CN102621063A - Small-size oxygen measuring device based on porous material gas cell - Google Patents
Small-size oxygen measuring device based on porous material gas cell Download PDFInfo
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- CN102621063A CN102621063A CN2012100551039A CN201210055103A CN102621063A CN 102621063 A CN102621063 A CN 102621063A CN 2012100551039 A CN2012100551039 A CN 2012100551039A CN 201210055103 A CN201210055103 A CN 201210055103A CN 102621063 A CN102621063 A CN 102621063A
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- gas cell
- porosint
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- 239000007789 gas Substances 0.000 title claims abstract description 75
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 239000001301 oxygen Substances 0.000 title claims abstract description 37
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 37
- 239000011148 porous material Substances 0.000 title claims abstract description 10
- 238000005259 measurement Methods 0.000 claims abstract description 31
- 239000013307 optical fiber Substances 0.000 claims abstract description 13
- 239000000835 fiber Substances 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 4
- 238000002834 transmittance Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000000041 tunable diode laser absorption spectroscopy Methods 0.000 abstract description 6
- 230000010354 integration Effects 0.000 abstract description 2
- 238000010521 absorption reaction Methods 0.000 description 7
- 239000000523 sample Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
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Abstract
The invention provides a small-size oxygen measuring device based on a porous material gas cell, belongs to the field of oxygen measurement, and aims at solving the problems that miniaturization of a single device and integration of a multi-component and multi-point measuring system are difficult to carry out as a large-volume gas cell is adopted by an existing oxygen measuring instrument based on tunable diode laser absorption spectroscopy. According to the small-size oxygen measuring device, an output end of a signal acquisition controller is connected with an input end of a diode laser, output light of the diode laser enters an optical fiber by an optical fiber coupler, light output by the optical fiber is output by a beam collimator and enters to the porous material gas cell and then enters a detector by laser beams in the porous material gas cell, an electric signal output end of the detector is connected with an input end of amplifier, an output end of the amplifier is connected with an input end of a power divider, and the two output ends of the power divider are both connected with an input end of the signal acquisition controller by a phase lock. The small-size oxygen measuring device is used for measuring the concentration of oxygen.
Description
Technical field
The present invention relates to small-sized oxygen measurement mechanism, belong to the oxygen measurement field based on the porosint gas cell.
Background technology
The instrument that is widely used in the oxygen measurement field at present is based on the zirconia oxygen analyser of the principles of chemistry.Yet the kind technology belongs to contact type measurement, and phenomenons such as saturated poisoning appear in sniffer easily, influences the accuracy of measurement result, and the sensing probe corrosion-vulnerable, makes the Acceptable life of instrument generally be no more than 2 years.By contrast, the advantage that has noncontact and long service life based on the oxygen measurement set of laser spectrum tech.Especially the oxygen measurement system based on tunable diode laser absorption spectroscopy technology (TDLAS) has advantage highly sensitive, low energy consumption especially.Although TDLAS has dwindled the volume of light-source system owing to adopted the little diode laser light source of volume, the gas cell length that is used for load sample gas is generally all bigger, could guarantee that enough absorption light paths are realized accurately, quantitative measurment.The volume of gas cell becomes present based on one of technological main bottleneck of oxygen measurement equipment miniaturization of TDLAS, and the volume of gas cell greatly also is unfavorable in the multicomponent gas detection system, perhaps implementing the integrated of oxygen measurement device in the multiple spot oxygen measurement system simultaneously.
Summary of the invention
The present invention seeks to provides a kind of small-sized oxygen measurement mechanism based on the porosint gas cell in order to solve existing oxygen measurement set based on tunable diode laser absorption spectroscopy technology because the big volumes of gas of employing pond is difficult to carry out the problem of single device miniaturization and polycomponent, multimetering system integration.
Small-sized oxygen measurement mechanism based on the porosint gas cell according to the invention; It comprises signal acquisition controller, diode laser, fiber coupler, optical fiber, beam collimation device, porosint gas cell, detector, amplifier, power splitter, first phase locking unit and second phase locking unit
The output terminal of signal acquisition controller links to each other with the input end of diode laser; The light output end of diode laser links to each other with the input end of fiber coupler; The output terminal of fiber coupler links to each other with the input end of optical fiber; The output terminal of optical fiber links to each other with the input end of beam collimation device, and the output terminal of beam collimation device is launched parallel laser beam and is incident to the porosint gas cell, and the laser beam that sees through the porosint gas cell is incident to detector; The electrical signal of detector links to each other with amplifier input terminal; The output terminal of amplifier links to each other with the input end of power splitter, and first output terminal of power splitter links to each other with the input end of first phase locking unit, and second output terminal of power splitter links to each other with the input end of second phase locking unit; The output terminal of first phase locking unit links to each other with first signal input part of signal acquisition controller, and the output terminal of second phase locking unit links to each other with the secondary signal input end of signal acquisition controller.
