CN101106252A - A coaxial light output multi-wave length laser device - Google Patents

A coaxial light output multi-wave length laser device Download PDF

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Publication number
CN101106252A
CN101106252A CNA2006100989118A CN200610098911A CN101106252A CN 101106252 A CN101106252 A CN 101106252A CN A2006100989118 A CNA2006100989118 A CN A2006100989118A CN 200610098911 A CN200610098911 A CN 200610098911A CN 101106252 A CN101106252 A CN 101106252A
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light
frequency
laser
splitting piece
light splitting
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CN100581012C (en
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樊仲维
崔建丰
裴博
赵剑波
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Beijing GK Laser Technology Co Ltd
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Beijing GK Laser Technology Co Ltd
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Abstract

The invention discloses a coaxial light-emitting multi-wavelength laser device, comprising a laser; a first half-wave plate corresponding to the fundamental frequency laser; a frequency doubled device for generating a frequency doubled laser; a second half-wave plate corresponding to the frequency doubled laser; a frequency tripled device for generating a frequency tripled laser; a third half-wave plate corresponding to the frequency tripled laser; a quadruple frequency device for generating a quadruple frequency laser; a first beamsplitter; a second beamsplitter; a third beamsplitter; windows and a receiver. The invention realizes the coaxial light emitting of fundamental frequency, doubled frequency, tripled frequency and quadruple frequency respectively and simultaneously, and can flexibly adjust the ratio of emitting power to energy.

Description

A kind of multi-wave length laser device of coaxial light output
Technical field
The present invention relates to a kind of laser aid, particularly a kind of multi-wave length laser device of coaxial light output.
Background technology
Along with developing rapidly of laser technology, join the army that it is civilian to use, from the scientific research to the teaching, from industry to the agricultural avocation, the laser technology role is more and more huger.And meanwhile, laser miniaturization, high added value, easy to operate requirement are also got more and more.
In the prior art, general traditional single wavelength can not satisfy client's application in a lot of occasions, and many wavelength also make a lot of users feel to operate inconvenience extremely with regard to the way of many light holes, change out each time optical wavelength, all must aim at again, again adjustment light path is debug very trouble, has wasted the engineering scientific research personnel's of vast use laser quality time.Show the device of realizing multi-wavelength output in the prior art as Fig. 1, the laser that sends comprising laser 100 passes through frequency-doubling crystal 101 and frequency tripling crystal 102, and, the total reflective mirror 104 of frequency doubled light and the total reflective mirror 103 of frequency tripling light are arranged respectively on two other light paths for the optical filtering speculum 105 of frequency tripling light total reflection, frequency doubled light total transmissivity, fundamental frequency light total transmissivity with for the optical filtering speculum 106 of frequency doubled light total reflection, fundamental frequency light total transmissivity.In multi-wave length laser device shown in Figure 1, therefore fundamental frequency light, frequency doubled light and frequency tripling need three light-emitting windows only along the output of different optical axis, can be pretty troublesome when this in use changes out optical wavelength, must aim at again, adjustment light path again.
Therefore, people wish to have can reduce the user debug trouble to better meet the application of occasions such as industry, scientific research, military affairs, medical treatment, time saving coaxial light output multi-wave length laser device, preferably can realize the array output of multiple optical maser wavelength even output simultaneously, be preferably under the prerequisite that guarantees bright dipping gross power/constant in energy, can realize the flexible proportioning of each wavelength light intensity.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, a kind of four wavelength laser devices of coaxial light output are provided.
