CN102680098B - A kind of spectral measurement device - Google Patents
A kind of spectral measurement device Download PDFInfo
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- CN102680098B CN102680098B CN201210113260.0A CN201210113260A CN102680098B CN 102680098 B CN102680098 B CN 102680098B CN 201210113260 A CN201210113260 A CN 201210113260A CN 102680098 B CN102680098 B CN 102680098B
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Abstract
The invention discloses a kind of spectral measurement device, the optical element such as including entrance slit, dispersion element and image-forming component, it is coated with spectral selection thin film at optical element surface, the selection wave band of spectral selection thin film is corresponding with the measurement wave band of spectral measurement device, the optical element being coated with spectral selection thin film is only capable of the light in outgoing thin film selects wave band, and the light of other wavelength in the light path that significantly decays, thus the stray light level of optical system is greatly reduced.
Description
Technical field
The invention belongs to optical radiation measurement field, be specifically related to a kind of spectral measurement device.
Background technology
Spectral measurement device is the optical instrument for measuring luminous body spectral power distribution, is widely used in
The fields such as radiation of light source measurement, color measuring, elemental identification, chemical analysis.Spectral measurement device includes multiple
Type, the spectral region that can normally work according to it, it is divided into VUV/ultraviolet/visible light/near-infrared/red
Outward/far-infrared spectrometer etc.；According to the difference of dispersion element, it is divided into prism/diffraction grating/interference spectroscope etc.；
According to the difference of detection method, it is divided into and sees spectrometer, spectrograph and Photoelectric Spectrometer etc.；Function according to device and
Construction features, is divided into monochromator (grating/prism/double monochromator etc.) and polychromator (multi-channel spectrometer, to become
As spectrogrph etc.).
Spectral measurement device is typically made up of entrance slit, collimating element, dispersion element and image-forming component etc.,
During measurement apparatus work, light enters spectral measurement device from entrance slit, and incident illumination is collimated also by collimating element
Inciding dispersion element, incident complex light is decomposed into spectral line, by image-forming component by space color by dispersion element
The beam convergence of each wavelength scattered, on image space focal plane, detects by exit slit outgoing or by reception system.
Wherein, veiling glare is one of key factor determining various spectral measurement device certainties of measurement, and it refers to mistake ripple
The light radiation of long (non-corresponding signal light wavelength) is irradiated by outgoing or is accepted the optical signal of system detection, mainly
Derive from veiling glare produced by the overlap between surrounding light radiation, different diffraction level time and optical element defect
Or the reflection light etc. that non-optical elements produces.
In traditional spectral measurement device, concave mirror of aluminizing is conventional image-forming component, but plating
Aluminum concave mirror can be with the light radiation of high reflectance reflection ultraviolet-visible-infrared, as it is shown in figure 1, this
Broad-band reflective properties can bring considerable veiling glare to spectral measurement device.With typical Czerny-Turner
As a example by mechanical scanning type monochromator, dispersed light incides on convergent mirror (concave mirror of aluminizing), sweep mechanism
Drive convergent mirror rotates, thus by different reflection of monochromatic light to exit slit, it is achieved the scanning of whole spectrum,
Due to the overlap of different diffraction level time spectrum, on the same position of convergent mirror, may be simultaneously present monochrome to be measured
Light and the different diffraction level spectrum of other wavelength, aluminum reflector non-selectivity ground reflects owning on this this position
Light, causes, at exit slit in addition to monochromatic light to be measured, being also mixed into the veiling glare of other wavelength a large amount of.Additionally,
For using the polychromator of detector array, the light of different wave length is connect by detector array different pixels region
Receive, detection, due to the measurement light of different wave length and non-measured light all aluminized concave mirror reflex to
One pixel region, has been mixed into the veiling glare of other non-measured wavelength a large amount of in causing this pixel region.Therefore, right
In have employed the aluminum reflector spectral measurement device as image-forming component, the wide-band spectrum of its non-selectivity is anti-
Penetrating characteristic, can bring substantial amounts of veiling glare to measurement apparatus, measurement error is big.
Summary of the invention
For overcoming the defect of existing spectral measurement device, it is desirable to provide one can not change optics
The original structure of system can be greatly reduced the spectral measurement device of optical system stray light level.
