CN104882775A - Multi-wavelength single-window laser and in-cavity output end automatic lens changing system - Google Patents
Multi-wavelength single-window laser and in-cavity output end automatic lens changing system Download PDFInfo
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- CN104882775A CN104882775A CN201510318896.2A CN201510318896A CN104882775A CN 104882775 A CN104882775 A CN 104882775A CN 201510318896 A CN201510318896 A CN 201510318896A CN 104882775 A CN104882775 A CN 104882775A
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Abstract
The invention relates to a multi-wavelength single-window laser and an in-cavity output end automatic lens changing system. Pulse laser emitted by a laser source system is vibrated and output in a front resonance mirror and a rear resonance mirror via a 1/4 glass slide of a light guide system and a Q switch, and then the laser is reflected by a first reflector and a second reflector, is amplified by a beam expanding lens and forms a collimated light beam to be output via a diaphragm. A frequency multiplication element switching system includes three frequency multiplication crystals, three screw rods, and three corresponding slide grooves, each stepping motor drives the corresponding screw rod to rotate to enable the corresponding frequency multiplication crystal to horizontally move in the corresponding slide groove, the in-cavity output end automatic lens changing system includes an optical lens swivel mount, three lens mounts, and three plated lenses, the stepping motors is connected with the optical lens swivel mount, the optical lens swivel mount is provided with the three optical lens mounts which fix the plated lenses plated with different reflective films, and during the work state, the plated lenses are matched with an output port in dimension. The automatic switching of laser in different wavelength can be realized.
Description
Technical field
The present invention relates to output in a kind of multi-wavelength list window laser and chamber and, from moving mirror system, belong to laser multi-wavelength equipment technology field.
Background technology
Most laser is all the single wavelength way of output in the market, even if adopt frequency doubling non-linear's crystal technology to realize the output of multiwavelength laser, but need the position of manual adjustments frequency-doubling crystal to realize multi-wavelength, switching different wave length is exported, general employing multiwindow form, utilizes different metallic-membrane plating reflector to reflect the laser exporting different wave length from different windows.As patent CN102280807A discloses a kind of Medical multi-wavelength laser device, this laser can export multiple fundamental frequency or double-frequency laser, but this laser exports the laser of two bundle different wave lengths simultaneously, the output that the single period only has a kind of wavelength laser can not be realized, cause energy waste.Patent CN1300122A discloses a kind of all solid state multiple-wavelength laser, and this laser can export multiwavelength laser, but the adjustment of frequency-doubling crystal needs artificial intervention, and often dismounting laser causes shorten its useful life.Patent CN101854018A discloses the laser of the automatic adjusting wavelength of a kind of energy, utilizes the rotation realization of gear to the absorption of light or release, but the port that the output of multi-wavelength is corresponding different respectively, and in chamber, element is too much.Patent CN102012552A discloses a kind of multiwindow multiple-wavelength laser automatic optical path adjusting system, adopts wavelength switch to regulate the direction of laser outward at system light path, but due to the more device of switch window too huge.
Summary of the invention
The object of the invention is the deficiency overcoming prior art existence, provide output in a kind of multi-wavelength list window laser and chamber certainly to move mirror system.