For achieving the above object, the technical solution used in the present invention is as follows:
A kind of multi-wave length laser device of coaxial light output as shown in Figure 2, comprising:
One laser 10 is used to send fundamental frequency light; Have at the coaxial device of placing successively on the outer light path of described laser 10 light-emitting windows: the one 1/2 wave plate 11 for described fundamental frequency light;
One is used to produce two frequency multiplication devices 12 of two double-frequency lasers;
One the 2 1/2 wave plate 13 for described two double-frequency lasers;
One is used to produce the frequency tripling device 14 of frequency tripled laser;
One the 3 1/2 wave plate 15 for described frequency tripled laser;
One is used to produce the quadruple device 16 of laser of quadruple;
First light splitting piece 17, this light splitting piece is all-trans for fundamental frequency light, for two frequency doubled light full impregnated mistakes;
Second light splitting piece 18, this light splitting piece is all-trans for fundamental frequency and two frequencys multiplication, for frequency tripling light full impregnated mistake;
The 3rd light splitting piece 19, this light splitting piece is all-trans for fundamental frequency, two frequencys multiplication, frequency tripling, for quadruple frequency light full impregnated mistake;
Diaphragm 20, laser is from this diaphragm output, and this diaphragm is for fundamental frequency, two frequencys multiplication, frequency tripling, laser of quadruple full impregnated mistake;
Be sidelong at one of above-mentioned light splitting piece and put a receiver 21, be used to receive the rubbish light of described first light splitting piece 17, described second light splitting piece 18,19 reflections of described the 3rd light splitting piece.
In technique scheme, also comprise: each described the one 1/2 wave plate the 11, the 2 1/2 wave plate the 13, the 3 1/2 wave plate 15 is separately fixed on the first, second, third whirligig (not shown), described whirligig is controlled corresponding 1/2 wave plate and is rotated around optical axis center, and whirligig is by electronic control rotation or manually control rotation.
In technique scheme, also comprise: described first, second, third whirligig drives or is fixed on perpendicular to first, second, third of optical axis with rotary magnet respectively and moves on the platform (not shown), by this rotary magnet or move platform and can control described 1/2 wave plate device easily and insert in the light path or shift out light path; The described platform that moves is by electronic control rotation or manually control rotation.
In technique scheme, described first light splitting piece 17, second light splitting piece 18, the 3rd light splitting piece 19 planes and optical axis arrangement at 45.
In technique scheme, described first light splitting piece 17, second light splitting piece 18, the 3rd light splitting piece 19 drive or are fixed on perpendicular to the 4th, the 5th, the 6th of light path with rotary magnet respectively and move on the platform (not shown), by rotary magnet or move platform and can control first light splitting piece 17, second light splitting piece 18 or the 3rd light splitting piece 19 easily and insert in the light paths or shift out light path; The above-mentioned platform that moves is by electronic control rotation or manually control rotation.
In technique scheme, described laser 10 sends linearly polarized light, the polarization direction level.
Compared with prior art, beneficial effect of the present invention is:
The present invention realizes the laser aid of fundamental frequency, two frequencys multiplication, frequency tripling, the coaxial bright dipping respectively of quadruple and bright dipping simultaneously, and at the same time during bright dipping, also can be as required, keeping under the constant prerequisite of total bright dipping power/energy, realize the flexible of fundamental frequency light and two frequencys multiplication, frequency tripling, quadruple frequency light bright dipping power/energy ratio, the high-end product of be particularly suitable for processing, complex functions such as medical treatment, scientific research, teaching, military affairs being had relatively high expectations.
Description of drawings
Fig. 1 represents the laser aid of multi-wavelength output in the prior art;
Fig. 2 represents the multi-wave length laser device of coaxial light output of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail:
Embodiment 1
As shown in Figure 2, make four wavelength laser devices of coaxial light output, comprising: a laser 10, be used to send the linearly polarized light that the polarization direction is a level, wavelength is 1064nm; The coaxial device of placing successively has on the outer light path of these laser 10 light-emitting windows:
The one 1/2 wave plate 11 for described fundamental frequency light;
Be used to produce two frequency multiplication devices 12 of two double-frequency lasers, this two frequencys multiplication device adopts LBO, and (chemical molecular formula is LiB 3O 5,) and crystal;
The 2 1/2 wave plate 13 for described two double-frequency lasers;
Be used to produce the frequency tripling device 14 of frequency tripled laser, this frequency tripling device adopts BBO, and (molecular formula is β-BaB 2O 4) crystal;
The 3 1/2 wave plate 15 for described frequency tripled laser;
Be used to produce the quadruple device 16 of laser of quadruple, this quadruple device adopts bbo crystal;
First light splitting piece 17, this light splitting piece is high anti-for fundamental frequency light, and is high saturating for two frequency doubled lights;
Second light splitting piece 18, this light splitting piece is high anti-for fundamental frequency and two frequencys multiplication, and is high saturating for frequency tripling;
The 3rd light splitting piece 19, this light splitting piece is for fundamental frequency, two frequencys multiplication, frequency tripling height instead, and is high saturating for quadruple;
Diaphragm 20, laser are from this diaphragm output, and this diaphragm for fundamental frequency, two frequencys multiplication, frequency tripling, quadruple height thoroughly;
Be sidelong at one of above-mentioned light splitting piece and put a receiver 21, be used to receive the rubbish light of described first light splitting piece 17, described second light splitting piece 18,19 reflections of described the 3rd light splitting piece.
