e. dimension of contact region is nanometer scale) can exclude a variety of extraneous factors such as macroscopical Multi-contact
It disturbs, convenient for the quantitative analysis of superslide process.However, the ultralow friction coefficient measurement under nanoscale single-contact state is one at present
A generally acknowledged technical problem, in terms of being mainly reflected in following two: firstly, nanoscale single-contact generallys use atomic force microscopy
Mirror is realized, and atomic force microscope is mainly used in surface topography scanning, Mechanics Performance Testing etc., does not pay close attention to substantially ultralow
Friction coefficient measurement；Secondly, coefficient of friction resolution ratio reported in the literature is usually 0.01 magnitude, not yet realize 0.0001 and with
The friction coefficient measurement of upper magnitude (< 0.0001 higher precision) resolution ratio.When coefficient of friction resolution ratio is further reduced to
0.0001 and when the above magnitude, friction force signal can be covered by system noise, be unable to measure to obtain.
It can be seen that the existing nanoscale single-contact friction coefficient measurement technology of Optimal improvements, realize 0.0001 and with
The ultralow friction coefficient measurement of upper magnitude resolution ratio is most important.
Summary of the invention
The purpose of the present invention is intended to provide a kind of applied to nanoscale single-point for above-mentioned problems of the prior art
The design of rectangle micro-cantilever beam probe and processing method for contacting ultralow friction coefficient measurement, by this method design, process
Probe can be realized the ultralow friction coefficient measurement of 0.0001 and the above magnitude resolution ratio.The present invention passes through theoretical calculation, limited
The methods of member emulation and Micro Lub experiment proof, the probe for being designed, being processed using method proposed by the present invention, Neng Gouxian
It writes and improves friction coefficient measurement resolution ratio, ultralow friction coefficient measurement is realized, to guarantee the true of superslide process quantitative analysis
Property and reliability, provide a kind of important measurement means to go deep into system research superslide theory and technology.
The present invention is based on the measuring principles of atomic force microscope, are surveyed respectively by the torsion and bending of micro-cantilever beam probe
Frictional force and normal pressure are measured, the friction coefficient measurement theoretical model with universality is established；In conjunction with rectangle micro-cantilever beam probe
Architectural characteristic, establish be suitable for rectangle micro-cantilever beam probe friction coefficient measurement theoretical model；On this basis, in conjunction with rubbing
Wipe coefficient resolution ratio, the maximum positive voltage power that can be loaded or the constraint such as measurable minimum friction and atomic force microscope characteristic
Condition is calculated according to theoretical model, designs the rectangle micro-cantilever beam probe for meeting measurement request, and checked using finite element simulation
Verifying；There is the rectangle micro-cantilever beam probe of design size using the processing of the processes such as focused ion beam correction of the flank shape；Carry out Micro Lub
Coefficient of friction resolution ratio is verified in experiment, and the nanoscale single-contact ultralow friction coefficient being applied under sample superslide state is surveyed
Amount.
In order to achieve the above object, the present invention is realized using following technical scheme.
The present invention provides a kind of rectangle micro-cantilever spies applied to the measurement of nanoscale single-contact ultralow friction coefficient
Needle design and processing method, comprising the following steps:
Step (1) establishes the Universal Theory model of micro-cantilever beam probe measurement coefficient of friction
According to the measuring principle of atomic force microscope, friction is measured by the torsion and bending of micro-cantilever beam probe respectively
Power and normal pressure, i.e.,
FL=KT×InvOLSL×UL (i)
FN=KN×InvOLSN×UN (ii)
In formula, FL、FNRespectively frictional force, normal pressure；KT、KNThe respectively elasticity of torsion coefficient of micro-cantilever beam probe, method
To coefficient of elasticity；InvOLSL、InvOLSNThe inverse of respectively lateral optical lever sensitivity, normal direction optical lever sensitivity inverse；
UL、UNThe respectively lateral output voltage of photodetector, normal direction output voltage；
And then the Universal Theory model of micro-cantilever beam probe measurement coefficient of friction is established, it is shown below:
In formula, μ is coefficient of friction；
Step (2) establishes the theoretical model of rectangle micro-cantilever beam probe measurement coefficient of friction
According to the measuring principle of light path system, the InvOLS reciprocal of lateral optical lever sensitivityL, normal direction optical lever sensitivity
InvOLS reciprocalNIt indicates are as follows:
In formula, H is the photosurface length of photodetector, and d is optical path length, and l is the length of micro-cantilever, UsumIt is sharp
The total voltage that light is generated in four quadrants of photodetector, αsum、αL、αNRespectively total output electric current of photodetector, transverse direction
