CN101123168A - Thin film peel-off device - Google Patents
Thin film peel-off device Download PDFInfo
- Publication number
- CN101123168A CN101123168A CNA2006100298603A CN200610029860A CN101123168A CN 101123168 A CN101123168 A CN 101123168A CN A2006100298603 A CNA2006100298603 A CN A2006100298603A CN 200610029860 A CN200610029860 A CN 200610029860A CN 101123168 A CN101123168 A CN 101123168A
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- film
- thin film
- stained
- peel
- glutinous
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Abstract
A thin film stripping equipment comprises a plummer, a sticky thin film adhesion part and a drive mechanism. The plummer is used for bearing base plate on which a thin film is pasted. The thin film adhesion part is used for touching the thin film in order to get a part of the thin film that is to be pasted on the thin film adhesion part. The drive mechanism motivates the thin film adhesion part or the plummer for stripping the thin film from the base plate.
Description
Technical field
The present invention especially is stained with the thin film peel-off device that glutinous portion comes stripping film about a kind of film that utilizes about a kind of thin film peel-off device.
Background technology
Traditionally, in multiple handling procedure, be not subjected to pollute or damage, or, can on substrate, be adhesive with film usually for the ease of the enforcement of processing procedure in order to protect on the semiconductor substrate formed circuit.This film just is present in the intermediate process, is not present in the final products.Therefore, need the program that one film peeled off, thereby film is peeled off.
Traditional thin film peel-off device normally utilizes large-area adhesive tape to be attached on the film, then this adhesive tape and film is peeled off substrate (such as display panels).Yet such program tends to waste a lot of adhesive tapes, and not only not environmental protection more makes manufacturing cost effectively to reduce.
No. 443705 patent of TaiWan, China patent announcement disclosed a kind of circuit board film stripping machine, wherein be exactly to utilize roller that one whole volume adhesive tape is delivered to by guide plate (36) from feeding gummed paper wheel (55) to arrive rewinding gummed paper wheel (56), shown in Fig. 1-4 of No. 443705 patents.But because of it is to paste film with adhesive tape, so this adhesive tape can't be repeated to use.
Summary of the invention
Therefore, an object of the present invention is to provide a kind of thin film peel-off device, utilize film to be stained with glutinous portion and earlier the part of film is torn up, the film that will be torn up is peeled off substrate then, thereby avoids the waste of adhesive tape, can also reduce manufacturing cost.
For achieving the above object, the invention provides a kind of thin film peel-off device, the film that it comprises plummer, have a stickiness is stained with glutinous portion and driving mechanism.Plummer is adhesive with film in order to bearing substrate on the substrate.Film is stained with glutinous portion in order to contact membrane, is stained with in the glutinous portion so that the part of film torn up and paste at film.The drive mechanism film is stained with one of glutinous portion and plummer, thereby film is peeled off substrate.
Above-mentioned thin film peel-off device can also comprise pushing and pressing mechanism, pushes against in order to the direction that this film is stained with glutinous portion toward film.Driving mechanism can drive that film is stained with glutinous portion and pushing and pressing mechanism moves, or drives plummer and move.
Description of drawings
Fig. 1 shows first state according to the thin film peel-off device of first embodiment of the invention.
Fig. 2 shows second state according to the thin film peel-off device of first embodiment of the invention.
Fig. 3 shows the third state according to the thin film peel-off device of first embodiment of the invention.
Fig. 4 shows the schematic diagram according to the fixture of the thin film peel-off device of second embodiment of the invention.
Fig. 5 shows according to one of action schematic diagram of the hull and pulp removing machine structure of the thin film peel-off device of third embodiment of the invention.
Fig. 6 shows according to two of the action schematic diagram of the hull and pulp removing machine structure of the thin film peel-off device of third embodiment of the invention.
Fig. 7 shows according to three of the action schematic diagram of the hull and pulp removing machine structure of the thin film peel-off device of third embodiment of the invention.
Fig. 8 shows the vertical view according to the hull and pulp removing machine structure of the thin film peel-off device of third embodiment of the invention.
Embodiment
Fig. 1 to 3 show according to the thin film peel-off device of first embodiment of the invention first to the third state.As shown in figure 13, the thin film peel-off device of present embodiment comprises plummer 10, film with stickiness is stained with glutinous portion 20, driving mechanism 30 and pushing and pressing mechanism 40.
