CN103247348A - Working table applied to grating ruling machine - Google Patents
Working table applied to grating ruling machine Download PDFInfo
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- CN103247348A CN103247348A CN2013101804941A CN201310180494A CN103247348A CN 103247348 A CN103247348 A CN 103247348A CN 2013101804941 A CN2013101804941 A CN 2013101804941A CN 201310180494 A CN201310180494 A CN 201310180494A CN 103247348 A CN103247348 A CN 103247348A
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Abstract
The invention discloses a working table applied to a grating ruling machine, belonging to the field of research of an ultra-precise manufacturing technology and aiming to solve the problems of weak stability and low ruling degree existing in the prior art. The working table comprises an inner layer table, an outer layer table and piezoelectric ceramic, wherein the inner layer table is embedded in the outer layer table; the inner layer table is connected with the outer layer table through a spring leaf in the radial direction and is connected with the outer layer table through a sealed spring in the axial direction; the inner layer table and the outer layer table form a zigzag structure; the piezoelectric ceramic is symmetrically arranged on the two sides of the front end of the outer layer table; and the inner layer table is driven through the expansion and retraction of the piezoelectric ceramic to move opposite to the outer layer table. According to the working table, the correction of displacement and swing angle of the grating ruling machine is realized according to different expansion and retraction lengths of the piezoelectric ceramic; the inner layer table is connected with the outer layer table through an elastic steel sheet suspension; no axial friction force exists between the inner layer table and the outer layer table when the inner layer table and the outer layer table produce relative displacement; the crawling problem can be avoided during micro positioning of the inner layer table; and higher accuracy micro-displacement and angle resolving capacity are realized.
Description
Technical field
The invention belongs to super hot investment casting technical research field, relate in particular to a kind of worktable that is applied to optical grating graduating machine.
Background technology
Along with development of science and technology, current society raises gradually for the demand degree of grating, high precision ruling grating especially high resolving power echelle grating becomes the new focus that the spectral technique field is paid close attention to, the delineation system of optical grating graduating machine of the prior art adopts " striding bridge-type " structure, adopt the rose engine of the big grating of this structure manufacturing, need to make bigger knife rest, not only the difficulty of processing height also is difficult to guarantee for the stability of large scale worktable and the precision of delineation system.
Summary of the invention
The objective of the invention is to propose a kind of worktable that is applied to optical grating graduating machine, purpose is to solve stable weak, the low problem of delineation precision that exists in the prior art.
For achieving the above object, the worktable that is applied to optical grating graduating machine of the present invention comprises internal layer platform, outer platform and piezoelectric ceramics, described internal layer platform is embedded in the inside of described outer platform, described internal layer platform directly upwards is connected with described outer platform by spring leaf, axially go up by the sealing spring and be connected with described outer platform, described internal layer platform and described outer platform constitute Back Word type structure, described piezoelectric ceramics is symmetricly set on described outer platform front end both sides, moves relative to described outer platform by the described internal layer platform of the telescopic drive of piezoelectric ceramics.
The number of described spring leaf is four, and described four spring leafs are arranged in parallel between described outer platform and described internal layer platform.
The number of described sealing spring and described piezoelectric ceramics all is two, and described two piezoelectric ceramics are symmetrically set in described outer platform the same side, and described sealing spring and described piezoelectric ceramics be arranged in parallel.
Described piezoelectric ceramics one end is provided with ball, and described internal layer platform one end is provided with hard material, and described ball is connected with described hard material contact.
Described piezoelectric ceramics is heap formula structure.
Described spring leaf is elastic steel sheet.
Described hard material is the material of Rockwell's hardness more than 95.
Beneficial effect of the present invention is: compared with prior art, the worktable that is applied to optical grating graduating machine of the present invention drives the internal layer platform of worktable by piezoelectric ceramics, can realize correction to optical grating graduating machine displacement and pivot angle according to the difference of piezoelectric ceramics collapsing length, two the degree of freedom micrometric displacements of platform of finishing the work are regulated, be that a kind of novel micro-displacement work table is adjusted structure, can provide basic guarantee for worktable depicts correct cutting position, satisfy stability and accuracy requirement that large scale high precision grating is made; The present invention adopts elastic steel sheet to hang the mode that connects internal layer platform and outer platform, when producing relative displacement, described internal layer platform and described outer platform do not have axial friction each other, the internal layer platform can be avoided crawling problems in the microposition process, make worktable realize micrometric displacement and the angular resolution of degree of precision.