Object of the present invention is achieved through the following technical solutions:
In multi-wavelength list window laser and chamber, output is from moving mirror system, feature is: comprise laser source systems, light-conducting system, frequency multiplication element switched system, in chamber, output is from moving mirror system and industrial computer, described light-conducting system comprises front humorous galvanometer, rear humorous galvanometer, first speculum, second speculum, 1/4 slide, beam expanding lens and diaphragm, the pulse laser that laser source systems sends through 1/4 slide and Q switching at front humorous galvanometer, shake in rear humorous galvanometer and export, laser is through the first speculum, second speculum reflection, light beam enters beam expanding lens and amplifies, and form collimated light beam output by diaphragm,
Described frequency multiplication element switched system comprises three frequency-doubling crystals, three screw mandrels and corresponding with it three chutes, industrial computer is connected with three step motor control by trigger, screw mandrel corresponding to each driving stepper motor rotates and corresponding frequency-doubling crystal is moved horizontally in chute, controls the frequency-doubling crystal whether laser of exportable different wave length in working light path;
In described chamber, output is positioned at inside output port from moving mirror system, comprise optical mirror slip swivel mount, three eyeglass fixed mounts, three plated film lens, stepping motor and optical bench, optical bench bottom is connected at the bottom of the case of laser, the other end installs stepping motor, stepping motor is connected with industrial computer, stepping motor is connected with optical mirror slip swivel mount, optical mirror slip swivel mount is distributed with three optical mirror slip fixed mounts, be separated by 120 ° between two, three optical mirror slip fixed mounts are fixedly coated with the plated film lens of different reflectance coating respectively, plated film lens in working order time its eyeglass size and output port size match, when exporting the laser of different wave length, industrial computer control step motor rotates corresponding step makes plated film lens corresponding with optical maser wavelength.
Further, in above-mentioned multi-wavelength list window laser and chamber, output is from moving mirror system, wherein, described three optical mirror slip fixed mounts be fixedly coated with respectively 1064nm high transmittance film plated film lens, be coated with the plated film lens of 532nm high transmittance film/1064nm high-reflecting film, be coated with the plated film lens of 355nm266nm high transmittance film/1064nm532nm high-reflecting film.
Further, in above-mentioned multi-wavelength list window laser and chamber, output is from moving mirror system, and wherein, described three frequency-doubling crystals are KTP bis-frequency-doubling crystal, BBO and crystal and LBO bis-frequency-doubling crystal frequently.
Further, in above-mentioned multi-wavelength list window laser and chamber, output is from moving mirror system, wherein, described front humorous galvanometer and rear humorous galvanometer are made up of the slide of plated film, rear humorous galvanometer is coated with the high-reflecting film of 1064nm, front humorous galvanometer is coated with the projection film of 1064nm wavelength, and transmitance is 20%; First speculum and the second speculum are coated with the high-reflecting film of 1064nm.
Again further, in above-mentioned multi-wavelength list window laser and chamber, output is from moving mirror system, wherein, described laser source systems comprises laser crystal bar, laser pump cavity, pumping source and cooling system, the material of crystal bar is Nd:YAG, YB:YAG or Nd:YLF, laser pump cavity is bielliptic(al) laser pump cavity, hard-pressed bale type laser pump cavity or close coupling laser pump cavity, and pumping source is lamp pumping or semiconductor pumped, and cooling system is water-cooling system.
The substantive distinguishing features that technical solution of the present invention is outstanding and significant progress are mainly reflected in:
1. different wave length laser realizes automation switching, enormously simplify manual operation process;
2. in chamber, output is from moving mirror system by step motor control, and accurately facilitate, and can configure corresponding plated film lens according to wavelength requirement, utilance is high;
3. single window Output of laser not only simplify the quantity of element in chamber and also saves space, and externally the adjustment of light path is also convenient simultaneously;
4. equipment volume is little, easy to operate, and outer optical path adjusting is convenient, and range of application is extremely extensive.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, technical solution of the present invention is described further:
The system configuration schematic diagram that Fig. 1: laser 1064nm wavelength exports;
The system configuration schematic diagram that Fig. 2: laser 532nm wavelength exports;
The system configuration schematic diagram that Fig. 3: laser 355nm wavelength exports;
The system configuration schematic diagram that Fig. 4: laser 266nm wavelength exports;
Fig. 5: in chamber, output is from the structural representation moving mirror system;
The implication of each Reference numeral in figure:
1-Q drive circuit board, 2-rear humorous galvanometer, 3-1/4 slide 4-Q switching, 5-polarizer, 6-laser source systems, 7-front humorous galvanometer, 8-the first speculum, 9-safety switch, 10-industrial computer, 11-thermostat, 12-the second speculum, 13-beam expanding lens, 14-diaphragm, 15-KTP bis-frequency-doubling crystal, 16-BBO and frequently crystal, 17-LBO bis-frequency-doubling crystal, in 18-chamber, output is from moving mirror system, 19-output port, 20-stepping motor, 21-chute, 22-leading screw, 23-optical mirror slip swivel mount, 24-eyeglass fixed mount, 25-optical bench, 26-be coated with the plated film lens of 1064nm high transmittance film, 27-be coated with the plated film lens of 532nm high transmittance film/1064nm high-reflecting film, 28-be coated with the plated film lens of 355nm266nm high transmittance film/1064nm532nm high-reflecting film.