Plummer 10 is adhesive with film 4 in order to bearing substrate 2 on the substrate 2.Plummer 10 can have one or more sucker (not shown)s and fix substrate 2 to see through vacuum suction device.Film is stained with glutinous portion 20 can have any appropriate structuring.In the present embodiment, the film with stickiness is stained with glutinous portion 20 and is got roller for film is glutinous, in order to contact this film 4 (Fig. 1), rotates an angle (Fig. 2) then, sticks in the portion 20 so that the part of this film 4 torn up and paste to be stained with at this film.It should be noted that the glutinous roller of getting of film also can be changeed an angle, can be reached same effect as long as up lift.Pushing and pressing mechanism 40 pushes against in order to the direction that this film 4 is stained with glutinous portion 20 toward this film, clamps film 4 jointly thereby be stained with glutinous portion 20 with film.Pushing and pressing mechanism 40 is made of pneumatic cylinder, oil hydraulic cylinder or driving screw etc.Driving mechanism 30 drive these films be stained with glutinous portion 20 and this plummer 10 both one of in fact towards horizontal direction and movement in vertical direction, thereby this film 4 is peeled off this substrate 2.In should using, be earlier film to be stained with glutinous portion 20 to lift (Fig. 3), and then the translation film is stained with glutinous portion 20.For example, driving mechanism 30 can drive this film and be stained with glutinous portion 20 and move, or drives this plummer 10 and move.
It should be noted that pushing and pressing mechanism 40 is omissible members.In this case, as long as film is stained with the glutinous viscous force of getting film of glutinous portion 20 enough big (such as film 4 glutinous be taken at film to be stained with the area that sticks portion 20 enough big), it is fixing then film can be stained with glutinous portion 20, and makes film be stained with glutinous portion 20 and plummer 10 relative motions, still effective stripping film 4.Film is stained with glutinous portion 20 and can be designed to and can moves up and down, and perhaps plummer 10 can be designed to and can move up and down.
Film is stained with glutinous portion 20 will tear off substrate 2 with film 4 parts, thus film be stained with periphery that glutinous portion 20 contacts with film 4 may not be certain will be as shown in Figure 2 so big.Under the situation that has top-pushing mechanism 40 to exist, it is very little with the area that film 4 contacts that film is stained with glutinous portion 20, whole film tear off that needed pulling force major part comes from top-pushing mechanism 40 and film is stained with the chucking power that sticks between the portion 20.Therefore, it is longer that film is stained with the useful life that sticks portion 20.When the stickiness of being stained with glutinous portion 20 when film is degenerated, can change film be stained with glutinous portion 20 or again gluing can recover normal operation.
Fig. 4 shows the schematic diagram according to the fixture of the thin film peel-off device of second embodiment of the invention.As shown in Figure 4, the thin film peel-off device of present embodiment more comprises fixture 50, is stained with the glutinous portion 20 glutinous films of getting 4 in order to direct clamping by film.In this case, driving mechanism 30 can drive that film is stained with glutinous portion 20 and fixture 50 moves, and perhaps drives plummer 10 and moves.
Fig. 5 to 7 shows the action schematic diagram according to the hull and pulp removing machine structure of the thin film peel-off device of third embodiment of the invention.Fig. 8 shows the vertical view according to the hull and pulp removing machine structure of the thin film peel-off device of third embodiment of the invention.Shown in Fig. 5 to 8, the thin film peel-off device of present embodiment also comprises hull and pulp removing machine structure 60, with being stained with glutinous portion 20 so that film 4 breaks away from film.The action of whole hull and pulp removing machine structure 60 in regular turn as shown in Figs. 5 to 7.In Fig. 5, film 4 is not peeled off substrate 2 as yet fully.In Fig. 6, film 4 is peeled off substrate 2 and fully toward sagging.In Fig. 7, hull and pulp removing machine structure 60 pushing tow films 4 break away from it and fall down after film is stained with glutinous portion 20.In the present embodiment, hull and pulp removing machine structure 60 is made of one or two push rods, backs down so that it breaks away from film and is stained with glutinous portion 20 thereby film is stained with film 4 in the glutinous portion 20.Perhaps, hull and pulp removing machine structure 60 can utilize mechanical arm to reach.
It should be noted that film among the present invention be stained with glutinous portion 20 can be designed as reusable, thereby can reduce cost effectively.
Utilize thin film peel-off device of the present invention, can avoid needing in the known technology to use the shortcoming of a large amount of adhesive tapes, thereby effectively reduce manufacturing cost.
The specific embodiment that is proposed in the detailed description of preferred embodiment is only in order to convenient explanation technology contents of the present invention, but not with narrow sense of the present invention be limited to the foregoing description, in the situation that does not exceed spirit of the present invention and following claim, the many variations of being done is implemented, and all belongs to scope of the present invention.
The primary clustering symbol description
2 substrates
4 films
10 plummers
20 films are stained with glutinous section
30 driving mechanisms
40 pushing and pressing mechanisms
50 clamping devices
60 material removing mechanisms
Claims (19)
1. a thin film peel-off device is characterized in that, comprises:
Plummer in order to bearing substrate, is adhesive with film on the described substrate;
Film with stickiness is stained with glutinous portion, in order to contacting described film, is stained with in the glutinous portion so that the part of described film torn up and paste at described film; And
Driving mechanism drives described film and is stained with the motion of one of glutinous portion and described plummer, thereby described film is peeled off described substrate.
2. thin film peel-off device as claimed in claim 1 is characterized in that, it is the glutinous roller of getting of film that described film is stained with glutinous portion.
3. thin film peel-off device as claimed in claim 2 is characterized in that, described film is glutinous gets that roller can be rotated an angle so that the described part of described film tears up.