According to fundamental frequency light wavelength, the angle of divergence, power/energy density, select two suitable frequency-doubling crystals, frequency tripling crystal, quadruple frequency crystal and corresponding cutting angle, this is adequate to those skilled in the art.
Each described the one 1/2 wave plate the 11, the 2 1/2 wave plate the 13, the 3 1/2 wave plate 15 is separately fixed on the first, second, third whirligig (not shown), whirligig is an electric rotary body, control corresponding 1/2 wave plate and rotate around optical axis center, the angle φ of rotation can be by the anglec of rotation control of this electric rotary body.
Described first, second, third whirligig is separately fixed at perpendicular to first, second, third of optical axis and moves on the platform (not shown), these move platform and adopt electronic control to move platform, can control in the insertion light path of described 1/2 wave plate device easily or shift out light path by this electronic platform that moves.
Described first light splitting piece 17, second light splitting piece 18, the 3rd light splitting piece 19 and optical axis arrangement at 45, be fixed on perpendicular to the 4th, the 5th, the 6th of light path and move on the platform (not shown), these move platform and adopt electronic control to move platform, electronicly move that platform can be controlled first light splitting piece 17, second light splitting piece 18 easily respectively, the 3rd light splitting piece 19 inserts in the light paths or shift out light path by these.
Adopt laser aid of the present invention, realize that the step of coaxial multi-wavelength bright dipping is as follows:
(1) frequency multiplication according to quadruple requires to have put successively two frequency multiplication devices, frequency tripling device and quadruple device, 1/2 all wave plates is shifted out, move into the 3rd light splitting piece 19, be the quadruple bright dipping this moment, adjusts two frequency multiplication devices, frequency tripling device and quadruple device, make quadruple go out luminous power/light intensity maximum, go out optical mode for only exporting quadruple this moment;
(2) in previous step rapid (1) device, shift out the 3rd light splitting piece 19, for fundamental frequency, two frequencys multiplication, frequency tripling, quadruple go out optical mode simultaneously;
(3) in above-mentioned steps (2) device, move into the one 1/2 wave plate 11 again, the one 1/2 wave plate 11 is rotated under the effect of electric rotary body, write down two frequency doubled lights, frequency tripling, quadruple and go out the pairing motor start of optical power change step number, just can obtain the bright dipping simultaneously of fundamental frequency light, two frequency doubled lights, frequency tripling light, quadruple frequency light and total bright dipping power/energy constant the time, the power/energy proportioning of quadruple frequency light, frequency tripling light, two frequency doubled lights and fundamental frequency light that continually varying is different;
(4) the φ angle of adjustment the one 1/2 wave plate 11 in the device of step (3), make the fundamental frequency polarised light under the effect of the one 1/2 wave plate 11, when plane of polarization rotates to and overlaps with the main cross section at the optical axis of crystal place of frequency-doubling crystal, two shg efficiencies are zero, has only of the diaphragm output of fundamental frequency light this moment, for only going out the fundamental frequency optical mode by laser aid;
(5) in the device of step (4), shift out the one 1/2 wave plate 11, move into the 2 1/2 wave plate 13, and adjust the φ angle of the 2 1/2 wave plate 13, when the plane of polarization of two frequencys multiplication being rotated to overlap under the effect of the 2 1/2 wave plate 13 with the main cross section at the optical axis of crystal place of frequency tripling crystal, frequency tripling efficient is zero, moves into light splitting piece first light splitting piece 17 simultaneously, and fundamental frequency light is filtered, be to have only the 2 1/2 wave plate 13 and first light splitting piece 17 in the light path, go out optical mode for only going out two frequencys multiplication this moment.Shift out first light splitting piece 17, for fundamental frequency light and frequency doubled light go out optical mode simultaneously.Move into the one 1/2 wave plate 11 again, only go out fundamental frequency light this moment, the one 1/2 wave plate 11 is rotated under the effect of electric rotary body, write down frequency doubled light and go out the pairing motor start of optical power change step number, just can obtain the bright dipping simultaneously of fundamental frequency light and frequency doubled light and total bright dipping power/energy constant the time, frequency doubled light that continually varying is different and fundamental frequency light proportioning.
