CN201464390U - X fluorescence spectrometer with flat and bent double-crystal fixed element road optical splitters - Google Patents
X fluorescence spectrometer with flat and bent double-crystal fixed element road optical splitters Download PDFInfo
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- CN201464390U CN201464390U CN2009201105749U CN200920110574U CN201464390U CN 201464390 U CN201464390 U CN 201464390U CN 2009201105749 U CN2009201105749 U CN 2009201105749U CN 200920110574 U CN200920110574 U CN 200920110574U CN 201464390 U CN201464390 U CN 201464390U
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Abstract
The utility model discloses an X fluorescence spectrometer with flat and bent double-crystal fixed element road optical splitters, which comprises an X-ray tube, an X-ray generator, a plurality of fixed element road optical splitters, a vacuum measurement chamber, a vacuum pumping system, an automatic control system, an X-ray detector, an element characteristic X-ray spectral peak detecting device and an upper PC, wherein a bent crystal diffraction optical path and a flat crystal diffraction optical path are arranged in each fixed element road optical splitter, so the size of the optical splitter is not changed and all the optical splitters can determine two elements simultaneously, so that the types of elements that an instrument can determine simultaneously are doubled without increasing the diameter of the vacuum measurement chamber and the number of optical splitters, so as to expand the scope of application of the instrument; and when the type of the element to be determined is fixed, the number of the optical splitter and the diameter of the vacuum measurement chamber can be doubly reduced, so as to greatly simplify the structure of the instrument, and reduce the manufacturing cost.
Description
Technical field
The utility model relates to the measuring equipment field, is specifically related to the X fluorescence spectrum analyzer, particularly relates to a kind of X fluorescence spectrum analyzer with flat curved twin crystal fixed element light splitter.
Background technology
In the existing wavelength dispersion multielement simultaneous determination type X fluorescence spectrum analyzer (being called for short co-shaping WDXRFS), in general the vacuum measurement chamber around a plurality of fixed elements road (be called for short element road) is installed, the characteristic X-ray in each element road is detected by detector after the optical splitter beam split, the pulse signal that produces is after amplifier amplifies, pulse height will distribute according to a peak-shaped curve, promptly be called the characteristic X-ray spectrum peak (being called for short the element spectral peak) of this element.Must carefully regulate spectrum peak-to-peak position during instrument testing, and make spectrum peak resolution reach best, set region of interest then, calculate the spectrum peak area (pulsimeter digit rate) in the district, promptly represent the intensity of this elemental characteristic X ray, be directly proportional with this constituent content, promptly can carry out quantitative test whereby constituent content.
Existing co-shaping WDXRFS, periphery has been installed several fixed element light splitters in the vacuum measurement chamber.Each adopts the element light splitter of curved crystals (hereinafter to be referred as the bent crystal), is made up of entrance slit pipe assembly, the light-splitting box assembly that is connected with entrance slit pipe assembly afterbody, the exit slit pipe assembly that is connected with the light-splitting box assembly.Sent separately characteristic X-ray by the different elements in the sample after the x-ray bombardment of X-ray pipe, its wavelength is different.Slit and the pipe internal channel of these X ray by incident ray slit tube end projects on the analyzing crystal surface in the light-splitting box assembly with the θ angle, wherein have only wavelength X to meet the Bragg formula: (n is the diffraction number of times to n λ=2dSin θ, be generally 1, d is an interplanar distance) the elemental characteristic X ray could be reflected by analyzing crystal and focus on same θ angle, and the slit by exit slit pipe assembly end to enter detector detected.Get final product the content of this element in the calculation sample according to the intensity of detected this kind elemental characteristic X ray.The characteristic X-ray of other element is not absorbed by analyzing crystal and exit slit tube wall because of its wavelength meets the Bragg formula.
A bent crystal can only be installed in the known fixed element light splitter, and have only a single channel light path, can only measure a certain fixing element.Therefore, the element kind that can measure simultaneously of co-shaping WDXRFS is identical with the optical splitter quantity of being installed.Because the restriction of installing space, the optical splitter limited amount that can install at the certain vacuum measurement chamber periphery of diameter, so the element kind that instrument can be measured simultaneously is restricted.Up to the present, 12 known single bent crystal element optical splitters can be installed at most in the small-sized multiple tracks WDXRFS instrument of existing power≤200W, promptly can measure 12 kinds of elements simultaneously at most.In order to increase the kind that to measure element, have to strengthen the diameter of vacuum measurement chamber, cause sample to the optical path length of crystal to increase, because detected X ray intensity and optical path length are inversely proportional to, therefore in order to guarantee the analysis precision of element, must strengthen the power of instrument.Nonetheless, in the large-scale multiple tracks WDXRFS instrument of power 〉=2000W, about 30 known single bent crystal optical splitters can only be installed at most also, and seem very crowded in the instrument this moment, install, debug and keep in repair all quite difficulty.
