CN106300000B - Fast tuning pulse CO2Laser device - Google Patents
Fast tuning pulse CO2Laser device Download PDFInfo
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- CN106300000B CN106300000B CN201610970842.9A CN201610970842A CN106300000B CN 106300000 B CN106300000 B CN 106300000B CN 201610970842 A CN201610970842 A CN 201610970842A CN 106300000 B CN106300000 B CN 106300000B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/117—Q-switching using intracavity acousto-optic devices
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- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
The invention discloses a fast tuning pulse CO2The laser comprises a grating component, an acousto-optic deflector driving power supply, an acousto-optic modulator, a laser gain area device and a laser output mirror. In order to select two different wavelengths, an acousto-optic deflector driving power supply for controlling the start and stop of the acousto-optic deflector is added. When the acousto-optic deflector driving power supply does not work, the acousto-optic deflector belongs to one wavelength, and when the acousto-optic deflector driving power supply works, the acousto-optic deflector belongs to the other wavelength after working, namely, the switching of the two wavelengths is realized. According to the description, the mode for realizing the wavelength tuning only consists in starting and stopping the acousto-optic deflector, the tuning speed is high, the repeated switching stability is high, the tuning range is wide, the pulse repetition frequency is adjustable, the operation is easy, the maintenance is convenient, and the like. When the wavelength is switched, the acousto-optic deflector can only work, a motor is not needed to drive the grating to rotate, the problem that the mechanical positioning precision is difficult to control is solved, and the stability and the repeatability of wavelength tuning are improved.
Description
Technical Field
The invention relates to the technical field of laser fast tuning, in particular to fast tuning pulse CO2A laser.
Background
Fast tuning pulse CO2The laser has more than one hundred spectral lines within the range of 9-11 mu m of an atmospheric transmission window, corresponds to the absorption peaks of various gases, and is an ideal light source of the laser differential absorption radar. The working principle of the laser differential absorption radar is that two beams of laser with different wavelengths are emitted to an area to be measured, one beam is a measuring beam which is superposed with an absorption peak of gas to be measured, and the other beam is a reference beam which is deviated from the absorption peak of the gas to be measured. In order to eliminate measurement errors caused by atmospheric jitter, two laser beams with different wavelengths are required to be emitted in the same direction within the atmospheric freezing time (1ms) for high-precision gas differential detection. Therefore, the fast tuning pulse CO2The laser is attracting attention as a light source of a far infrared laser differential absorption radar. A tunable wavelength, for example of the type disclosed in the patent publication "ZL 200810051433.4Coded output acousto-optic Q-switched pulse CO2The laser adopts the grating as a wavelength tuning device and adopts the acousto-optic modulator as a Q-switching device, thereby realizing tunable pulse output of dozens of laser spectral lines in the range of 9-11 mu m, but the wavelength tuning is finished by manually rotating the grating surface, and the tuning speed is slow. The patent publication "CN 101071929A" discloses a "grating selective fast tuning laser resonator", which proposes a method of using a servo motor to drive the grating to rotate to realize wavelength tuning, but although it can realize wavelength fast tuning, since a moving part (a motor drives the grating to rotate) is used in the wavelength tuning process, it has the disadvantage that it is difficult to overcome in terms of stability and repeatability of wavelength tuning, and the mechanical positioning accuracy is difficult to control.
Thus, how to provide a fast tuning pulse CO2The laser, which realizes fast switching with stable wavelength, is a technical problem that needs to be solved by those skilled in the art at present.
Disclosure of Invention
In view of the above, the present invention provides a fast tuning pulse CO2The laser realizes the fast switching with stable wavelength.
In order to achieve the purpose, the invention provides the following technical scheme:
fast tuning pulse CO2A laser, comprising:
the grating assembly comprises a first metal original-etched grating and a second metal original-etched grating;
the optical axis of the acousto-optic deflector and the normal of the first metal original etching grating are arranged in an auto-collimation angle, and the normal of the second metal original etching grating and the deflected optical axis of the acousto-optic deflector are arranged in an auto-collimation angle;
the acousto-optic deflector driving power supply controls the start and stop of the acousto-optic deflector;
CO2a laser gain region device;
a laser output mirror, an optical axis of the laser output mirror, an optical axis of an input end of the acousto-optic deflector, and the CO2The optical axes of the laser gain region devices are collinearThe acousto-optic deflector is positioned between the grating component and the CO2Between the laser gain area devices.