(6) shift out the one 1/2 wave plate 11, the 2 1/2 wave plate 13, move into the 3 1/2 wave plate 15, when the plane of polarization of frequency tripling being rotated to overlap with the main cross section at the optical axis of crystal place of quadruple frequency crystal under the effect of the 3 1/2 wave plate 15, quadruple efficient is zero, moves into second light splitting piece 18 simultaneously, filter fundamental frequency light and two frequency doubled lights, being to have only the 3 1/2 wave plate 15, the second light splitting pieces 18 at this moment in the light path, is for only going out the optical mode that outes of frequency tripling.Shift out second light splitting piece 18, for fundamental frequency light, frequency doubled light, frequency tripling go out optical mode simultaneously.Move into the one 1/2 wave plate 11 again, the one 1/2 wave plate 11 is rotated under the effect of electric rotary body, write down two frequency doubled lights, frequency tripling goes out the pairing motor start of optical power change step number, just can obtain the bright dipping simultaneously of fundamental frequency light, frequency doubled light, frequency tripling light and total bright dipping power/energy constant the time, the power/energy proportioning of two frequency doubled lights, frequency tripling light and fundamental frequency light that continually varying is different.
In said apparatus, if only control the immigration of the one 1/2 wave plate the 11, the 2 1/2 wave plate 13, the 3 1/2 wave plate 15 and shift out, and go the angle φ that controls wave plate to change without electric rotary body with the electronic platform that moves, promptly be the reduced form of the above device.Still the bright dipping or the combination bright dipping separately separately of four wavelength can be controlled this moment easily, but the size of bright dipping ratio separately can not be controlled.
When exporting fundamental frequency, two frequencys multiplication, frequency tripled laser simultaneously, the amplitude that frequency tripling bright dipping power/energy is changed is littler, can shift out the one 1/2 wave plate 11, move into the 2 1/2 wave plate 13, allow the 2 1/2 wave plate 13 anglec of rotation φ under the drive of electric rotary body get final product then, the change amount of two frequencys multiplication is reduced, it can be considered as accurate adjustment.The scheme of previously described commentaries on classics the one 1/2 wave plate 11 is considered as coarse adjustment, also can make to exist the one 1/2 wave plate the 11, the 2 1/2 13, two of wave plates all to rotate in the light path simultaneously, and combination is regulated.In like manner, when exporting fundamental frequency, two frequencys multiplication, frequency tripling, laser of quadruple at the same time, also can insert the one 1/2 wave plate the 11, the 2 1/2 wave plate the 13, the 3 1/2 wave plate 15, the 3 1/2 wave plates 15 simultaneously and be accurate adjustment, the 2 1/2 wave plate 13 takes second place, and the one 1/2 wave plate 11 is coarse adjustment.
Embodiment 2,
Laser among the embodiment 1 10 is adopted the titanium-doped sapphire tunable laser, send the linearly polarized light that the polarization direction is a level, wavelength is that 700--900nm is adjustable, other devices are constant, but corresponding eyeglass and wave plate all are plated to the broadband film of respective wavelength, and present embodiment is realized the laser output of tunable four wavelength coaxial light outputs.
