CN101126148A - 一种具有阻隔兼防护功能的纳米薄膜及其制做方法 - Google Patents
一种具有阻隔兼防护功能的纳米薄膜及其制做方法 Download PDFInfo
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- CN101126148A CN101126148A CNA2007101196226A CN200710119622A CN101126148A CN 101126148 A CN101126148 A CN 101126148A CN A2007101196226 A CNA2007101196226 A CN A2007101196226A CN 200710119622 A CN200710119622 A CN 200710119622A CN 101126148 A CN101126148 A CN 101126148A
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- 239000010409 thin film Substances 0.000 title claims description 31
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- 239000007789 gas Substances 0.000 claims abstract description 32
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000001301 oxygen Substances 0.000 claims abstract description 13
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 13
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- 238000000151 deposition Methods 0.000 claims abstract description 7
- 229920001296 polysiloxane Polymers 0.000 claims abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000000463 material Substances 0.000 claims description 31
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- 239000003513 alkali Substances 0.000 claims description 2
- 230000003628 erosive effect Effects 0.000 claims description 2
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical group C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 150000003839 salts Chemical class 0.000 claims description 2
- RSNQKPMXXVDJFG-UHFFFAOYSA-N tetrasiloxane Chemical compound [SiH3]O[SiH2]O[SiH2]O[SiH3] RSNQKPMXXVDJFG-UHFFFAOYSA-N 0.000 claims description 2
- UHUUYVZLXJHWDV-UHFFFAOYSA-N trimethyl(methylsilyloxy)silane Chemical compound C[SiH2]O[Si](C)(C)C UHUUYVZLXJHWDV-UHFFFAOYSA-N 0.000 claims description 2
- 238000005728 strengthening Methods 0.000 abstract description 4
- 239000002184 metal Substances 0.000 abstract description 3
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- 229940079593 drug Drugs 0.000 abstract 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
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Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN2007101196226A CN101126148B (zh) | 2007-07-27 | 2007-07-27 | 一种具有阻隔兼防护功能的纳米薄膜及其制做方法 |
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CN2007101196226A CN101126148B (zh) | 2007-07-27 | 2007-07-27 | 一种具有阻隔兼防护功能的纳米薄膜及其制做方法 |
Publications (2)
Publication Number | Publication Date |
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CN101126148A true CN101126148A (zh) | 2008-02-20 |
CN101126148B CN101126148B (zh) | 2010-04-21 |
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CN2007101196226A Expired - Fee Related CN101126148B (zh) | 2007-07-27 | 2007-07-27 | 一种具有阻隔兼防护功能的纳米薄膜及其制做方法 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101886253A (zh) * | 2010-06-25 | 2010-11-17 | 合肥科烨电物理设备制造有限公司 | 潘宁放电离子源柔性材料真空镀膜机 |
CN102717969A (zh) * | 2011-03-30 | 2012-10-10 | 利乐拉瓦尔集团及财务有限公司 | 包装层、制备包装层压板的方法以及其生产的包装容器 |
WO2014127644A1 (en) * | 2013-02-25 | 2014-08-28 | Au Optronics Corporation | Barrier film and methods of making same |
CN105154857A (zh) * | 2015-09-16 | 2015-12-16 | 东华大学 | 一步法制备褶皱薄膜的工艺 |
CN106456847A (zh) * | 2014-07-22 | 2017-02-22 | 百多力股份公司 | 可生物降解的金属支架和方法 |
CN113308945A (zh) * | 2021-06-17 | 2021-08-27 | 佛山南海力豪包装有限公司 | 表面涂覆纳米氧化硅涂层的高阻隔纸张及其制作工艺 |
CN113308940A (zh) * | 2021-05-17 | 2021-08-27 | 佛山南海力豪包装有限公司 | 一种等离子体高阻隔纸及其制备方法 |
CN115667171A (zh) * | 2020-05-28 | 2023-01-31 | D.施华洛世奇两合公司 | 在装饰元件上提供有色涂层的方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09167755A (ja) * | 1995-12-15 | 1997-06-24 | Nec Corp | プラズマ酸化膜処理装置 |
US7288292B2 (en) * | 2003-03-18 | 2007-10-30 | International Business Machines Corporation | Ultra low k (ULK) SiCOH film and method |
-
2007
- 2007-07-27 CN CN2007101196226A patent/CN101126148B/zh not_active Expired - Fee Related
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101886253A (zh) * | 2010-06-25 | 2010-11-17 | 合肥科烨电物理设备制造有限公司 | 潘宁放电离子源柔性材料真空镀膜机 |
CN101886253B (zh) * | 2010-06-25 | 2013-09-11 | 合肥科烨电物理设备制造有限公司 | 潘宁放电离子源柔性材料真空镀膜机 |
CN102717969A (zh) * | 2011-03-30 | 2012-10-10 | 利乐拉瓦尔集团及财务有限公司 | 包装层、制备包装层压板的方法以及其生产的包装容器 |
WO2014127644A1 (en) * | 2013-02-25 | 2014-08-28 | Au Optronics Corporation | Barrier film and methods of making same |
CN106456847A (zh) * | 2014-07-22 | 2017-02-22 | 百多力股份公司 | 可生物降解的金属支架和方法 |
CN105154857A (zh) * | 2015-09-16 | 2015-12-16 | 东华大学 | 一步法制备褶皱薄膜的工艺 |
CN115667171A (zh) * | 2020-05-28 | 2023-01-31 | D.施华洛世奇两合公司 | 在装饰元件上提供有色涂层的方法 |
CN113308940A (zh) * | 2021-05-17 | 2021-08-27 | 佛山南海力豪包装有限公司 | 一种等离子体高阻隔纸及其制备方法 |
CN113308945A (zh) * | 2021-06-17 | 2021-08-27 | 佛山南海力豪包装有限公司 | 表面涂覆纳米氧化硅涂层的高阻隔纸张及其制作工艺 |
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CN101126148B (zh) | 2010-04-21 |
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