Embodiment
As shown in Figure 1, in multi-wavelength list window laser and chamber, output is from moving mirror system, comprise laser source systems 6, light-conducting system, frequency multiplication element switched system, in chamber, output is from moving mirror system 18, industrial computer 10, Q switching 4 and Q drive circuit board, light-conducting system comprises front humorous galvanometer 7, rear humorous galvanometer 2, first speculum 8, second speculum 12, 1/4 slide 3, beam expanding lens 13, diaphragm 14, polarizer 5, safety switch 9 and thermostat 11, the 1064nm wavelength pulsed laser that laser source systems 6 sends through 1/4 slide 3 with Q switching 4 at front humorous galvanometer 7, shake in rear humorous galvanometer 2 and export, laser is through the first speculum 8, second speculum 12 reflects, light beam enters beam expanding lens 13 and amplifies, and form collimated light beam output by diaphragm 14, front humorous galvanometer 7 and rear humorous galvanometer 2 are made up of the slide of plated film, and rear humorous galvanometer 2 is coated with the high-reflecting film of 1064nm, and front humorous galvanometer 7 is coated with the projection film of 1064nm wavelength, transmitance is 20%, first speculum 8 and the second speculum 12 are coated with the high-reflecting film of 1064nm.
Frequency multiplication element switched system comprises three frequency-doubling crystals, three stepping motors, 20, three screw mandrels 22 and corresponding with it three chutes 21, three frequency-doubling crystals are KTP bis-frequency-doubling crystal 15, BBO and frequency crystal 16 and LBO bis-frequency-doubling crystal 17, industrial computer is connected with three step motor control by trigger, the screw mandrel that each driving stepper motor is corresponding rotates, corresponding frequency-doubling crystal is moved horizontally in chute, controls the frequency-doubling crystal whether laser of exportable different wave length in working light path.
In chamber, output is positioned at inside output port 19 from moving mirror system 18, comprise optical mirror slip swivel mount 23, three eyeglass fixed mounts 24, three plated film lens, stepping motor and optical benchs 25, optical bench 25 bottom is connected at the bottom of the case of laser, the other end installs stepping motor, stepping motor is connected with industrial computer, stepping motor is connected with optical mirror slip swivel mount 23, and optical mirror slip swivel mount 23 is distributed with three optical mirror slip fixed mounts 24, is separated by 120 between two
othree optical mirror slip fixed mounts be fixedly coated with respectively 1064nm high transmittance film plated film lens 26, be coated with the plated film lens 27 of 532nm high transmittance film/1064nm high-reflecting film, be coated with the plated film lens 28 of 355nm266nm high transmittance film/1064nm532nm high-reflecting film, plated film lens in working order time its eyeglass size and output port 19 size match, when exporting the laser of different wave length, industrial computer 10 control step motor rotates corresponding step makes plated film lens corresponding with optical maser wavelength.
Laser source systems 6 comprises laser crystal bar, laser pump cavity, pumping source and cooling system, the material of crystal bar is Nd:YAG, YB:YAG or Nd:YLF, laser pump cavity is bielliptic(al) laser pump cavity, hard-pressed bale type laser pump cavity or close coupling laser pump cavity, pumping source is lamp pumping or semiconductor pumped, and cooling system is water-cooling system.
