CN102680098A - Spectral measurement device - Google Patents
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- CN102680098A CN102680098A CN2012101132600A CN201210113260A CN102680098A CN 102680098 A CN102680098 A CN 102680098A CN 2012101132600 A CN2012101132600 A CN 2012101132600A CN 201210113260 A CN201210113260 A CN 201210113260A CN 102680098 A CN102680098 A CN 102680098A
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- 230000003595 spectral effect Effects 0.000 title claims abstract description 119
- 238000005259 measurement Methods 0.000 title claims abstract description 96
- 230000003287 optical effect Effects 0.000 claims abstract description 41
- 239000010409 thin film Substances 0.000 claims abstract description 19
- 238000003384 imaging method Methods 0.000 claims abstract description 6
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- 101710123186 Slit homolog 1 protein Proteins 0.000 description 5
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- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000005269 aluminizing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000012788 optical film Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
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- 230000011514 reflex Effects 0.000 description 1
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Abstract
The invention discloses a spectral measurement device, comprising optical elements including an incidence slit, a dispersing element and an imaging element. A spectral selection thin film is plated on the surface of each optical element; the selection wave band of the spectral selection thin film corresponds to a measurement wave band of the spectral measurement device; the optical elements plated with the spectral selection thin film only can emit light within the selection wave band of the spectral selection thin film so as to greatly weaken light with other wavelengths in a light path, Thus the stray light level of an optical system is greatly reduced.
Description
Technical field
The invention belongs to the optical radiation measurement field, be specifically related to a kind of spectral measurement device.
Background technology
Spectral measurement device is the optical instrument that is used to measure the luminophor spectral power distribution, is widely used in fields such as radiation of light source measurement, color measuring, element evaluation, chemical analysis.Spectral measurement device comprises polytype, according to its can operate as normal spectral range, be divided into vacuum ultraviolet/ultraviolet/near infrared/infrared/far-infrared spectrometer etc.; According to the difference of dispersion element, be divided into prism/diffraction grating/interference spectroscope etc.; According to the difference of detection method, be divided into and see spectrometer, spectrograph and Photoelectric Spectrometer etc.; Function and design feature according to device are divided into monochromator (grating/prism/double monochromator etc.) and polychromator (multi-channel spectrometer based, imaging spectrometer etc.).
Spectral measurement device generally is made up of entrance slit, collimating element, dispersion element and image-forming component etc.; During measurement mechanism work; Light gets into spectral measurement device from entrance slit, and collimating element is with the incident light collimation and incide dispersion element, and dispersion element is decomposed into spectrum line with the complex light of incident; The beam convergence of each wavelength of spatial dispersion being opened by image-forming component is surveyed by the exit slit outgoing or the system that is received on focal plane, picture side.Wherein, Parasitic light is one of key factor of the various spectral measurement device measuring accuracy of decision; The optical radiation irradiation that it is meant wrong wavelength (non-respective signal optical wavelength) is by outgoing or accepted the light signal that system surveys, and is mainly derived from reflected light that overlapping between surrounding environment optical radiation, different diffraction level time and parasitic light that the optical element defective is produced or non-optical element produce etc.
In traditional spectral measurement device; The concave mirror of aluminizing is the image-forming component of using always; Yet the concave mirror of aluminizing can reflect ultraviolet-visible-infrared optical radiation with high reflectance, and as shown in Figure 1, this broadband reflection characteristic can be brought considerable parasitic light to spectral measurement device.With typical C zerny-Turner mechanical scanning type monochromator is example, and dispersed light incides on the convergent mirror (concave mirror of aluminizing), and scanning mechanism drives the convergent mirror rotation; Thereby with different reflection of monochromatic lights to the exit slit place; Realize the scanning of whole spectrum, because different diffraction level time spectrum is overlapping, on the same position of convergent mirror; The different diffraction level spectrum that possibly have monochromatic light to be measured and other wavelength simultaneously; Reflection this this locational all light in aluminum reflector non-selectivity ground cause the exit slit place except that monochromatic light to be measured, have also sneaked into the parasitic light of a large amount of other wavelength.In addition; For the polychromator that adopts detector array; The light of different wave length is received, surveys by detector array different pixels zone; Concave mirror reflexes to same pixel region because the measurement light of different wave length and non-measurement light are all aluminized, and causes having sneaked in this pixel region the parasitic light of a large amount of other non-measurement wavelength.Therefore, for having adopted the spectral measurement device of aluminum reflector as image-forming component, the wide-band spectrum reflection characteristic of its non-selectivity can be brought a large amount of parasitic lights to measurement mechanism, and measuring error is big.
