WO2022110284A1

WO2022110284A1 - Method for regulating output power of 213 nm laser, and apparatus thereof

Info

Publication number: WO2022110284A1
Application number: PCT/CN2020/134296
Authority: WO
Inventors: 任俊杰; 王家赞; 江锐; 刘广义; 陈彬彬
Original assignee: 北京科益虹源光电技术有限公司
Priority date: 2020-11-27
Filing date: 2020-12-07
Publication date: 2022-06-02
Also published as: CN112490841A

Abstract

Provided are a method for regulating the output power of a 213 nm laser, and an apparatus thereof, said method comprising: setting the temperature of a frequency tripling crystal (21) (S1); using the frequency tripling crystal (21) to output a 532 nm laser and a 355 nm laser (S2); summing the frequencies of the 532 nm laser and the 355 nm laser to obtain a 213 nm laser, and recording the output power of the 213 nm laser (S3); repeating the described steps (S1-S3) multiple times, the temperature of the frequency tripling crystal (21) being set differently each time, and recording the output power of the 213 nm laser at different temperatures to obtain a correlation between the temperature of the frequency tripling crystal (21) and the output power of the 213 nm laser (S4); according to said correlation, adjusting the temperature of the frequency tripling crystal (21) so as to regulate the output power of the 213 nm laser (S5).

Description

A method and device for regulating 213nm laser output power

technical field

The present disclosure relates to the field of laser technology, in particular to a method and a device for regulating the output power of a 213 nm laser.

Background technique

The methods of controlling the laser output power are generally divided into two categories. One is to control the input end, such as controlling the current or voltage of the laser pump source to change the laser output power; the other is to control the output end, such as in the laser. An acousto-optic modulator is inserted at the output end to control the laser output power.

However, for the 213nm laser, firstly, there are no optical devices available on the market for power control at the output end, and secondly, the power control at the input end is to regulate the 1064nm power output at the output end of the fundamental frequency laser. The laser needs to perform frequency conversion at least 3 times, changing the input power of the fundamental frequency 1064nm to adjust the output optical power after multiple mixing, which will change the beam quality of the final output light at 213nm, and also make the output power in the frequency conversion, power stability and stability. The beam quality becomes uncontrollable, increasing overall system instability. In general, there are no available methods and devices on the market for regulating the output power of a quintuple 213 nm laser.

SUMMARY OF THE INVENTION

In order to solve the above problems in the prior art, the present disclosure provides a method and device for regulating the output power of a 213 nm laser, which is practical and reliable, and realizes the precise control of the output power of a 213 nm laser without adding additional optical devices. control.

One aspect of the present disclosure provides a method for regulating the output power of a 213 nm laser, which includes: S1, setting the temperature of a frequency triple crystal; S2, using the frequency triple crystal to output a 532 nm laser and a 355 nm laser; S3, pairing The 532nm laser and the 355nm laser are summed to obtain a 213nm laser, and the output power of the 213nm laser is recorded; in S4, S1 to S3 are repeated for several times, wherein the temperature of the frequency tripler crystal is set at different temperatures each time, and recorded at different temperatures According to the output power of the 213nm laser, the corresponding relationship between the temperature of the triple frequency crystal and the output power of the 213nm laser is obtained; S5, according to the corresponding relationship, the temperature of the triple frequency crystal is adjusted to regulate the output power of the 213nm laser.

Further, S4 includes: S41, repeating S1 to S3 multiple times, wherein the temperature of the frequency triple crystal is set to be different each time, and recording the output power of the 213 nm laser at different temperatures; S42, processing S41 through a data fitting function The corresponding relationship between the output power of the 213nm laser and the temperature of the 213nm laser at different temperatures obtained in Polynomial expression.

Further, S3 includes: S31, using a quintuple frequency crystal to perform sum frequency on the 532nm laser and the 355nm laser to obtain a 213nm laser; S32, using a Perrin Broca prism to separate the 532nm, 355nm and 213nm lasers, and make the 213nm laser The outgoing direction of the laser is perpendicular to the incoming direction of the Perin Broca prism; S33, record the output power of the 213 nm laser.

Further, the method further includes: S0, frequency-doubling the fundamental frequency of the 1064 nm laser with a frequency-doubling crystal to generate a 532-nm laser, and outputting the 1064-nm laser and the 532-nm laser to a frequency-tripling crystal.