Embodiment 1:1064nm wavelength pulsed laser exports
As shown in Figure 1 and Figure 5, before bright dipping, industrial computer 10 sends instruction from moving mirror system 18 with frequency multiplication element switched system to output in chamber, triggering stepping motor moves, stepping motor drives leading screw 22 to move, KTP bis-frequency-doubling crystal 15, BBO and frequency crystal 16, LBO bis-frequency-doubling crystal 17 moved in chute 22 and makes KTP bis-frequency-doubling crystal 15, BBO and frequency crystal 16, LBO bis-frequency-doubling crystal 17 position be in outside light path, realizing the automatic switchover of frequency multiplication element switched system.Rotate from moving optical mirror slip swivel mount 23 in mirror system 18, the plated film lens 26 being coated with 1064nm high transmittance film is coincided with output port 19 position.Industrial computer 10 controls laser source systems 6 and works, the 1064nm wavelength pulsed laser that laser source systems 6 sends through 1/4 slide 3 and Q switching 4 in front and back humorous galvanometer 2, shake in front humorous galvanometer 7 and export, laser is through the first speculum 8 of plating 1064nm high-reflecting film, second speculum 12 reflects, enter in beam expanding lens 13, light beam is through amplifying and forming high-quality collimated light beam by diaphragm 14, owing to there is no KTP bis-frequency-doubling crystal 15, BBO and frequently crystal 16, the effect of LBO bis-frequency-doubling crystal 17, light beam directly exports 1064nm wavelength laser through the plated film lens 26 being coated with 1064nm high transmittance film from output port 19.
Embodiment 2:532nm wavelength pulsed laser exports
As shown in Figure 2 and Figure 5, before bright dipping, industrial computer 10 sends instruction from moving mirror system 18 with frequency multiplication element switched system to output in chamber, triggering stepping motor moves, stepping motor drives leading screw 22 to move, make KTP bis-frequency-doubling crystal 15, BBO and frequency crystal 16, LBO bis-frequency-doubling crystal 17 move in chute 22 and make KTP bis-frequency-doubling crystal 15 move in light path, BBO and frequently crystal 16, LBO bis-frequency-doubling crystal 17 position are in outside light path, realize the automatic switchover of frequency multiplication element switched system.In chamber, output rotates from moving optical mirror slip swivel mount 23 in mirror system 18, and the plated film lens 27 being coated with 532nm high transmittance film/1064nm high-reflecting film is coincided with output port 19 position.Industrial computer 10 controls laser source systems 6 and works, the 1064nm wavelength pulsed laser that laser source systems 6 sends shakes through 1/4 slide 3 with Q switching 4 and exports in the humorous galvanometer in front and back 2, front humorous galvanometer 7, laser reflects through the first speculum 8, second speculum 12 of plating 1064nm high-reflecting film, enter in beam expanding lens 13, light beam is through amplifying and forming high-quality collimated light beam by diaphragm 14, through the frequency multiplication effect of KTP bis-frequency-doubling crystal 15, light beam exports 532nm wavelength laser through the plated film lens 27 being coated with 532nm high transmittance film/1064nm high-reflecting film from output port 19.
Embodiment 3:355nm wavelength pulsed laser exports
As shown in Figure 3 and Figure 5, before bright dipping, industrial computer 10 sends instruction from moving mirror system 18 with frequency multiplication element switched system to output in chamber, triggering stepping motor moves, stepping motor drives leading screw 22 to move, make KTP bis-frequency-doubling crystal 15, BBO and frequently crystal 16, LBO bis-frequency-doubling crystal 17 move in chute 22 and make KTP bis-frequency-doubling crystal 15, LBO bis-frequency-doubling crystal 17 moves in light path, BBO and frequency crystal 16 position are in outside light path, realize the automatic switchover of frequency multiplication element switched system.In chamber, output rotates from moving optical mirror slip swivel mount 23 in mirror system 18, and the plated film lens 28 being coated with 355nm266nm high transmittance film/1064nm532nm high-reflecting film is coincided with output port 19 position.Industrial computer 10 controls laser source systems 6 and works, the 1064nm wavelength pulsed laser that laser source systems 6 sends through 1/4 slide 3 and Q switching 4 after humorous galvanometer 2, shake in front humorous galvanometer 7 and export, laser is through the first speculum 8 of plating 1064nm high-reflecting film, second speculum 12 reflects, enter in beam expanding lens 13, light beam is through amplifying and forming high-quality collimated light beam by diaphragm 14, through KTP bis-frequency-doubling crystal 15 and LBO bis-frequency-doubling crystal 17, light beam exports 355nm wavelength laser through the plated film lens 28 being coated with 355nm266nm high transmittance film/1064nm532nm high-reflecting film from output port 19.
