CN101188195A - 一种用于释放应力的多孔缓冲层制备方法 - Google Patents
一种用于释放应力的多孔缓冲层制备方法 Download PDFInfo
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CNB2007101918843A CN100508126C (zh) | 2007-12-18 | 2007-12-18 | 一种用于释放应力的多孔缓冲层制备方法 |
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Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102427100A (zh) * | 2011-11-11 | 2012-04-25 | 郭磊 | 半导体结构及其形成方法 |
CN102610717A (zh) * | 2011-01-20 | 2012-07-25 | 鸿富锦精密工业(深圳)有限公司 | 半导体发光芯片及其制造方法 |
CN103035585A (zh) * | 2012-12-12 | 2013-04-10 | 武汉铂岩科技有限公司 | 一种金属铝基氮化铝封装基板及其制备方法 |
CN103343386A (zh) * | 2013-06-21 | 2013-10-09 | 西安神光皓瑞光电科技有限公司 | 一种利用原位腐蚀技术提高材料晶体质量的方法 |
CN103928499A (zh) * | 2014-04-22 | 2014-07-16 | 西安神光皓瑞光电科技有限公司 | 一种缓冲型衬底结构及其上的侧向外延生长方法 |
CN106435720A (zh) * | 2016-09-22 | 2017-02-22 | 东莞市联洲知识产权运营管理有限公司 | 一种GaN薄膜材料的制备方法 |
US9773906B2 (en) | 2015-04-28 | 2017-09-26 | Samsung Electronics Co., Ltd. | Relaxed semiconductor layers with reduced defects and methods of forming the same |
CN108004514A (zh) * | 2017-12-28 | 2018-05-08 | 福州大学 | 一种具有自适应缓冲层的旋转靶材的制备方法 |
CN108052239A (zh) * | 2018-01-25 | 2018-05-18 | 武汉华星光电半导体显示技术有限公司 | 触摸屏 |
CN108385080A (zh) * | 2018-04-28 | 2018-08-10 | 华南理工大学 | 用于制备多孔模板的衬底及制备方法、多孔模板的制备方法 |
CN111636047A (zh) * | 2020-05-29 | 2020-09-08 | 太原理工大学 | 一种在医用金属表面制备抗菌合金纳米柱的方法 |
CN112490112A (zh) * | 2019-09-11 | 2021-03-12 | 中国科学院苏州纳米技术与纳米仿生研究所 | 氧化镓薄膜及其异质外延生长方法与应用 |
CN113140447A (zh) * | 2021-04-21 | 2021-07-20 | 西安电子科技大学 | 基于TiN掩膜的GaN材料及其制备方法 |
CN115047549A (zh) * | 2022-05-26 | 2022-09-13 | 麦斯塔微电子(深圳)有限公司 | 光学元件 |
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2007
- 2007-12-18 CN CNB2007101918843A patent/CN100508126C/zh not_active Expired - Fee Related
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102610717A (zh) * | 2011-01-20 | 2012-07-25 | 鸿富锦精密工业(深圳)有限公司 | 半导体发光芯片及其制造方法 |
CN102427100A (zh) * | 2011-11-11 | 2012-04-25 | 郭磊 | 半导体结构及其形成方法 |
CN103035585A (zh) * | 2012-12-12 | 2013-04-10 | 武汉铂岩科技有限公司 | 一种金属铝基氮化铝封装基板及其制备方法 |
CN103035585B (zh) * | 2012-12-12 | 2015-07-15 | 武汉铂岩科技有限公司 | 一种金属铝基氮化铝封装基板及其制备方法 |
CN103343386A (zh) * | 2013-06-21 | 2013-10-09 | 西安神光皓瑞光电科技有限公司 | 一种利用原位腐蚀技术提高材料晶体质量的方法 |
CN103928499A (zh) * | 2014-04-22 | 2014-07-16 | 西安神光皓瑞光电科技有限公司 | 一种缓冲型衬底结构及其上的侧向外延生长方法 |
US9773906B2 (en) | 2015-04-28 | 2017-09-26 | Samsung Electronics Co., Ltd. | Relaxed semiconductor layers with reduced defects and methods of forming the same |
CN106435720A (zh) * | 2016-09-22 | 2017-02-22 | 东莞市联洲知识产权运营管理有限公司 | 一种GaN薄膜材料的制备方法 |
CN108004514A (zh) * | 2017-12-28 | 2018-05-08 | 福州大学 | 一种具有自适应缓冲层的旋转靶材的制备方法 |
CN108052239A (zh) * | 2018-01-25 | 2018-05-18 | 武汉华星光电半导体显示技术有限公司 | 触摸屏 |
CN108385080A (zh) * | 2018-04-28 | 2018-08-10 | 华南理工大学 | 用于制备多孔模板的衬底及制备方法、多孔模板的制备方法 |
CN112490112A (zh) * | 2019-09-11 | 2021-03-12 | 中国科学院苏州纳米技术与纳米仿生研究所 | 氧化镓薄膜及其异质外延生长方法与应用 |
CN111636047A (zh) * | 2020-05-29 | 2020-09-08 | 太原理工大学 | 一种在医用金属表面制备抗菌合金纳米柱的方法 |
CN113140447A (zh) * | 2021-04-21 | 2021-07-20 | 西安电子科技大学 | 基于TiN掩膜的GaN材料及其制备方法 |
CN115047549A (zh) * | 2022-05-26 | 2022-09-13 | 麦斯塔微电子(深圳)有限公司 | 光学元件 |
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