Preferably, the fast tuning pulse CO mentioned above2Fast tuning of pulsed CO in a laser2An acousto-optic modulator of the laser is positioned between the acousto-optic deflector and the CO2Between the laser gain area devices;
and the acousto-optic modulator drives a power supply and controls the start and stop of the acousto-optic modulator.
Preferably, the fast tuning pulse CO mentioned above2The laser also comprises a signal generator which is in signal connection with the acousto-optic deflector driving power supply and the acousto-optic modulator driving power supply, and the acousto-optic modulator driving power supply is turned on in the optical path switching process of the acousto-optic deflector.
Preferably, the fast tuning pulse CO mentioned above2The laser also comprises the acousto-optic modulator and CO2And the laser gain area devices are sequentially provided with a beam coupling unit and a mode selection diaphragm, and the optical axes of the beam coupling unit and the mode selection diaphragm are coincident with the optical axis of the laser output mirror.
Preferably, the fast tuning pulse CO mentioned above2In the laser, the beam coupling unit comprises at least two lenses with coincident optical axes.
Preferably, the fast tuning pulse CO mentioned above2In the laser, the CO2Both ends of the laser gain device are encapsulated by brewster windows of zinc selenide.
Preferably, the fast tuning pulse CO mentioned above2In the laser, the laser output mirror is a zinc selenide concave lens of a semi-transparent semi-reflective coating film.
Preferably, the fast tuning pulse CO mentioned above2In the laser, the working surfaces of the first metal original-etched grating and the second metal original-etched grating can both rotate.
Preferably, the fast tuning pulse CO mentioned above2In the laser, the first metal original-etching grating is arranged on a first high-precision rotary table, and the second metal original-etching grating is arranged on a second high-precision rotary table.
Preferably, the aboveFast tuning pulse CO of2In the laser, the acousto-optic deflector comprises an ultrasonic generator made of quartz material and an acousto-optic crystal made of germanium material.
By the technical scheme, the invention discloses a fast tuning pulse CO2The laser comprises a grating component, an acousto-optic deflector driving power supply, a laser gain area device and a laser output mirror. By adopting the structure, in order to select two different wavelengths, the acousto-optic deflector driving power supply for controlling the start and stop of the acousto-optic deflector is added. When the acousto-optic deflector driving power supply does not work, the acousto-optic deflector belongs to one wavelength, and when the acousto-optic deflector driving power supply works, the acousto-optic deflector belongs to the other wavelength after working, namely, the switching of the two wavelengths is realized. According to the description process, the mode for realizing the wavelength tuning only consists in starting and stopping the acousto-optic deflector, so that the tuning speed is high, the repeated switching stability is high, the tuning range is wide, the pulse repetition frequency is adjustable, the operation is easy, the maintenance is convenient and the like. And when the wavelength is switched, the acousto-optic deflector can only work, and a motor is not needed to drive the grating to rotate, so that the problem that the mechanical positioning precision is difficult to control is solved, and the stability and the repeatability of wavelength tuning are improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a diagram of a fast tuning pulse CO according to an embodiment of the present invention2The structure schematic diagram of the laser;
fig. 2 is a schematic structural diagram of an acousto-optic deflector according to an embodiment of the present invention.
Detailed Description
The core of the invention is to provide a fast tuning pulse CO2The laser realizes the fast switching with stable wavelength.