Export the amplification factor of electric current, normal direction output electric current after current/voltage converter, unit V/A；
The cross section of generally rectangular micro-cantilever is narrow and long rectangular, i.e. width is much larger than thickness；Based on thin plate elastic mechanics
And theory of mechanics of materials, the elasticity of torsion COEFFICIENT K of rectangle micro-cantilever beam probeT, normal direction coefficient of elasticity KNIt indicates are as follows:
In formula, G, E are respectively the modulus of shearing of rectangle micro-cantilever material, elasticity modulus, since micro-cantilever material can
Can be anisotropy (such as silicon), therefore conventional G=E/2 (1+ ν) (ν is Poisson's ratio) is not necessarily set up, w, t are respectively that rectangle is micro-
Width, the thickness of cantilever beam, htipFor tip height；
Above-mentioned formula (iv)~(vii) is substituted into the Universal Theory model (iii) that step (1) is established and obtains rectangle micro-cantilever
Beam probe measures the theoretical model of coefficient of friction, is shown below:
In formula, ILFor the lateral output electric current of photodetector, IL=UL/αL, INElectricity is exported for the normal direction of photodetector
Stream, IN=UN/αN；
Step (3) designs the rectangle micro-cantilever beam probe for meeting ultralow friction coefficient measurement request
According to step (2), enabling μ is coefficient of friction resolution ratio μmin, FNFor the maximum positive voltage power F that can be loadedNmaxOr FLFor can
The minimum friction F of measurementLmin, in conjunction with coefficient of friction resolution ratio μmin, the maximum positive voltage power F that can loadNmaxOr it is measurable most
Less friction FLminAnd the constraint conditions such as atomic force microscope characteristic, simultaneous (i)~(viii) are calculated, are designed satisfaction measurement
It is required that rectangle micro-cantilever beam probe size, including length l, width w, thickness t etc.；
Step (4) processes the rectangle micro-cantilever beam probe for meeting ultralow friction coefficient measurement request
The rectangle micro-cantilever beam probe design size obtained according to step (3) is processed, and the spy of rectangle micro-cantilever is obtained
Needle, rectangle micro-cantilever tip designs have needle point.
The above-mentioned design of rectangle micro-cantilever beam probe and processing applied to the measurement of nanoscale single-contact ultralow friction coefficient
Method in the step (2), works as htipWhen much larger than 0.5t, above-mentioned theory model simplification is as follows:
The above-mentioned design of rectangle micro-cantilever beam probe and processing applied to the measurement of nanoscale single-contact ultralow friction coefficient
Method, in the step (3), mainly include it is following step by step:
A) according to given coefficient of friction resolution ratio μmin, due to usual htipMuch larger than 0.5t, therefore can be according to formula
(ix) the length l of rectangle micro-cantilever is calculated, wherein htipIt is related with Micro Lub experiment purpose, needle point initial in design
Height and material have determined that；G and E is related with the rectangle micro-cantilever material of selection, and conventional rectangle micro-cantilever material is
Silicon or silicon nitride, the G of silicon are 50GPa, and the G of E 169GPa, silicon nitride are 61GPa, E 156Gpa, it is not difficult to find that silicon and nitrogen
G, E of SiClx are of substantially equal, and after material is selected, G and E are assured that；ILAnd INIt is visited with the atomic force microscope photoelectricity of selection
It is related to survey device, after atomic force microscope is selected, ILMinimum value and INMaximum value be assured that；
B) according to the given maximum positive voltage power F loadedNmaxOr measurable minimum friction FLmin, can be according to formula
(i) quantitative relationship of the width w and thickness t of rectangle micro-cantilever is calculated in~(vii)；
C) according to constraint conditions such as atomic force microscope characteristics, it can provide the width w's and thickness t of rectangle micro-cantilever
Value range；Atomic force microscope characteristic includes: that laser facula is made to entirely fall within the square set in rectangle micro-cantilever reflecting surface
The value range of the width w and length l of shape micro-cantilever, and the rectangle micro-cantilever according to the setting of rectangle micro-cantilever material
Thickness t value range etc.；For conventional commercial atomic force microscope (such as MFP-3D of U.S.'s Oxford Instruments production),
Constraint condition are as follows: 1) laser facula size is micron dimension, in order to make laser facula entirely fall within the reflection of rectangle micro-cantilever
In face, the width w of beam should be not less than 20 μm, and length l should be not less than 50 μm；2) the thickness t of silicon micro-cantilever is usually 1 μm -7.8
μm, the thickness t of silicon nitride microcantilever is usually 0.2 μm -0.6 μm；
D) according to rectangle micro-cantilever width w and thickness t value range, set rectangle micro-cantilever width w or
Thickness t, and the quantitative relationship of the width w and thickness t according to rectangle micro-cantilever, can be calculated the thickness of rectangle micro-cantilever
Spend t or width w.
