CN101122680A - 可变形镜 - Google Patents
可变形镜 Download PDFInfo
- Publication number
- CN101122680A CN101122680A CNA2007101413923A CN200710141392A CN101122680A CN 101122680 A CN101122680 A CN 101122680A CN A2007101413923 A CNA2007101413923 A CN A2007101413923A CN 200710141392 A CN200710141392 A CN 200710141392A CN 101122680 A CN101122680 A CN 101122680A
- Authority
- CN
- China
- Prior art keywords
- mirror
- mirror substrate
- piezoelectric element
- substrate
- deformable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 192
- 238000009940 knitting Methods 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 239000010931 gold Substances 0.000 description 29
- 229910052737 gold Inorganic materials 0.000 description 27
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 25
- 239000000853 adhesive Substances 0.000 description 21
- 230000001070 adhesive effect Effects 0.000 description 21
- 238000000034 method Methods 0.000 description 20
- 230000008569 process Effects 0.000 description 12
- 230000003287 optical effect Effects 0.000 description 10
- 239000007767 bonding agent Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000008602 contraction Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000004075 alteration Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000003475 lamination Methods 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000012190 activator Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 150000002343 gold Chemical class 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 229910015363 Au—Sn Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 150000001398 aluminium Chemical class 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1392—Means for controlling the beam wavefront, e.g. for correction of aberration
- G11B7/13925—Means for controlling the beam wavefront, e.g. for correction of aberration active, e.g. controlled by electrical or mechanical means
- G11B7/13927—Means for controlling the beam wavefront, e.g. for correction of aberration active, e.g. controlled by electrical or mechanical means during transducing, e.g. to correct for variation of the spherical aberration due to disc tilt or irregularities in the cover layer thickness
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1362—Mirrors
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Optical Elements Other Than Lenses (AREA)
- Optical Head (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006216636A JP2008040298A (ja) | 2006-08-09 | 2006-08-09 | 形状可変ミラー |
| JP2006216636 | 2006-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101122680A true CN101122680A (zh) | 2008-02-13 |
Family
ID=38669661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101413923A Pending CN101122680A (zh) | 2006-08-09 | 2007-08-09 | 可变形镜 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US20080037148A1 (ja) |
| EP (1) | EP1887573A1 (ja) |
| JP (1) | JP2008040298A (ja) |
| CN (1) | CN101122680A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102608728A (zh) * | 2012-03-31 | 2012-07-25 | 中国科学院光电技术研究所 | 一种利用磁力校正金属反射镜面形的装置及方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7321529B2 (ja) * | 2020-02-05 | 2023-08-07 | タチバナテクノス株式会社 | Ｐｔｃ面状発熱体 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3742234A (en) * | 1971-06-23 | 1973-06-26 | Hughes Aircraft Co | High speed small deflection interlace mirror |
| US3904274A (en) | 1973-08-27 | 1975-09-09 | Itek Corp | Monolithic piezoelectric wavefront phase modulator |
| US4655563A (en) | 1985-11-25 | 1987-04-07 | Itek Corporation | Variable thickness deformable mirror |
| JPH05333274A (ja) | 1992-05-29 | 1993-12-17 | Hitachi Ltd | 形状可変鏡および該形状可変鏡の組立方法ならびに該形状可変鏡を用いた補償光学装置、アレイレーザ発振器、レーザ同位体分離器 |
| JP3311869B2 (ja) * | 1994-09-16 | 2002-08-05 | 株式会社東芝 | 半導体光電変換素子およびこれを用いた撮像装置 |
| US6726338B2 (en) * | 2000-11-16 | 2004-04-27 | Olympus Optical Co., Ltd. | Variable shape mirror and its manufacturing method |
| US6942352B2 (en) * | 2002-08-15 | 2005-09-13 | Bennett Optical Research, Inc. | Transfer optics |
| JP2005196859A (ja) | 2004-01-07 | 2005-07-21 | Matsushita Electric Ind Co Ltd | 光ピックアップ装置及び光ディスク装置 |
-
2006
- 2006-08-09 JP JP2006216636A patent/JP2008040298A/ja active Pending
-
2007
- 2007-08-06 EP EP07015368A patent/EP1887573A1/en not_active Withdrawn
- 2007-08-08 US US11/889,046 patent/US20080037148A1/en not_active Abandoned
- 2007-08-09 CN CNA2007101413923A patent/CN101122680A/zh active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102608728A (zh) * | 2012-03-31 | 2012-07-25 | 中国科学院光电技术研究所 | 一种利用磁力校正金属反射镜面形的装置及方法 |
| CN102608728B (zh) * | 2012-03-31 | 2013-11-13 | 中国科学院光电技术研究所 | 一种利用磁力校正金属反射镜面形的装置及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20080037148A1 (en) | 2008-02-14 |
| JP2008040298A (ja) | 2008-02-21 |
| EP1887573A1 (en) | 2008-02-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20080213 |