Summary of the invention
For overcoming the defective of existing spectral measurement device, the present invention aims to provide the spectral measurement device that a kind of original structure that can not change optical system can significantly reduce the optical system stray light level.
A kind of spectral measurement device; Comprise entrance slit, dispersion element and one or more image-forming component, light gets into spectral measurement device from entrance slit, after the dispersion element beam split; Image-forming component is converged to picture with dispersed light; It is characterized in that, be coated with the spectral selectivity film on the surface of image-forming component, the selection wave band of described spectral selectivity film is corresponding with the measurement wave band of spectral measurement device.
A kind of spectral measurement device disclosed by the invention; Light by the dispersion element beam split after; Incide on the image-forming component that is coated with the spectral selectivity film and pool picture, the effect of spectral selectivity film be make light in the designated band on optical film with certain ratio outgoing, and the light in its all band is owing to be positioned at outside the selection wave band of spectral selectivity film; Behind image-forming component, this part light is significantly decayed in light path.Because the selection wave band of spectral selectivity film is corresponding (for example with the measurement wave band of spectral measurement device; The measurement wave band of spectral measurement device is 380nm ~ 780nm; Then the selection wave band of spectral selectivity film also should be 380nm ~ 780nm); In a certain particular locations of image-forming component, only can the beam projecting of a certain designated band be gone out, and at the light of this other wave band of position (like second order spectrum etc.) by significantly decay; Make that only the interior emergent light of this designated band is converged to picture, thereby significantly reduce parasitic light.This spectral measurement device does not change the optical system of former measuring equipment, only through light-plated spectral selectivity film on image-forming component, just can significantly reduce the stray light level of optical system, thereby improves accuracy of measurement.
The present invention can also further limit and perfect through following technical scheme:
Optical thin film is meant the uniform dielectric rete attached to the thin thickness of optical element surface, according to its function, can be divided into many types, like reflectance coating, anti-reflection film, semi-transparent semi-reflecting film, filter coating, dichroic coating, polarizing coating, conducting film and diaphragm etc.Spectral selectivity film among the present invention can be reflectance coating or anti-reflection film or filter coating, specifies as follows:
(a) reflectance coating (claiming reflective membrane again) is the film that can make the light reflection of certain wave band, and its function is the reflectivity that increases optical element surface.Light-plated spectral selectivity reflectance coating on image-forming component; Thereby image-forming component only reflects away the light of designated band, also the reflected light in this designated band is converged to picture by certain reflectivity in the corresponding position of plated film; Reflection ray at this its all band of position is significantly decayed, thereby significantly reduces parasitic light.
(b) function of anti-reflection film (claiming antireflecting film again) is to produce destructive interference through film, reduces or eliminates the reflected light of optical element surface, thereby increase the transmitted light of these elements.Light-plated spectral selectivity anti-reflection film on image-forming component, image-forming component are only with the light transmission in the designated band and be converged to picture, and the transmitted ray of its all band is reduced parasitic light by significantly decay with this.
(c) function of filter coating is to filter out unwanted light in the spectrum, promptly only lets the light of designated band pass through, and with the light ray cut of its all band.Light-plated spectral selectivity filter coating on image-forming component, image-forming component only let designated band light reflection or transmission and be converged to picture, the reflection of its all band or transmitted ray be by significantly decay, thereby reduce parasitic light.