The utility model content
The purpose of this utility model provides the number of elements that a kind of volume reduces, measures and increases, has the X fluorescence spectrum analyzer with flat curved twin crystal fixed element light splitter that can measure two kinds of elements simultaneously.
For achieving the above object, the technical scheme that the utility model is taked is: a kind of X fluorescence spectrum analyzer with flat curved twin crystal fixed element light splitter, it comprises X-ray pipe and X-ray generator, several fixed element light splitters, vacuum measurement chamber and pumped vacuum systems, automatic control system, detector, elemental characteristic X-ray spectrum peak pick-up unit and upper PC computing machine, be characterized in: a kind of X fluorescence spectrum analyzer with flat curved twin crystal fixed element light splitter, it comprises X-ray pipe and X-ray generator, several fixed element light splitters, vacuum measurement chamber and pumped vacuum systems, automatic control system, X-ray detector, elemental characteristic X-ray spectrum peak pick-up unit and upper PC computing machine is characterized in that: described fixed element light splitter includes incident pipe assembly, the light-splitting box assembly that is connected with incident pipe assembly afterbody, exit slit pipe assembly that is connected with the light-splitting box assembly and outgoing collimation organ pipe assembly;
Described incident pipe assembly includes the body of incident passage, the diaphragm board that is installed in the slit width governor motion of this incident passage head and is installed in this incident passage afterbody; The slit plate that described exit slit pipe assembly includes the body of exit channel and is installed in this exit channel head, the afterbody of this exit slit pipe assembly is connected with the box body of described light-splitting box assembly; The bent crystal assembly that described light-splitting box assembly includes box body and is installed in this box body inside, this bent crystal assembly includes the bent crystal, crystal carriage and incident angle governor motion;
Two incident passages are arranged in the body of described incident pipe assembly, and wherein one is the entrance slit passage, and another is the incident collimator channel, and collimating apparatus is installed one time in this incident collimator channel; The afterbody of the body of described incident pipe assembly is connected with box body;
Described light-splitting box assembly also is connected with an outgoing collimating apparatus pipe assembly, and it includes body and is installed in the interior secondary collimator of body, and the afterbody of this outgoing collimation organ pipe body is connected with the box body of light-splitting box assembly;
One cover optical flat assembly also is installed in the box body of described light-splitting box assembly, and it includes optical flat, crystal carriage and incident angle governor motion; Entrance slit passage in described bent crystal assembly and the incident pipe assembly and exit slit pipe assembly constitute a bent crystal optical diffraction, and incident collimator channel in described optical flat assembly and the incident pipe assembly and outgoing collimation organ pipe assembly constitute an optical flat optical diffraction.
In the described X fluorescence spectrum analyzer, the incident light axis of the interior incident collimator channel of incident pipe assembly body and the angle between the body central axis are 2～4 degree in the described fixed element light splitter, and the incident angle of this road incident light axis is θ
1, θ
1Be the angle of diffraction of first kind of tested element, the emergence angle of outgoing collimation organ pipe assembly equals θ
1Angle between the incident light axis of described entrance slit passage and the body central axis is 4～6 degree, and the incident angle of this road incident light axis is θ
2, θ
2Be the angle of diffraction of second kind of tested element, the emergence angle of exit slit pipe assembly equals θ
2
A described collimating apparatus and secondary collimator are the parallel-plate collimating apparatus.
The end of the end of described exit slit pipe body and outgoing collimation organ pipe body connects an X-ray detector respectively.Described X-ray detector is following a kind of: flow gas proportional counter, closed proportional counter or scintillation counter.
The axial line of the body of described incident pipe assembly is by the center of box body.
The described bent crystal is Johannson type, Johann type or logarithm spiral camber type; The center of this bent crystal to the distance between incident, the exit slit is 130～210mm.
Adopt above scheme, made up flat curved twin crystal fixed element light splitter in the utility model, compare with known fixed element light splitter, under the identical situation of optical splitter physical dimension, it is two kinds of elements that the element kind that each optical splitter can be measured is simultaneously become by original a kind of element, this makes the utility model co-shaping WDXRFS instrument not strengthen vacuum measurement chamber diameter and increase under the situation of optical splitter quantity, the element kind of Ce Dinging is multiplied simultaneously, thereby enlarges the range of application of instrument greatly.