Further, the quintuple crystal in S31 is placed in the third temperature control furnace, and the operating temperature of the quintuple crystal is 120°C to 160°C, and a temperature lock is maintained.

Further, the triple frequency crystal in S1 is placed in the second temperature control furnace, and the second temperature control furnace is used to set the temperature of the triple frequency crystal according to the phase matching temperature of the fundamental frequency 1064 nm laser and the 532 nm laser.

Further, the method also includes: S2I, using the first dichroic mirror to transmit the 1064nm laser output by the frequency triple crystal, and reflecting the 532nm laser and 355nm laser; S2II, using a wave plate to transmit the 532nm laser and 355nm laser output from the first dichroic mirror The laser polarization direction is adjusted so that the polarization direction of the 532nm laser is consistent with the polarization direction of the 355nm laser; S2III, the second dichromatic mirror is used to transmit the 1064nm laser output by the wave plate again, and reflect the 532nm laser and 355nm laser; The speed mirror increases the laser spot area of the 532nm laser and 355nm laser that has passed through the second dichroic mirror, and outputs the 532nm laser and 355nm laser with the enlarged spot area to the five-fold frequency crystal.

Further, the operating temperature range of the triple frequency crystal is 50°C to 70°C.

Further, the frequency-doubling crystal in S0 is placed in the first temperature-controlled furnace, and the working temperature of the frequency-doubling crystal is 120°C to 160°C, and a temperature lock is maintained.

Another aspect of the present disclosure provides a device for controlling the output power of a 213nm laser, a laser output module including a frequency triple crystal for outputting a 532nm laser and a 355nm laser, and summing the 532nm laser and the 355nm laser to obtain a 213nm laser ; Temperature control module, the laser output module is arranged in the temperature control module, which is used to control the temperature of the triple frequency crystal, so that the corresponding 213nm laser output power can be obtained at different temperature of the triple frequency crystal; The laser power The test module is used to measure the output power of the 213nm laser; the temperature control module is used to set different temperatures of the temperature of the triple frequency crystal for many times, and record the output power of the 213nm laser at different temperatures, and then the frequency triple crystal is obtained. The corresponding relationship between the temperature and the output power of the 213nm laser, and according to the corresponding relationship, the temperature of the triple frequency crystal is adjusted to control the output power of the 213nm laser.

The present disclosure provides a method and device for regulating the output power of a 213nm laser. The method utilizes the principle of temperature-phase matching in nonlinear frequency conversion, and adjusts the temperature of a temperature-controlled furnace to change the crystal temperature to control the output power of a five-fold frequency 213nm laser. The whole control process is simple and convenient without changing the beam quality of the 213nm laser and the stability of the entire laser system, and effectively avoiding the walk-off effect of the frequency-doubling crystal. This method is practical and reliable, and does not require additional optical devices. On this basis, the precise control of the output power of the 213nm laser is realized.

Description of drawings

For a more complete understanding of the present disclosure and its advantages, reference will now be made to the following description taken in conjunction with the accompanying drawings, in which:

FIG. 1 schematically shows a flow chart of a method for regulating the output power of a 213 nm laser according to an embodiment of the present disclosure;

2 schematically shows a flow chart of obtaining a 213 nm laser in a method for regulating the output power of a 213 nm laser according to an embodiment of the present disclosure;

3 schematically shows a flow chart of obtaining the corresponding relationship between the output power of the 213 nm laser and the temperature of the triple frequency crystal in the method for regulating the output power of the 213 nm laser according to an embodiment of the present disclosure;

FIG. 4 schematically shows a structural diagram of a device for regulating the output power of a 213 nm laser according to an embodiment of the present disclosure;

FIG. 5 schematically shows a diagram of an experimental device for regulating the output power of a 213 nm laser according to an embodiment of the present disclosure.

Detailed ways

Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. In the following detailed description, for convenience of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It will be apparent, however, that one or more embodiments may be practiced without these specific details. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts of the present disclosure.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the present disclosure. The terms "comprising", "comprising" and the like as used herein indicate the presence of stated features, steps, operations and/or components, but do not preclude the presence or addition of one or more other features, steps, operations or components.

All terms (including technical and scientific terms) used herein have the meaning as commonly understood by one of ordinary skill in the art, unless otherwise defined. It should be noted that terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly rigid manner.

