CN101187780A - 确定镜头受热变形修正参数的方法 - Google Patents
确定镜头受热变形修正参数的方法 Download PDFInfo
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CNB200610118340XA CN100561351C (zh) | 2006-11-15 | 2006-11-15 | 确定镜头受热变形修正参数的方法 |
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CNB200610118340XA CN100561351C (zh) | 2006-11-15 | 2006-11-15 | 确定镜头受热变形修正参数的方法 |
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CN101187780A true CN101187780A (zh) | 2008-05-28 |
CN100561351C CN100561351C (zh) | 2009-11-18 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102446782A (zh) * | 2010-10-13 | 2012-05-09 | 上海华虹Nec电子有限公司 | 一种利用ovl机台量测关键尺寸的方法 |
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2006
- 2006-11-15 CN CNB200610118340XA patent/CN100561351C/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102446782A (zh) * | 2010-10-13 | 2012-05-09 | 上海华虹Nec电子有限公司 | 一种利用ovl机台量测关键尺寸的方法 |
CN102446782B (zh) * | 2010-10-13 | 2014-02-26 | 上海华虹宏力半导体制造有限公司 | 一种利用ovl机台量测关键尺寸的方法 |
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Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING |
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Effective date of registration: 20111118 Address after: 201203 No. 18 Zhangjiang Road, Shanghai Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091118 Termination date: 20181115 |