As a kind of technical scheme, described spectral selectivity film is made up of the optical thin film that two or more has the different choice wave band, and the selection wave band of each optical thin film overlaps from beginning to end and covers whole measurement wave band.For example; The measurement wave band of spectral measurement device is 380nm-780nm, is coated with the spectral selectivity reflectance coating on the image-forming component, and this optical film is made up of the reflectance coating of four kinds of different choice wave bands; Its corresponding reflected waveband is respectively 350nm-500nm, 450nm-600nm, 480nm-700nm and 500nm-800nm; As shown in Figure 2, the reflected waveband of above-mentioned each sheet reflectance coating is the first to overlap, and has covered the measurement wave band of spectral measurement device.Perhaps described spectral selectivity film is a local optical thin film of selecting the wavelength band gradual change; As shown in Figure 3; This spectral selectivity optical thin film is as a whole, selects the wave band gradual change in the whole measurement wave band, promptly has different selection wavelength band at the diverse location place of optical thin film.
As preferably, above-mentioned image-forming component is a concave mirror, is coated with spectral selectivity reflectance coating or filter coating on the surface of concave mirror.The function that concave mirror has reflection and assembles is coated with reflectance coating on its surface, can light in selecting wave band at it be reflected, and the reflection ray of its all band of significantly decaying; Be coated with filter coating on its surface, can see through the light of selecting the wave band inner segment at it, and filter out the light of its all band of the overwhelming majority, thereby making to measure only exists optical thin film to select the light in the wave band in the light path.The image-forming component here can be the multi-curvature concave mirror of curvature gradual change according to certain rules; Through adopting the concave mirror of multi-curvature; Particularly at the edge of concave mirror, the concave mirror of multi-curvature can change the exit direction of light, thereby reduces or eliminate the aberration of lens; Make imaging clear, improve accuracy of measurement.Perhaps described image-forming component is convex lens, is coated with spectral selectivity anti-reflection film or filter coating on the surface of convex lens.Convex lens have the function that transmission is assembled, and are coated with anti-reflection film on its surface, can be with light transmission, the convergence of different-waveband; Be coated with filter coating on its surface, can filter out the light of other different-wavebands of the overwhelming majority.
As a kind of technical scheme, comprise detector array, image-forming component is imaged onto dispersed light on the photosurface of detector array, on the different pixels zone of detector array photosurface, is coated with the spectral selectivity film corresponding with the probing wave appearance.Detector array is positioned at the image planes position of image-forming component; Received measurement from the light of each position outgoing of image-forming component by the different pixels of detector array zone; Because the spectral selectivity film that plates on the different pixels zone of detector array; Further light is carried out selectivity and receive, thereby improve accuracy of measurement.For example, the gradual change filter coating of visible light wave range is set before detector array, corresponding with the probing wave appearance of detector respectively, realize the accurate measurement of visible light wave range.
As a kind of technical scheme; Comprise the switching mechanism that is used for image-forming component is cut light path; Two or more image-forming components are set on described switching mechanism, and described two or more image-forming components are coated with the spectral selectivity film of different choice wave band respectively.The spectral selectivity film of incision different choice wave band, the light with different-waveband carries out the outgoing convergence respectively, realizes the accurate measurement of different choice wave band light.The switching mechanism here can be through drive units such as motors with different image-forming component incision light paths.
As a kind of technical scheme; Comprise two or more dispersion elements and two or more image-forming component; And the number of dispersion element and image-forming component equates and is provided with at interval, all is coated with the spectral selectivity optical thin film of selecting the wave band correspondent equal on each image-forming component.Specifically; In an optical system, possibly there are a plurality of dispersion elements and a plurality of image-forming component (like double monochromator) exactly; In same spectral measurement device; The number of dispersion element and image-forming component should equate and be provided with at interval, dispersion element be positioned on the input path of image-forming component (be dispersion element-image-forming component-dispersion element-image-forming component-...), light is after each dispersion element beam split; Light all will be converged to picture through image-forming component, on each image-forming component, all is coated with to select wave band identical spectra selective optical film.For example, in double monochromator, comprise two dispersion elements and two image-forming components; The structure and the size of two image-forming components are identical; And all be coated with the reflectance coating of 300nm-600nm and two kinds of different choice wave bands of 550nm-800nm on the correspondence position, light is after first dispersion element beam split, and reflection is converged to picture on first image-forming component; Through second dispersion element beam split, reflection is converged to picture on second image-forming component again.
