CN100561351C - 确定镜头受热变形修正参数的方法 - Google Patents
确定镜头受热变形修正参数的方法 Download PDFInfo
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- CN100561351C CN100561351C CNB200610118340XA CN200610118340A CN100561351C CN 100561351 C CN100561351 C CN 100561351C CN B200610118340X A CNB200610118340X A CN B200610118340XA CN 200610118340 A CN200610118340 A CN 200610118340A CN 100561351 C CN100561351 C CN 100561351C
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CNB200610118340XA CN100561351C (zh) | 2006-11-15 | 2006-11-15 | 确定镜头受热变形修正参数的方法 |
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CNB200610118340XA CN100561351C (zh) | 2006-11-15 | 2006-11-15 | 确定镜头受热变形修正参数的方法 |
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CN101187780A CN101187780A (zh) | 2008-05-28 |
CN100561351C true CN100561351C (zh) | 2009-11-18 |
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CN102446782B (zh) * | 2010-10-13 | 2014-02-26 | 上海华虹宏力半导体制造有限公司 | 一种利用ovl机台量测关键尺寸的方法 |
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Effective date of registration: 20111118 Address after: 201203 No. 18 Zhangjiang Road, Shanghai Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 No. 18 Zhangjiang Road, Shanghai Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091118 Termination date: 20181115 |
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CF01 | Termination of patent right due to non-payment of annual fee |