Embodiment 3
On the basis of embodiment 1, according to actual needs, by increasing or reducing some devices, can realize dual-wavelength laser output, the output of three-wavelength laser or the output of five wavelength lasers of coaxial light output, the benefit of doing like this is corresponding devices to be installed according to actual demand, saves cost.Such as the dual-wavelength laser output of coaxial light output, can on the basis of Fig. 2, remove the 2 1/2 wave plate 13, frequency tripling device 14, the 3 1/2 wave plates 15, quadruple device 16, the second light splitting pieces 18, the three light splitting pieces 19 get final product.For the three-wavelength laser output of coaxial light output, can on the basis of Fig. 2, remove the 3 1/2 wave plate 15, quadruple device 16, the three light splitting pieces 19 get final product.For the five wavelength lasers output of coaxial light output, (molecular formula is β-BaB can to increase by one five frequency-doubling crystal such as BBO on the basis of Fig. 2 again 2O 4) crystal and high anti-for fundamental frequency, two frequencys multiplication, frequency tripling, quadruple, for the high saturating filter of five frequencys multiplication, and diaphragm 20 replaced to fundamental frequency, two frequencys multiplication, frequency tripling, quadruple, eyeglass that five frequencys multiplication are all high, it is identical with embodiment 1 that other implement control methods.
It should be noted last that above embodiment is only unrestricted in order to technical scheme of the present invention to be described.Although the present invention is had been described in detail with reference to embodiment, those of ordinary skill in the art is to be understood that, technical scheme of the present invention is made amendment or is equal to replacement, do not break away from the spirit and scope of technical solution of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.

Claims (6)

1. the multi-wave length laser device of a coaxial light output comprises:
One is used to send the laser (10) of fundamental frequency light;
It is characterized in that, at the coaxial device of placing successively on the outer light path of described laser (10) light-emitting window be: the one 1/2 wave plate (11) for described fundamental frequency light;
One is used to produce two frequency multiplication devices (12) of two double-frequency lasers;
One the 2 1/2 wave plate (13) for described two double-frequency lasers;
One is used to produce the frequency tripling device (14) of frequency tripled laser;
One the 3 1/2 wave plate (15) for described frequency tripled laser;
One is used to produce the quadruple device (16) of laser of quadruple;
First light splitting piece (17), this light splitting piece is all-trans for fundamental frequency light, for two frequency doubled light full impregnated mistakes;
Second light splitting piece (18), this light splitting piece is all-trans for fundamental frequency and two frequencys multiplication, for frequency tripling light full impregnated mistake;
The 3rd light splitting piece (19), this light splitting piece is all-trans for fundamental frequency, two frequencys multiplication, frequency tripling, for quadruple frequency light full impregnated mistake;
Diaphragm (20), laser is from this diaphragm output, and this diaphragm is for fundamental frequency, two frequencys multiplication, frequency tripling, laser of quadruple full impregnated mistake;
Be sidelong at one of described light splitting piece and put a receiver (21) that is used to receive the rubbish light of described first light splitting piece (17), described second light splitting piece (18) and described the 3rd light splitting piece (19) reflection.
2. according to the multi-wave length laser device of the described coaxial light output of claim 1, it is characterized in that, also comprise: each described the one 1/2 wave plate (11), the 2 1/2 wave plate (13), the 3 1/2 wave plate (15) are separately fixed on first, second, third whirligig, described whirligig is controlled corresponding 1/2 wave plate and is rotated around optical axis center, and whirligig is by electronic control rotation or manually control rotation.
3. according to the multi-wave length laser device of the described coaxial light output of claim 1, it is characterized in that, also comprise: described first, second, third whirligig drives or is fixed on perpendicular to first, second, third of optical axis with rotary magnet respectively and moves on the platform, and the described platform that moves is by electronic control rotation or manually control rotation.
4. according to the multi-wave length laser device of the described coaxial light output of claim 1, it is characterized in that described first light splitting piece (17), second light splitting piece (18), the 3rd light splitting piece (19) and optical axis angle at 45.
