CN201522463U - Wavelength dispersion X-ray fluorescence analyzer with energy dispersion detecting technology - Google Patents

Wavelength dispersion X-ray fluorescence analyzer with energy dispersion detecting technology Download PDF

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Publication number
CN201522463U
CN201522463U CN2009202466547U CN200920246654U CN201522463U CN 201522463 U CN201522463 U CN 201522463U CN 2009202466547 U CN2009202466547 U CN 2009202466547U CN 200920246654 U CN200920246654 U CN 200920246654U CN 201522463 U CN201522463 U CN 201522463U
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wavelength dispersion
ray
dispersion
vacuum
energy
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CN2009202466547U
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Chinese (zh)
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吴娜
高华
余正东
秦志立
张军涛
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Beijing Bandwise Technology Development Co Ltd
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Beijing Bandwise Technology Development Co Ltd
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Abstract

The utility model discloses a wavelength dispersion x-ray fluorescence analyzer with energy dispersion detecting technology, which belongs to the technical field of measuring devices utilizing X-rays to analyze materials and comprises an X-ray tube, an X-ray generating device, a vacuum measuring room, one or a plurality of fixed element channel optical splitters connected with an explorer, an automatic control system, a data collecting device, a vacuum-pumping system, a computer and an energy spectrum exploring device, wherein the X-ray tube and the X-ray generating device are installed inside a case, the automatic control system is formed by a control circuit board card and the like, the vacuum-pumping system is arranged outside the case and communicated with the vacuum measuring room, the computer is electrically with the automatic control system and a detecting device and is provided with a display and a printer, and the energy spectrum exploring device is mounted inside another fixed element channel. By adding an energy spectrum channel on a multi-channel spectrometer, the wavelength dispersion x-ray fluorescence analyzer realizes first combination of wavelength dispersion and energy dispersion, has compact structure and simple operating process, and achieves sending samples once and measuring dozens of elements, thereby greatly reducing work load and increasing efficiency of measurement and analysis.