As shown in FIG. 1 , an embodiment of the present disclosure provides a method for regulating the output power of a 213 nm laser.

As shown in Figure 1, the method includes:

S1, set the temperature of the frequency triple crystal.

In the embodiment of the present disclosure, the frequency triple crystal is placed in a second temperature-controlled furnace, and the second temperature control furnace is used to set the temperature of the frequency triple crystal according to the phase matching temperature of the fundamental frequency 1064 nm laser and the 532 nm laser, so that the three The operating temperature of the frequency doubling crystal is kept in the range of 50℃～70℃.

S2, use frequency triple crystal to output 532nm laser and 355nm laser.

In the embodiment of the present disclosure, the 532 nm laser is obtained by frequency doubling the fundamental frequency of the 1064 nm laser through a frequency doubling crystal, and the frequency doubling crystal outputs the remaining 1064 nm laser and 532 nm laser as the incident light of the frequency triple crystal. Among them, the double frequency crystal is placed in the first temperature control furnace, and the first temperature control furnace is used to make the double frequency crystal in a stable constant temperature environment to ensure that the fundamental frequency 1064nm frequency doubles to generate a 532nm laser with high beam quality, and its output The 532nm laser is coaxial with the remaining 1064nm laser and has no walk-off effect. The optimal working temperature of the double frequency crystal is 120℃～160℃, and a certain temperature within this temperature range is kept locked. In the embodiment of the present disclosure, the operating temperature of the frequency doubling crystal is set to 150° C., and the temperature is kept locked.

In the embodiment of the present disclosure, the refractive index of the frequency triple crystal is sensitive to temperature changes, and the refractive index of the laser can be changed by changing the temperature of the frequency triple crystal, so as to achieve the purpose of phase matching. Among them, the remaining 1064nm laser after the double frequency crystal and the 355nm generated by the sum frequency of the 532nm laser belong to the second type of phase matching. The 1064nm laser is o light, the 532nm laser is e light, and the 355nm laser generated by the sum frequency is o light. The temperature of the frequency doubled crystal makes the laser not have the walk-off effect. The walk-off effect means that when the light propagates in an anisotropic medium, the energy flow direction of the o light and the wave vector are not in the same direction, that is, the o light and the e light are in the same direction in the crystal. It will gradually separate when it propagates in the middle, that is, it has no effect on the output spot of the 355nm laser. When the incident light propagates along the direction determined by the nonlinear frequency triple crystal, the temperature of the frequency triple crystal is changed. When the temperature of the frequency triple crystal is equal to the phase matching temperature of the laser, the output power of the output laser is the highest. Under the condition that other conditions remain unchanged, fine-tuning the triple frequency temperature within a certain range can change the phase matching degree, so that the output power of the laser changes and the beam quality of the laser does not change.

S3 , summing the 532 nm laser and the 355 nm laser to obtain a 213 nm laser, and recording the output power of the 213 nm laser.

In the embodiment of the present disclosure, a 532nm laser and a 355nm laser are combined with a frequency-five crystal to obtain a laser of 213nm, wherein the five-fold crystal is placed in a third temperature-controlled furnace, and the third temperature-controlled furnace is used to make The quintuple crystal is in a set high temperature environment to ensure that the boundary temperature of the quintuple crystal is constant. temperature lock.

In the embodiment of the present disclosure, since the quintuple crystal is sensitive to temperature, its temperature changes slightly, not only the output power of the 213nm laser will change greatly, but also the output spot of the 213nm laser will be affected, because the 532nm laser and the 355nm laser All belong to o light, and the generated 213nm belongs to e light, which has a walk-off effect, resulting in an unsatisfactory roundness of the output 213nm laser spot. It is not feasible to control the output power at 213nm by adjusting the temperature of the quintuple crystal. In the embodiment of the present disclosure, the temperature of the quintuple crystal is adjusted to a suitable temperature and locked, that is, the selected operating temperature of the quintuple crystal is 150° C., and the temperature is kept locked.

S4, repeating S1 to S3 multiple times, wherein the temperature of the frequency tripler crystal is set to be different each time, and the output power of the 213nm laser at different temperatures is recorded, and then the temperature of the frequency tripler crystal and the output power of the 213nm laser are obtained. Correspondence.