Advantage of the present invention:
1. adopt porosint as the gas cell that carries tested gas with strong scattering property; Constantly be scattered in the microstructure of laser in scattering medium; Improved the probability that produces resonance absorption with tested gas greatly; Can in the gas cell of centimeter scale magnitude, obtain effective absorption light path of rice magnitude, compare with traditional oxygen measurement instrument, under the level of equal measuring accuracy based on the laser absorption spectrum technology; The volume of gas bearing part can reduce two one magnitude, makes the miniaturization more of whole oxygen measurement system.
2. the small size gas cell has improved the replacing speed of testing sample gas, reduces to second-time from tens traditional second-times, has significantly improved the measurement response time of total system.
3. in the structure that carries out multiple spot oxygen measurement system; The data of each measurement point are done the control and the processing of unified standard by the central signal control processing system; Adopt device of the present invention only to need number according to how many corresponding increase gas cells of measurement point; But the volume increase to entire system is very little, can improve the integrated degree of total system greatly.
Description of drawings
Fig. 1 is the small-sized oxygen measurement mechanism synoptic diagram based on the porosint gas cell;
Fig. 2 is the structural representation of porosint gas cell;
Fig. 3 is the side view of Fig. 2.
Embodiment
Embodiment one: this embodiment is described below in conjunction with Fig. 1; The said small-sized oxygen measurement mechanism of this embodiment based on the porosint gas cell; It comprises signal acquisition controller 1, diode laser 2, fiber coupler 3, optical fiber 4, beam collimation device 5, porosint gas cell 6, detector 7, amplifier 8, power splitter 9, first phase locking unit 10 and second phase locking unit 11
The output terminal of signal acquisition controller 1 links to each other with the input end of diode laser 2; The light output end of diode laser 2 links to each other with the input end of fiber coupler 3; The output terminal of fiber coupler 3 links to each other with the input end of optical fiber 4; The output terminal of optical fiber 4 links to each other with the input end of beam collimation device 5, and the output terminal of beam collimation device 5 is launched parallel laser beam and is incident to porosint gas cell 6, and the laser beam that sees through porosint gas cell 6 is incident to detector 7; The electrical signal of detector 7 links to each other with the input end of amplifier 8; The output terminal of amplifier 8 links to each other with the input end of power splitter 9, and first output terminal of power splitter 9 links to each other with the input end of first phase locking unit 10, and second output terminal of power splitter 9 links to each other with the input end of second phase locking unit 11; The output terminal of first phase locking unit 10 links to each other with first signal input part of signal acquisition controller 1, and the output terminal of second phase locking unit 11 links to each other with the secondary signal input end of signal acquisition controller 1.
Principle of work: it is f by frequency that signal acquisition controller 1 generates one
1Sawtooth wave and frequency be f
2The synthetic signal of sine wave be input to diode laser 2, the effect of sawtooth wave is to implement the tuning of wavelength through the forward conduction electric current that changes laser diode 2, and sinusoidal wave frequency f
2It is the sawtooth wave frequency f
11000 times, the sinusoidal wave effect of being played is to suppress low-frequency noise through original signal is carried out high frequency modulated, improves the signal to noise ratio (S/N ratio) of measuring.Diode laser 2 output have wavelength-modulated, centre wavelength is 759 to 767nm laser; Through fiber coupler 3 coupled into optical fibres 4; Laser in optical fiber 4 output terminal outgoing after by beam collimation device 5 collimations, the parallel laser light beam behind the collimation is incident to the porosint gas cell 6 that is filled with oxygen to be measured.Laser is constantly scattering in the porous structure of the inside of porosint; With oxygen in the testing sample gas that is filled with in the hole in certain wave strong point generation resonance absorption; The part photon that carries absorption information penetrates at the exit facet of porosint gas cell 6, and is received by detector 7, and detector 7 inputs to amplifier 8 amplifications after light signal is changed into electric signal; Be divided into the two paths of signals that is equal to by power splitter 9 then, the one tunnel connects the input end of first phase locking unit 10 and at f
2The frequency place demodulates the first harmonic of absorption signal, and another road connects the input end of second phase locking unit 11 and at 2f
2The frequency place demodulates the second harmonic of absorption signal, and first harmonic that demodulates and second harmonic connect two input ends of signal acquisition controller 1 respectively, and signal acquisition controller 1 is according to densimeter formula C
s=C
rA
2sA
1r/ A
2rA
1sObtain concentration of oxygen value to be measured.C in the formula
rFor being used for the calibrating gas concentration of oxygen of system calibrating, A
2sBe the second harmonic signal of testing sample gas, A
1sBe the first harmonic signal of testing sample gas, A
2rBe the second harmonic signal of calibrating gas, A
1rFirst harmonic signal for calibrating gas.