A kind of spectral measurement device, including entrance slit, dispersion element and one or more image-forming component,
Light enters spectral measurement device from entrance slit, and after dispersion element light splitting, dispersed light is assembled by image-forming component
Imaging, it is characterised in that be coated with spectral selection thin film, described spectral selection on the surface of image-forming component
The selection wave band of thin film is corresponding with the measurement wave band of spectral measurement device.
A kind of spectral measurement device disclosed by the invention, light, by after dispersion element light splitting, incides and is coated with
Pool picture on the image-forming component of spectral selection thin film, the effect of spectral selection thin film be make designated band in
Light on optical film with certain ratio outgoing, and the light in its all band is owing to being positioned at optical electivity
Outside the selection wave band of property thin film, after imaged element, this some light is attenuated to relatively large extent in the optical path.Due to light
Selection wave band (such as, the spectral measurement dress corresponding with the measurement wave band of spectral measurement device of spectral selectivity thin film
The measurement wave band put is 380nm～780nm, then the selection wave band of spectral selection thin film also should be
380nm～780nm), in a certain particular locations of image-forming component, it is only capable of the light of a certain designated band
It is shot out, and is attenuated to relatively large extent at the light (such as second order spectrum etc.) of this other wave band of position so that only this refers to
Emergent light in standing wave section is converged to picture, thus veiling glare is greatly reduced.This spectral measurement device does not change former
The optical system of measurement equipment, only by light-plated spectral selectivity thin film on image-forming component, just can be greatly reduced light
The stray light level of system, thus improve accuracy of measurement.
The present invention can also limit and perfect the most further:
Optical thin film refers to be attached to the uniform and thin media coating of thickness of optical element surface, for its function,
Many types can be divided into, as reflectance coating, anti-reflection film, semi-transparent semi-reflecting film, filter coating, dichroic coating, polarizing coating,
Conducting film and protecting film etc..Spectral selection thin film in the present invention can be reflectance coating or anti-reflection film or filter coating,
It is described as follows:
A () reflectance coating (also known as reflective membrane) is the thin film of the light line reflection that can make certain wave band, its function is to increase optics
The reflectance of element surface.Light-plated spectral selectivity reflectance coating on image-forming component, thus image-forming component is at plated film
The light of designated band is only gone out and by this designated band by corresponding position by certain reflective
Reflection light is converged to picture, and the reflection light at this its all band of position is attenuated to relatively large extent, thus is greatly reduced miscellaneous
Astigmatism.
B the function of () anti-reflection film (also known as antireflective coating) is to produce destructive interference by thin film, light is reduced or eliminated
Learn the reflection light of element surface, thus increase the transmission light of these elements.Light-plated spectral selectivity on image-forming component
Anti-reflection film, image-forming component only by the light transmission in designated band and be converged to picture, the transmitted ray of its all band
It is attenuated to relatively large extent, reduces veiling glare with this.
C the function of () filter coating is that light unwanted in spectrum is filtered out, the most only allow the light of designated band lead to
Cross, and by the light ray cut of its all band.Light-plated spectral selectivity filter coating on image-forming component, image-forming component is only
Allowing the light line reflection of designated band or transmission be converged to picture, the reflection of its all band or transmitted ray are by significantly
Decay, thus reduce veiling glare.
As a kind of technical scheme, described spectral selection thin film is had difference by two or more
The optical thin film selecting wave band is constituted, and the selection wave band head and the tail of each optical thin film are overlapping and cover whole measurement ripple
Section.Such as, the measurement wave band of spectral measurement device is 380nm-780nm, and image-forming component is coated with spectrum choosing
Selecting film sexual reflex, this optical film is made up of the reflectance coating of four kinds of different choice wave bands, the reflected waveband of its correspondence
It is respectively 350nm-500nm, 450nm-600nm, 480nm-700nm and 500nm-800nm, such as Fig. 2
Shown in, the reflected waveband first place of above-mentioned each reflectance coating overlaps, and covers the measurement wave band of spectral measurement device.
Or described spectral selection thin film is the optical thin film that a local selects wavelength band gradual change, such as Fig. 3
Shown in, this spectral selection optical thin film is an entirety, selects wave band gradual change, i.e. exist in whole measurement wave band
The various location of optical thin film has different selection wavelength band.