In the embodiment of the present disclosure, different temperatures of the frequency-doubling crystal are set by the second temperature control furnace, steps S1 and S3 are repeated for many times, the output power of the 213 nm laser at different temperatures is recorded, and then the temperature and the frequency of the frequency-doubling crystal are obtained. The corresponding relationship between the output power of the 213nm laser, the corresponding relationship can be a one-to-one correspondence between the temperature of the triple frequency crystal and the output power of the 213nm laser in a tabular format, or the polynomial expression of the output power of the 213nm laser and the temperature of the triple frequency crystal relationship, etc.

S5, according to the corresponding relationship, adjust the temperature of the frequency triple crystal to adjust the output power of the 213 nm laser.

According to an embodiment of the present disclosure, as shown in FIG. 2 , S3 includes: S31 , using a quintuple frequency crystal to sum-frequency the 532 nm laser and the 355 nm laser to obtain a 213 nm laser; S32 , using a Pelinbroca prism to combine the 532 nm, 355 nm laser And 213nm laser separation processing, and make the 213nm laser's outgoing direction perpendicular to its incident direction into the Pelin Broca prism; S33, record the 213nm laser output power.

According to an embodiment of the present disclosure, the Pelin Broca prism is used to separate 532 nm, 355 nm and 213 nm laser light. Since the three wavelength bands of laser light have different refractive indices in the Pelin Broca prism, the corresponding outgoing light has different There will be differences in the deflection direction. According to the calculation, the exit direction of the 213nm laser is perpendicular to the incident direction of the 213nm laser and the incident direction of the 213nm laser is set perpendicular to the incident direction of the 213nm laser for convenience. The integrated design of the laser device corresponding to the method enables better output of the 213 nm laser in the state of ensuring that the lasers of each wavelength are separated, and at the same time reduces the difficulty of the fabrication process of the laser device.

According to an embodiment of the present disclosure, as shown in FIG. 3 , S4 includes: S41 , repeating S1 to S3 multiple times, wherein the temperature of the frequency triple crystal is set to be different each time, and the output power of the 213 nm laser at different temperatures is recorded ; S42, process the output power data of the corresponding 213nm laser at different temperatures obtained in S41 by the data fitting function, and obtain the corresponding relationship between the temperature of the triple frequency crystal and the output power of the 213nm laser, wherein the corresponding relationship is the 213nm laser A polynomial expression of output power versus tripled crystal temperature.

For example, scan the temperature of the frequency triple crystal, and record the output power at 213 nm in real time. Let the laser phase matching temperature be recorded as T ₀ . At this time, the output power at 213 nm is the highest, recorded as P ₀ , and then increase each time on the basis of T0 0.1°C, respectively denoted as T ₁ , T ₂ , T ₃ , ..., T _n-1 , T _n , and the corresponding 213nm output powers were denoted as P ₁ , P ₂ , P ₃ , ... , P _n respectively _-1 , P _n , until the laser output power at 213nm is about 10mW, the frequency triple crystal temperature and 213nm laser output power data are sorted out to prepare for the next stage of data fitting.

According to an embodiment of the present disclosure, a matlab fitting function is used to process the data of the triple frequency crystal temperature and the 213 nm output power to obtain the relationship between them, and a commonly used fitting method is a polynomial fitting function. In matlab, the polynomial fitting function command used is y=polyfit(x, y, N), where the meaning of the first parameter x of the function polyfit is the independent variable of the fitted data, and x is the temperature of the triple frequency crystal , the meaning of the second parameter y is the dependent variable, y is the output power of the 213nm laser, and the third parameter N represents the order of the fitting polynomial. The given N is different, and the fitted polynomial is also different. Accuracy also varies widely. By optimizing the matlab function program, the value of the polynomial order N makes the squared error precision of y be controlled below 0.1, and the value of the polynomial order N can be determined. Through the calculation of matlab, the polynomial relationship between the temperature of the triple frequency crystal and the output power of the 213nm laser can be obtained. With the known polynomial, the temperature of the triple frequency crystal corresponding to the output power of the 213nm laser can be obtained at any location, then the The output power of the 213nm laser was controlled by adjusting the temperature of the triple frequency crystal.