The above-mentioned design of rectangle micro-cantilever beam probe and processing applied to the measurement of nanoscale single-contact ultralow friction coefficient
Method can satisfy ultralow friction coefficient measurement request to verify the rectangle micro-cantilever beam probe designed in the step (3),
In the step (3), obtained rectangle micro-cantilever beam probe design size is further substituted into limit element artificial module, is determined imitative
The coefficient of friction resolution ratio that really obtains, the maximum positive voltage power that can be loaded or measurable minimum friction, maximum stress, resonance frequency
Whether the friction coefficient measurements such as rate key index meets sets requirement, if satisfied, (4) are then entered step, if not satisfied, then replacing
Rectangle micro-cantilever material or/and reflection finishing coat, return step (3)；Or replacement atomic force microscope, it is suitable to guarantee to have
Light path system and photodetector and its attached current/voltage converter, return step (3), until the friction that emulation obtains
The coefficient of frictions such as coefficient resolution ratio, the maximum positive voltage power that can be loaded or measurable minimum friction, maximum stress, resonant frequency
Measurement key index meets sets requirement.
The above-mentioned design of rectangle micro-cantilever beam probe and processing applied to the measurement of nanoscale single-contact ultralow friction coefficient
Method, in order to adapt to the application environment of existing atomic force microscope, reduce small batch, customization rectangle micro-cantilever beam probe plus
Work cost improves processing efficiency, in the step (4), to approach the quotient of rectangle micro-cantilever beam probe design size in step (3)
It is processing object with probe, correction of the flank shape is carried out to it using focused ion beam and is machined to design size, selects suitable glue, by needle
The rectangle micro-cantilever end of point bonding after processing, completes probe manufacturing.
The above-mentioned design of rectangle micro-cantilever beam probe and processing applied to the measurement of nanoscale single-contact ultralow friction coefficient
Method, according to requirement of experiment, tip point material be selected from silicon, silicon nitride, silica, diamond, diamond-like, aluminum oxide,
At least one of zirconium dioxide, titanium dioxide, ceria, graphite, gold and graphene, molybdenum disulfide, hexagonal boron nitride.
The above-mentioned design of rectangle micro-cantilever beam probe and processing applied to the measurement of nanoscale single-contact ultralow friction coefficient
0.0001 or more amount may be implemented in order to further illustrate the rectangle micro-cantilever beam probe designed by the method for the invention in method
The ultralow friction coefficient of class resolution ratio measures, and the rectangle micro-cantilever beam probe that can also be obtained using step (4) processing is carried out micro-
Frictional experiment is seen, coefficient of friction resolution ratio is verified, measures nanoscale single-contact ultralow friction coefficient.
The rectangle micro-cantilever beam probe of design and processing method production proposed according to the present invention is applied to sample superslide shape
The measurement of nanoscale single-contact ultralow friction coefficient under state.
Compared with the design of existing micro-cantilever beam probe and processing method, method provided by the invention has below beneficial to effect
Fruit:
1, the theoretical model for the rectangle micro-cantilever beam probe measurement coefficient of friction that the present invention establishes demonstrates coefficient of friction point
Resolution is directly proportional to the length of rectangle micro-cantilever, to propose a kind of rectangle micro-cantilever with great friction coefficient resolution ratio
The design of beam probe and processing method, can be produced by this method and be measured applied to nanoscale single-contact ultralow friction coefficient
Probe；
2, the probe designed based on method proposed by the present invention, processed can significantly improve friction coefficient measurement resolution
Rate realizes the ultralow friction coefficient measurement of 0.0001 and the above magnitude resolution ratio, guarantees the authenticity of superslide process quantitative analysis
And reliability, a kind of important measurement means are provided to go deep into system research superslide theory and technology；
3, the Universal Theory model of micro-cantilever beam probe measurement coefficient of friction proposed by the present invention, is applicable not only to rectangle and cuts
Face is also applied for the cross-section or variable cross-section of other shapes；By substituting into corresponding thin plate elastic mechanics and mechanical parameters,
Corresponding theoretical model can be obtained, and then the ultralow friction coefficient measurement of higher amount class resolution ratio can be able to achieve；
4, the Universal Theory model based on micro-cantilever beam probe proposed by the present invention measurement coefficient of friction, can not only pass through
Optimal improvements micro-cantilever beam probe structure improves coefficient of friction resolution ratio, can also improve coefficient of friction by other means
Resolution ratio, such as Optimal improvements light path system.Meanwhile the Universal Theory model can also be applied to other and relevant to tribology grind
Study carefully, there is very high practical value.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, be described below in attached drawing be only this
Some embodiments of invention for those of ordinary skills without creative efforts, can be with
Illustrated embodiment obtains other embodiments and its attached drawing according to these attached drawings.