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
As shown in FIGS. 1 and 2, the present invention discloses a fast tuning pulse CO2The laser comprises a grating assembly, an acousto-optic deflector 5, an acousto-optic deflector drive power supply 7, and CO2A laser gain region device 12 and a laser output mirror 14. The grating assembly comprises a first metal original grating 1 and a second metal original grating 3, and working faces of the two gratings can rotate to adjust the wavelength and the angle of the gratings. The normal line of the first metal original etching grating 1 and the optical axis of the acousto-optic deflector 5 are arranged in an auto-collimation angle, and the normal line of the second metal original etching grating 3 and the optical axis after the acousto-optic deflector 5 rotates are arranged in an auto-collimation angle. When the wavelength needs to be switched, only the acousto-optic deflector 5 needs to be activated. The positions of the working surfaces of the first metal original-etched grating 1 and the second metal original-etched grating 3 need to be determined after the wavelength is selected.
In order to select two different wavelengths, an acousto-optic deflector driving power supply 7 for controlling the on-off of the acousto-optic deflector 5 is arranged. When the acousto-optic deflector driving power supply 7 does not work, the acousto-optic deflector belongs to one wavelength, and when the acousto-optic deflector driving power supply 7 works, the acousto-optic deflector 5 works and then belongs to the other wavelength, namely, the switching of the two wavelengths is realized. According to the above description, the wavelength tuning is realized only by starting and stopping the acousto-optic deflector 5, so that the tuning speed is high and the repeated switching stability is high.
Optical axis, CO, of the laser output mirror 142The optical axis of the laser gain region device 12 is collinear with the optical axis of the input end of the acousto-optic deflector 5, and the acousto-optic deflector 5 is located between the grating assembly and the laser output mirror 14. The first metal original grating 1 and the second metal original grating 3 respectively form a resonant cavity with the laser output mirror 14.The input end of the acousto-optic deflector 5 is near one end of the grating assembly.
By adopting the structure, the acousto-optic deflector 5 is added, so that the tuning speed of the selected wavelength is high, the repeated switching stability is high, the tuning range is wide, the operation is easy, the maintenance is convenient, and the like. And when the wavelength is switched, the acousto-optic deflector 5 can only work, and a motor is not needed to drive the grating to rotate, so that the problem that the mechanical positioning precision is difficult to control is solved, and the stability and the repeatability of wavelength tuning are improved.
In a specific embodiment, the fast tuning pulse CO2The laser has an acousto-optic modulator 6 and an acousto-optic modulator drive power supply 8. The acousto-optic modulator 6 is located between the acousto-optic deflector 5 and the laser output mirror 14, and the acousto-optic modulator driving power supply 8 controls the on-off of the acousto-optic modulator 6. In the actual operation process, in order to avoid the problem of laser spectrum ghost lines, the output of laser needs to be cut off in the light path deflection scanning process of the acousto-optic deflector 5, so that the acousto-optic modulator driving power supply 8 is turned on at the moment, the acousto-optic modulator 6 is in an acousto-optic diffraction state, namely, the light path is turned off, and at the moment, no laser resonance exists in the resonant cavity, so that the ghost lines are avoided.
For automated control, the fast tuning pulse CO disclosed in this application2The laser further comprises a signal generator 9, the signal generator 9 is in signal connection with both the acousto-optic deflector drive power supply 7 and the acousto-optic modulator drive power supply 8, and the acousto-optic modulator drive power supply 8 is turned on during switching of the optical path of the acousto-optic deflector 5.
Under the control of the signal generator 9, the acousto-optic deflector drive power supply 7 is turned off, the acousto-optic deflector 5 does not work, at the moment, the first metal original etching grating 1 and the laser output mirror 14 form a resonant cavity, and the resonant output of the first laser wavelength is realized by rotating the first high-precision rotary table 2; and secondly, under the control of the signal generator 9, the acousto-optic deflector drives the power supply 7 to be turned on, the acousto-optic deflector 5 starts to work, the light path deflects, at the moment, the second metal original etching grating 3 and the laser output mirror 14 form a resonant cavity, and the resonant output of the second laser wavelength is realized by rotating the second high-precision rotary table 4. The acousto-optic modulator 6 is driven by the signal generator 9 and the acousto-optic modulatorWorking under the control of source 8 to complete CO2And a laser Q-switching process is carried out to realize laser pulse output. The signal generator 9 ensures that the acousto-optic modulator 6 is in an acousto-optic diffraction state (optical path is turned off) in the optical path switching process of the acousto-optic deflector 5 through time sequence programming control, and no laser resonance exists in the resonant cavity at the moment, so that the possibility of laser spectrum ghost lines occurring in the optical path deflection scanning process of the acousto-optic deflector 5 is eliminated. The working frequency of the acousto-optic deflector 5 can reach 1kHz, namely within 1ms, one-time light path deflection switching can be completed, so that the pulse CO is quickly tuned under the control of the signal generator 92The switching time between selected wavelengths of the laser can be as short as 1 ms.
