CN101149484A - Fixed element light splitter for co-shaping x-ray fluorescence spectrometer - Google Patents
Fixed element light splitter for co-shaping x-ray fluorescence spectrometer Download PDFInfo
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- CN101149484A CN101149484A CNA200610113279XA CN200610113279A CN101149484A CN 101149484 A CN101149484 A CN 101149484A CN A200610113279X A CNA200610113279X A CN A200610113279XA CN 200610113279 A CN200610113279 A CN 200610113279A CN 101149484 A CN101149484 A CN 101149484A
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Abstract
This invention discloses a kind of fixed element light splitter that is used to approve X-fluorescent spectrometer. It is made up of an entrance duct unit, a spectroscopical box unit that is connected to the entrance duct unit's tail and an emergent duct unit that is connected to the spectroscopical box unit. Comparing with the well-known fixed element light splitter, this invention has a curved crystal diffraction light path and a flat crystal diffraction light path at its interior. So this invention can improve the element species that each light splitter determines at the same time from one kind to two kinds of elements in the case of the same physical dimension of the light splitter. This makes the element species that uses device to determine increase for times after adopting this invention in the case of not increasing the diameter of vacuum measuring house and the number of light splitter, and then it can increase the applied range of the device. On the other hand, in the case of determining the specie of the needed element, this invention can decrease the number of light splitter for times and the diameter of vacuum measuring house. Then it can predigest the structure of device and reduce the factory cost in a large range.
Description
Technical field
The present invention relates to the measuring equipment field, particularly relate to improvement X fluorescence spectrum analyzer fixed element light splitter.
Background technology
The vacuum measurement chamber periphery of multielement measurement type simultaneously X fluorescence spectrophotometer (hereinafter to be referred as co-shaping WDXRFS) has been installed several fixed element light splitters.Each adopts the element light splitter of curved crystals (hereinafter to be referred as the bent crystal), is made up of entrance slit pipe assembly, the light-splitting box assembly that is connected with entrance slit pipe assembly afterbody, the exit slit pipe assembly that is connected with the light-splitting box assembly.Sent separately characteristic X-ray by the different elements in the sample after the x-ray bombardment of X-ray pipe, its wavelength is different.Slit and the pipe internal channel of these X ray by incident ray slit tube end projects on the analyzing crystal surface in the light-splitting box assembly with the θ angle, wherein have only wavelength X to meet the Bragg formula: (n is the diffraction number of times to n λ=2dSin θ, be generally 1, d is an interplanar distance) the elemental characteristic X ray could be reflected by analyzing crystal and focus on same θ angle, and the slit by exit slit pipe assembly end to enter detector detected.Get final product the content of this element in the calculation sample according to the intensity of detected this kind elemental characteristic X ray.The characteristic X-ray of other element is not absorbed by analyzing crystal and exit slit tube wall because of its wavelength meets the Bragg formula.
In the known fixed element road bent crystal optical splitter bent crystal can only be installed, and have only a single channel light path, can only measure a certain fixing element.Therefore, the element kind that can measure simultaneously of co-shaping WDXRFS is identical with the optical splitter quantity of being installed.Because the restriction of installing space, the optical splitter limited amount that can install at the certain vacuum measurement chamber periphery of diameter, so the element kind that instrument can be measured simultaneously is restricted.Up to the present, 12 known single bent crystal element optical splitters can be installed at most in the small-sized multiple tracks WDXRFS instrument of existing power≤200W, promptly can measure 12 kinds of elements simultaneously at most.In order to increase the kind that to measure element, have to strengthen the diameter of vacuum measurement chamber, cause sample to the optical path length of crystal to increase, because detected X ray intensity and optical path length are inversely proportional to, therefore in order to guarantee the analysis precision of element, must strengthen the power of instrument.Nonetheless, in the large-scale multiple tracks WDXRFS instrument of power 〉=2000W, about 30 known single bent crystal optical splitters can only be installed at most also, and seem very crowded in the instrument this moment, install, debug and keep in repair all quite difficulty.
Summary of the invention
The purpose of this invention is to provide a kind of fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer, it can measure two kinds of elements simultaneously, thereby the number of elements that makes the volume of co-shaping WDXRFS instrument reduce, measure increases.