Description

Wavelength dispersion X fluorescence analyser with the detection technique of loosing
Technical field
The utility model belongs to the technical field of measuring equipment of utilizing X ray to carry out material analysis, relates to the X fluorescence spectrum analyzer, particularly relates to a kind of energy dispersion-wavelength dispersion X ray fluorescence spectra combined instrument.
Background technology
It is different with wavelength that the x-ray fluorescence analysis method is based on the energy of X ray of different elements, and a certain characteristic X ray strength is relevant with the content of this element in sample, carries out qualitative and quantitative analysis.The X fluorescence spectrophotometer is divided into Wavelength dispersion type and energy dispersion type.
Existing multielement simultaneous determination type X fluorescence spectrophotometer (hereinafter to be referred as co-shaping WDXRFS) belongs to Wavelength dispersion type, and its vacuum measurement chamber periphery has been installed several fixed element light splitters.The existing fixed element light splitter is divided according to the kind of analyzing crystal can be divided into optical flat type and bent crystal type, sent separately characteristic X-ray by the different elements in the sample behind the X-ray pipe radiation exposure, its wavelength X is different, these X ray project on the surface of analyzing crystal with the θ angle, the elemental characteristic X ray that wherein has only wavelength X to meet the Bragg formula could be reflected by analyzing crystal and focuses on same θ angle, and is detected instrument detecting.According to the intensity of detected this elemental characteristic X ray can calculation sample in the content of this element, the characteristic X-ray of other element is not absorbed because of its wavelength meets the Bragg formula.
Known fixed element road crystal optical splitter has one can only measure a certain or two kinds of fixing elements, so co-shaping WDXRFS is can simultaneously-measured element kind identical with the optical splitter quantity of being installed or be multiplied.Because the restriction of installing space, the optical splitter limited amount that can install at the certain vacuum measurement chamber periphery of diameter, so the element kind that instrument can be measured simultaneously is restricted.In the small-sized multiple tracks WDXRFS instrument of existing power≤200W 12 known optical splitters can be installed at most, promptly can measure 12 kinds of elements simultaneously at most.In order to increase the kind that to measure element, have to strengthen the diameter of vacuum measurement chamber, cause sample to the optical path length of crystal to increase, because detected X ray intensity and optical path length are inversely proportional to, therefore in order to guarantee the analysis precision of element, must strengthen the power of instrument, nonetheless, in the large-scale multiple tracks WDXRFS instrument of power 〉=2000W, about 30 known optical splitters at most also can only be installed, and seemed very crowded in the instrument at this moment, install, debug and keep in repair all quite difficulty.
Because the beam split function of wavelength dispersion, make when it is used must known elements wavelength, and can only be as semi-quantitative analysis, can not qualitative analysis
The energy-dispersive spectroscopy instrument belongs to the energy dispersion type, is made up of light pipe, high pressure, detector, multichannel analyzer.Behind X-ray pipe radiation exposure, the different elements in the sample send characteristic X-ray separately, and its energy is different, and these X ray are detected device and detect, and have formed the Continuous Energy spectrum, and the element of analyzing between the Na-U can be arranged.Get final product the content of this element in the calculation sample according to the intensity of detected this elemental characteristic X ray.
Because the continuous spectrum characteristics of energy dispersion, the energy dispersion fluorescence spectrophotometer can be done harmless qualitative analysis.
Application facet, co-shaping WDXRFS and energy-dispersive spectroscopy instrument all are separately to use, and are used for the detection of different situations.Therefore on structure, the wavelength dispersion spectrometer can be installed some or certain several optical splitter, but never to occur on an instrument be beam splitting system, is again the equipment of continuous spectrum measuring system.
The utility model content
The purpose of this utility model provides can the loose wavelength dispersion X fluorescence analyser of detection technique of having of a kind of energy dispersion-wavelength dispersion coupling.
For achieving the above object, the technical scheme taked of the utility model is:
A kind of wavelength dispersion X fluorescence analyser with the detection technique of loosing, the automatic control system, the digital acquisition device that comprise X-ray pipe and X-ray generator, the vacuum measurement chamber that is installed in the cabinet, the one or more fixed element light splitters that are connected with detector, constitute by control circuit integrated circuit board etc., and place pumped vacuum systems, the band display that is electrically connected with automatic control system and pick-up unit and the computing machine of printer that cabinet is outer and the vacuum measurement chamber is communicated with, in an other fixed element road, install the power spectrum sniffer in addition.
The above has the wavelength dispersion X fluorescence analyser of the detection technique of loosing, and described power spectrum sniffer comprises successively the eds detector that connects, is connected and fixed assembly and collimating apparatus, and wherein, collimating apparatus stretches into the vacuum measurement chamber.
Described power spectrum sniffer is fixed in the cabinet by being connected and fixed assembly.