As preferably, above-mentioned image-forming component is concave mirror, is coated with light on the surface of concave mirror
Spectral selectivity reflectance coating or filter coating.Concave mirror has reflection and the function assembled, and is coated with instead on its surface
Penetrate film, light line reflection in can selecting wave band at it, and the reflection light of its all band of significantly decaying；At its table
Face is coated with filter coating, can pass through the light at its selection wave band inner segment, and filters out its all band of the overwhelming majority
Light, so that the light only existed in optical path in optical thin film selects wave band.Here image-forming component
Can be the multi-curvature concave mirror of curvature gradual change according to certain rules, by using the concave reflection of multi-curvature
Mirror, particularly at the edge of concave mirror, the concave mirror of multi-curvature can change the exit direction of light,
Thus the aberration of lens is reduced or eliminated, make imaging clearly, improve accuracy of measurement.Or described one-tenth pixel
Part is convex lens, is coated with spectral selection anti-reflection film or filter coating on the surface of convex lens.Convex lens has transmission
The function assembled, is coated with anti-reflection film on its surface, can be by the light transmission of different-waveband, convergence；On its surface
It is coated with filter coating, may filter that the light of other different-wavebands of the overwhelming majority.
As a kind of technical scheme, including detector array, dispersed light is imaged onto array and visits by image-forming component
Survey on the photosurface of device, the different pixels region of detector array photosurface is coated with corresponding with probing wave length
Spectral selection thin film.Detector array is positioned at the image planes position of image-forming component, from each position of image-forming component
The light of outgoing is received by the different pixels region of detector array and measures, due to the different pixels of detector array
The spectral selection thin film of plating on region, carries out selectivity reception further, thus improves measurement accurately light
Degree.Such as, the gradual change filter coating of visible light wave range is set before detector array, respectively with the detection of detector
Wavelength is corresponding, it is achieved the accurate measurement of visible light wave range.
As a kind of technical scheme, including the switching mechanism for image-forming component being cut light path, described
Switching mechanism on two or more image-forming component, described two or more one-tenth pixels are set
Part is coated with the spectral selection thin film of different choice wave band respectively.The spectral selection of incision different choice wave band is thin
Film, carries out outgoing convergence by the light of different-waveband respectively, it is achieved the accurate measurement of different choice wave band light.
Difference image-forming component can be cut light path by driving means such as motors by switching mechanism here.
As a kind of technical scheme, including two or more dispersion elements and two or more
Image-forming component, and the number of dispersion element and image-forming component is equal and interval is arranged, on each image-forming component all
It is coated with the spectral selection optical thin film selecting wave band correspondent equal.Specifically, it is simply that an optical system
In there may be multiple dispersion element and multiple image-forming component (such as double monochromator), at same spectral measurement device
In, the number of dispersion element and image-forming component answers equal and interval setting, and dispersion element is positioned at entering of image-forming component
Penetrating (i.e. dispersion element image-forming component dispersion element image-forming component ...) in light path, light is through each
After dispersion element light splitting, light is intended to imaged element and is converged to picture, is all coated with selection on each image-forming component
The spectral selection optical thin film that wave band is identical.Such as, in double monochromator, including two dispersion elements and two
Individual image-forming component, the structure of two image-forming components is identical with size, and is all coated with on correspondence position
The reflectance coating of two kinds of different choice wave bands of 300nm-600nm and 550nm-800nm, light is through first dispersion
After element light splitting, on first image-forming component, reflection is converged to picture, then through second dispersion element light splitting,
On second image-forming component, reflection is converged to picture.
As a kind of technical scheme, including be arranged on the incidence of dispersion element or emitting light path or
The multiple collimating mirror of person is or/and reflecting mirror.By arranging collimating mirror in light path or/and reflecting mirror, flexibly changing
Light path, significantly reduces the volume of instrument, it is simple to optical design and actual application.Additionally, it is all right in the present invention
Other optical elements (such as diaphragm, integrating sphere etc.) are set in the optical path, to realize different measurement purposes, suitable
Should be in different optical instruments.In the present invention, the concrete optical design of the most all right basis and measurement needs,
Optionally at one or more above-mentioned collimating mirror or/and be coated with the survey with spectral measurement device on reflecting mirror
The spectral selection thin film that amount wave band is corresponding, motility is good, and accuracy of measurement is high.Can be at single collimation
Mirror is or/and be coated with thin with the spectral selection measuring wave band corresponding of spectral measurement device on single reflecting mirror
Film；Or the most several collimating mirrors are or/and be all coated with the measurement ripple with spectral measurement device on several reflecting mirror
The spectral selection thin film that section is corresponding；Or at all collimating mirrors or/and be all coated with and light on all reflecting mirrors
Spectrometry device measure the corresponding spectral selection thin film of wave band.