In a further embodiment, a beam coupling unit 10 and a mode selection diaphragm 11 are sequentially arranged between the acousto-optic modulator 6 and the laser output mirror 14, and the optical axes of both the beam coupling unit 10 and the mode selection diaphragm 11 coincide with the optical axis of the laser output mirror 14.
Wherein, the beam coupling unit 10 comprises at least two lenses with coincident optical axes, and is arranged by adopting a telescope structure, and the function of the beam coupling unit is that one side is matched with CO2The aperture of the laser gain area device 12 and the aperture of the acoustic-optical modulator 6 are matched on the other side, and the beam coupling unit 10 is arranged close to the CO2The laser gain region 12 has a larger beam diameter, i.e., a larger lens area, to facilitate laser gain extraction, and a smaller beam diameter, i.e., a smaller lens area, near the acousto-optic modulator 6 to facilitate compression of the transit time of the beam within the acousto-optic modulator 6. The mode selection diaphragm 11 is a small-hole diaphragm and has the function of limiting laser high-order mode oscillation and improving laser beam quality. Said CO2Two ends of the laser gain area device 12 are packaged by a Brewster window 13 made of zinc selenide materials, so that the requirement of the acoustic optical modulator 6 and the acoustic optical deflector 5 on the deflection characteristic of incident laser is met, and linear polarization output of the laser is realized.
The laser output mirror 14 adopts a zinc selenide concave lens of a semi-transparent semi-reflective coating film. The first metal original-engraved grating 1 and the second metal original-engraved grating 3 are both self-collimating gratings, the first metal original-engraved grating 1 is fixed on the first high-precision rotary table 2, the second metal original-engraved grating 3 is fixed on the second high-precision rotary table 4, and grating rotation can be achieved under the driving of the high-precision rotary table.
The acousto-optic deflector 5 in the present application is an element for completing the deflection of the optical path in the resonant cavity, and is the core of the fast tuning system, and comprises an ultrasonic generator 51 and an acousto-optic crystal 52. The acousto-optic crystal 52 is made of polycrystalline germanium material with good transmittance in a wave band of 9-11 mu m, and the transmission speed v of ultrasonic waves in the crystals5.5km/s, the effective clear aperture is 8mm, and the one-way transmittance in the wave band is more than 95 percent. The ultrasonic generator 51 selects quartz material with high conversion efficiency from electric power to acoustic power, and its resonant frequency f is driven by the driving power supply 7 of the acoustic-optical deflectorsIs 40.68 MHz. The calculation formula of the acousto-optic deflection angle is 2arcsin (lambda f)s/2vs) And according to the calculation, the acousto-optic deflector 5 can deflect the optical path by an angle of 4.5 degrees, and the angle is enough to meet the application requirement of optical path deflection.
