CN101113513A - Composite titanium-aluminum alloy target and method for making same - Google Patents
Composite titanium-aluminum alloy target and method for making same Download PDFInfo
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- CN101113513A CN101113513A CNA200710120869XA CN200710120869A CN101113513A CN 101113513 A CN101113513 A CN 101113513A CN A200710120869X A CNA200710120869X A CN A200710120869XA CN 200710120869 A CN200710120869 A CN 200710120869A CN 101113513 A CN101113513 A CN 101113513A
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Abstract
The invention relates to a preparation method of a complex titanium aluminum alloy target with low production cost and good thermal conductance. The technic proposal of the invention is that: the complex titanium aluminum alloy target is characterized in that the shape of the titanium aluminum alloy target is a column with a groove at the upper surface or the lower surface; the shape of a back target comprises a column base, the area of the upper surface of the column base is the same as that of the lower surface of the titanium aluminum alloy target. The preparation method comprises the steps that: the titanium aluminum alloy target surface is cleaned in a ultrasonic cleaner, then is coated with metallization material, and positioned into a vacuum furnace for heat preservation in a temperature being higher than the melting point of the alloy for a certain time, and then cooled to room temperature; Al, Cu, Mo or the back alloy targets thereof are cleaned in the ultrasonic cleaner, a welding material is clamped between the titanium aluminum target surface and the back target to be arranged, and the alloy target and the back target are welded according to the technological conditions of sputtering in a vacuum furnace or atmosphere.
Description
Technical field
The present invention relates to titanium-aluminum alloy target and preparation method thereof field, especially can solve titanium aluminum alloy and be difficult to Welding Problems, titanium-aluminium alloy target material is connected to prepare the method for composite titanium-aluminum alloy target with the soldering of back of the body target.
Background technology
Intermatallic Ti-Al compound belongs to hard and fragile material, has good wear resistance, is covering one deck Intermatallic Ti-Al compound on the universal cutter surface, can effectively prolong the duration of service of cutter, has application promise in clinical practice at mechanical processing industry.
In addition,, the color of finishing material is required more and more higher, require decorating film to have higher chemical stability and color weathering resistance preferably simultaneously along with developing rapidly of Modern Decorative industry.Titanium-aluminium alloy target material can provide golden yellow, black, brown, rose-colored isochrome film according to sputtering atmosphere, has advantage corrosion-resistant, wear-resisting and attractive in appearance, can satisfy the requirement of finishing material to color and chemical stability.Titanium-aluminium alloy target material all is being better than tantalum of the same type, tantalum alloy, tungsten or tungstenalloy target aspect solidity to corrosion, preparation cost, the sputter cost.
Usually adopt technologies such as magnetron sputtering, multi-arc ion coating, hallow cathode deposition, HCD, arc ion plating to adhere to one deck TiAl (CN) layer at material surface, these technologies all have the requirement of conduction, heat conduction to target, the capacity of heat transmission is high more, then production efficiency is high more, coating quality is good more, conductive capability is good more, and the handiness of technology is high more, and the application surface of target is also wide more.
Because the heat conduction of titanium aluminium target, conductive capability is relatively poor, and hard crisp difficult processing, in suitability for industrialized production, the production efficiency of having relatively high expectations, if want titanium aluminium target to reach the requirement of scale production, can only be processed into thin slice to satisfy conduction, the requirement of heat conduction, and the utilization ratio of monolithic titanium aluminium target is very low, be difficult to reclaim, increase production cost, be unsuitable for the suitability for industrialized production requirement, and titanium aluminium composition target is owing to utilized aluminium, copper, the high conduction of molybdenum and alloy thereof, the capacity of heat transmission, make titanium aluminium target and metal be connected to form composition target, not only can satisfy the heat conduction of sputtering technology to the target requirement, conduction and mechanical property improved coating effects, but also the utilization ratio of the unit's of making target improve greatly, aluminium, copper, molybdenum and their alloy can also utilize once more, have very high economic worth.