As a kind of technical scheme, described dispersion element is coated with the measurement ripple with spectral measurement device
The spectral selection thin film that section is corresponding.Light is on dispersion element, and spectral selection thin film is only to spectrum
Measurement apparatus is measured the light of wave band and is carried out light splitting, and the light of its all band is decayed by major part.Here color
Scattered element can be plane grating or prism etc., so that incident ray to be decomposed into directional light, is again incident on image-forming component
On be converged to picture.
As a kind of technical scheme, including in order to the monochromatic exit slit of outgoing, described exit slit
It is arranged on the imaging surface of image-forming component.Such as, dispersion element, image-forming component and exit slit may make up monochrome
Instrument, image-forming component is by convergence of rays imaging, from the exit slit injection being positioned at imaging surface, it is achieved monochromator
Measure function.
In sum, the present invention is by being coated with spectral selection thin film on image-forming component, and makes spectrum
Optional membrane selects wave band corresponding with the measurement wave band of spectral measurement device, makes image-forming component be only capable of outgoing
Light in optical thin film selection wave band, and the light of its all band in the light path that significantly decays, thus be greatly reduced
The stray light level of optical system.Further, it is also possible to according to the particular type of spectral measurement device, use not
Effective control of stray light level is realized with light-plated spectral selectivity thin film on optical element.Such as, sweep at machinery
Retouch in formula monochromator, use the switching mechanism that multiple optical thin film having different choice wave band is set, use switching
Mechanism is by different optical thin film incision light paths；In double monochromator, corresponding phase will be coated with on multiple image-forming components
Same spectral selection thin film；In polychromator, the photosurface of detector array is coated with spectral selection thin
Film etc..Therefore, spectral measurement device disclosed by the invention, various spectral measurement device spuious can be greatly reduced
Light level, thus it is effectively improved accuracy of measurement.
Accompanying drawing explanation
Accompanying drawing 1 is the reflectance change curve with wavelength of aluminum reflector；
Accompanying drawing 2 is the schematic diagram of the present invention a kind of spectral selection reflectance coating；
Accompanying drawing 3 is the schematic diagram of another kind spectral selection reflectance coating of the present invention；
Accompanying drawing 4 is the structure chart of embodiment 1；
Accompanying drawing 5 is the structure chart of embodiment 2；
Accompanying drawing 6 is the schematic diagram of switching construction in embodiment 2；
Accompanying drawing 7 is the structure chart of embodiment 3；
1-entrance slit；2-dispersion element；3-image-forming component；4-spectral selection thin film；6-collimating mirror；7-reflects
Mirror；8-switching construction；9-exit slit；10-motor.
Detailed description of the invention
Embodiment 1
As shown in Figure 4, present embodiment discloses a kind of polychromator, including entrance slit 1, dispersion element 2, imaging
Element 3, spectral selection thin film 4 and detector array.Dispersion element 2 in the present embodiment is plane grating,
Image-forming component 3 is concave mirror, and on concave mirror 3, the spectral selection thin film 4 of plating is reflectance coating.
As in figure 2 it is shown, anti-by four kinds of different choice wave bands of the spectral selection reflectance coating 4 of the present embodiment
Penetrating film to constitute, the reflected waveband of its correspondence is respectively 350nm-500nm, 450nm-600nm, 480nm-700nm
And 500nm-800nm, the reflected waveband first place of above-mentioned each reflectance coating overlaps, and covers spectral measurement dress
The measurement wave band 380nm-780nm put.
Incident ray is after plane grating 2 light splitting, and the monochromatic light of different-waveband incides on concave mirror 3,
Owing to being coated with the spectral selection reflectance coating 4 of different reflected waveband on concave mirror 3, concave mirror 3 is respectively to difference
The light selecting wave band carries out reflecting, assembling, and is imaged onto on the detector array being positioned at concave mirror 3 image planes,
And the light of its all band is not reflected by, the different pixels region of detector array receives different choice wave band respectively
Reflection light, reduce the stray light level of system, it is achieved the quick high accuracy of whole spectrum is measured.