As a kind of technical scheme, comprise that the incident that is arranged at dispersion element or one or more collimating mirror on the emitting light path are or/and catoptron.Or/and catoptron, the flexibly changing light path is significantly dwindled the volume of instrument, is convenient to optical design and practical application through on light path, collimating mirror being set.In addition, among the present invention other optical elements (like diaphragm, integrating sphere etc.) can also be set in light path,, be adapted to different optical instruments to realize different measurement purposes.Among the present invention; The concrete optical design of simultaneously all right basis and measurement needs; Optionally at one or more above-mentioned collimating mirror or/and be coated with on the catoptron and the corresponding spectral selectivity film of the measurement wave band of spectral measurement device, dirigibility is good, and accuracy of measurement is high.Can be at single collimating mirror or/and be coated with on the single catoptron and the corresponding spectral selectivity film of the measurement wave band of spectral measurement device; Perhaps several therein collimating mirrors are or/and all be coated with on several catoptron and the corresponding spectral selectivity film of the measurement wave band of spectral measurement device; Perhaps at all collimating mirrors or/and all be coated with on all catoptrons and the corresponding spectral selectivity film of the measurement wave band of spectral measurement device.
As a kind of technical scheme, on described dispersion element, be coated with and the corresponding spectral selectivity film of the measurement wave band of spectral measurement device.Light incides on the dispersion element, and the spectral selectivity film only carries out beam split to the light of spectral measurement device measurement wave band, and the light of its all band is decayed by major part.The dispersion element here can be plane grating or prism etc., incident ray is decomposed into directional light, reenters to be mapped to and is converged to picture on the image-forming component.
As a kind of technical scheme, comprise that described exit slit is arranged on the imaging surface of image-forming component in order to the monochromatic exit slit of outgoing.For example, dispersion element, image-forming component and exit slit can constitute monochromator, and image-forming component forms images convergence of rays, penetrate from the exit slit that is positioned on the imaging surface, realize the measurement function of monochromator.
In sum; The present invention is through being coated with the spectral selectivity film on image-forming component; And make that the selection wave band of spectral selectivity film is corresponding with the measurement wave band of spectral measurement device; Make image-forming component only can the outgoing optical thin film select the light in the wave band, and the light of its all band in the light path that significantly decays, thereby significantly reduce the stray light level of optical system.In addition, can also be according to the particular type of spectral measurement device, be employed in effective control that light-plated spectral selectivity film on the different optical element is realized stray light level.For example, in the mechanical scanning type monochromator, adopt a plurality of switching mechanisms that the optical thin film of different choice wave band is arranged are set, adopt switching mechanism different optical thin film incision light paths; In double monochromator, with being coated with corresponding identical spectra optional membrane on a plurality of image-forming components; In polychromator, on the photosurface of detector array, be coated with spectral selectivity film etc.Therefore, spectral measurement device disclosed by the invention can significantly reduce the stray light level of various spectral measurement devices, thereby effectively improves accuracy of measurement.
Description of drawings
Accompanying drawing 1 is that the reflectivity of aluminum reflector is with the wavelength change curve;
Accompanying drawing 2 is synoptic diagram of a kind of spectral selectivity reflectance coating of the present invention;
Accompanying drawing 3 is synoptic diagram of the another kind of spectral selectivity reflectance coating of the present invention;
Accompanying drawing 5 is structural drawing of embodiment 2;
Accompanying drawing 7 is structural drawing of embodiment 3;
The 1-entrance slit; The 2-dispersion element; The 3-image-forming component; 4-spectral selectivity film; The 5-detector array; The 6-collimating mirror; The 7-catoptron; The 8-switching construction; The 9-exit slit; The 10-motor.
Embodiment
As shown in Figure 4, present embodiment discloses a kind of polychromator, comprises entrance slit 1,, dispersion element 2, image-forming component 3, spectral selectivity film 4 and detector array 5.Dispersion element 2 in the present embodiment is a plane grating, and image-forming component 3 is a concave mirror, and the spectral selectivity film 4 of plating is a reflectance coating on the concave mirror 3.
As shown in Figure 2; The spectral selectivity reflectance coating 4 of present embodiment is made up of the reflectance coating of four kinds of different choice wave bands; Its corresponding reflected waveband is respectively 350nm-500nm, 450nm-600nm, 480nm-700nm and 500nm-800nm; The reflected waveband of above-mentioned each sheet reflectance coating is the first to overlap, and has covered the measurement wave band 380nm-780nm of spectral measurement device.