If the good material of conductive and heat-conductive is connected with titanium aluminum alloy, must solve the problem of titanium aluminum alloy surface compact oxide film, the existence of oxide film makes titanium aluminium be difficult for welding with other materials, in order to reach the industrial application requirement of titanium aluminium target, the present invention has adopted special method, promptly earlier the titanium surface of aluminum target material is metallized, and then prepare titanium aluminium composition target, solved the problem that titanium aluminum alloy is difficult to weld with the method for solder welding.
Summary of the invention
The purpose of this invention is to provide that a kind of production cost is low, good heat conductivity, composite titanium-aluminum alloy target that coating effects is good and preparation method thereof, titanium aluminium target and aluminium, copper, molybdenum or their alloy are formed by connecting.
The technical solution used in the present invention is: composite titanium-aluminum alloy target, comprise target and back of the body target, target material and back of the body target link together, and it is characterized in that: titanium-aluminium alloy target material be shaped as or lower surface is provided with the right cylinder of groove.
Described groove floor is circular, and the center of rounded bottom surface overlaps with the center of right cylinder upper surface, forms a circular table in the periphery of right cylinder upper surface, is provided with domatic between described circular table and the rounded bottom surface.
The shape of described back of the body target comprises a right cylinder base, described right cylinder base lower surface is provided with a cylinder bodily form projection, the lower surface of cylinder bodily form projection is provided with groove, and the upper surface of described right cylinder base is identical with the lower surface area of titanium-aluminium alloy target material.
The groove shapes that is provided with on the described back of the body target cylinder bodily form convex lower surface is for circular.
A kind of preparation method of above-mentioned composite titanium-aluminum alloy target is characterized in that comprising the following steps:
(1), the titanium aluminum alloy target surface is cleaned in ultrasonic cleaning machine after, at titanium aluminum alloy surface metallization formed material, put into vacuum oven then, be higher than the temperature insulation certain hour of alloy melting point, be cooled to room temperature then, the titanium aluminum alloy surface finish is smooth standby;
(2) Al, Cu, Mo or their alloy back of the body target are wherein cleaned up in ultrasonic cleaning;
(3) with scolder assembling on titanium aluminum alloy target surface and the back of the body target therebetween, in vacuum oven or in the atmosphere, weld according to the sputtering technology condition.
The composition proportion of titanium-aluminum alloy target is 0.1%～70%wt for Al content, and She's amount is Ti.
Described metallization material is an Ag base alloy pulp.
Back of the body target material is Cu, Mo, Al and copper alloy, molybdenum alloy, aluminium alloy.
Welding material is alloy, the Sn base low-melting alloy of AgCu series.
Between the surface of the periphery of titanium aluminum alloy target surface and the back of the body target right cylinder base solder sheet is set.
Titanium aluminium composite target material provided by the invention has following advantage:
1, the metalized temperature is low: used metallization material can be finished metallization about 820 ℃, and is also lower than the metallizing temperature of pottery;
2, wide adaptability: can adapt to the titanium aluminium target of heterogeneity, the aluminium content in the target can change in the 0.1%-70% scope;
3, conduction, good heat conductivity: because used back of the body target electrical and thermal conductivity performance is good, the composite titanium-aluminum target for preparing by welding has better electrical and thermal conductivity performance than common titanium aluminium target.
4, production cost is low: select different scolder and weldprocedure according to different process environments, back of the body target can be reused, and reduces production costs greatly;
5, coating effects is good: the film even film layer that the titanium aluminium composite target material of preparing with the present invention is prepared, smooth, strong adhesion, color even, long service life.
The present invention is described further below in conjunction with drawings and Examples.
Description of drawings
Fig. 1 is a titanium-aluminium alloy target material structural representation in the manufacture method of the present invention;
Fig. 2 is that the A of Fig. 1 is to view;
Fig. 3 is an alloy back of the body target structure synoptic diagram of the present invention;
Fig. 4 is that the A of Fig. 3 is to view;
Fig. 5 titanium aluminium composition target wiring layout.
Embodiment
Example 1:
Composite titanium-aluminum alloy target, comprise target and back of the body target, target material and back of the body target link together, as shown in Figure 1, titanium-aluminium alloy target material 1 be shaped as the right cylinder that upper surface is provided with groove 2, groove floor 3 is circular, the center of rounded bottom surface overlaps with the center of right cylinder upper surface, form a circular table 4 in the periphery of right cylinder upper surface, be provided with domatic 5 (referring to Fig. 2) between described circular table and the rounded bottom surface.