Embodiment two: this embodiment is described further embodiment one, and the centre wavelength of the light wave of diode laser 2 emission is in 759 to 767nm the scope.
Embodiment three: the Fig. 3 below in conjunction with Fig. 2 explains this embodiment; This embodiment is described further embodiment one; Porosint gas cell 6 has two end face window 6-3; Said two end face window 6-3 are parallel to each other, and to launch laser beam vertical with the output terminal of beam collimation device 5;
The upper and lower end of porosint gas cell 6 is respectively arranged with air intake opening 6-1 and gas outlet 6-2;
The set inside of porosint gas cell 6 has filling material.
Embodiment four: this embodiment is described further embodiment three, and porosint gas cell 6 inner filling materials are aluminum oxide porous material.
Embodiment five: this embodiment is described further embodiment four; The porosity of the aluminum oxide porous material of filling in the porosint gas cell 6 is greater than 30%; Average pore size is less than 5 μ m, and the photon transmission mean free path is less than 20 μ m, and transmittance is greater than 0.01%.
Embodiment six: this embodiment is described further embodiment three, and the manufacturing materials of two end face window 6-3 of porosint gas cell 6 is a K9 glass, at the transmittance at wavelength 760nm place greater than 90%.
Embodiment seven: this embodiment is described further embodiment three, and the end face window 6-3 of porosint gas cell 6 is a rectangle glass, and the thickness of said rectangle glass is 2～5mm; Porosint gas cell 6 two end face window 6-3 between distance be b; And satisfy relational expression e >=c＞3b, wherein, e is the long edge lengths of rectangle glass; C is the length of the broadside of rectangle glass, and said broadside is parallel with the airintake direction of porosint gas cell 6.
Embodiment eight: this embodiment is described further embodiment three; The air intake opening 6-1 of porosint gas cell 6 and gas outlet 6-2's is measure-alike; Length with plane, end face window 6-3 place vertical direction is a; Be of a size of d with end face window 6-3 place plane parallel direction, and satisfying relational expression a＞b/2 and relational expression d＞e/2.
Claims (8)
1. based on the small-sized oxygen measurement mechanism of porosint gas cell; It is characterized in that; It comprises signal acquisition controller (1), diode laser (2), fiber coupler (3), optical fiber (4), beam collimation device (5), porosint gas cell (6), detector (7), amplifier (8), power splitter (9), first phase locking unit (10) and second phase locking unit (11)
The output terminal of signal acquisition controller (1) links to each other with the input end of diode laser (2); The light output end of diode laser (2) links to each other with the input end of fiber coupler (3); The output terminal of fiber coupler (3) links to each other with the input end of optical fiber (4); The output terminal of optical fiber (4) links to each other with the input end of beam collimation device (5); The output terminal of beam collimation device (5) is launched parallel laser beam and is incident to porosint gas cell (6); The laser beam that sees through porosint gas cell (6) is incident to detector (7), and the electrical signal of detector (7) links to each other with the input end of amplifier (8), and the output terminal of amplifier (8) links to each other with the input end of power splitter (9); First output terminal of power splitter (9) links to each other with the input end of first phase locking unit (10); Second output terminal of power splitter (9) links to each other with the input end of second phase locking unit (11), and the output terminal of first phase locking unit (10) links to each other with first signal input part of signal acquisition controller (1), and the output terminal of second phase locking unit (11) links to each other with the secondary signal input end of signal acquisition controller (1).
2. according to the said small-sized oxygen measurement mechanism of claim 1, it is characterized in that the centre wavelength of the light wave of diode laser (2) emission is in 759 to 767nm the scope based on the porosint gas cell.
3. according to the said small-sized oxygen measurement mechanism of claim 1 based on the porosint gas cell; It is characterized in that; Porosint gas cell (6) has two end face windows (6-3); Said two end face windows (6-3) are parallel to each other, and to launch laser beam vertical with the output terminal of beam collimation device (5);
The upper and lower end of porosint gas cell (6) is respectively arranged with air intake opening (6-1) and gas outlet (6-2);
The set inside of porosint gas cell (6) has filling material.
