CN101176006B - Tft基板检查装置 - Google Patents

Tft基板检查装置 Download PDF

Info

Publication number
CN101176006B
CN101176006B CN200680016715XA CN200680016715A CN101176006B CN 101176006 B CN101176006 B CN 101176006B CN 200680016715X A CN200680016715X A CN 200680016715XA CN 200680016715 A CN200680016715 A CN 200680016715A CN 101176006 B CN101176006 B CN 101176006B
Authority
CN
China
Prior art keywords
tft substrate
tft
substrate
inspection chamber
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200680016715XA
Other languages
English (en)
Chinese (zh)
Other versions
CN101176006A (zh
Inventor
小西康雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN101176006A publication Critical patent/CN101176006A/zh
Application granted granted Critical
Publication of CN101176006B publication Critical patent/CN101176006B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2875—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136254—Checking; Testing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Theoretical Computer Science (AREA)
  • Toxicology (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Liquid Crystal (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Thin Film Transistor (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
CN200680016715XA 2005-06-14 2006-06-13 Tft基板检查装置 Expired - Fee Related CN101176006B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005174075 2005-06-14
JP174075/2005 2005-06-14
PCT/JP2006/311784 WO2006134888A1 (ja) 2005-06-14 2006-06-13 Ｔｆｔ基板検査装置

Publications (2)

Publication Number Publication Date
CN101176006A CN101176006A (zh) 2008-05-07
CN101176006B true CN101176006B (zh) 2010-09-01

Family

ID=37532250

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200680016715XA Expired - Fee Related CN101176006B (zh) 2005-06-14 2006-06-13 Tft基板检查装置

Country Status (5)

Country Link
JP (1) JP4670870B2 (ja)
KR (1) KR20070118137A (ja)
CN (1) CN101176006B (ja)
TW (1) TWI313142B (ja)
WO (1) WO2006134888A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4863163B2 (ja) * 2006-07-10 2012-01-25 株式会社島津製作所 Ｔｆｔ基板検査装置
KR100920158B1 (ko) * 2008-06-18 2009-10-06 (주)에이원메카 엘씨디 셀 라인의 일직선 셀 에이징 장치 및 셀 에이징방법
JP5232671B2 (ja) * 2009-01-22 2013-07-10 株式会社アルバック 処理装置
CN102667507A (zh) * 2009-12-10 2012-09-12 株式会社岛津制作所 Tft基板检查装置以及tft基板检查方法
CN105632041A (zh) * 2014-11-26 2016-06-01 上海宝钢钢材贸易有限公司 自助提单打印系统及方法
CN104795339B (zh) * 2015-03-09 2017-10-20 昆山龙腾光电有限公司 薄膜晶体管阵列基板的检测装置及检测方法
KR20220009667A (ko) 2020-07-16 2022-01-25 삼성전자주식회사 로봇이 구비된 반도체 모듈 검사장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6249268A (ja) * 1985-08-28 1987-03-03 Toshiba Seiki Kk 電子部品の加熱、冷却方法
JPS6285810A (ja) * 1985-10-11 1987-04-20 Nec Corp 電子線測長機
JPH08105938A (ja) * 1994-10-06 1996-04-23 Advantest Corp Ｉｃテストハンドラ
JP3813334B2 (ja) * 1997-10-24 2006-08-23 株式会社半導体エネルギー研究所 リア型プロジェクションｔｖ用の液晶パネルの作製方法
JP2001013519A (ja) * 1999-06-28 2001-01-19 Matsushita Electric Ind Co Ltd 液晶表示装置用アクティブマトリクスアレイ基板および検査方法および検査装置および液晶表示装置および映像表示装置

Also Published As

Publication number Publication date
TWI313142B (en) 2009-08-01
JP4670870B2 (ja) 2011-04-13
CN101176006A (zh) 2008-05-07
KR20070118137A (ko) 2007-12-13
JPWO2006134888A1 (ja) 2009-01-08
WO2006134888A1 (ja) 2006-12-21
TW200644705A (en) 2006-12-16

Similar Documents

Publication Publication Date Title
CN101176006B (zh) Tft基板检查装置
US8920162B1 (en) Closed loop temperature heat up and control utilizing wafer-to-heater pedestal gap modulation
TWI555711B (zh) 玻璃模造系統及相關設備與方法
TWI381430B (zh) Light irradiation method
TWI824271B (zh) 粒子束檢測設備
US20060158207A1 (en) Method and apparatus for testing semiconductor wafers by means of a temperature-regulated chuck device
US20180299487A1 (en) Wafer inspection device and wafer inspection method
JP2017224608A (ja) 高処理能力の加熱イオン注入システムおよび方法
US9982338B2 (en) High-throughput system and method for post-implantation single wafer warm-up
US20050018196A1 (en) Measuring method and measuring apparatus of optical energy absorption ratio, and thermal processing apparatus
KR20170056187A (ko) 인터페이스 모듈 및 이를 포함하는 반도체 소자 테스트 장치
JPS63148623A (ja) 基板温度測定装置
KR102731818B1 (ko) 열처리 장치, 및, 열처리 방법
KR20240017028A (ko) 기판 처리 시스템 및 상태 감시 방법
KR102715109B1 (ko) 반도체 처리장치를 위한 열전대 내장 엔드 이펙터를 통한 웨이퍼 소크 온도 판독 및 제어
DE112015000714B4 (de) Halbleiterwaferinspektionsvorrichtung und Halbleiterwafer-Inspektionsverfahren
US8691676B2 (en) Substrate heat treating apparatus, temperature control method of substrate heat treating apparatus, manufacturing method of semiconductor device, temperature control program of substrate heat treating apparatus, and recording medium
KR20210157870A (ko) 가열 장치, 기판 처리 시스템 및 가열 방법
JP4863163B2 (ja) Ｔｆｔ基板検査装置
JP2008170179A (ja) オートハンドラ
KR101373489B1 (ko) 테스트 핸들러
JP2009049140A (ja) 熱処理装置
KR102225424B1 (ko) 열처리 방법 및 열처리 장치
KR102662419B1 (ko) 온도 조절 모듈 및 이를 포함하는 테스트 핸들러
KR101554931B1 (ko) 유도가열을 이용한 프로브카드 예열장치 및 이를 이용한 프로브 검사장치

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20100901

Termination date: 20110613