The above has the wavelength dispersion X fluorescence analyser of the detection technique of loosing, and described optical splitter has flat curved twin crystal passage, two optical flat passage or two bent crystal channels designs.
Adopt above design, distinguishing feature of the present utility model has:
1, realized the combination first time of wavelength dispersion and energy dispersion;
2, replenished the narrow shortcoming of wavelength dispersion analyst coverage: generally speaking, wavelength dispersion can only be analyzed 12 kinds of elements simultaneously, and the energy dispersion continuous spectrum can be analyzed tens kinds of elements simultaneously;
3, energy dispersion qualitative analysis exactly, and wavelength dispersion must be predicted the element kind in the sample.
4, do not increase under the situation of volume, realized both combinations;
5, operating process is simple, and one time sample presentation gets final product, and has significantly reduced workload;
6, saved used high pressure, the light pipe of energy-dispersive spectroscopy instrument;
7, saved auxiliary device (computing machine, vacuum pump etc.).
Description of drawings
Fig. 1 is an one-piece construction synoptic diagram of the present utility model.
Fig. 2 is the structural representation of power spectrum sniffer in the utility model.
Fig. 3 is power spectrum sniffer and other parts annexation synoptic diagram in the utility model.
Embodiment
The utility model proposes a kind of X fluorescence spectrophotometer that has energy dispersion and wavelength dispersion simultaneously.As shown in Figure 1, automatic control system, characteristic X-ray digital acquisition device 107 that it comprises the X-ray pipe that is installed in the cabinet and X-ray generator 101, vacuum measurement chamber 102, the fixed element light splitter 104 that is connected with detector 105, power spectrum sniffer 103, is made of control circuit integrated circuit board 106 etc., and the pumped vacuum systems 103, the band display 108 that is electrically connected with automatic control system and digital acquisition device 107 and the parts such as computing machine 100 of printer 109 that place outer and vacuum measurement chamber 102 connections of cabinet.Here, other complete machine parts composition except that power spectrum sniffer 103 and annexation and existing co-shaping WDXRFS are basic identical, and this paper will not give unnecessary details.
The optical splitter 104 that is used for the utility model can be the single channel design, also can be flat curved twin crystal passage, two optical flat passage or two bent crystal channels designs.The design of these binary channels optical splitters can make an optical splitter be used for the mensuration of two kinds of elements.
Referring to Fig. 2 and shown in Figure 3, power spectrum sniffer 103 mainly comprises successively the eds detector 201 that connects, is connected and fixed assembly 202 and collimating apparatus 203, wherein, the collimating apparatus 203 that is connected and fixed assembly 202 front ends stretches in the vacuum measurement chamber 102, the rear end links to each other with eds detector 201, and by being connected and fixed assembly 202 power spectrum sniffer 103 is fixed in the cabinet.
The actual detected function description:
Actual detected function 1-----improves the element test detection limit to wave dispersion testing background deduction
Implementation procedure:
Open instrument, by fixing road element (i) the intensity C of detector 105 iBe transmitted to digital acquisition device 107, the background intensity D of this element of the correspondence that will simulate by eds detector 201 iBe transmitted to digital acquisition device 107, be transferred to computing machine again, by computing machine two values are subtracted each other according to corresponding proportion and obtain clean intensity I i:
I i=C i-D i (i=1,2……10)
Pass through the content Y of this element (i) in the following formula calculation sample again i:
Y i=aI i+ b (a, b are systematic parameter, by calculating automatically in the standard of instruments calibration process)
Actual detected function 2-----can loose with wave dispersion jointly to sample analysis-by-synthesis function
The fast qualitative analysis utilizing function that real process 1-----can loose
Open instrument, the test signal of this element of the correspondence that will be simulated by eds detector 201 is transmitted to digital acquisition device 107, be transferred to computing machine again, the process computing machine is to signal Processing, form the energy spectrum analysis spectrogram of contact, computing machine carries out qualitative analysis to spectrogram, and whole process only needed can finish with interior in 10 seconds.
Real process 2-----adopts power spectrum to extend the analyst coverage of wave spectrum, combined basis weight analysis
Its defective-----power spectrum that can remedy the general fixedly ultimate analysis limited amount of road wave spectrum, power spectrum can realize the full spectrum direct-reading to sample, and analysis speed is fast.
1., open instrument, by fixing road element (i) the intensity C of detector 105 iBe transmitted to digital acquisition device 107, be transferred to computing machine again, obtain the characteristic X ray strength I of this element i:
Pass through the content Y of certain element (i) in the following formula calculation sample again i:
Y i=aI i+ b (a, b are the wave dispersion systematic parameter, by calculating automatically in the standard of instruments calibration process)
2., open instrument, by the sniffer 201 that can loose with certain element (j) intensity C jBe transmitted to digital acquisition device 107, be transferred to computing machine again, obtain the characteristic X ray strength I of this element j:
Pass through the content Y of certain element (i) in the following formula calculation sample again i:
Y j=cI j+ d (c, d are the systematic parameter of loosing, by calculating automatically in the standard of instruments calibration process)
3., will be 1., 2. institute's result calculated is carried out analysis-by-synthesis, draws net result, and output in file or the printer.