Fig. 1 is that the rectangle provided in an embodiment of the present invention applied to the measurement of nanoscale single-contact ultralow friction coefficient is micro- outstanding
The design of arm beam probe and processing method flow chart.
Fig. 2 is that rectangle micro-cantilever beam probe provided in an embodiment of the present invention measures coefficient of friction schematic diagram.
Fig. 3 is MFP-3D atomic force microscope photodetector voltage resolution provided in an embodiment of the present invention.
Fig. 4 is rectangle micro-cantilever beam probe FEM Numerical Simulation provided in an embodiment of the present invention.Wherein, (a) is to add
Stress envelope when carrying 25 μ N normal pressure (safety coefficient 10) at maximum stress section, (b) having for normal direction coefficient of elasticity
First simulation result is limited, the FEM Numerical Simulation of elasticity of torsion coefficient when (c) being 2.5 μ N normal pressure of load.
Fig. 5 is rectangle micro-cantilever beam probe process provided in an embodiment of the present invention.
Graphene bead needle point and highly directional pyrolysis stone when Fig. 6 is 1.70 μ N normal pressure of load provided in an embodiment of the present invention
The frictional force ring experimental result of black opposite grinding.
Specific embodiment
Clear, complete description is carried out below with reference to technical solution of the attached drawing to various embodiments of the present invention, it is clear that is retouched
Stating embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, originally
Field those of ordinary skill obtained all other embodiment without making creative work, belongs to this hair
Bright protected range.
Embodiment 1
According to following ultralow friction coefficient measurement request design, processing rectangle micro-cantilever beam probe: 1) realize 0.0001 and
The ultralow friction coefficient of the above magnitude resolution ratio measures；2) the maximum positive voltage power that can be loaded is equal or close to 2.5 μ N；3) micro-cantilever
Beam material is silicon nitride；4) needle point is the graphene bead of 8 μ m diameters；5) it is carried out using a MFP-3D atomic force microscope real
It tests.
MFP-3D atomic force microscope characteristic is as follows in the present embodiment: 1) laser facula size is micron dimension, is
Entirely fall within laser facula in the reflecting surface of rectangle micro-cantilever, the width w of beam should be not less than 20 μm, length l Ying Bu little
In 50 μm；2) the thickness t of silicon nitride microcantilever is usually 0.2 μm -0.6 μm；3) through measuring, normal direction optical lever in light path system
The InvOLS reciprocal of sensitivityNWith l, UsumFit correlation formula be InvOLSN(nm/V)=0.00274 × l/Usum+ 24.7, it is horizontal
To the InvOLS reciprocal of optical lever sensitivityLWith UsumFit correlation formula be InvOLSL(rad/V)=0.0697/Usum+
0.00879(4.5V<Usum<5.8V)；4) as shown in figure 3, the voltage resolution U of photodetectorLminIt is 0.01mV (in addition, ginseng
Examine document J.Li, C.Zhang, P.Cheng, X.Chen, the middle report of W.Wang and J.Luo, Langmuir, 32,5593 (2016)
The U of road MFP-3D atomic force microscopeLminFor 0.002mV, wouldn't be used in this patent), voltage range UNmaxFor 20V；5) through surveying
Amount, the current resolution I of photodetectorLminWith range INmaxRatio ILmin/INmaxIt is 7 × 10-6。
As shown in Figure 1, present embodiments providing a kind of square applied to the measurement of nanoscale single-contact ultralow friction coefficient
The design of shape micro-cantilever beam probe and processing method, comprising the following steps:
Step (1) establishes the Universal Theory model of micro-cantilever beam probe measurement coefficient of friction
According to the measuring principle of atomic force microscope, friction is measured by the torsion and bending of micro-cantilever beam probe respectively
Power and normal pressure, i.e.,
FL=KT×InvOLSL×UL (i)
FN=KN×InvOLSN×UN (ii)
In formula, FL、FNRespectively frictional force, normal pressure；KT、KNThe respectively elasticity of torsion coefficient of micro-cantilever beam probe, method
To coefficient of elasticity；InvOLSL、InvOLSNThe inverse of respectively lateral optical lever sensitivity, normal direction optical lever sensitivity inverse；
UL、UNThe respectively lateral output voltage of photodetector, normal direction output voltage.
