CN106300000A - A kind of quickly tuning pulse CO2laser instrument - Google Patents
A kind of quickly tuning pulse CO2laser instrument Download PDFInfo
- Publication number
- CN106300000A CN106300000A CN201610970842.9A CN201610970842A CN106300000A CN 106300000 A CN106300000 A CN 106300000A CN 201610970842 A CN201610970842 A CN 201610970842A CN 106300000 A CN106300000 A CN 106300000A
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- acousto
- deflection device
- optic
- laser
- grating
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/2232—Carbon dioxide (CO2) or monoxide [CO]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
- H01S3/1123—Q-switching
- H01S3/117—Q-switching using intracavity acousto-optic devices
Abstract
The invention discloses a kind of quickly tuning pulse CO2Laser instrument, drives power supply, acousto-optic modulator, laser gain zone device and laser output mirror including grating assembly, acousto-optic deflection device, acousto-optic deflection device.In order to choose different two kinds of wavelength, add the acousto-optic deflection device for controlling acousto-optic deflection device start and stop and drive power supply.When acousto-optic deflection device drives power supply not work, belong to a kind of wavelength, and when acousto-optic deflection device drives power work, after making acousto-optic deflection device work, belong to another kind of wavelength, i.e. realize the switching of two kinds of wavelength.By foregoing description, it is achieved the mode of wavelength tuning is only that the start and stop of acousto-optic deflection device, tuned speed is fast, repeats to switch stability high, tuning range width, and pulse recurrence frequency is adjustable, it is easy to operation, maintains easily.When wavelength switching, acousto-optic deflection device can be only made to work, it is not necessary to motor drives grating rotating, it is to avoid the unmanageable problem of mechanical positioning precision, improves stability and the repeatability of wavelength tuning.
Description
Technical field
The present invention relates to laser fast tunable technology field, specifically, relate to a kind of quickly tuning pulse CO2Laser instrument.
Background technology
Quickly tuning pulse CO2Laser instrument has over one hundred spectral line in atmospheric transmission window 9 μm～11 μ m, corresponding
The absworption peak of multiple gases, is the perfect light source of differential absorption lidar.Differential absorption lidar operation principle be to
Field emission two to be measured restraints the laser that wavelength is different, and a branch of is the measuring beam overlapped with GAS ABSORPTION peak to be measured, and another bundle is
Reference beam with GAS ABSORPTION peak to be measured deviation.In order to get rid of the measurement error that atmospheric agitation causes, it is desirable to " freeze at air
Knot " launch the laser of two bundle different wave lengths in the same direction for high-precision gas difference detecting in the time (1ms).Therefore, arteries and veins is tuned soon
Rush CO2Laser instrument receives much concern as the light source of Submillineter Wave Technology differential absorption lidar.As patent publication No. is
" the coding output acousto-optic Q modulation pulse CO of a kind of tunable wave length of " ZL200810051433.4 "2Laser instrument ", it uses grating
As wavelength tuning device, use acousto-optic modulator as Q-switching device, it is achieved that 9 μm～tens of laser lines of 11 μ m
Tunable pulse output, but its wavelength tuning armrest moves rotating grating face completes, and tuned speed is slow.Patent publication No. is " CN
101071929A " " grating-selected quick tuning laser resonant cavity ", this patent propose use driven by servomotor grating rotating
Method realize wavelength tuning, quickly tune though it can realize wavelength, but due in wavelength tuning process use moving component
(motor driving grating rotating), thus in terms of the stability and repeatability of wavelength tuning, there is the shortcoming being difficult to overcome, and machine
Tool positioning precision is difficult to control to.
Therefore, a kind of quickly tuning pulse CO how is provided2Laser instrument, it is achieved Wavelength stabilized is switched fast, is ability
Field technique personnel are presently required and solve the technical problem that.
Summary of the invention
In view of this, the invention provides a kind of quickly tuning pulse CO2Laser instrument, it is achieved Wavelength stabilized quickly cuts
Change.