4. according to the said small-sized oxygen measurement mechanism of claim 3, it is characterized in that the inner filling material of porosint gas cell (6) is aluminum oxide porous material based on the porosint gas cell.
5. according to the said small-sized oxygen measurement mechanism of claim 4 based on the porosint gas cell; It is characterized in that; The porosity of the aluminum oxide porous material of filling in the porosint gas cell (6) is greater than 30%; Average pore size is less than 5 μ m, and the photon transmission mean free path is less than 20 μ m, and transmittance is greater than 0.01%.
6. according to the said small-sized oxygen measurement mechanism of claim 3, it is characterized in that the manufacturing materials of two end face windows (6-3) of porosint gas cell (6) is a K9 glass based on the porosint gas cell, at the transmittance at wavelength 760nm place greater than 90%.
7. according to the said small-sized oxygen measurement mechanism of claim 3 based on the porosint gas cell; It is characterized in that the end face window (6-3) of porosint gas cell (6) is a rectangle glass, the thickness of said rectangle glass is 2～5mm; Porosint gas cell (6) two end face windows (6-3) between distance be b; And satisfy relational expression e >=c＞3b, wherein, e is the long edge lengths of rectangle glass; C is the length of the broadside of rectangle glass, and said broadside is parallel with the airintake direction of porosint gas cell (6).
8. according to the said small-sized oxygen measurement mechanism of claim 3 based on the porosint gas cell; It is characterized in that; The air intake opening (6-1) of porosint gas cell (6) is measure-alike with gas outlet (6-2); Length with plane, end face window (6-3) place vertical direction is a, is being of a size of d with end face window (6-3) place plane parallel direction, and is satisfying relational expression a＞b/2 and relational expression d＞e/2.
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| CN2012100551039A CN102621063B (en) | 2012-03-05 | 2012-03-05 | Small-size oxygen measuring device based on porous material gas cell |
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| CN2012100551039A CN102621063B (en) | 2012-03-05 | 2012-03-05 | Small-size oxygen measuring device based on porous material gas cell |
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| CN102621063B CN102621063B (en) | 2013-11-13 |
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Cited By (6)
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| CN102809547A (en) * | 2012-08-28 | 2012-12-05 | 昆山昱翌辉华电子科技有限公司 | Method and device for detecting trace gas by scattering-enhanced tunable diode laser |
| CN106018341A (en) * | 2016-07-26 | 2016-10-12 | 北京工业大学 | Non-contact type detection device for oxygen concentration of aircraft fuel tank |
| CN106198451A (en) * | 2016-07-26 | 2016-12-07 | 北京工业大学 | A kind of fuel tanker molecular film collection oxygen non-contact laser detection device |
| CN110621980A (en) * | 2017-05-11 | 2019-12-27 | 梅特勒-托莱多有限公司 | Gas measuring system |
| CN110940632A (en) * | 2019-10-31 | 2020-03-31 | 河南农业大学 | TDLAS-based methane gas concentration detection device and detection method |
| CN114964652A (en) * | 2022-04-15 | 2022-08-30 | 清华大学 | Air preheater section air leakage rate online monitoring system and method |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102809547A (en) * | 2012-08-28 | 2012-12-05 | 昆山昱翌辉华电子科技有限公司 | Method and device for detecting trace gas by scattering-enhanced tunable diode laser |
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| CN106198451A (en) * | 2016-07-26 | 2016-12-07 | 北京工业大学 | A kind of fuel tanker molecular film collection oxygen non-contact laser detection device |
| CN106018341B (en) * | 2016-07-26 | 2018-11-02 | 北京工业大学 | A kind of fuel tanker oxygen concentration contactless detection device |
| CN110621980A (en) * | 2017-05-11 | 2019-12-27 | 梅特勒-托莱多有限公司 | Gas measuring system |
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| CN110621980B (en) * | 2017-05-11 | 2023-12-15 | 梅特勒-托莱多有限公司 | Gas measurement system |
| CN110940632A (en) * | 2019-10-31 | 2020-03-31 | 河南农业大学 | TDLAS-based methane gas concentration detection device and detection method |
| CN110940632B (en) * | 2019-10-31 | 2022-04-26 | 河南农业大学 | TDLAS-based methane gas concentration detection device and detection method |
| CN114964652A (en) * | 2022-04-15 | 2022-08-30 | 清华大学 | Air preheater section air leakage rate online monitoring system and method |
| CN114964652B (en) * | 2022-04-15 | 2023-08-25 | 清华大学 | Online monitoring system and method for section air leakage rate of air preheater |
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