According to an embodiment of the present disclosure, the method further includes: S2I, using the first dichroic mirror to transmit the 1064 nm laser light, and reflecting the 532 nm laser light and the 355 nm laser light; S2II, using a wave plate to adjust the polarization directions of the 532 nm laser light and the 355 nm laser light to make The polarization direction of the 532nm laser is the same as that of the 355nm laser; S2III, the second dichroic mirror is used to transmit the 1064nm laser again, and the 532nm laser and 355nm laser are reflected; S2IV, the beam expander is used to transmit the 532nm laser and The 355nm laser is used to increase the laser spot area, and the 532nm laser and 355nm laser with the enlarged spot area are output to the quintuple frequency crystal.

According to the embodiment of the present disclosure, the first dichroic mirror and the second dichroic mirror are both HR@532nm+355nm, AR@1064nm dichroic mirrors, which are used for transmitting 1064nm laser light and reflecting 532nm laser light and 355nm laser light, so that 532nm laser light and 355nm laser light The laser enters the beam expander and participates in the next stage of the five-fold frequency crystal and frequency processing, and the remaining 1064nm laser after the three-fold frequency crystal does not enter the next stage of frequency conversion.

According to an embodiment of the present disclosure, the wave plate is a wave plate with performance parameters of λ/2@532nm and λ@355nm, which is used to rotate the polarization state direction of the 532nm laser to be consistent with the polarization state of the 355nm laser, but it is not suitable for the 355nm laser. There is no change in the direction of the polarization state.

According to the embodiment of the present disclosure, the beam expander is used to increase the spot area of the incident light entering the quintuple crystal, so that the spot size of the 532 nm laser and the 355 nm laser becomes larger, and the beam divergence angle becomes smaller, which is conducive to generating a better beam quality. 213nm output laser, improve crystal life and improve 213nm output spot shape.

FIG. 4 schematically shows a structural diagram of a device for regulating the output power of a 213 nm laser according to an embodiment of the present disclosure.

As shown in FIG. 4 , the device includes a laser output module 410 , a temperature control module 420 and an optical power test module 430 .

The laser output module 410 includes a frequency triple crystal for outputting a 532nm laser and a 355nm laser. The 532nm laser and the 355nm laser are summed to obtain a 213nm laser.

The temperature control module 420, this laser output module is arranged in the temperature control module, and it is used for controlling the temperature of the laser output module 410, so that the corresponding 213nm laser output power is obtained under the temperature of different triple frequency crystals;

The laser power test module 430 is used to measure the output power of the 213 nm laser; wherein, the temperature control module is used to set different temperatures of the frequency triple crystal for many times, and record the output power of the 213 nm laser at different temperatures, thereby obtaining the frequency triple crystal The corresponding relationship between the temperature of the 213nm laser and the output power of the 213nm laser, and according to the corresponding relationship, the temperature of the frequency triple crystal is adjusted to control the output power of the 213nm laser.

According to an embodiment of the present disclosure, the laser output module 410 further includes a frequency doubling crystal and a frequency doubling crystal. The frequency doubling crystal is used for frequency doubling the laser with a fundamental frequency of 1064 nm to obtain a 532 nm laser, and outputting the 1064 nm laser and the 532 nm laser to the Frequency triple crystal, frequency triple crystal is used to phase-match 1064nm laser and 532nm laser to obtain 355nm laser, frequency triple crystal outputs the remaining 532nm laser and 355nm laser to frequency quintuple crystal, frequency doubling crystal is used to combine The 532nm laser and the 355nm laser are summed to obtain a 213nm laser.

According to the embodiment of the present disclosure, the 1064nm laser, 532nm laser and 355nm laser output by the triple frequency crystal are further processed by the first dichroic mirror, the wave plate, the second dichroic mirror and the beam expander in sequence before being incident on the five frequency doubler crystal. The processing process and principle thereof are shown in the above content, and will not be described in detail here.

According to an embodiment of the present disclosure, the temperature control module 420 includes a first temperature control furnace, a second temperature control furnace, and a third temperature control furnace, the double frequency crystal is placed in the first temperature control furnace, and the triple frequency crystal is placed in the first temperature control furnace. In the second temperature control furnace, the quintuple frequency crystal is placed in the third temperature control furnace, and the first temperature control furnace, the second temperature control furnace and the third temperature control furnace are respectively used to make the frequency doubling crystal, The frequency doubling crystal and the quintuple frequency crystal are in the set temperature environment.

According to the embodiment of the present disclosure, the 532nm laser, 355nm laser and 213nm laser output by the quintuple frequency crystal are output after being separated by the Pelin-Broca prism. According to the calculation, the outgoing direction of the 213nm laser is perpendicular to the incident direction of the 213nm laser entering the Pelin Broca prism.