For achieving the above object, the present invention takes technical scheme: a kind of fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer, and it includes incident pipe assembly, the light-splitting box assembly that is connected with incident pipe assembly afterbody, the exit slit pipe assembly that is connected with the light-splitting box assembly and outgoing collimation organ pipe assembly;
Described incident pipe assembly includes the body of incident passage, the diaphragm board that is installed in the slit width governor motion of this incident passage head and is installed in this incident passage afterbody; The slit plate that described exit slit pipe assembly includes the body of exit channel and is installed in this exit channel head, the afterbody of this exit slit pipe assembly is connected with the box body of described light-splitting box assembly; The bent crystal assembly that described light-splitting box assembly includes box body and is installed in this box body inside, this bent crystal assembly includes the bent crystal, crystal carriage and incident angle governor motion; The optical axis of described incident passage is by the center of the bent crystal, and its incident angle equals the angle of diffraction of tested element, and the optical axis of described exit channel is by the center of the bent crystal, and its emergence angle equals incident angle;
Two incident passages are arranged in the body of described incident pipe assembly, and wherein one is the entrance slit passage, and another is the incident collimator channel, and collimating apparatus is installed in this passage one time; The afterbody of the body of described incident pipe assembly is connected with box body;
Described light-splitting box assembly also connects an outgoing collimating apparatus pipe assembly, and it includes body and is installed in the interior secondary collimator of body, and the afterbody of this outgoing collimation organ pipe body is connected with the box body of light-splitting box assembly;
One cover optical flat assembly also is installed in the box body of described light-splitting box assembly, and it includes optical flat, crystal carriage and incident angle governor motion; Entrance slit passage in described bent crystal assembly and the incident pipe assembly and exit slit pipe assembly constitute a bent crystal optical diffraction, and incident collimator channel in described optical flat assembly and the incident pipe assembly and outgoing collimation organ pipe assembly constitute an optical flat optical diffraction.
The incident light axis of incident collimator channel and the angle between the body central axis are 2～4 degree in the above-mentioned fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer, described incident pipe assembly body, and the incident angle of this road incident light axis is θ
1, θ
1Be the angle of diffraction of first kind of tested element, the emergence angle of outgoing collimation organ pipe assembly equals θ
1Angle between the incident light axis of described entrance slit passage and the body central axis is 4～6 degree, and the incident angle of this road incident light axis is θ
2, θ
2Be the angle of diffraction of second kind of tested element, the emergence angle of exit slit pipe assembly equals θ
2
The above-mentioned fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer, a described collimating apparatus and secondary collimator are the parallel-plate collimating apparatus.
The above-mentioned fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer, the end of the end of described exit slit pipe body and outgoing collimation organ pipe body is respectively arranged with an X-ray detector.Specifically, described X-ray detector is following a kind of: flow gas proportional counter, closed proportional counter or scintillation counter.
The above-mentioned fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer, the axle line of the body of described incident pipe assembly is by the center of box body.
The above-mentioned fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer, the described bent crystal are Johannson type, Johann type or logarithm spiral camber type; The center of this bent crystal to the distance between incident, the exit slit is 130～210mm.
The present invention is owing to take above design, and it has the following advantages:
The present invention compares with known fixed element light splitter, under the identical situation of optical splitter physical dimension, it is two kinds of elements that the element kind that the present invention can measure each optical splitter is simultaneously become by original a kind of element, this makes and does not strengthen in co-shaping WDXRFS instrument under the situation of vacuum measurement chamber diameter and increase optical splitter quantity, the element kind that instrument can be measured simultaneously behind employing the present invention is multiplied, thereby enlarges the range of application of instrument greatly.
On the other hand, under the certain situation of the element kind of required mensuration, can reduce the quantity of optical splitter at double and reduce the diameter of vacuum measurement chamber behind employing the present invention, thereby apparatus structure is greatly simplified, reduce manufacturing cost significantly; The fluorescent X-ray utilization ratio is significantly improved, and reduce the X-ray tube power.
Three, the price of optical flat is low, helps reducing cost.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Embodiment
As shown in Figure 1, be a kind of fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer provided by the present invention, it includes incident pipe assembly 1, the light-splitting box assembly 2 that is connected with incident pipe assembly afterbody, the exit slit pipe assembly 3 that is connected with the light-splitting box assembly and outgoing collimation organ pipe assembly 5;
Incident pipe assembly 1 includes the body 12 of incident passage 11, the diaphragm board 14 that is installed in the slit width governor motion 13 of this incident passage head and is installed in this incident passage afterbody; The slit plate 33 that exit slit pipe assembly 3 includes the body 32 of exit channel 31 and is installed in this exit channel head, the afterbody of this exit slit pipe assembly 3 is connected with the box body 21 of light-splitting box assembly; The bent crystal assembly 4 that light-splitting box assembly 2 includes box body 21 and is installed in this box body inside, this bent crystal assembly 4 includes the bent crystal 41, crystal carriage 42 and incident angle governor motion 43;
Two incident passages 11 are arranged in the body 12 of incident pipe assembly 1, and wherein one is entrance slit passage 111, and another is an incident collimator channel 112, and collimating apparatus 15 is installed one time in this incident passage 112; The afterbody of the body 12 of incident pipe assembly 1 is connected with box body 21, and its central axis is by the center of box body 21;
Light-splitting box assembly 2 also connects an outgoing collimating apparatus pipe assembly 5, and it includes body 51 and the secondary collimator 52 that is installed in the body 51, and the afterbody of this outgoing collimation organ pipe body 51 is connected with the box body 21 of light-splitting box assembly;
In addition, a cover optical flat assembly 6 is installed also in the box body 21 of light-splitting box assembly, it includes optical flat 61, crystal carriage 62 and incident angle governor motion 63; Entrance slit passage 111 in bent crystal assembly 5 and the incident pipe assembly 1 and exit slit pipe assembly 3 constitute a bent crystal optical diffraction, and incident collimator channel 112 in optical flat assembly 6 and the incident pipe assembly 1 and outgoing collimation organ pipe assembly 5 constitute an optical flat optical diffraction.