And then the Universal Theory model of micro-cantilever beam probe measurement coefficient of friction is established, it is shown below:
In formula, μ is coefficient of friction.
Step (2) establishes the theoretical model of rectangle micro-cantilever beam probe measurement coefficient of friction
According to the measuring principle of light path system, the InvOLS reciprocal of lateral optical lever sensitivityL, normal direction optical lever sensitivity
InvOLS reciprocalNIt indicates are as follows:
In formula, H is the photosurface length of photodetector, and d is optical path length, and l is the length of micro-cantilever, UsumIt is sharp
The total voltage that light is generated in four quadrants of photodetector, αsum、αL、αNRespectively total output electric current of photodetector, transverse direction
Export the amplification factor of electric current, normal direction output electric current after current/voltage converter, unit V/A.
The cross section of generally rectangular micro-cantilever is narrow and long rectangular, i.e. width is much larger than thickness.Based on thin plate elastic mechanics
And theory of mechanics of materials, the elasticity of torsion COEFFICIENT K of rectangle micro-cantilever beam probeT, normal direction coefficient of elasticity KNIt indicates are as follows:
In formula, G, E are respectively the modulus of shearing of rectangle micro-cantilever material, elasticity modulus, and w, t are respectively rectangle micro-cantilever
Width, the thickness of beam, htipFor tip height.
Above-mentioned formula (iv)~(vii) is substituted into the Universal Theory model (iii) that step (1) is established and obtains rectangle micro-cantilever
Beam probe measures the theoretical model of coefficient of friction, is shown below:
In formula, ILFor the lateral output electric current of photodetector, IL=UL/αL, INElectricity is exported for the normal direction of photodetector
Stream, IN=UN/αN。
H in the present embodimenttipMuch larger than 0.5t, above-mentioned theory model simplification is as follows:
Step (3) designs the rectangle micro-cantilever beam probe for meeting ultralow friction coefficient measurement request
According to step (2), enabling μ is coefficient of friction resolution ratio μmin, FNFor the maximum positive voltage power F that can be loadedNmaxOr FLFor can
The minimum friction F of measurementLmin, in conjunction with coefficient of friction resolution ratio μmin, the maximum positive voltage power F that can loadNmaxOr it is measurable most
Less friction FLminAnd the constraint conditions such as atomic force microscope characteristic, simultaneous (i)~(viii) are calculated, are designed satisfaction measurement
It is required that rectangle micro-cantilever beam probe size, including length l, width w, thickness t etc., and verifying is checked using finite element simulation.
Firstly, requiring coefficient of friction resolution ratio μ in the present embodimentminLess than or equal to 0.0001, i.e.,
In formula, ILmin、INmaxThe respectively current resolution of photodetector, range.Wherein the G of silicon nitride is 61GPa, E
For 156GPa, htipIt is 8 μm, ILmin/INmaxIt is 7 × 10-6, substitute into length l≤146 that rectangle micro-cantilever is calculated in formula (x)
μm, by formula (x) it is found that the length l of rectangle micro-cantilever should be as far as possible in order to realize coefficient of friction resolution ratio as high as possible
Small, in conjunction with atomic force microscope characteristic (as previously described), the length l of rectangle micro-cantilever is minimized 50 μm.