The shape of composite titanium-aluminum alloy back of the body target as shown in Figure 3, back of the body target 6 comprises a right cylinder base 7, right cylinder base 7 lower surfaces are provided with a cylinder bodily form projection 8, the lower surface of cylinder bodily form projection 8 is provided with groove 9, groove 9 is shaped as circle, the lower surface area identical (referring to Fig. 4) of the upper surface of right cylinder base 7 and titanium-aluminium alloy target material.
The preparation method of composite titanium-aluminum alloy target comprises the following steps:
With composition is the titanium-aluminium alloy target material of Ti70Al30, in ultrasonic cleaning machine, clean the back at titanium aluminum alloy surface-coated one deck AgCuTi slurry, put into vacuum oven then and be incubated 5 minutes postcooling to room temperature 720 ℃～820 ℃ temperature, the titanium aluminum alloy surface finish after the metallization is smooth standby.
Red copper is carried on the back target wherein to be cleaned up in ultrasonic cleaning.
Right cylinder and red copper at titanium-aluminium alloy target material 1 are carried on the back AgCuInSn alloy slice 10 (referring to Fig. 5) on the target 6 right cylinder base therebetween, and 750 ℃ of insulations were promptly prepared the titanium aluminum alloy composite target material behind the furnace cooling after 20 minutes in vacuum oven.
Example 2:
The shape of target and back of the body target is with embodiment 1.
With composition is the titanium-aluminium alloy target material of Ti50Al50, in ultrasonic cleaning machine, clean the back at titanium aluminum alloy surface-coated one deck AgCuTi slurry, put into vacuum oven then and be incubated 5 minutes postcooling to room temperature 710 ℃～820 ℃ temperature, the titanium aluminum alloy surface finish after the metallization is smooth standby.
Fine aluminium is carried on the back target wherein to be cleaned up in ultrasonic cleaning.
SnAg alloy slice 10 (referring to Fig. 5) on the right cylinder base therebetween that the right cylinder and the fine aluminium of titanium-aluminium alloy target material 1 are carried on the back target 6,260 ℃ of insulations were promptly prepared the titanium aluminum alloy composite target material behind the furnace cooling after 10 minutes in vacuum oven.
Example 3:
The shape of target and back of the body target is with embodiment 1.
The preparation method of composite titanium-aluminum alloy target comprises the following steps:
With composition is the titanium-aluminium alloy target material of Ti90Al10, in ultrasonic cleaning machine, clean the back at titanium aluminum alloy surface-coated one deck AgCu slurry, put into vacuum oven then and be incubated 5 minutes postcooling to room temperature 720 ℃～820 ℃ temperature, the titanium aluminum alloy surface finish after the metallization is smooth standby.
Pure molybdenum target material is wherein cleaned up in ultrasonic cleaning.
AgCuIn alloy slice 10 (referring to Fig. 5) on the right cylinder base therebetween of titanium-aluminium alloy target material 1 right cylinder and red copper back of the body target 6, argon shield in soldering oven, 600 ℃～730 ℃ insulations were promptly prepared the titanium aluminum alloy composite target material behind the furnace cooling after 20 minutes.
Claims (10)
1. composite titanium-aluminum alloy target comprises target and back of the body target, and target material and back of the body target link together, and it is characterized in that: titanium-aluminium alloy target material be shaped as or lower surface is provided with the right cylinder of groove.
2. composite titanium-aluminum alloy target according to claim 1, it is characterized in that: described groove floor is for circular, the center of rounded bottom surface overlaps with the center of right cylinder upper surface, form a circular table in the periphery of right cylinder upper surface, be provided with domatic between described circular table and the rounded bottom surface.
3. composite titanium-aluminum alloy target according to claim 1 and 2, it is characterized in that: the shape of described back of the body target comprises a right cylinder base, described right cylinder base lower surface is provided with a cylinder bodily form projection, the lower surface of cylinder bodily form projection is provided with groove, and the upper surface of described right cylinder base is identical with the lower surface area of titanium-aluminium alloy target material.
