CN101203354A - 平移旋转二自由度载物台装置及采用该装置的三自由度载物台装置 - Google Patents
平移旋转二自由度载物台装置及采用该装置的三自由度载物台装置 Download PDFInfo
- Publication number
- CN101203354A CN101203354A CNA2006800220414A CN200680022041A CN101203354A CN 101203354 A CN101203354 A CN 101203354A CN A2006800220414 A CNA2006800220414 A CN A2006800220414A CN 200680022041 A CN200680022041 A CN 200680022041A CN 101203354 A CN101203354 A CN 101203354A
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- CN
- China
- Prior art keywords
- translation
- aforementioned
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- freedom
- turning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Environmental & Geological Engineering (AREA)
- Machine Tool Units (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Machine Tool Positioning Apparatuses (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005192131 | 2005-06-30 | ||
JP192131/2005 | 2005-06-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN101203354A true CN101203354A (zh) | 2008-06-18 |
Family
ID=37604286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2006800220414A Pending CN101203354A (zh) | 2005-06-30 | 2006-06-19 | 平移旋转二自由度载物台装置及采用该装置的三自由度载物台装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP4826584B2 (ja) |
KR (1) | KR20080002864A (ja) |
CN (1) | CN101203354A (ja) |
TW (1) | TW200707622A (ja) |
WO (1) | WO2007004413A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010006466A1 (zh) * | 2008-07-16 | 2010-01-21 | 北京航空航天大学 | 非对称直线驱动的平动加转动进给功能部件 |
CN101750885B (zh) * | 2010-01-06 | 2011-12-14 | 天津大学 | 二自由度精密定位工作台 |
CN101770166B (zh) * | 2010-01-06 | 2011-12-28 | 天津大学 | 一种用于纳米压印光刻系统的两平动精密定位工作台 |
CN102998899A (zh) * | 2012-12-05 | 2013-03-27 | 天津大学 | 二自由度纳米定位平台 |
CN110361397A (zh) * | 2018-04-09 | 2019-10-22 | Hb技术有限公司 | 可进行侧双夹持器驱动方式的θ轴对齐的AOI检测设备 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112193371A (zh) * | 2020-10-09 | 2021-01-08 | 九江精密测试技术研究所 | 一种船用三自由度位移平台 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06294B2 (ja) * | 1986-09-03 | 1994-01-05 | 新明和工業株式会社 | 位置決め装置 |
JP2675307B2 (ja) * | 1987-08-28 | 1997-11-12 | 株式会社日立製作所 | プリアライナー装置 |
JPH02202031A (ja) * | 1989-01-31 | 1990-08-10 | Nippon Seiko Kk | 回動テーブル装置 |
JP2523978B2 (ja) * | 1990-10-04 | 1996-08-14 | 松下電器産業株式会社 | 位置決めテ―ブル |
JP3607449B2 (ja) * | 1997-03-14 | 2005-01-05 | 株式会社東芝 | 画像処理アライメント装置 |
JPH11245128A (ja) * | 1998-02-26 | 1999-09-14 | Thk Co Ltd | 2軸平行・1軸旋回運動案内機構およびこれを用いた2軸平行・1軸旋回テーブル装置 |
JPH11300558A (ja) * | 1998-04-15 | 1999-11-02 | Thk Co Ltd | 移動テーブル装置 |
JP3733808B2 (ja) * | 1999-10-26 | 2006-01-11 | 松下電器産業株式会社 | XYθ3軸移動テーブル |
JP2002228411A (ja) * | 2001-02-05 | 2002-08-14 | Hitachi Kokusai Electric Inc | 二次元測定装置 |
-
2006
- 2006-06-19 JP JP2007523400A patent/JP4826584B2/ja not_active Expired - Fee Related
- 2006-06-19 KR KR1020077024407A patent/KR20080002864A/ko active Search and Examination
- 2006-06-19 WO PCT/JP2006/312230 patent/WO2007004413A1/ja active Application Filing
- 2006-06-19 CN CNA2006800220414A patent/CN101203354A/zh active Pending
- 2006-06-28 TW TW095123411A patent/TW200707622A/zh not_active IP Right Cessation
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010006466A1 (zh) * | 2008-07-16 | 2010-01-21 | 北京航空航天大学 | 非对称直线驱动的平动加转动进给功能部件 |
CN101750885B (zh) * | 2010-01-06 | 2011-12-14 | 天津大学 | 二自由度精密定位工作台 |
CN101770166B (zh) * | 2010-01-06 | 2011-12-28 | 天津大学 | 一种用于纳米压印光刻系统的两平动精密定位工作台 |
CN102998899A (zh) * | 2012-12-05 | 2013-03-27 | 天津大学 | 二自由度纳米定位平台 |
CN102998899B (zh) * | 2012-12-05 | 2014-09-17 | 天津大学 | 二自由度纳米定位平台 |
CN110361397A (zh) * | 2018-04-09 | 2019-10-22 | Hb技术有限公司 | 可进行侧双夹持器驱动方式的θ轴对齐的AOI检测设备 |
CN110361397B (zh) * | 2018-04-09 | 2021-11-30 | Hb技术有限公司 | 可进行侧双夹持器驱动方式的θ轴对齐的AOI检测设备 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2007004413A1 (ja) | 2009-01-22 |
JP4826584B2 (ja) | 2011-11-30 |
KR20080002864A (ko) | 2008-01-04 |
TWI302723B (ja) | 2008-11-01 |
TW200707622A (en) | 2007-02-16 |
WO2007004413A1 (ja) | 2007-01-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20080618 |