Then, the maximum positive voltage power F that requirement can load in the present embodimentNmaxEqual or close to 2.5 μ N, i.e.,
FNmax=(KN×InvOLSN×UN)max=KN×InvOLSN×UNmax=2.5 (xi)
In formula, UNmaxFor the voltage range of photodetector.Wherein the reflection finishing coat of rectangle micro-cantilever is gold, laser
The total voltage U generated in four quadrants of photodetector is reflected by gold platingsumInvOLS is calculated in about 5VNFor
52.1nm/V UNmaxFor 20V, substitutes into formula (xi) and K is calculatedNFor 2.40N/m, substitutes into formula (vii) and rectangle micro-cantilever is calculated
The quantitative relationship of the width w and thickness t of beam are w × t3=7.69 μm4, in conjunction with atomic force microscope characteristic (as previously described), i.e.,
0.2 μm≤t≤0.6 μm, 0.2 μm≤t≤0.6 μm is calculated in w >=20 μm, and 35.6 μm≤w≤962 μm.In view of focus from
The economy and convenience of beamlet correction of the flank shape processing, selecting commercial probe is processing object, and 35 μm are that commercial probe is commonly micro-
Cantilever beam width, therefore the width w for designing rectangle micro-cantilever is 35 μm, thickness t is 0.6 μm.
So far, determine the structural parameters of rectangle micro-cantilever beam probe: l is 50 μm, and w is 35 μm, and t is 0.6 μm, htipFor 8 μ
M, the effective digital as involved in design process are accepted or rejected, and are substituted into and are calculated again, and the calculated results are as shown in table 1.
The experimental result of 1 rectangle micro-cantilever beam probe of table
Furthermore obtained rectangle micro-cantilever beam probe design size is substituted into limit element artificial module, it is soft using finite element
Part NX Nastran emulates to obtain coefficient of friction resolution ratio, can load maximum positive voltage power or measurable minimum friction, most
Big stress, resonant frequency, FEM Numerical Simulation is as shown in table 1 and Fig. 4.As can be seen that coefficient of friction resolution ratio is 3 × 10-5,
The maximum positive voltage power that can be loaded is 2.46 μ N, and maximum stress is 600MPa (much smaller than the yield strength 15GPa of silicon nitride), resonance
Frequency is 115kHz (resonant frequency far from atomic force microscope), fully meets sets requirement.
Step (4) processes the rectangle micro-cantilever beam probe for meeting ultralow friction coefficient measurement request
The rectangle micro-cantilever beam probe design size obtained according to step (3) is processed, and the spy of rectangle micro-cantilever is obtained
Needle, rectangle micro-cantilever tip designs have needle point.
In the present embodiment, selection and the close (U.S. commercial probe HYDRA6R-100NG-TL of above-mentioned design size
The production of Applied NanoStructures company), ion beam correction of the flank shape processing is focused to it.As shown in figure 5, using focusing
The length correction of the flank shape of HYDRA6R-100NG-TL to 50 μm, is then used AB glue by ion beam in MFP-3D atomic force microscope
8 μm of diameter of graphene bead is bonded in the rectangle micro-cantilever end after correction of the flank shape by (or uv-curable glue etc.), completes to visit
Needle production.
The rectangle micro-cantilever beam probe of production is mounted in MFP-3D atomic force microscope, Micro Lub experiment is carried out,
Experimental result is as shown in table 1.The experimental results showed that KNFor 4.82N/m, InvOLSNFor 41.4nm/V, the maximum positive voltage that can be loaded
Power is 3.99 μ N, is greater than 2.5 μ N, it is contemplated that mismachining tolerance and systematic error, the result substantially meet the maximum positive voltage that can be loaded
The sets requirement of power；KL×InvOLSLFor 8.65 μ N/V (use document S.-W.Liu, H.-P.Wang, Q.Xu, T.-B.Ma,
G.Yu,C.Zhang,D.Geng,Z.Yu,S.Zhang,W.Wang,Y.-Z.Hu,H.Wang and J.Luo,Nature
Communications, the middle magnetic suspension standardization reported in 8,14029 (2017)), frictional force resolution ratio is 86.5pN.Work as load
3.99 μ N of maximum positive voltage power, coefficient of friction resolution ratio are 2 × 10-5；When loading 2.5 μ N, coefficient of friction resolution ratio is 3 × 10-5, meet the sets requirement of coefficient of friction resolution ratio, can be realized the ultralow friction coefficient survey of 0.0001 and the above magnitude resolution ratio
Amount.
So far, the rectangle micro-cantilever is demonstrated in terms of theoretical calculation, finite element simulation and Micro Lub experiment three
The feasibility and accuracy of probe design and processing method.
Embodiment 2
Further carry out Micro Lub experiment, uses the rectangle micro-cantilever beam probe and highly directional heat made in embodiment 1
Solve graphite opposite grinding, frictional force ring experimental result as shown in fig. 6,1.70 μ N normal pressures (at this time coefficient of friction resolution ratio be 5 ×
10-5) under frictional force be 10.0nN, coefficient of friction 0.00591.