Incident ray is after plane grating 2 beam split; The monochromatic light of different-waveband incides on the concave mirror 3; Because be coated with the spectral selectivity reflectance coating 4 of different reflected wavebands on the concave mirror 3, concave mirror 3 reflects, assembles the light of different choice wave band respectively, and is imaged onto on the detector array 5 that is positioned at concave mirror 3 image planes places; And the light of its all band is not reflected; The different pixels zone of detector array 5 receives the reflected light of different choice wave band respectively, reduces the stray light level of system, realizes that the quick high accuracy of whole spectrum is measured.
In addition; Present embodiment also is coated with spectral selectivity film 4 on the surface of detector array 5; The spectral selectivity film 4 here is the filter coating of a gradual change, and is as shown in Figure 3, and spectral selectivity filter coating 4 to pass through wave band corresponding with detector array 5 different pixels area detection wavelength.Similarly; Light is after 4 reflections of spectral selectivity reflectance coating, assembling; Spectral selectivity filter coating 4 through detector array 5 surfaces further filters, and filters out the light that should not fall in this pixel region, the light of only surveying through this pixel region planted agent; Thereby further reduce the stray light level of system, improve accuracy of measurement.
As shown in Figure 5, present embodiment discloses a kind of monochromator, comprises entrance slit 1, dispersion element 2, image-forming component 3, spectral selectivity film 4, collimating mirror 6, exit slit 9 and motor 10.Dispersion element 2 in the present embodiment is a plane grating, and image-forming component 3 is a concave mirror, and the spectral selectivity film 4 of plating is a reflectance coating on the concave mirror 3.
During actual measurement; Light gets into through entrance slit 1; After collimating mirror 6 reflections, becoming a branch of directional light incides on the plane grating 2; Plane grating 2 is with the incident ray chromatic dispersion and project on the concave mirror 3, and the spectral selectivity reflectance coating 4 on the concave mirror 3 reflects corresponding light according to its reflected waveband, through exit slit 9 outgoing.
As shown in Figure 6; Present embodiment also comprises the switching mechanism 8 that is electrically connected with motor 10; Be provided with five image-forming components 3 on the switching mechanism 8, and the reflected waveband of each image-forming component 3 polishing wax selective reflection film 4 is all different, the reflected waveband on the first image-forming component 3-1 is 350nm-480nm; The reflected waveband of the second image-forming component 3-2 is 450nm-550nm; The reflected waveband of the 3rd image-forming component 3-3 is 480nm-650nm, and the reflected waveband of the second image-forming component 3-4 is 600nm-720nm, and the reflected waveband of the fifty percentth pixel spare 3-5 is 700nm-800nm.During measurement, switching mechanism 8 is under the drive of motor 10, in different image-forming components 3 incision light paths, respectively the light reflection of different-waveband is assembled, to realize the accurate measurement of different-waveband light.
As shown in Figure 7, present embodiment discloses a kind of double monochromator, comprises entrance slit 1, two 2, two image-forming components 3 of dispersion element, spectral selectivity film 4, four catoptrons 7, two collimating mirrors 6 and exit slits 9.Two dispersion elements 2 in the present embodiment are plane grating; Two image-forming components 3 are the structure concave mirror all identical with size; The spectral selectivity film 4 of concave mirror 3 platings is reflectance coating; Spectral selectivity reflectance coating 4 in the present embodiment on the concave mirror 3 is as shown in Figure 2, and it selects identical among wave band and the embodiment 1, and the correspondence position that reflectance coating plates on two concave mirrors 3 is identical.
During measurement; Light gets into through entrance slit 1; After catoptron 7 is reflective, be reflected into a branch of directional light by collimating mirror 6 and incide on the plane grating 2, plane grating 2 is with the incident ray chromatic dispersion and project on the concave mirror 3; Spectral selectivity reflectance coating 4 on the concave mirror 3 reflects corresponding light according to its reflected waveband; From the reflected light of concave mirror 3 outgoing again through two catoptrons 7 reflective with collimating mirror 6 reflections, become directional light and incide on the plane grating 2, plane grating 2 is with the incident ray chromatic dispersion and project on the concave mirror 3; Spectral selectivity reflectance coating 4 on the concave mirror 3 reflects corresponding light according to its reflected waveband, through exit slit 9 outgoing.