Claims (4)

1. wavelength dispersion X fluorescence analyser with the detection technique of loosing, the automatic control system, the digital acquisition device that comprise X-ray pipe and X-ray generator, the vacuum measurement chamber that is installed in the cabinet, the one or more fixed element light splitters that are connected with detector, constitute by control circuit integrated circuit board etc., and place pumped vacuum systems, the band display that is electrically connected with automatic control system and pick-up unit and the computing machine of printer that cabinet is outer and the vacuum measurement chamber is communicated with, it is characterized in that: installing power spectrum sniffer in an other fixed element road.
2. according to the described wavelength dispersion X fluorescence analyser with the detection technique of loosing of claim 1, it is characterized in that described power spectrum sniffer comprises successively the eds detector that connects, is connected and fixed assembly and collimating apparatus, wherein, collimating apparatus stretches into the vacuum measurement chamber.
3. according to the described wavelength dispersion X fluorescence analyser of claim 2, it is characterized in that described power spectrum sniffer is fixed in the cabinet by being connected and fixed assembly with the detection technique of loosing.
4. according to claim 1 or 2 or 3 described wavelength dispersion X fluorescence analysers, it is characterized in that described optical splitter has flat curved twin crystal passage, two optical flat passage or two bent crystal channels designs with the detection technique of loosing.
CN2009202466547U 2009-10-23 2009-10-23 Wavelength dispersion X-ray fluorescence analyzer with energy dispersion detecting technology Expired - Lifetime CN201522463U (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105302009A (en) * 2014-06-09 2016-02-03 郎溪杰博电器科技有限公司 Measurement control system of fully-digital spectrum analyzer
CN107941830A (en) * 2017-12-27 2018-04-20 钢研纳克检测技术股份有限公司 The distributional analysis Image Acquisition and data handling system of Xray fluorescence spectrometer
CN108508051A (en) * 2018-04-24 2018-09-07 国家地质实验测试中心 A kind of compound Xray fluorescence spectrometer of wave spectrum power spectrum
CN108562603A (en) * 2017-10-27 2018-09-21 钢研纳克检测技术股份有限公司 X-ray detection system for the compound Xray fluorescence spectrometer of wave spectrum power spectrum
CN113791454A (en) * 2021-09-16 2021-12-14 中国科学院国家天文台长春人造卫星观测站 Method, system, terminal and medium for detecting gravitational wave by using Mossbauer effect

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105302009A (en) * 2014-06-09 2016-02-03 郎溪杰博电器科技有限公司 Measurement control system of fully-digital spectrum analyzer
CN105302009B (en) * 2014-06-09 2019-02-22 郎溪杰博电器科技有限公司 A kind of full digital spectroanalysis instrument Measurement and Control System
CN108562603A (en) * 2017-10-27 2018-09-21 钢研纳克检测技术股份有限公司 X-ray detection system for the compound Xray fluorescence spectrometer of wave spectrum power spectrum
CN108562603B (en) * 2017-10-27 2023-08-15 钢研纳克检测技术股份有限公司 X-ray detection system for spectrum energy spectrum composite type X-ray fluorescence spectrometer
CN107941830A (en) * 2017-12-27 2018-04-20 钢研纳克检测技术股份有限公司 The distributional analysis Image Acquisition and data handling system of Xray fluorescence spectrometer
CN108508051A (en) * 2018-04-24 2018-09-07 国家地质实验测试中心 A kind of compound Xray fluorescence spectrometer of wave spectrum power spectrum
CN113791454A (en) * 2021-09-16 2021-12-14 中国科学院国家天文台长春人造卫星观测站 Method, system, terminal and medium for detecting gravitational wave by using Mossbauer effect
CN113791454B (en) * 2021-09-16 2024-01-16 中国科学院国家天文台长春人造卫星观测站 Method, system, terminal and medium for detecting gravitational wave by using Mossburg effect

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