On the other hand, under the certain situation of the element kind of required mensuration, can reduce the quantity and the diameter that reduces the vacuum measurement chamber of optical splitter behind the flat curved twin crystal fixed element light splitter of the utility model employing at double, thereby the utility model apparatus structure is greatly simplified, reduced manufacturing cost significantly; The fluorescent X-ray utilization ratio is significantly improved, and reduce the X-ray tube power.
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present utility model.
Fig. 2 is the structural representation of fixed element light splitter in the utility model.
Embodiment
The utility model proposes a kind of X fluorescence spectrophotometer with the fixed element light splitter that can measure two kinds of elements simultaneously.This X fluorescence spectrum analyzer one-piece construction as shown in Figure 1, it comprises the X-ray pipe that is installed in the cabinet and X-ray generator 101, vacuum measurement chamber 102, several automatic control system, elemental characteristic X-ray spectrum peak pick-up units 107 that are connected with the fixed element light splitter 104 of detector 105, are made of control circuit integrated circuit board 106 etc., and the pumped vacuum systems 103, the band display 108 that is electrically connected with automatic control system and pick-up unit 107 and the parts such as computing machine 100 of printer 109 that place outer and vacuum measurement chamber 102 connections of cabinet.
Complete machine parts composition and annexation and existing co-shaping WDXRFS are basic identical, and this paper will not give unnecessary details.
In the utility model, fixed element light splitter 104 adopts special flat curved twin crystal channel architecture design.As shown in Figure 2, this fixed element light splitter 104 includes incident pipe assembly 1, the light-splitting box assembly 2 that is connected with incident pipe assembly afterbody, the exit slit pipe assembly 3 that is connected with the light-splitting box assembly and outgoing collimation organ pipe assembly 5;
Incident pipe assembly 1 includes the body 12 of incident passage 11, the diaphragm board 14 that is installed in the slit width governor motion 13 of this incident passage head and is installed in this incident passage afterbody; The slit plate 33 that exit slit pipe assembly 3 includes the body 32 of exit channel 31 and is installed in this exit channel head, the afterbody of this exit slit pipe assembly 3 is connected with the box body 21 of light-splitting box assembly; The bent crystal assembly 4 that light-splitting box assembly 2 includes box body 21 and is installed in this box body inside, this bent crystal assembly 4 includes the bent crystal 41, crystal carriage 42 and incident angle governor motion 43;
Two incident passages 11 are arranged in the body 12 of incident pipe assembly 1, and wherein one is entrance slit passage 111, and another is an incident collimator channel 112, and collimating apparatus 15 is installed one time in this incident collimator channel 112; The afterbody of the body 12 of incident pipe assembly 1 is connected with box body 21, and its central axis is by the center of box body 21;
Light-splitting box assembly 2 also connects an outgoing collimating apparatus pipe assembly 5, and it includes body 51 and the secondary collimator 52 that is installed in the body 51, and the afterbody of this outgoing collimation organ pipe body 51 is connected with the box body 21 of light-splitting box assembly;
In addition, a cover optical flat assembly 6 is installed also in the box body 21 of light-splitting box assembly, it includes optical flat 61, crystal carriage 62 and incident angle governor motion 63.Entrance slit passage 111 in bent crystal assembly 4 and the incident pipe assembly 1 and exit slit pipe assembly 3 constitute a bent crystal optical diffraction, and incident collimator channel 112 in optical flat assembly 6 and the incident pipe assembly 1 and outgoing collimation organ pipe assembly 5 constitute an optical flat optical diffraction.
In the utility model, the end of exit slit pipe body 32 connects an X-ray detector 105, the end of outgoing collimation organ pipe body 51 connects another X-ray detector 105, this X-ray detector can be flow gas proportional counter, closed proportional counter or scintillation counter, and each X-ray detector all links to each other with elemental characteristic X-ray spectrum peak pick-up unit 107 signals in the complete machine.
In the utility model, in order to reduce the size of light-splitting box assembly 2, the incident light axis of incident collimator channel 112 and the angle β between the body central axis in the incident pipe assembly body 1
1Generally can be 2～4 degree, the incident angle of this road incident light axis is θ
1, θ
1Be the angle of diffraction of first kind of tested element, the emergence angle of outgoing collimation organ pipe assembly 5 equals θ
1Angle β between the incident light axis of entrance slit passage 111 and the body central axis
2Generally can be 4～6 degree, the incident angle of this road incident light axis is θ
2, θ
2Be the angle of diffraction of second kind of tested element, the emergence angle of exit slit pipe assembly 3 equals θ
2
In the foregoing description, a mentioned collimating apparatus 15 and secondary collimator 52 are the parallel-plate collimating apparatus.Specifically, can to adopt the patent No. be the Chinese patent " direct insertion parallel-plate collimating apparatus " of ZL200520000267.7 to this parallel-plate collimating apparatus.