For achieving the above object, the present invention provides following technical scheme:
A kind of quickly tuning pulse CO2Laser instrument, comprising:
Grating assembly, described grating assembly includes that the first metal raw carves grating and the second metal raw carves grating；
Acousto-optic deflection device, the normal that the optical axis of described acousto-optic deflection device carves grating with described first metal raw is Littrow angle
Arranging, the optical axis after the normal of described second metal raw grating at quarter deflects with described acousto-optic deflection device is that Littrow angle is arranged；
Acousto-optic deflection device drives power supply, controls the start and stop of described acousto-optic deflection device；
CO2Laser gain zone device；
Laser output mirror, the optical axis of described laser output mirror, the optical axis of input of described acousto-optic deflection device and described
CO2The optical axis conllinear of laser gain zone device, described acousto-optic deflection device is positioned at described grating assembly and described CO2Laser gain district
Between device.
Preferably, above-mentioned quickly tuning pulse CO2In laser instrument, quickly tuning pulse CO2The acousto-optic modulator of laser instrument
It is positioned at described acousto-optic deflection device and described CO2Between laser gain zone device；
Acousto-Optic Modulator Driver, controls described acousto-optic modulator start and stop.
Preferably, above-mentioned quickly tuning pulse CO2In laser instrument, also include with described acousto-optic deflection device drive power supply and
The signal generator that the equal signal of described Acousto-Optic Modulator Driver connects, when in the optical switching process of described acousto-optic deflection device
Described Acousto-Optic Modulator Driver is opened.
Preferably, above-mentioned quickly tuning pulse CO2In laser instrument, it is additionally included in described acousto-optic modulator and CO2Laser increases
Be sequentially arranged between benefit zone device and optical axis all with light beam coupling unit and the modeling light of the optical axis coincidence of described laser output mirror
Door screen.
Preferably, above-mentioned quickly tuning pulse CO2In laser instrument, described light beam coupling unit includes at least two optical axis
The lens overlapped.
Preferably, above-mentioned quickly tuning pulse CO2In laser instrument, described CO2The two ends of laser gain device are by zinc selenide
Brewster window encapsulation.
Preferably, above-mentioned quickly tuning pulse CO2In laser instrument, described laser output mirror is the selenium of semi-transparent semi-reflecting plated film
Change zinc concavees lens.
Preferably, above-mentioned quickly tuning pulse CO2In laser instrument, described first metal raw carves grating and described second gold medal
The work surface belonging to grating at former quarter is the most rotatable.
Preferably, above-mentioned quickly tuning pulse CO2In laser instrument, described first metal raw is carved grating and is arranged on the first height
On precise rotating platform, described second metal raw is carved grating and is arranged on the second high-accuracy turntable.
Preferably, above-mentioned quickly tuning pulse CO2In laser instrument, described acousto-optic deflection device includes the ultrasonic of quartz material
Generator and the acousto-optic crsytal of germanium material.
Understand via above-mentioned technical scheme, the invention discloses a kind of quickly tuning pulse CO2Laser instrument, including grating
Assembly, acousto-optic deflection device, acousto-optic deflection device drive power supply, laser gain zone device and laser output mirror.Use said structure, for
Choose different two kinds of wavelength, add the acousto-optic deflection device for controlling acousto-optic deflection device start and stop and drive power supply.When acousto-optic is inclined
Turning device drives power supply when not working, and belongs to a kind of wavelength, and when acousto-optic deflection device drives power work, makes acousto-optic deflection device work
After work, then belong to another kind of wavelength, i.e. realize the switching of two kinds of wavelength.By foregoing description process, it is achieved wavelength tuning
Mode be only that the start and stop of acousto-optic deflection device, therefore, tuned speed is fast, repeats to switch stability high, tuning range width, pulse
Repetition rate is adjustable, it is easy to operation, maintains easily.And when wavelength switching, can only make acousto-optic deflection device work, it is not necessary to
Motor drives grating rotating, it is to avoid mechanical positioning precision unmanageable problem, improves stability and the weight of wavelength tuning
Renaturation.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Inventive embodiment, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to according to
The accompanying drawing provided obtains other accompanying drawing.
The quickly tuning pulse CO that Fig. 1 provides for the embodiment of the present invention2The structural representation of laser instrument；
The structural representation of the acousto-optic deflection device that Fig. 2 provides for the embodiment of the present invention.
Detailed description of the invention
The core of the present invention is to provide a kind of quickly tuning pulse CO2Laser instrument, it is achieved Wavelength stabilized is switched fast.