Additionally, the present embodiment is also coated with spectral selection thin film 4, light here on the surface of detector array
Spectral selectivity thin film 4 is the filter coating of a gradual change, as it is shown on figure 3, and spectral selection filter coating 4
Corresponding with the probing wave length in detector array different pixels region by wave band.Similarly, light is through spectrum
Selective reflection film 4 reflects, assemble after, further through the spectral selection filter coating 4 on detector array surface
Filter, filter out and should not fall into the light in this pixel region, only by the light of this pixel region planted agent detection
Line, thus reduce the stray light level of system further, improve accuracy of measurement.
Embodiment 2
As it is shown in figure 5, present embodiment discloses a kind of monochromator, including entrance slit 1, dispersion element 2, imaging
Element 3, spectral selection thin film 4, collimating mirror 6, exit slit 9 and motor 10.Color in the present embodiment
Dissipating element 2 is plane grating, and image-forming component 3 is concave mirror, the optical electivity of plating on concave mirror 3
Property thin film 4 is reflectance coating.
During actual measurement, light enters through entrance slit 1, becomes a branch of parallel after the reflection of collimated mirror 6
Light incides on plane grating 2, and plane grating 2 is by incident ray dispersion and projects on concave mirror 3,
Spectral selection reflectance coating 4 on concave mirror 3 according to its reflected waveband by corresponding light line reflection, through going out
Penetrate slit 9 outgoing.
As shown in Figure 6, the present embodiment also includes the switching mechanism 8 electrically connected with motor 10, switching mechanism
Five image-forming components 3, and the echo of each image-forming component 3 polishing wax selective reflection film 4 it is provided with on 8
Section is the most different, and the reflected waveband on the first image-forming component 3-1 is 350nm-480nm, the second image-forming component 3-2
Reflected waveband be 450nm-550nm, the reflected waveband of the 3rd image-forming component 3-3 is 480nm-650nm,
The reflected waveband of two image-forming component 3-4 is 600nm-720nm, and the reflected waveband of the 5th image-forming component 3-5 is
700nm-800nm.During measurement, switching mechanism 8 is under the drive of motor 10, by different image-forming components 3
In incision light path, respectively the light line reflection of different-waveband is assembled, to realize the accurate survey of different-waveband light
Amount.
Embodiment 3
As it is shown in fig. 7, present embodiment discloses a kind of double monochromator, including 1, two dispersion elements 2 of entrance slit,
Two image-forming components 3, spectral selection thin film 4, four reflecting mirrors 7, two collimating mirrors 6 and exit slits
9.Two dispersion elements 2 in the present embodiment are plane grating, and two image-forming components 3 are structure and chi
The most identical very little concave mirror, the spectral selection thin film 4 of concave mirror 3 plating is reflectance coating, this reality
The spectral selection reflectance coating 4 executed in example on concave mirror 3 is as in figure 2 it is shown, it selects wave band and embodiment
Identical in 1, and the correspondence position that reflectance coating plates on two concave mirrors 3 is identical.
During measurement, light enters through entrance slit 1, be reflected mirror 7 reflective after, collimated mirror 6 reflects
Inciding on plane grating 2 for a branch of directional light, plane grating 2 is by incident ray dispersion and to project concave surface anti-
Penetrate on mirror 3, the spectral selection reflectance coating 4 on concave mirror 3 according to its reflected waveband by corresponding light
Reflection, from the reflection light of concave mirror 3 outgoing is reflective through two reflecting mirrors 7 again and collimating mirror 6 reflects, becomes
Inciding on plane grating 2 for directional light, plane grating 2 is by incident ray dispersion and projects concave mirror
On 3, the spectral selection reflectance coating 4 on concave mirror 3 according to its reflected waveband by corresponding light line reflection,
Through exit slit 9 outgoing.