In addition, the above-mentioned bent crystal 41 is Johannson type, Johann type or logarithm spiral camber type; The center of this bent crystal 41 to the distance between incident, the exit slit is 130～210mm.
Below, lift a specific embodiment and describe:
A flat curved twin crystal optical splitter that is used to measure Si and two kinds of elements of S, in this optical splitter, the incident light axis of incident passage 112 and the angle β between body 12 central axis in the described incident pipe assembly body 12
1Be 2.95 degree, the incident angle of this road incident light axis is θ
1=72.29 degree.Angle β between the incident light axis of described entrance slit passage 111 and body 12 central axis
2Be 4.9 degree, the incident angle of this road incident light axis is θ
2=55.35 degree.The center of the bent crystal 41 to the distance between incident, the exit slit is 170mm.The internal diameter of the box body 21 of light-splitting box assembly is φ 104mm, and external diameter is φ 124mm.
The fixed element light splitter 104 of above-mentioned design is assembled in the X fluorescence spectrum analyzer in the following manner, wherein: incident pipe assembly 1 Shen is gone in the vacuum measurement chamber 102, and by seal assembly 104 and 102 assemblies are tightly connected, the spectrum groupware connection of this instrument is finished.
Claims (10)
1. one kind has the flat X fluorescence spectrum analyzer of bending the twin crystal fixed element light splitter, it comprises X-ray pipe and X-ray generator, several fixed element light splitters, vacuum measurement chamber and pumped vacuum systems, automatic control system, X-ray detector, elemental characteristic X-ray spectrum peak pick-up unit and upper PC computing machine, it is characterized in that: described fixed element light splitter includes incident pipe assembly, the light-splitting box assembly that is connected with incident pipe assembly afterbody, the exit slit pipe assembly that is connected with the light-splitting box assembly and outgoing collimation organ pipe assembly;
Described incident pipe assembly includes the body of incident passage, the diaphragm board that is installed in the slit width governor motion of this incident passage head and is installed in this incident passage afterbody; The slit plate that described exit slit pipe assembly includes the body of exit channel and is installed in this exit channel head, the afterbody of this exit slit pipe assembly is connected with the box body of described light-splitting box assembly; The bent crystal assembly that described light-splitting box assembly includes box body and is installed in this box body inside, this bent crystal assembly includes the bent crystal, crystal carriage and incident angle governor motion;
Two incident passages are arranged in the body of described incident pipe assembly, and wherein one is the entrance slit passage, and another is the incident collimator channel, and collimating apparatus is installed one time in this incident collimator channel; The afterbody of the body of described incident pipe assembly is connected with box body;
Described light-splitting box assembly also is connected with an outgoing collimating apparatus pipe assembly, and it includes body and is installed in the interior secondary collimator of body, and the afterbody of this outgoing collimation organ pipe body is connected with the box body of light-splitting box assembly;
One cover optical flat assembly also is installed in the box body of described light-splitting box assembly, and it includes optical flat, crystal carriage and incident angle governor motion; Entrance slit passage in described bent crystal assembly and the incident pipe assembly and exit slit pipe assembly constitute a bent crystal optical diffraction, and incident collimator channel in described optical flat assembly and the incident pipe assembly and outgoing collimation organ pipe assembly constitute an optical flat optical diffraction.
2. X fluorescence spectrum analyzer according to claim 1, it is characterized in that: the incident light axis of the interior incident collimator channel of incident pipe assembly body and the angle between the body central axis are 2～4 degree in the described fixed element light splitter, and the incident angle of this road incident light axis is θ
1, θ
1Be the angle of diffraction of first kind of tested element, the emergence angle of outgoing collimation organ pipe assembly equals θ
1Angle between the incident light axis of described entrance slit passage and the body central axis is 4～6 degree, and the incident angle of this road incident light axis is θ
2, θ
2Be the angle of diffraction of second kind of tested element, the emergence angle of exit slit pipe assembly equals θ
2
3. X fluorescence spectrum analyzer according to claim 1 is characterized in that: a described collimating apparatus and secondary collimator are the parallel-plate collimating apparatus.
4. X fluorescence spectrum analyzer according to claim 2 is characterized in that: a described collimating apparatus and secondary collimator are the parallel-plate collimating apparatus.