4. thin film peel-off device as claimed in claim 1 is characterized in that, the described film of described drive mechanism is stained with glutinous portion and is moved.
5. thin film peel-off device as claimed in claim 1 is characterized in that, the described plummer of described drive mechanism moves.
6. thin film peel-off device as claimed in claim 1 is characterized in that, also comprises pushing and pressing mechanism, pushes against in order to the direction that described film is stained with glutinous portion toward described film.
7. thin film peel-off device as claimed in claim 6 is characterized in that, the described film of described drive mechanism is stained with glutinous portion and described pushing and pressing mechanism moves.
8. thin film peel-off device as claimed in claim 6 is characterized in that, the described plummer of described drive mechanism moves.
9. thin film peel-off device as claimed in claim 1 is characterized in that, also comprises fixture, in order to the described film of clamping.
10. thin film peel-off device as claimed in claim 9 is characterized in that, the described film of described drive mechanism is stained with glutinous portion and described fixture moves.
11. thin film peel-off device as claimed in claim 9 is characterized in that, the described plummer of described drive mechanism moves.
12. thin film peel-off device as claimed in claim 1 is characterized in that, also comprises the hull and pulp removing machine structure, with being stained with glutinous portion so that described film breaks away from described film.
13. thin film peel-off device as claimed in claim 12 is characterized in that, described hull and pulp removing machine structure comprises push rod.
14. thin film peel-off device as claimed in claim 12 is characterized in that, described hull and pulp removing machine structure comprises mechanical arm.
15. thin film peel-off device as claimed in claim 1 is characterized in that, described plummer has sucker to secure the above substrate.
16. thin film peel-off device as claimed in claim 1 is characterized in that, described film is stained with one of glutinous portion and described plummer in fact towards horizontal direction and movement in vertical direction.
17. thin film peel-off device as claimed in claim 1 is characterized in that, it is reusable that described film is stained with glutinous portion.
18. thin film peel-off device as claimed in claim 17 is characterized in that, it is the glutinous roller of getting of film that described film is stained with glutinous portion.
19. thin film peel-off device as claimed in claim 18 is characterized in that, described film is glutinous to be got roller and can be rotated an angle so that tear up the described part of described film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100298603A CN101123168A (en) | 2006-08-09 | 2006-08-09 | Thin film peel-off device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2006100298603A CN101123168A (en) | 2006-08-09 | 2006-08-09 | Thin film peel-off device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101123168A true CN101123168A (en) | 2008-02-13 |
Family
ID=39085437
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2006100298603A Pending CN101123168A (en) | 2006-08-09 | 2006-08-09 | Thin film peel-off device |
Country Status (1)
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| CN (1) | CN101123168A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101333079B (en) * | 2008-08-06 | 2012-10-31 | 友达光电股份有限公司 | Pad pasting tearing-off device and method |
| CN105252880A (en) * | 2012-11-14 | 2016-01-20 | 财团法人工业技术研究院 | Film peeling device and method thereof |
| CN106809652A (en) * | 2017-04-14 | 2017-06-09 | 常州亿晶光电科技有限公司 | Solar panel safety glass feeding device |
| CN108454991A (en) * | 2017-02-17 | 2018-08-28 | 盟立自动化股份有限公司 | Carrier substrate and method for removing adhesive layer from carrier substrate |
| CN110676207A (en) * | 2019-09-27 | 2020-01-10 | 云谷（固安）科技有限公司 | Separation device and separation method |
| TWI786848B (en) * | 2021-09-24 | 2022-12-11 | 陽程科技股份有限公司 | Sheet separating device and sheet separating method |
-
2006
- 2006-08-09 CN CNA2006100298603A patent/CN101123168A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101333079B (en) * | 2008-08-06 | 2012-10-31 | 友达光电股份有限公司 | Pad pasting tearing-off device and method |
| CN105252880A (en) * | 2012-11-14 | 2016-01-20 | 财团法人工业技术研究院 | Film peeling device and method thereof |
| CN105252880B (en) * | 2012-11-14 | 2018-05-15 | 财团法人工业技术研究院 | Film peeling device and method thereof |
| CN108454991A (en) * | 2017-02-17 | 2018-08-28 | 盟立自动化股份有限公司 | Carrier substrate and method for removing adhesive layer from carrier substrate |
| CN108454991B (en) * | 2017-02-17 | 2020-05-12 | 盟立自动化股份有限公司 | Carrier substrate and method for removing adhesive layer from carrier substrate |
| CN106809652A (en) * | 2017-04-14 | 2017-06-09 | 常州亿晶光电科技有限公司 | Solar panel safety glass feeding device |
| CN110676207A (en) * | 2019-09-27 | 2020-01-10 | 云谷（固安）科技有限公司 | Separation device and separation method |
| CN110676207B (en) * | 2019-09-27 | 2021-11-16 | 云谷（固安）科技有限公司 | Separation device and separation method |
| TWI786848B (en) * | 2021-09-24 | 2022-12-11 | 陽程科技股份有限公司 | Sheet separating device and sheet separating method |
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