The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (8)
1. Fast tuning pulse CO2A laser, comprising:
the grating assembly comprises a first metal original-etched grating (1) and a second metal original-etched grating (3);
the optical axis of the acousto-optic deflector (5) and the normal of the first metal original etching grating (1) are arranged in an auto-collimation angle, and the normal of the second metal original etching grating (3) and the deflected optical axis of the acousto-optic deflector (5) are arranged in an auto-collimation angle;
the acousto-optic deflector driving power supply (7) controls the start and stop of the acousto-optic deflector (5);
CO2a laser gain region device (12);
a laser output mirror (14), an optical axis of the laser output mirror (14), an optical axis of an input of the acousto-optic deflector (5) and the CO2The optical axes of the laser gain region devices (12) are collinear, and the acousto-optic deflector (5) is positioned between the grating assembly and the CO2Between the laser gain region devices (12);
fast tuning pulse CO2An acousto-optic modulator (6) of the laser is positioned between the acousto-optic deflector (5) and the CO2Between the laser gain region devices (12);
the acousto-optic modulator driving power supply (8) controls the acousto-optic modulator (6) to start and stop;
further comprises an acousto-optic modulator (6) and CO2The beam coupling unit (10) and the mode selection diaphragm (11) are sequentially arranged among the laser gain area devices (12), and the optical axes of the beam coupling unit and the mode selection diaphragm are coincident with the optical axis of the laser output mirror (14);
when the acousto-optic deflector driving power supply (7) does not work, the acousto-optic deflector (5) stops and outputs a wavelength; when the acousto-optic deflector driving power supply (7) works, the acousto-optic deflector (5) is started to output another wavelength;
when the acousto-optic deflector (5) is started to switch the light path, the acousto-optic modulator driving power supply (8) is turned on, and the acousto-optic modulator (6) is in an acousto-optic diffraction state.
2. Fast tuning pulsed CO according to claim 12The laser is characterized by further comprising a signal generator (9) in signal connection with both the acousto-optic deflector driving power supply (7) and the acousto-optic modulator driving power supply (8).
3. Fast tuning pulsed CO according to claim 12Laser, characterized in that the beam coupling unit (10) comprises at least two lenses with coinciding optical axes.
4. Fast tuning pulsed CO according to claim 12Laser, characterized in that the CO2The laser gain region device (12) is encapsulated at both ends by a Brewster window (13) of zinc selenide.
5. Fast tuning pulse CO according to any one of claims 1-42The laser is characterized in that the laser output mirror (14) is a zinc selenide concave lens of a semi-transparent semi-reflective coating film.
6. Fast tuning pulse CO according to any one of claims 1-42The laser is characterized in that the working surfaces of the first metal original-engraved grating (1) and the second metal original-engraved grating (3) can rotate.
7. Fast tuning pulse CO according to claim 62The laser is characterized in that the first metal original-etching grating (1) is arranged on the first high-precision rotary table (2), and the second metal original-etching grating (3) is arranged on the second high-precision rotary table (4).
8. Fast tuning pulse CO according to any one of claims 1-42Laser, characterized in that the acousto-optic deflector (5) comprises an ultrasonic generator (51) of quartz material and an acousto-optic crystal (52) of germanium material.
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| CN108736307A (en) * | 2018-05-29 | 2018-11-02 | 中国科学院电子学研究所 | Intracavity frequency doubling mid and far infrared laser |
| WO2020056590A1 (en) * | 2018-09-18 | 2020-03-26 | 广东工业大学 | Method for processing array micro-nano structure using ultrafast laser combined pulse sequence |
| CN115519243B (en) * | 2022-11-25 | 2023-03-21 | 武汉铱科赛科技有限公司 | Laser pulse space-time correlation positioning scanning method, device and system |
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| CN104051936A (en) * | 2014-06-09 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Active mode locking CO2 laser |
| CN104184030A (en) * | 2013-05-21 | 2014-12-03 | 福州高意通讯有限公司 | Tunable laser |
| CN104617474A (en) * | 2013-11-05 | 2015-05-13 | 中国科学院大连化学物理研究所 | Resonant cavity for pulse and line selection output of airflow hydrogen fluoride laser |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104184030A (en) * | 2013-05-21 | 2014-12-03 | 福州高意通讯有限公司 | Tunable laser |
| CN104617474A (en) * | 2013-11-05 | 2015-05-13 | 中国科学院大连化学物理研究所 | Resonant cavity for pulse and line selection output of airflow hydrogen fluoride laser |
| CN104051936A (en) * | 2014-06-09 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Active mode locking CO2 laser |
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