5. according to four wavelength laser devices of the described coaxial light output of claim 1, it is characterized in that described first light splitting piece (17), second light splitting piece (18), the 3rd light splitting piece (19) drive or are fixed on perpendicular to the 4th, the 5th, the 6th of light path with rotary magnet respectively and move on the platform; The described the 4th, the 5th, the 6th moves platform by electronic control rotation or manually control rotation.
6. according to the multi-wave length laser device of the described coaxial light output of claim 1, it is characterized in that described laser (10) sends the linearly polarized light that the polarization direction is a level.
CN200610098911A 2006-07-14 2006-07-14 Coaxial light output multi-wave length laser device Expired - Fee Related CN100581012C (en)

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102570271A (en) * 2012-01-13 2012-07-11 北京国科世纪激光技术有限公司 Period-modulated flat-topped pulse device for accurately controlling output power/energy
CN103001112A (en) * 2012-07-06 2013-03-27 中国科学院福建物质结构研究所 All-solid-state quadruple-harmonic ultraviolet laser
CN104009388A (en) * 2014-04-03 2014-08-27 青岛镭视光电科技有限公司 Three-wavelength laser and working method thereof
CN109323852A (en) * 2018-11-13 2019-02-12 清华大学 A kind of laser frequency doubling crystal frequency conversion efficiency measuring system and performance characterization method
CN111048992A (en) * 2019-12-26 2020-04-21 中国科学院半导体研究所 Controllable multi-wavelength laser output device
CN112269260A (en) * 2020-09-27 2021-01-26 北京卓镭激光技术有限公司 Laser switching device and method
CN112448265A (en) * 2020-11-24 2021-03-05 西安博高光电科技有限公司 Dual-wavelength laser
CN113131312A (en) * 2020-01-16 2021-07-16 北京科益虹源光电技术有限公司 Sum frequency generator of deep ultraviolet laser
CN113131313A (en) * 2020-01-16 2021-07-16 北京科益虹源光电技术有限公司 Sum frequency method of quintupling frequency laser
CN113675714A (en) * 2021-07-01 2021-11-19 青岛镭创光电技术有限公司 Multi-wavelength laser
WO2022110284A1 (en) * 2020-11-27 2022-06-02 北京科益虹源光电技术有限公司 Method for regulating output power of 213 nm laser, and apparatus thereof

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102570271B (en) * 2012-01-13 2014-10-01 北京国科世纪激光技术有限公司 Period-modulated flat-topped pulse device for accurately controlling output power/energy
CN102570271A (en) * 2012-01-13 2012-07-11 北京国科世纪激光技术有限公司 Period-modulated flat-topped pulse device for accurately controlling output power/energy
CN103001112A (en) * 2012-07-06 2013-03-27 中国科学院福建物质结构研究所 All-solid-state quadruple-harmonic ultraviolet laser
CN104009388A (en) * 2014-04-03 2014-08-27 青岛镭视光电科技有限公司 Three-wavelength laser and working method thereof
CN109323852A (en) * 2018-11-13 2019-02-12 清华大学 A kind of laser frequency doubling crystal frequency conversion efficiency measuring system and performance characterization method
CN111048992B (en) * 2019-12-26 2021-04-02 中国科学院半导体研究所 Controllable multi-wavelength laser output device
CN111048992A (en) * 2019-12-26 2020-04-21 中国科学院半导体研究所 Controllable multi-wavelength laser output device
CN113131312A (en) * 2020-01-16 2021-07-16 北京科益虹源光电技术有限公司 Sum frequency generator of deep ultraviolet laser
CN113131313A (en) * 2020-01-16 2021-07-16 北京科益虹源光电技术有限公司 Sum frequency method of quintupling frequency laser
CN112269260A (en) * 2020-09-27 2021-01-26 北京卓镭激光技术有限公司 Laser switching device and method
CN112448265A (en) * 2020-11-24 2021-03-05 西安博高光电科技有限公司 Dual-wavelength laser
WO2022110284A1 (en) * 2020-11-27 2022-06-02 北京科益虹源光电技术有限公司 Method for regulating output power of 213 nm laser, and apparatus thereof
CN113675714A (en) * 2021-07-01 2021-11-19 青岛镭创光电技术有限公司 Multi-wavelength laser

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