5. according to claim 1 or 2 or 3 or 4 described X fluorescence spectrum analyzers, it is characterized in that: described X-ray detector is two, and the end of the end of exit slit pipe body and outgoing collimation organ pipe body connects an X-ray detector respectively.
6. X fluorescence spectrum analyzer according to claim 5 is characterized in that: described X-ray detector is following a kind of: flow gas proportional counter, closed proportional counter or scintillation counter.
7. according to claim 1 or 2 or 3 or 4 described X fluorescence spectrum analyzers, it is characterized in that: the axial line of the body of described incident pipe assembly is by the center of box body.
8. the fixed element light splitter that is used for the X fluorescence spectrum analyzer according to claim 5 is characterized in that: the axial line of the body of described incident pipe assembly is by the center of box body.
9. according to claim 1 or 2 or 3 or 4 described X fluorescence spectrum analyzers, it is characterized in that: the described bent crystal is Johannson type, Johann type or logarithm spiral camber type; The center of this bent crystal to the distance between incident, the exit slit is 130～210mm.
10. X fluorescence spectrum analyzer according to claim 7 is characterized in that: the described bent crystal is Johannson type, Johann type or logarithm spiral camber type; The center of this bent crystal to the distance between incident, the exit slit is 130～210mm.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201105749U CN201464390U (en) | 2009-07-31 | 2009-07-31 | X fluorescence spectrometer with flat and bent double-crystal fixed element road optical splitters |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009201105749U CN201464390U (en) | 2009-07-31 | 2009-07-31 | X fluorescence spectrometer with flat and bent double-crystal fixed element road optical splitters |
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| CN201464390U true CN201464390U (en) | 2010-05-12 |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US10207296B2 (en) | 2015-07-16 | 2019-02-19 | UHV Technologies, Inc. | Material sorting system |
| US10625304B2 (en) | 2017-04-26 | 2020-04-21 | UHV Technologies, Inc. | Recycling coins from scrap |
| US10710119B2 (en) | 2016-07-18 | 2020-07-14 | UHV Technologies, Inc. | Material sorting using a vision system |
| US10722922B2 (en) | 2015-07-16 | 2020-07-28 | UHV Technologies, Inc. | Sorting cast and wrought aluminum |
| US10823687B2 (en) | 2015-08-03 | 2020-11-03 | UHV Technologies, Inc. | Metal analysis during pharmaceutical manufacturing |
| US11278937B2 (en) | 2015-07-16 | 2022-03-22 | Sortera Alloys, Inc. | Multiple stage sorting |
| US11964304B2 (en) | 2015-07-16 | 2024-04-23 | Sortera Technologies, Inc. | Sorting between metal alloys |
| US11969764B2 (en) | 2016-07-18 | 2024-04-30 | Sortera Technologies, Inc. | Sorting of plastics |
-
2009
- 2009-07-31 CN CN2009201105749U patent/CN201464390U/en not_active Expired - Lifetime
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10207296B2 (en) | 2015-07-16 | 2019-02-19 | UHV Technologies, Inc. | Material sorting system |
| US10722922B2 (en) | 2015-07-16 | 2020-07-28 | UHV Technologies, Inc. | Sorting cast and wrought aluminum |
| US11278937B2 (en) | 2015-07-16 | 2022-03-22 | Sortera Alloys, Inc. | Multiple stage sorting |
| US11471916B2 (en) | 2015-07-16 | 2022-10-18 | Sortera Alloys, Inc. | Metal sorter |
| US11964304B2 (en) | 2015-07-16 | 2024-04-23 | Sortera Technologies, Inc. | Sorting between metal alloys |
| US11975365B2 (en) | 2015-07-16 | 2024-05-07 | Sortera Technologies, Inc. | Computer program product for classifying materials |
| US10823687B2 (en) | 2015-08-03 | 2020-11-03 | UHV Technologies, Inc. | Metal analysis during pharmaceutical manufacturing |
| US10710119B2 (en) | 2016-07-18 | 2020-07-14 | UHV Technologies, Inc. | Material sorting using a vision system |
| US11969764B2 (en) | 2016-07-18 | 2024-04-30 | Sortera Technologies, Inc. | Sorting of plastics |
| US10625304B2 (en) | 2017-04-26 | 2020-04-21 | UHV Technologies, Inc. | Recycling coins from scrap |
| US11260426B2 (en) | 2017-04-26 | 2022-03-01 | Sortera Alloys, hic. | Identifying coins from scrap |
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Granted publication date: 20100512 |
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| CX01 | Expiry of patent term |