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Describe, it is clear that described embodiment is only a part of embodiment of the present invention rather than whole embodiments wholely.Based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under not making creative work premise
Embodiment, broadly falls into the scope of protection of the invention.
As depicted in figs. 1 and 2, the invention discloses a kind of quickly tuning pulse CO2Laser instrument, including grating assembly, sound
Light deflector 5, acousto-optic deflection device drive power supply 7, CO2Laser gain zone device 12 and laser output mirror 14.Wherein, grating assembly
Carve grating 1 including the first metal raw and the second metal raw carves grating 3, and the work surface of the two grating is the most rotatable, to adjust
The wavelength of joint grating and angle.Carving the normal of grating 1 with the optical axis of acousto-optic deflection device 5 for the first metal raw is that Littrow angle sets
Put, and the optical axis after the second metal raw carves normal and the acousto-optic deflection device 5 turns of grating 3 is that Littrow angle is arranged.When needs switch
Have only to during wavelength start acousto-optic deflection device 5.Grating 1 is carved for the first metal raw and the second metal raw carves both gratings 3
The position of work surface need to determine after selected good wavelength after.
In order to choose different two kinds of wavelength, it is provided with the acousto-optic deflection device for controlling acousto-optic deflection device 5 start and stop and drives electricity
Source 7.When acousto-optic deflection device drives power supply 7 not work, belong to a kind of wavelength, and when acousto-optic deflection device drives power supply 7 to work,
After making acousto-optic deflection device 5 work, then belong to another kind of wavelength, i.e. realize the switching of two kinds of wavelength.Can by foregoing description process
Know, it is achieved the mode of wavelength tuning is only that the start and stop of acousto-optic deflection device 5, and therefore, tuned speed is fast, repeats to switch stability
High.
The optical axis of laser output mirror 14, CO2The light of the input of the optical axis of laser gain zone device 12 and acousto-optic deflection device 5
Axle conllinear, acousto-optic deflection device 5 is between grating assembly and laser output mirror 14.First metal raw carves grating 1 and the second metal
Former quarter, grating 3 formed resonator cavity with laser output mirror 14 respectively.The input of acousto-optic deflection device 5 is near one end of grating assembly.
Use said structure, owing to adding acousto-optic deflection device 5, there is selected wavelength tuning speed fast, repeat switching steady
Qualitative height, tuning range width, it is easy to operation, maintain easily.And when wavelength switching, can only make acousto-optic deflection device 5 work,
Need not motor and drive grating rotating, it is to avoid mechanical positioning precision unmanageable problem, improve stablizing of wavelength tuning
Property and repeatability.
In specific embodiment, this quickly tunes pulse CO2Laser instrument has acousto-optic modulator 6 and acousto-optic modulator drives
Power supply 8.Wherein, acousto-optic modulator 6 is between acousto-optic deflection device 5 and laser output mirror 14, and Acousto-Optic Modulator Driver 8
Control the start and stop of acousto-optic modulator 6.In actual mechanical process, in order to avoid the problem of laser spectrum " ghost line " occurs, at sound
The optical path-deflecting scanning process of light deflector 5 needs to cut off the output of laser, therefore, now Acousto-Optic Modulator Driver 8
Open, make acousto-optic modulator 6 be in acoustooptic diffraction state, i.e. light path and turn off, now without laser resonance in resonator cavity, it is to avoid
The appearance of " ghost line ".
In order to realize Automated condtrol, quickly tuning pulse CO disclosed herein2Laser instrument also includes that signal occurs
Device 9, this signal generator 9 drives power supply 7 and the equal signal of Acousto-Optic Modulator Driver 8 to be connected with acousto-optic deflection device, and works as
In the optical switching process of acousto-optic deflection device 5, Acousto-Optic Modulator Driver 8 is opened.