4. composite titanium-aluminum alloy target according to claim 3 is characterized in that: the groove shapes that is provided with on the described back of the body target cylinder bodily form convex lower surface is for circular.
5. the preparation method of the described composite titanium-aluminum alloy target of one of above-mentioned each claim is characterized in that comprising the following steps:
(1), the titanium aluminum alloy target surface is cleaned in ultrasonic cleaning machine after, at titanium aluminum alloy surface metallization formed material, put into vacuum oven then, be higher than the temperature insulation certain hour of alloy melting point, be cooled to room temperature then, the titanium aluminum alloy surface finish is smooth standby;
(2) Al, Cu, Mo or their alloy back of the body target are wherein cleaned up in ultrasonic cleaning;
(3) with scolder assembling on titanium aluminum alloy target surface and the back of the body target therebetween, in vacuum oven or in the atmosphere, weld according to the sputtering technology condition.
6. the preparation method of composite titanium-aluminum alloy target according to claim 5, it is characterized in that: the composition proportion of titanium-aluminum alloy target is 0.1%～70%wt for Al content, and surplus is Ti.
7. according to the preparation method of claim 5 or 6 described composite titanium-aluminum alloy targets, it is characterized in that: described metallization material is an Ag base alloy pulp.
8. the preparation method of composite titanium-aluminum alloy target according to claim 7, it is characterized in that: back of the body target material is Cu, Mo, Al and copper alloy, molybdenum alloy, aluminium alloy.
9. the preparation method of composite titanium-aluminum alloy target according to claim 8, it is characterized in that: welding material is alloy, the Sn base low-melting alloy of AgCu series.
10. the preparation method of composite titanium-aluminum alloy target according to claim 9 is characterized in that: between the surface of the periphery of titanium aluminum alloy target surface and the back of the body target right cylinder base solder sheet is set.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200710120869XA CN101113513A (en) | 2007-08-28 | 2007-08-28 | Composite titanium-aluminum alloy target and method for making same |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA200710120869XA CN101113513A (en) | 2007-08-28 | 2007-08-28 | Composite titanium-aluminum alloy target and method for making same |
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| CN101113513A true CN101113513A (en) | 2008-01-30 |
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| CNA200710120869XA Pending CN101113513A (en) | 2007-08-28 | 2007-08-28 | Composite titanium-aluminum alloy target and method for making same |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101811209A (en) * | 2010-04-14 | 2010-08-25 | 宁波江丰电子材料有限公司 | Manufacture method of target assembly |
| CN102086506B (en) * | 2009-12-03 | 2013-08-14 | 无锡华润上华半导体有限公司 | Target cooling device and target cooling method |
| CN108213855A (en) * | 2016-12-15 | 2018-06-29 | 宁波江丰电子材料股份有限公司 | Copper target components and its manufacturing method |
| CN108796457A (en) * | 2018-09-03 | 2018-11-13 | 宝鸡市创信金属材料有限公司 | A kind of titanium-aluminium alloy recess target with cooling hole |
| CN113981388A (en) * | 2021-10-25 | 2022-01-28 | 北京安泰六九新材料科技有限公司 | Preparation method of high-density TiAl and TiAlMe target material |
-
2007
- 2007-08-28 CN CNA200710120869XA patent/CN101113513A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102086506B (en) * | 2009-12-03 | 2013-08-14 | 无锡华润上华半导体有限公司 | Target cooling device and target cooling method |
| CN101811209A (en) * | 2010-04-14 | 2010-08-25 | 宁波江丰电子材料有限公司 | Manufacture method of target assembly |
| CN108213855A (en) * | 2016-12-15 | 2018-06-29 | 宁波江丰电子材料股份有限公司 | Copper target components and its manufacturing method |
| CN108796457A (en) * | 2018-09-03 | 2018-11-13 | 宝鸡市创信金属材料有限公司 | A kind of titanium-aluminium alloy recess target with cooling hole |
| CN113981388A (en) * | 2021-10-25 | 2022-01-28 | 北京安泰六九新材料科技有限公司 | Preparation method of high-density TiAl and TiAlMe target material |
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Open date: 20080130 |