Description of drawings
Fig. 1 is the worktable one-piece construction synoptic diagram that is applied to optical grating graduating machine of the present invention;
Fig. 2 is the internal layer platform structural representation that is applied to the worktable of optical grating graduating machine of the present invention;
Fig. 3 is the Piezoelectric Ceramic internal layer platform work synoptic diagram that is applied to the worktable of optical grating graduating machine of the present invention;
Wherein: 1, outer platform, 2, the internal layer platform, 3, elastic steel sheet, 4, the sealing spring, 5, piezoelectric ceramics, 6, ball, 7, sapphire.
Embodiment
Below in conjunction with accompanying drawing the present invention is described further.
Referring to accompanying drawing 1 and accompanying drawing 2, the worktable that is applied to optical grating graduating machine of the present invention comprises internal layer platform 2, outer platform 1 and piezoelectric ceramics 5, described internal layer platform 2 is embedded in the inside of described outer platform 1, described internal layer platform 2 footpaths upwards are connected with described outer platform 1 by spring leaf, axially go up by sealing spring 4 and be connected with described outer platform 1, described internal layer platform 2 and described outer platform 1 constitute Back Word type structure, described piezoelectric ceramics 5 is symmetricly set on described outer platform 1 the same side, move relative to described outer platform 1 by the described internal layer platform 2 of the telescopic drive of piezoelectric ceramics 5, for being applicable to the delineation of different quality diffraction grating, the spring leaf of replaceable different elasticity coefficient is regulated the displacement response performance of worktable.
The number of described spring leaf is four, and described four spring leafs are arranged in parallel between described outer platform 1 and described internal layer platform 2.The number of described sealing spring 4 and described piezoelectric ceramics 5 all is two, and described two piezoelectric ceramics 5 are symmetrically set in described outer platform 1 the same side, and described sealing spring 4 be arranged in parallel with described piezoelectric ceramics 5.
Two piezoelectric ceramics 5 symmetries are installed on the outer platform 1, are connected by sealing spring 4 between internal layer platform 2 and the outer platform 1, and provide confining force by sealing spring 4, and in the present embodiment, for improving stroke and load driving force, described piezoelectric ceramics 5 adopts heap formula structure; Certainly, described piezoelectric ceramics 5 can be other any structure that meets described worktable requirement.
With reference to the accompanying drawings 3, described piezoelectric ceramics 5 one ends are provided with ball 6, and described internal layer platform 2 one ends are provided with hard material, and described ball 6 is connected with described hard material contact; Described hard material is sapphire 7, piezoelectric ceramics 5 provides thrust, sealing spring 4 provides pulling force, piezoelectric ceramics 5 acts on the sapphire 7 that is fixed in internal layer platform 2 by the ball 6 that is arranged on the one end, the benefit of this structure is to avoid piezoelectric ceramics 5 carrying out bearing bigger load force when displacement is shunk described internal layer platform 2 to be damaged, when ball 6 can reduce piezoelectric ceramics 5 with the worktable assembling for the requirement of right alignment, sapphire 7 hardness are higher, can avoid directly acting on internal layer platform 2 and make described internal layer platform 2 distortion or damage.
Described spring leaf is elastic steel sheet 3, also can be other any spring leaf that is applicable to described worktable.
The above the specific embodiment of the present invention does not constitute the restriction to protection domain of the present invention.Various other corresponding changes and distortion that any technical conceive according to the present invention has been done all should be included in the protection domain of claim of the present invention.
Claims (7)
1. be applied to the worktable of optical grating graduating machine, it is characterized in that, comprise internal layer platform (2), outer platform (1) and piezoelectric ceramics (5), described internal layer platform (2) is embedded in the inside of described outer platform (1), described internal layer platform (2) footpath upwards is connected with described outer platform (1) by spring leaf, axially go up by sealing spring (4) and be connected with described outer platform (1), described internal layer platform (2) and described outer platform (1) constitute Back Word type structure, described piezoelectric ceramics (5) is symmetricly set on described outer platform (1) the same side, moves relative to described outer platform (1) by the described internal layer platform of the telescopic drive of piezoelectric ceramics (5) (2).
2. the worktable that is applied to optical grating graduating machine according to claim 1 is characterized in that, the number of described spring leaf is four, and described four spring leafs are arranged in parallel between described outer platform (1) and described internal layer platform (2).