On two concave mirrors 3 in the present embodiment, the selection wave band of optical thin film should be essentially equal.Example
As, incident ray is through plane grating 2 dispersion, and wavelength is that the purple light of 420nm is by concave mirror 3
The reflectance coating reflection of 350nm-480nm is assembled, and is reflected mirror 7, collimating mirror 6 reflects, and plane grating 2
After light splitting, inciding concave mirror 3 should be reflected convergence by the reflectance coating of 350nm-480nm equally.Two
The selection wave band correspondent equal of the spectral selection reflectance coating 4 on concave mirror 3 correspondence position, strict guarantee
The reflection concordance of twice dispersion, thus significantly reduce the stray light level of system, improve measurement accurately
Degree.Compared to other spectrogrphs, double monochromator inherently has the highest accuracy of measurement, then by concave surface
Light-plated spectral selectivity reflectance coating on reflecting mirror 3 so that the accuracy of measurement of double monochromator is higher.
Claims (9)
1. a spectral measurement device, including entrance slit (1), dispersion element (2) and one or more image-forming component (3), light enters spectral measurement device from entrance slit (1), after dispersion element (2) light splitting, dispersed light is converged to picture by image-forming component (3), it is characterized in that, be coated with spectral selection thin film (4) on the surface of image-forming component (3), the selection wave band of described spectral selection thin film (4) is corresponding with the measurement wave band of spectral measurement device；Also include that dispersed light is imaged onto on the photosurface of detector array by detector array, image-forming component (3), the different pixels region of described detector array photosurface is coated with the spectral selection thin film (4) corresponding with probing wave length.
2. a kind of spectral measurement device as claimed in claim 1, it is characterized in that, described spectral selection thin film (4) is had the optical thin film of different choice wave band and constitutes by two or more, and the selection wave band head and the tail of each optical thin film are overlapping and cover whole measurement wave band；Or described spectral selection thin film (4) is the optical thin film that a kind of local selects wavelength band gradual change.
3. a kind of spectral measurement device as claimed in claim 1, it is characterized in that, including for the switching mechanism (8) by image-forming component (3) incision light path, arranging two or more image-forming component (3) on described switching mechanism (8), described two or more image-forming components (3) are coated with the spectral selection thin film (4) selecting wave band different respectively.
4. a kind of spectral measurement device as claimed in claim 1, it is characterized in that, including two or more dispersion elements (2) and two or more image-forming component (3), the number of dispersion element (2) and image-forming component (2) is equal and interval is arranged, and each image-forming component (3) is all coated with the spectral selection thin film (4) selecting wave band correspondent equal.
5. a kind of spectral measurement device as described in claim 1 or 3 or 4, it is characterised in that described image-forming component (3) is concave mirror, is coated with spectral selection reflectance coating or filter coating on the surface of concave mirror.
6. a kind of spectral measurement device as described in claim 1 or 4, it is characterised in that be coated with the spectral selection thin film (4) corresponding with the measurement wave band of spectral measurement device on described dispersion element (2).
7. a kind of spectral measurement device as described in claim 1 or 4, it is characterised in that one or more collimating mirror 6 in the incidence including being arranged at dispersion element (2) or emitting light path) or/and reflecting mirror (7).
8. a kind of spectral measurement device as claimed in claim 7, it is characterized in that, at described one or more collimating mirror (6) or/and be coated with the spectral selection thin film (4) corresponding with the measurement wave band of spectral measurement device on reflecting mirror (7).
9. a kind of spectral measurement device as described in claim 1 or 3 or 4, it is characterised in that include that, in order to the monochromatic exit slit of outgoing (9), described exit slit (9) is arranged on the imaging surface of image-forming component (3).
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| CN103389159B (en) * | 2013-07-23 | 2015-02-18 | 中国科学院长春光学精密机械与物理研究所 | Prism and grating cascading dispersion two-channel and high-resolution spectrum imaging system |
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| CN108534898A (en) * | 2018-06-06 | 2018-09-14 | 首都师范大学 | Hyperspectral imager, EO-1 hyperion camera and EO-1 hyperion camera system |
| CN109030360A (en) * | 2018-08-03 | 2018-12-18 | 苏州博维仪器科技有限公司 | Optical path adjustment method |
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| CN202522321U (en) * | 2012-04-18 | 2012-11-07 | 杭州远方光电信息股份有限公司 | Spectral measurement device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106841105A (en) * | 2017-04-14 | 2017-06-13 | 北京国科虹谱光电技术有限公司 | A kind of multi-wavelength near-infrared spectral measurement device for Object Classification |
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| CN102680098A (en) | 2012-09-19 |
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