Therefore, the rectangle micro-cantilever beam probe of design and processing method production proposed according to the present invention can be applied to sample
Nanoscale single-contact ultralow friction coefficient measurement under product superslide state.
A kind of rectangle micro-cantilever beam probe applied to the measurement of nanoscale single-contact ultralow friction coefficient of the invention is set
Meter and processing method, significantly improve friction coefficient measurement resolution ratio, and realization 0.0001 and above the ultralow of magnitude resolution ratio rub
Coefficient measurement is wiped, guarantees the authenticity and reliability of the quantitative analysis of superslide process, is existed for the foundation and superslide technology of superslide theory
The application of the key areas such as China's aerospace, advanced manufacture, the energy provides a kind of important measurement means.
Those of ordinary skill in the art will understand that the embodiments described herein, which is to help reader, understands this hair
Bright principle, it should be understood that protection scope of the present invention is not limited to such specific embodiments and embodiments.This field
Those of ordinary skill disclosed the technical disclosures can make according to the present invention and various not depart from the other each of essence of the invention
The specific variations and combinations of kind, these variations and combinations are still within the scope of the present invention.
Claims (9)
1. a kind of design of rectangle micro-cantilever beam probe and processing side applied to the measurement of nanoscale single-contact ultralow friction coefficient
Method, it is characterised in that the following steps are included:
Step (1) establishes the Universal Theory model of micro-cantilever beam probe measurement coefficient of friction
According to the measuring principle of atomic force microscope, measured respectively by the torsion and bending of micro-cantilever beam probe frictional force and
Normal pressure, i.e.,
FL=KT×InvOLSL×UL (i)
FN=KN×InvOLSN×UN (ii)
In formula, FL、FNRespectively frictional force, normal pressure；KT、KNThe respectively elasticity of torsion coefficient of micro-cantilever beam probe, normal direction bullet
Property coefficient；InvOLSL、InvOLSNThe inverse of respectively lateral optical lever sensitivity, normal direction optical lever sensitivity inverse；UL、
UNThe respectively lateral output voltage of photodetector, normal direction output voltage；
And then the Universal Theory model of micro-cantilever beam probe measurement coefficient of friction is established, it is shown below:
In formula, μ is coefficient of friction；
Step (2) establishes the theoretical model of rectangle micro-cantilever beam probe measurement coefficient of friction
According to the measuring principle of light path system, the InvOLS reciprocal of lateral optical lever sensitivityL, normal direction optical lever sensitivity fall
Number InvOLSNIt indicates are as follows:
In formula, H is the photosurface length of photodetector, and d is optical path length, and l is the length of micro-cantilever, UsumExist for laser
The total voltage that four quadrants of photodetector generate, αsum、αL、αNRespectively total output electric current of photodetector, laterally output
The amplification factor of electric current, normal direction output electric current after current/voltage converter；
Based on thin plate elastic mechanics and theory of mechanics of materials, the elasticity of torsion COEFFICIENT K of rectangle micro-cantilever beam probeT, normal direction elasticity system
Number KNIt indicates are as follows:
In formula, G, E are respectively the modulus of shearing of rectangle micro-cantilever material, elasticity modulus, and w, t are respectively rectangle micro-cantilever
Width, thickness, htipFor tip height；
Above-mentioned formula (iv)~(vii) is substituted into the Universal Theory model (iii) that step (1) is established and obtains the spy of rectangle micro-cantilever
Needle measures the theoretical model of coefficient of friction, is shown below:
In formula, ILFor the lateral output electric current of photodetector, IL=UL/αL, INElectric current, I are exported for the normal direction of photodetectorN
=UN/αN；
Step (3) designs the rectangle micro-cantilever beam probe for meeting ultralow friction coefficient measurement request
According to step (2), enabling μ is coefficient of friction resolution ratio μmin, FNFor the maximum positive voltage power F that can be loadedNmaxOr FLIt is measurable
Minimum friction FLmin, in conjunction with coefficient of friction resolution ratio μmin, the maximum positive voltage power F that can loadNmaxOr measurable minimum is rubbed
Wipe power FLminAnd atomic force microscope characteristic constraint condition, simultaneous (i)~(viii) are calculated, are designed and meet measurement request
Rectangle micro-cantilever beam probe size, including length l, width w, thickness t；
Step (4) processes the rectangle micro-cantilever beam probe for meeting ultralow friction coefficient measurement request
The rectangle micro-cantilever beam probe design size obtained according to step (3) is processed, and rectangle micro-cantilever beam probe, square are obtained
Shape micro-cantilever tip designs have needle point.