Under signal generator 9 controls, acousto-optic deflection device drives power supply 7 to cut out, and acousto-optic deflection device 5 does not works, and now the
One metal raw is carved grating 1 and is formed resonator cavity with laser output mirror 14, realizes the first laser wave by rotating the first high-accuracy turntable 2
Long resonance exports；Secondly, under signal generator 9 controls, acousto-optic deflection device drives power supply 7 to open, and acousto-optic deflection device 5 starts work
Making, optical path-deflecting, now the second metal raw carves grating 3 and laser output mirror 14 forms resonator cavity, high-accuracy by rotating second
Turntable 4 realizes the second optical maser wavelength resonance output.Acousto-optic modulator 6 is controlled at signal generator 9 and Acousto-Optic Modulator Driver 8
The lower work of system, completes CO2Laser Q-switching process, it is achieved laser pulse exports.Signal generator 9 is by sequential programming Control, it is ensured that
In acousto-optic deflection device 5 optical switching process, acousto-optic modulator 6 is in acoustooptic diffraction state (light path shutoff), now resonator cavity
Interior without laser resonance, thus eliminate that acousto-optic deflection device 5 occurs laser spectrum " ghost line " in optical path-deflecting scanning process can
Energy.Acousto-optic deflection device 5 operating frequency is up to 1kHz, i.e. within the 1ms time, can complete a light path deviation switching, therefore at letter
Under the control of number generator 9, fast tuning pulse CO2Laser instrument is selected and can be as short as 1ms the switching time between wavelength.
In further embodiment, between acousto-optic modulator 6 and laser output mirror 14, it is disposed with light beam coupling list
Unit 10 and modeling diaphragm 11, and the optical axis of light beam coupling unit 10 and the optical axis both modeling diaphragm 11 and laser output mirror 14
All overlap.
Wherein, light beam coupling unit 10 includes the lens of at least two optical axis coincidence, uses " telescope " structure to arrange, its
Function is that CO is mated in side2Laser gain zone device 12 aperture and the aperture of opposite side coupling acousto-optic modulator 6, light beam coupling list
Unit 10 is near CO2Laser gain zone device 12 has bigger beam diameter i.e. lens area relatively big so that laser gain is extracted,
Less so that compression light beam is in acousto-optic modulator 6 in the less i.e. lens area of beam diameter near acousto-optic modulator 6
Transition time.Above-mentioned modeling diaphragm 11 is aperture, and its function is for limiting the vibration of laser high-order mode, improving laser light beam matter
Amount.Described CO2Laser gain zone device 12 two ends are encapsulated by the Brewster window 13 of zinc selenide material, meet acousto-optic modulator
6 and the acousto-optic deflection device 5 requirement to incident laser deflection characteristic, it is achieved laser rays polarization output.
Laser output mirror 14 uses the zinc selenide concavees lens of semi-transparent semi-reflecting plated film.First metal raw carves grating 1 and the second gold medal
Belong to grating at former quarter 3 and be auto-collimation grating, and the first metal raw is carved grating 1 and is fixed on the first high-accuracy turntable 2, the second gold medal
Belong to grating at former quarter 3 to be fixed on the second high-accuracy turntable 4, under high-accuracy turntable drives, grating rotating can be realized.
Acousto-optic deflection device 5 in the application has been the element of light path deviation in resonator cavity, is the core quickly tuning system
The heart, it includes that ultrasonic generator 51 and acousto-optic crsytal 52 form.Acousto-optic crsytal 52 uses 9～11 mu m waveband transmitances good many
Brilliant germanium material, ultrasonic transmission speed v in crystalsFor 5.5km/s, effective clear aperture 8mm, in wave band, one way transmitance is more than
95%.Ultrasonic generator 51 selects electrical power to the high quartz material of acoustical power conversion efficiency, drives power supply 7 at acousto-optic deflection device
Under driving, its resonant frequency fsFor 40.68MHz.Audio-optical deflection angle computing formula is θ=2arcsin (λ fs/2vs), count accordingly
Calculating, the angle of optical path-deflecting can be 4.5 ° by acousto-optic deflection device 5, and this angle is sufficient for light path deviation application demand.
In this specification, each embodiment uses the mode gone forward one by one to describe, and what each embodiment stressed is and other
The difference of embodiment, between each embodiment, identical similar portion sees mutually.
Described above to the disclosed embodiments, makes professional and technical personnel in the field be capable of or uses the present invention.
Multiple amendment to these embodiments will be apparent from for those skilled in the art, as defined herein
General Principle can realize without departing from the spirit or scope of the present invention in other embodiments.Therefore, the present invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and principles disclosed herein and features of novelty phase one
The widest scope caused.