The selection wave band of optical thin film should be equal fully on two concave mirrors 3 in the present embodiment.For example; Incident ray is through plane grating 2 chromatic dispersions; Wavelength is that the purple light of 420nm is assembled by the reflection of the reflectance coating of 350nm-480nm on the concave mirror 3; Through catoptron 7, collimating mirror 6 reflections, and after plane grating 2 beam split, inciding concave mirror 3 should be assembled by the reflection of the reflectance coating of 350nm-480nm equally.The selection wave band correspondent equal of the spectral selectivity reflectance coating 4 on two concave mirror 3 correspondence positions, strict guarantee the reflection consistance of twice chromatic dispersion, thereby significantly reduced the stray light level of system, improved accuracy of measurement.Than other spectrometers, double monochromator itself just has very high accuracy of measurement, through light-plated spectral selectivity reflectance coating on concave mirror 3, makes that the accuracy of measurement of double monochromator is higher again.
Claims (10)
1. spectral measurement device; Comprise entrance slit (1), dispersion element (2) and one or more image-forming component (3), light gets into spectral measurement device from entrance slit (1), after dispersion element (2) beam split; Image-forming component (3) is converged to picture with dispersed light; It is characterized in that be coated with spectral selectivity film (4) on the surface of image-forming component (3), the selection wave band of described spectral selectivity film (4) is corresponding with the measurement wave band of spectral measurement device.
2. a kind of spectral measurement device as claimed in claim 1; It is characterized in that; Described spectral selectivity film (4) is made up of the optical thin film that two or more has the different choice wave band, and the selection wave band of each optical thin film overlaps from beginning to end and covers whole measurement wave band; Perhaps described spectral selectivity film (4) is a kind of local optical thin film of selecting the wavelength band gradual change.
3. a kind of spectral measurement device as claimed in claim 1; It is characterized in that; Comprise detector array (5); Image-forming component (3) is imaged onto dispersed light on the photosurface of detector array (5), on the different pixels zone of described detector array (5) photosurface, is coated with the spectral selectivity film (4) corresponding with the probing wave appearance.
4. a kind of spectral measurement device as claimed in claim 1; It is characterized in that; Comprise the switching mechanism (8) that is used for image-forming component (3) incision light path; Two or more image-forming components (3) are set on described switching mechanism (8), and described two or more image-forming components (3) are coated with respectively selects wave band different spectrum optional membrane (4).
5. a kind of spectral measurement device as claimed in claim 1; It is characterized in that; Comprise two or more dispersion elements (2) and two or more image-forming component (3); The number of dispersion element (2) and image-forming component (2) equates and is provided with at interval, all is coated with the spectral selectivity film (4) of selecting the wave band correspondent equal on each image-forming component (3).
6. like claim 1 or 3 or 4 or 5 described a kind of spectral measurement devices, it is characterized in that described image-forming component (3) is a concave mirror, is coated with spectral selectivity reflectance coating or filter coating on the surface of concave mirror.
7. like claim 1 or 5 described a kind of spectral measurement devices, it is characterized in that, on described dispersion element (2), be coated with and the corresponding spectral selectivity film of the measurement wave band of spectral measurement device (4).
8. like claim 1 or 5 described a kind of spectral measurement devices, it is characterized in that, comprise the incident that is arranged at dispersion element (2) or one or more collimating mirror 6 on the emitting light path) or/and catoptron (7).
9. a kind of spectral measurement device as claimed in claim 8 is characterized in that, at described one or more collimating mirror 6) or/and be coated with on the catoptron (7) and the corresponding spectral selectivity film of the measurement wave band of spectral measurement device (4).
10. like claim 1 or 4 or 5 described a kind of spectral measurement devices, it is characterized in that, comprise that in order to the monochromatic exit slit of outgoing (9), described exit slit (9) is arranged on the imaging surface of image-forming component (3).
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