2. being applied to the rectangle micro-cantilever beam probe of nanoscale single-contact ultralow friction coefficient measurement according to claim 1
Design and processing method, it is characterised in that in the step (2), work as htipWhen much larger than 0.5t, above-mentioned theory model simplification is such as
Under:
3. being applied to the rectangle micro-cantilever beam probe of nanoscale single-contact ultralow friction coefficient measurement according to claim 2
Design and processing method, it is characterised in that in the step (3), mainly include it is following step by step:
A) according to given coefficient of friction resolution ratio μmin, the length l of rectangle micro-cantilever is calculated according to formula (ix)；
B) according to the given maximum positive voltage power F loadedNmaxOr measurable minimum friction FLmin, according to formula (i)~
(vii) quantitative relationship of the width w and thickness t of rectangle micro-cantilever is calculated；
C) according to atomic force microscope characteristic constraint condition, the value range of the width w and thickness t of rectangle micro-cantilever are provided；
D) value range according to the width w and thickness t of rectangle micro-cantilever sets the width w or thickness of rectangle micro-cantilever
T, and the quantitative relationship of the width w and thickness t according to rectangle micro-cantilever, are calculated the thickness t or width of rectangle micro-cantilever
Spend w.
4. the rectangle micro-cantilevers measured according to claim 1 or described in 3 applied to nanoscale single-contact ultralow friction coefficient
Probe design and processing method, it is characterised in that the atomic force microscope characteristic includes: that laser facula is made to entirely fall within rectangle
The value range of the width w and length l of the rectangle micro-cantilever set in micro-cantilever reflecting surface, and according to rectangle micro-cantilever
The value range of the thickness t of the rectangle micro-cantilever of beam material setting.
5. the according to claim 1 or 2 or 3 rectangle micro-cantilevers applied to the measurement of nanoscale single-contact ultralow friction coefficient
The design of beam probe and processing method, it is characterised in that in the step (3), further set obtained rectangle micro-cantilever beam probe
It counts size and substitutes into limit element artificial module, whether the friction coefficient measurement key index for determining that emulation obtains meets sets requirement,
If satisfied, (4) are then entered step, if not satisfied, then replacing rectangle micro-cantilever material or/and reflection finishing coat, return step
(3)；Or replacement atomic force microscope, return step (3), until the friction coefficient measurement key index that emulation obtains meets setting
It is required that.
6. being applied to the rectangle micro-cantilever beam probe of nanoscale single-contact ultralow friction coefficient measurement according to claim 5
Design and processing method, it is characterised in that the friction coefficient measurement key index includes coefficient of friction resolution ratio, can load
Maximum positive voltage power or measurable minimum friction, maximum stress, resonant frequency.
7. being applied to the rectangle micro-cantilever beam probe of nanoscale single-contact ultralow friction coefficient measurement according to claim 5
Design and processing method, it is characterised in that in the step (4), design ruler to approach rectangle micro-cantilever beam probe in step (3)
Very little commercial probe is processing object, carries out correction of the flank shape to it using focused ion beam and is machined to design size, and needle point is bonded
Probe manufacturing is completed in rectangle micro-cantilever end after processing.
8. being applied to the rectangle micro-cantilever beam probe of nanoscale single-contact ultralow friction coefficient measurement according to claim 7
Design and processing method, it is characterised in that the tip point material be selected from silicon, silicon nitride, silica, diamond, diamond-like,
Aluminum oxide, zirconium dioxide, titanium dioxide, ceria, graphite, gold and graphene, molybdenum disulfide, in hexagonal boron nitride
At least one.
9. according to the measurement of nanoscale single-contact ultralow friction coefficient is applied to described in claim 1 to 8 any claim
The design of rectangle micro-cantilever beam probe and the rectangle micro-cantilever beam probe of processing method production are applied to receiving under sample superslide state
The measurement of meter level single-contact ultralow friction coefficient.
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| CN111717881A (en) * | 2020-05-29 | 2020-09-29 | 深圳清华大学研究院 | Preparation method of ultra-smooth sliding block |
| CN111717881B (en) * | 2020-05-29 | 2023-05-16 | 深圳清华大学研究院 | Preparation method of ultra-smooth sliding block |
| CN114924098A (en) * | 2022-05-20 | 2022-08-19 | 西南交通大学 | Flexible edge-free super-lubricating sliding block and preparation method and application thereof |
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