According to the embodiments of the present disclosure, according to the corresponding relationship, the principle of adjusting the temperature of the frequency triple crystal to adjust the output power of the 213 nm laser is shown in the above content, and will not be described in detail again.

According to the embodiment of the present disclosure, the schematic diagram of the experimental device corresponding to the device is shown in FIG. 5 . The fundamental frequency 1064 nm laser is incident on the frequency-doubling crystal 11 placed in the first temperature-controlled furnace 10 . The frequency of the 1064nm laser is doubled to generate a 532nm laser, and output to the triple frequency crystal 21 placed in the second temperature control furnace 20. According to the preset temperature of the triple frequency crystal 21, the phase matching of the 1064 nm laser and the 532 nm laser is achieved, and the result is obtained The laser wavelength is 355nm laser, the frequency triple crystal 21 outputs the remaining 1064nm, remaining 532nm and 355nm lasers through the first dichroic mirror 30 to transmit the 1064nm laser, reflect the 532nm laser and 355nm laser and output to the wave plate 40, the wave plate 40 will The polarization direction of the 532nm laser and 355nm laser is adjusted so that the polarization direction of the 532nm laser is consistent with the polarization direction of the 355nm laser. The laser output from the wave plate 40 passes through the second dichroic mirror 50 to transmit the 1064nm laser again, and reflects the 532nm laser and 355nm laser. , the laser beam passing through the second dichroic mirror 50 then passes through the beam expander 60 to increase the spot area of the 532nm laser and 355nm laser, and the 532nm laser and 355nm laser after the increased spot area are summed by the five-fold frequency crystal 31 to obtain a 213nm laser , the fivefold frequency crystal 31 is placed in the third temperature-controlled furnace 70, and it outputs the remaining 532nm laser, the remaining 355nm laser and the 213nm laser to the Pelinbroca prism 80, and the Pelinbroca prism 80 converts the 532nm, 355nm laser and 213nm laser separation processing, and make the exit direction of the 213nm laser perpendicular to the incident direction of the 213nm laser entering the Pelin Broca prism 80, as shown in FIG. Instrument 90, use the laser power tester 90 to test the output power of the 213nm laser, set the temperature of the frequency triple crystal 21 to be different each time, repeat the above steps many times, and test the output power of the 213nm laser at different temperatures by the laser power tester 90. output power, and record the output power, and then obtain the corresponding relationship between the temperature of the frequency triple crystal 21 and the output power of the 213nm laser. According to the corresponding relationship, adjust the temperature of the frequency triple crystal 21 to adjust the output power of the 213nm laser.

While the present disclosure has been illustrated and described in detail in the accompanying drawings and the foregoing description, such illustration and description are to be considered illustrative or exemplary and not restrictive, as shown in FIG. 5 only in accordance with A schematic diagram of the structure of an experimental device exemplified in the embodiment of the present disclosure, in the actual application process, some components in the device can be replaced by other components with the same or similar functions, or the structure of the experimental principle device is more simplified or complicated, and this embodiment does not constitute a Definition of this experimental setup.

Those skilled in the art will appreciate that various range combinations and/or combinations of features recited in various embodiments and/or claims of the present disclosure are possible, even if such combinations or combinations are not expressly recited in the present disclosure. In particular, various combinations and/or combinations of the features recited in the various embodiments of the present disclosure and/or in the claims may be made without departing from the spirit and teachings of the present disclosure. All such combinations and/or combinations fall within the scope of this disclosure.

Although the present disclosure has been shown and described with reference to specific exemplary embodiments of the present disclosure, those skilled in the art will appreciate that, without departing from the spirit and scope of the present disclosure as defined by the appended claims and their equivalents, Various changes in form and detail have been made in the present disclosure. Therefore, the scope of the present disclosure should not be limited to the above-described embodiments, but should be determined not only by the appended claims, but also by their equivalents.