Embodiment 4:266nm wavelength pulsed laser exports
As shown in Figure 4 and Figure 5, before bright dipping, industrial computer 10 sends instruction from moving mirror system 18 with frequency multiplication element switched system to output in chamber, triggering stepping motor moves, stepping motor drives leading screw 22 to move, KTP bis-frequency-doubling crystal 15, BBO and frequency crystal 16, LBO bis-frequency-doubling crystal 17 are moved in chute 22 and makes KTP bis-frequency-doubling crystal 15, BBO and frequency crystal 16 move in light path, LBO bis-frequency-doubling crystal 17 position is in outside light path, realizes the automatic switchover of frequency multiplication element switched system.In chamber, output rotates from moving optical mirror slip swivel mount 23 in mirror system 18, and the plated film lens 28 being coated with 355nm266nm high transmittance film/1064nm532nm high-reflecting film is coincided with output port 19 position.Industrial computer 10 controls laser source systems 6 and works, the 1064nm wavelength pulsed laser that laser source systems 6 sends through 1/4 slide 3 and Q switching 4 after humorous galvanometer 2, shake in front humorous galvanometer 7 and export, laser is through the first speculum 8 of plating 1064nm high-reflecting film, second speculum 12 reflects, enter in beam expanding lens 13, light beam is through amplifying and forming high-quality collimated light beam by diaphragm 14, through KTP bis-frequency-doubling crystal 15, the frequency multiplication effect of BBO and frequently crystal 16, light beam exports 266nm wavelength laser through the plated film lens 28 being coated with 355nm266nm high transmittance film/1064nm532nm high-reflecting film from output port 19.
In sum, different wave length laser realizes automation and switches, and enormously simplify manual operation process; In chamber, output is from moving mirror system by step motor control, and accurately facilitate, and can configure corresponding plated film lens according to wavelength requirement, utilance is high; Single window Output of laser not only simplify the quantity of element in chamber and also saves space, and externally the adjustment of light path is also convenient simultaneously; Equipment volume is little, easy to operate, and outer optical path adjusting is convenient, and range of application is extremely extensive.
It is to be understood that: the above is only the preferred embodiment of the present invention; for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (5)
1. in multi-wavelength list window laser and chamber output from moving mirror system, it is characterized in that: comprise laser source systems, light-conducting system, frequency multiplication element switched system, in chamber, output is from moving mirror system and industrial computer, described light-conducting system comprises front humorous galvanometer, rear humorous galvanometer, first speculum, second speculum, 1/4 slide, beam expanding lens and diaphragm, the pulse laser that laser source systems sends through 1/4 slide and Q switching at front humorous galvanometer, shake in rear humorous galvanometer and export, laser is through the first speculum, second speculum reflection, light beam enters beam expanding lens and amplifies, and form collimated light beam output by diaphragm,
Described frequency multiplication element switched system comprises three frequency-doubling crystals, three screw mandrels and corresponding with it three chutes, industrial computer is connected with three step motor control by trigger, screw mandrel corresponding to each driving stepper motor rotates and corresponding frequency-doubling crystal is moved horizontally in chute, controls the frequency-doubling crystal whether laser of exportable different wave length in working light path;
In described chamber, output is positioned at inside output port from moving mirror system, comprise optical mirror slip swivel mount, three eyeglass fixed mounts, three plated film lens, stepping motor and optical bench, optical bench bottom is connected at the bottom of the case of laser, the other end installs stepping motor, stepping motor is connected with industrial computer, stepping motor is connected with optical mirror slip swivel mount, optical mirror slip swivel mount is distributed with three optical mirror slip fixed mounts, be separated by 120 ° between two, three optical mirror slip fixed mounts are fixedly coated with the plated film lens of different reflectance coating respectively, plated film lens in working order time its eyeglass size and output port size match, when exporting the laser of different wave length, industrial computer control step motor rotates corresponding step makes plated film lens corresponding with optical maser wavelength.