Among the present invention, in order to reduce the size of light-splitting box assembly 2, the incident light axis of incident collimator channel 112 and the angle β between the body central axis in the incident pipe assembly body 1
1Generally can be 2～4 degree, the incident angle of this road incident light axis is θ
1, θ
1Be the angle of diffraction of first kind of tested element, the emergence angle of outgoing collimation organ pipe assembly 5 equals θ
1Angle β between the incident light axis of entrance slit passage 111 and the body central axis
2Generally can be 4～6 degree, the incident angle of this road incident light axis is θ
2, θ
2Be the angle of diffraction of second kind of tested element, the emergence angle of exit slit pipe assembly 3 equals θ
2
In the foregoing description, a mentioned collimating apparatus 15 and secondary collimator 52 are the parallel-plate collimating apparatus.Specifically, can to adopt the patent No. be the Chinese patent " direct insertion parallel-plate collimating apparatus " of ZL200520000267.7 to this parallel-plate collimating apparatus.
In addition, the end of the end of above-mentioned exit slit pipe body 32 and outgoing collimation organ pipe body 51 is respectively arranged with an X-ray detector 34,53, and this X-ray detector 34,53 can be flow gas proportional counter, closed proportional counter or scintillation counter.
In addition, the above-mentioned bent crystal 41 is Johannson type, Johann type or logarithm spiral camber type; The center of this bent crystal 41 to the distance between incident, the exit slit is 130～210mm.
Below, lift a specific embodiment and describe:
A flat curved twin crystal optical splitter that is used to measure Si and two kinds of elements of S, in this optical splitter, the incident light axis of incident passage 112 and the angle β between body 12 central axis in the described incident pipe assembly body 12
1Be 2.95 degree, the incident angle of this road incident light axis is θ
1=72.29 degree.Angle β between the incident light axis of described entrance slit passage 111 and body 12 central axis
2Be 4.9 degree, the incident angle of this road incident light axis is θ
2=55.35 degree.The center of the bent crystal 41 to the distance between incident, the exit slit is 170mm.The internal diameter of the box body 21 of light-splitting box assembly is φ 104mm, and external diameter is φ 124mm.
Claims (10)
1. fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer is characterized in that: it includes incident pipe assembly, the light-splitting box assembly that is connected with incident pipe assembly afterbody, the exit slit pipe assembly that is connected with the light-splitting box assembly and outgoing collimation organ pipe assembly;
Described incident pipe assembly includes the body of incident passage, the diaphragm board that is installed in the slit width governor motion of this incident passage head and is installed in this incident passage afterbody; The slit plate that described exit slit pipe assembly includes the body of exit channel and is installed in this exit channel head, the afterbody of this exit slit pipe assembly is connected with the box body of described light-splitting box assembly; The bent crystal assembly that described light-splitting box assembly includes box body and is installed in this box body inside, this bent crystal assembly includes the bent crystal, crystal carriage and incident angle governor motion;
Two incident passages are arranged in the body of described incident pipe assembly, and wherein one is the entrance slit passage, and another is the incident collimator channel, and collimating apparatus is installed one time in this incident collimator channel; The afterbody of the body of described incident pipe assembly is connected with box body;
Described light-splitting box assembly also is connected with an outgoing collimating apparatus pipe assembly, and it includes body and is installed in the interior secondary collimator of body, and the afterbody of this outgoing collimation organ pipe body is connected with the box body of light-splitting box assembly;
One cover optical flat assembly also is installed in the box body of described light-splitting box assembly, and it includes optical flat, crystal carriage and incident angle governor motion; Entrance slit passage in described bent crystal assembly and the incident pipe assembly and exit slit pipe assembly constitute a bent crystal optical diffraction, and incident collimator channel in described optical flat assembly and the incident pipe assembly and outgoing collimation organ pipe assembly constitute an optical flat optical diffraction.