3. the worktable that is applied to optical grating graduating machine according to claim 1, it is characterized in that, the number of described sealing spring (4) and described piezoelectric ceramics (5) all is two, described two piezoelectric ceramics (5) are symmetrically set in described outer platform (1) the same side, and described sealing spring (4) be arranged in parallel with described piezoelectric ceramics (5).
4. the worktable that is applied to optical grating graduating machine according to claim 1, it is characterized in that, described piezoelectric ceramics (5) one ends are provided with ball (6), and described internal layer platform (2) one ends are provided with hard material, and described ball (6) is connected with described hard material contact.
5. the worktable that is applied to optical grating graduating machine according to claim 1 is characterized in that, described piezoelectric ceramics (5) is heap formula structure.
6. the worktable that is applied to optical grating graduating machine according to claim 1 is characterized in that, described spring leaf is elastic steel sheet (3).
7. the worktable that is applied to optical grating graduating machine according to claim 4 is characterized in that, described hard material is the material of Rockwell's hardness more than 95.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310180494.1A CN103247348B (en) | 2013-05-16 | 2013-05-16 | Working table applied to grating ruling machine |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310180494.1A CN103247348B (en) | 2013-05-16 | 2013-05-16 | Working table applied to grating ruling machine |
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| CN103247348A true CN103247348A (en) | 2013-08-14 |
| CN103247348B CN103247348B (en) | 2015-06-10 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103481321A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Nanometer positioning device and system |
| CN110474562A (en) * | 2019-09-06 | 2019-11-19 | 仪晟科学仪器(嘉兴)有限公司 | The accurate piezoelectric ceramics oscillating table of ultrahigh vacuum |
| CN112379130A (en) * | 2020-11-16 | 2021-02-19 | 中国科学技术大学 | Low-temperature multi-parameter scanning probe microscope capable of automatically switching probes in situ |
| CN113459048A (en) * | 2021-06-28 | 2021-10-01 | 无锡地心科技有限公司 | High-response and high-balance working platform |
Citations (3)
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| US5142146A (en) * | 1990-06-13 | 1992-08-25 | Olympus Optical Co., Ltd. | High-accuracy position comparator using 2 dimensional grating |
| CN102506785A (en) * | 2011-09-23 | 2012-06-20 | 哈尔滨工业大学 | Three-degree-of-freedom integrated stick-slip linear positioning device |
| CN102513878A (en) * | 2011-12-30 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Control system of grating ruling machine |
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2013
- 2013-05-16 CN CN201310180494.1A patent/CN103247348B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5142146A (en) * | 1990-06-13 | 1992-08-25 | Olympus Optical Co., Ltd. | High-accuracy position comparator using 2 dimensional grating |
| CN102506785A (en) * | 2011-09-23 | 2012-06-20 | 哈尔滨工业大学 | Three-degree-of-freedom integrated stick-slip linear positioning device |
| CN102513878A (en) * | 2011-12-30 | 2012-06-27 | 中国科学院长春光学精密机械与物理研究所 | Control system of grating ruling machine |
Non-Patent Citations (1)
| Title |
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| 时轮等: ""高精度衍射光栅刻划机的最新技术进展"", 《仪器仪表学报》, vol. 22, no. 4, 31 August 2001 (2001-08-31), pages 438 - 439 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103481321A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Nanometer positioning device and system |
| CN110474562A (en) * | 2019-09-06 | 2019-11-19 | 仪晟科学仪器(嘉兴)有限公司 | The accurate piezoelectric ceramics oscillating table of ultrahigh vacuum |
| CN110474562B (en) * | 2019-09-06 | 2024-03-12 | 仪晟科学仪器(嘉兴)有限公司 | Precise piezoelectric ceramic swinging table for ultrahigh vacuum |
| CN112379130A (en) * | 2020-11-16 | 2021-02-19 | 中国科学技术大学 | Low-temperature multi-parameter scanning probe microscope capable of automatically switching probes in situ |
| CN113459048A (en) * | 2021-06-28 | 2021-10-01 | 无锡地心科技有限公司 | High-response and high-balance working platform |
| CN113459048B (en) * | 2021-06-28 | 2024-04-16 | 无锡地心科技有限公司 | High-response high-balance working platform |
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| Publication number | Publication date |
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| CN103247348B (en) | 2015-06-10 |
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