Claims

A method for regulating 213nm laser output power, comprising:

S1, set the temperature of the triple frequency crystal;

S2, using the triple frequency crystal to output a 532nm laser and a 355nm laser;

S3, summing the 532nm laser and the 355nm laser to obtain a 213nm laser, and recording the output power of the 213nm laser;

S4, repeating S1 to S3 multiple times, wherein the temperature of the frequency triple crystal is set to be different each time, and the output power of the 213 nm laser at different temperatures is recorded, and then the temperature and the frequency of the frequency triple crystal are obtained. Corresponding relationship of output power of 213nm laser;

S5, according to the corresponding relationship, adjust the temperature of the frequency triple crystal to adjust the output power of the 213 nm laser.
The method for regulating 213nm laser output power according to claim 1, wherein the S4 comprises:

S41, repeating S1 to S3 multiple times, wherein the temperature of the frequency triple crystal is set to be different each time, and the output power of the 213 nm laser at different temperatures is recorded;

S42, processing the output power data of the 213 nm laser corresponding to the different temperatures obtained in S41 through a data fitting function to obtain the corresponding relationship between the temperature of the triple frequency crystal and the output power of the 213 nm laser, wherein the The corresponding relationship is the polynomial expression of the output power of the 213 nm laser and the temperature of the frequency tripled crystal.
The method for regulating 213nm laser output power according to claim 1, wherein the S3 comprises:

S31, using a frequency-five crystal to perform sum frequency on the 532nm laser and the 355nm laser to obtain a 213nm laser;

S32, separate and process the 532nm, 355nm and 213nm lasers by using a Pelinbroca prism, and make the exit direction of the 213nm laser perpendicular to the incident direction of the 213nm laser entering the Pelinbroca prism;

S33, recording the output power of the 213 nm laser.
The method for regulating 213nm laser output power according to claim 1, characterized in that, the method further comprises: S0, using a frequency-doubling crystal to frequency double the fundamental frequency of a 1064nm laser to generate a 532nm laser, and combine the 1064nm laser and the The 532nm laser is output to the frequency triple crystal.
The method for regulating 213nm laser output power according to claim 3, wherein the quintuple crystal in S31 is placed in a third temperature-controlled furnace, and the operating temperature of the quintuple crystal is 120°C ~160°C and maintain a temperature lock.
The method for regulating the output power of a 213 nm laser according to claim 4, wherein the triple frequency crystal in the S1 is placed in a second temperature-controlled furnace, and the second temperature-controlled furnace is used to The fundamental frequency 1064nm laser and the 532nm laser phase matching temperature set the temperature of the triple frequency crystal.
The method for regulating 213nm laser output power according to claim 6, wherein the method further comprises:

S2I, using the first dichroic mirror to transmit the 1064nm laser output from the triple frequency crystal, and to reflect the 532nm laser and the 355nm laser;

S2II, using a wave plate to adjust the polarization directions of the 532nm laser and the 355nm laser output by the first dichroic mirror, so that the polarization direction of the 532nm laser is consistent with the polarization direction of the 355nm laser;

S2III, using the second dichroic mirror to transmit the 1064nm laser output from the wave plate again, and to reflect the 532nm laser and the 355nm laser;

S2IV, the expansion mirror is used to increase the laser spot area of the 532nm laser and the 355nm laser passing through the second dichroic mirror, and the 532nm laser and the 355nm laser with the enlarged spot area are output to The quintuple frequency crystal.
The method for regulating the output power of a 213 nm laser according to claim 6, wherein the operating temperature range of the triple frequency crystal is 50°C to 70°C.
The method for regulating 213nm laser output power according to claim 4, wherein the frequency-doubling crystal in the S0 is placed in a first temperature control furnace, and the working temperature of the frequency-doubling crystal is 120°C ~160°C and maintain a temperature lock.
A device for regulating 213nm laser output power, characterized in that it includes:

The laser output module includes a frequency tripled crystal for outputting a 532nm laser and a 355nm laser, and summing the 532nm laser and the 355nm laser to obtain a 213nm laser;

A temperature control module, the laser output module is arranged in the temperature control module, which is used to control the temperature of the frequency triple crystal, so that the corresponding 213nm laser can be obtained at different temperatures of the frequency triple crystal Output Power;

A laser power test module for measuring the output power of the 213nm laser;

The temperature control module is used to set different temperatures of the temperature of the frequency triple crystal for many times, and record the output power of the 213nm laser at different temperatures, so as to obtain the temperature of the frequency triple crystal and the output of the 213nm laser. The corresponding relationship of power, and according to the corresponding relationship, the temperature of the frequency triple crystal is adjusted to adjust the output power of the 213 nm laser.