2. the fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer according to claim 1, it is characterized in that: the incident light axis of incident collimator channel and the angle between the body central axis are 2～4 degree in the described incident pipe assembly body, and the incident angle of this road incident light axis is θ
1, θ
1Be the angle of diffraction of first kind of tested element, the emergence angle of outgoing collimation organ pipe assembly equals θ
1Angle between the incident light axis of described entrance slit passage and the body central axis is 4～6 degree, and the incident angle of this road incident light axis is θ
2, θ
2Be the angle of diffraction of second kind of tested element, the emergence angle of exit slit pipe assembly equals θ
2
3. the fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer according to claim 1 is characterized in that: a described collimating apparatus and secondary collimator are the parallel-plate collimating apparatus.
4. the fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer according to claim 2 is characterized in that: a described collimating apparatus and secondary collimator are the parallel-plate collimating apparatus.
5. according to claim 1 or 2 or the 3 or 4 described fixed element light splitters that are used for co-shaping x-ray fluorescence spectrometer, it is characterized in that: the end of the end of described exit slit pipe body and outgoing collimation organ pipe body is respectively arranged with an X-ray detector.
6. the fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer according to claim 5 is characterized in that: described X-ray detector is following a kind of: flow gas proportional counter, closed proportional counter or scintillation counter.
7. according to claim 1 or 2 or 3 or the 4 or 6 described fixed element light splitters that are used for co-shaping x-ray fluorescence spectrometer, it is characterized in that: the axle line of the body of described incident pipe assembly is by the center of box body.
8. the fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer according to claim 5 is characterized in that: the axle line of the body of described incident pipe assembly is by the center of box body.
9. according to claim 1 or 2 or 3 or 4 or the 6 or 8 described fixed element light splitters that are used for co-shaping x-ray fluorescence spectrometer, it is characterized in that: the described bent crystal is Johannson type, Johann type or logarithm spiral camber type; The center of this bent crystal to the distance between incident, the exit slit is 130～210mm.
10. the fixed element light splitter that is used for co-shaping x-ray fluorescence spectrometer according to claim 7 is characterized in that: the described bent crystal is Johannson type, Johann type or logarithm spiral camber type; The center of this bent crystal to the distance between incident, the exit slit is 130～210mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200610113279XA CN101149484A (en) | 2006-09-21 | 2006-09-21 | Fixed element light splitter for co-shaping x-ray fluorescence spectrometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200610113279XA CN101149484A (en) | 2006-09-21 | 2006-09-21 | Fixed element light splitter for co-shaping x-ray fluorescence spectrometer |
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| CN101149484A true CN101149484A (en) | 2008-03-26 |
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|---|---|---|---|
| CNA200610113279XA Pending CN101149484A (en) | 2006-09-21 | 2006-09-21 | Fixed element light splitter for co-shaping x-ray fluorescence spectrometer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101776620A (en) * | 2009-05-11 | 2010-07-14 | 中国建筑材料检验认证中心 | Bent crystal light splitting device of wavelength dispersion X-fluorescence spectrograph and operating method thereof |
| CN105659027A (en) * | 2013-07-18 | 2016-06-08 | 夸克星有限责任公司 | Illumination device in which source light injection is non-parallel to device's optical axis |
| CN106855523A (en) * | 2015-12-08 | 2017-06-16 | 株式会社岛津制作所 | X-ray spectrum analysis equipment and elemental analysis method |
-
2006
- 2006-09-21 CN CNA200610113279XA patent/CN101149484A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101776620A (en) * | 2009-05-11 | 2010-07-14 | 中国建筑材料检验认证中心 | Bent crystal light splitting device of wavelength dispersion X-fluorescence spectrograph and operating method thereof |
| CN101776620B (en) * | 2009-05-11 | 2014-06-25 | 中国建材检验认证集团股份有限公司 | Bent crystal light splitting device of wavelength dispersion X-fluorescence spectrograph and operating method thereof |
| CN105659027A (en) * | 2013-07-18 | 2016-06-08 | 夸克星有限责任公司 | Illumination device in which source light injection is non-parallel to device's optical axis |
| CN105659027B (en) * | 2013-07-18 | 2018-03-13 | 夸克星有限责任公司 | Source light injection is not parallel to the lighting device of device optical axis |
| CN106855523A (en) * | 2015-12-08 | 2017-06-16 | 株式会社岛津制作所 | X-ray spectrum analysis equipment and elemental analysis method |
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