2. in multi-wavelength list window laser according to claim 1 and chamber, output, from moving mirror system, is characterized in that: described three optical mirror slip fixed mounts be fixedly coated with respectively 1064nm high transmittance film plated film lens, be coated with the plated film lens of 532nm high transmittance film/1064nm high-reflecting film, be coated with the plated film lens of 355nm266nm high transmittance film/1064nm532nm high-reflecting film.
3. in multi-wavelength list window laser according to claim 1 and chamber, output, from moving mirror system, is characterized in that: described three frequency-doubling crystals are KTP bis-frequency-doubling crystal, BBO and crystal and LBO bis-frequency-doubling crystal frequently.
4. in multi-wavelength list window laser according to claim 1 and chamber output from moving mirror system, it is characterized in that: described front humorous galvanometer and rear humorous galvanometer are made up of the slide of plated film, rear humorous galvanometer is coated with the high-reflecting film of 1064nm, front humorous galvanometer is coated with the transmission film of 1064nm wavelength, transmitance is 20%; First speculum and the second speculum are coated with the high-reflecting film of 1064nm.
5. in multi-wavelength list window laser according to claim 1 and chamber output from moving mirror system, it is characterized in that: described laser source systems comprises laser crystal bar, laser pump cavity, pumping source and cooling system, the material of crystal bar is Nd:YAG, YB:YAG or Nd:YLF, laser pump cavity is bielliptic(al) laser pump cavity, hard-pressed bale type laser pump cavity or close coupling laser pump cavity, pumping source is lamp pumping or semiconductor pumped, and cooling system is water-cooling system.
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| CN105680309A (en) * | 2016-04-06 | 2016-06-15 | 南京大学 | Compact-structure picosecond pulse wide-tuning mid-infrared laser |
| CN106924885A (en) * | 2015-12-30 | 2017-07-07 | 武汉奇致激光技术股份有限公司 | A kind of energy correction control system and control method for laser cure apparatus |
| CN108555438A (en) * | 2018-07-06 | 2018-09-21 | 温州大学激光与光电智能制造研究院 | Laser machine fundamental frequency frequency multiplication switching system and its method |
| CN110265859A (en) * | 2019-05-30 | 2019-09-20 | 中国科学院长春光学精密机械与物理研究所 | A kind of laser output optics resonator device |
| CN110928105A (en) * | 2019-12-09 | 2020-03-27 | 浙江德扬精密仪器有限公司 | High-precision single-motor multi-crystal optical parametric amplifier |
| CN111906306A (en) * | 2020-06-10 | 2020-11-10 | 上海航天设备制造总厂有限公司 | Multi-wavelength laser processing optical path system of melting additive manufacturing equipment |
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| CN113451871A (en) * | 2021-06-28 | 2021-09-28 | 长春理工大学 | Quick start intermediate infrared laser |
| CN113451872A (en) * | 2021-06-28 | 2021-09-28 | 长春理工大学 | Quick start intermediate infrared laser and corresponding polycrystal switching device |
| CN113451872B (en) * | 2021-06-28 | 2022-08-09 | 长春理工大学 | Quick start intermediate infrared laser and corresponding polycrystal switching device |
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Application publication date: 20150902 |