Claims (10)
1. a quick tuning pulse CO2Laser instrument, it is characterised in that including:
Grating assembly, described grating assembly includes that the first metal raw carves grating (1) and the second metal raw carves grating (3)；
Acousto-optic deflection device (5), the optical axis of described acousto-optic deflection device (5) and described first metal raw carve the normal of grating (1) in certainly
Angle of collimation is arranged, and the optical axis after the normal of described second metal raw grating at quarter (3) deflects with described acousto-optic deflection device (5) is autocollimatic
Right angle is arranged；
Acousto-optic deflection device drives power supply (7), controls the start and stop of described acousto-optic deflection device (5)；
CO2Laser gain zone device (12)；
Laser output mirror (14), the optical axis of described laser output mirror (14), described acousto-optic deflection device (5) input optical axis with
And described CO2The optical axis conllinear of laser gain zone device (12), described acousto-optic deflection device (5) is positioned at described grating assembly with described
CO2Between laser gain zone device (12).
Quick tuning pulse CO the most according to claim 12Laser instrument, it is characterised in that quickly tuning pulse CO2Laser
The acousto-optic modulator (6) of device is positioned at described acousto-optic deflection device (5) and described CO2Between laser gain zone device (12)；
Acousto-Optic Modulator Driver (8), controls described acousto-optic modulator (6) start and stop.
Quick tuning pulse CO the most according to claim 22Laser instrument, it is characterised in that also include and described audio-optical deflection
Device drives power supply (7) and described Acousto-Optic Modulator Driver (8) signal generator (9) that all signal connects, when described acousto-optic
Described in the optical switching process of deflector (5), Acousto-Optic Modulator Driver (8) is opened.
Quick tuning pulse CO the most according to claim 22Laser instrument, it is characterised in that be additionally included in described acousto-optic modulation
Device (6) and CO2Be sequentially arranged between laser gain zone device (12) and optical axis all with the optical axis weight of described laser output mirror (14)
The light beam coupling unit (10) closed and modeling diaphragm (11).
Quick tuning pulse CO the most according to claim 42Laser instrument, it is characterised in that described light beam coupling unit (10)
Lens including at least two optical axis coincidence.
Quick tuning pulse CO the most according to claim 42Laser instrument, it is characterised in that described CO2Laser gain device
(12) two ends are encapsulated by the Brewster window (13) of zinc selenide.
7. according to the quickly tuning pulse CO described in any one of claim 1-62Laser instrument, it is characterised in that described laser exports
Mirror (14) is the zinc selenide concavees lens of semi-transparent semi-reflecting plated film.
8. according to the quickly tuning pulse CO described in any one of claim 1-62Laser instrument, it is characterised in that described first metal
The work surface that former grating at quarter (1) and described second metal raw carve grating (3) is the most rotatable.
Quick tuning pulse CO the most according to claim 82Laser instrument, it is characterised in that described first metal raw carves grating
(1) being arranged on the first high-accuracy turntable (2), described second metal raw is carved grating (3) and is arranged on the second high-accuracy turntable (4)
On.
10. according to the quickly tuning pulse CO described in any one of claim 1-62Laser instrument, it is characterised in that described acousto-optic is inclined
Turn device (5) and include the ultrasonic generator (51) of quartz material and the acousto-optic crsytal (52) of germanium material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610970842.9A CN106300000B (en) | 2016-10-28 | 2016-10-28 | Fast tuning pulse CO2Laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610970842.9A CN106300000B (en) | 2016-10-28 | 2016-10-28 | Fast tuning pulse CO2Laser device |
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| Publication Number | Publication Date |
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| CN106300000A true CN106300000A (en) | 2017-01-04 |
| CN106300000B CN106300000B (en) | 2020-01-14 |
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ID=57721048
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610970842.9A Active CN106300000B (en) | 2016-10-28 | 2016-10-28 | Fast tuning pulse CO2Laser device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108736307A (en) * | 2018-05-29 | 2018-11-02 | 中国科学院电子学研究所 | Intracavity frequency doubling mid and far infrared laser |
| WO2020056590A1 (en) * | 2018-09-18 | 2020-03-26 | 广东工业大学 | Method for processing array micro-nano structure using ultrafast laser combined pulse sequence |
| CN115519243A (en) * | 2022-11-25 | 2022-12-27 | 武汉铱科赛科技有限公司 | Laser pulse space-time correlation positioning scanning method, device and system |
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| US20140092932A1 (en) * | 2012-10-02 | 2014-04-03 | Canon Kabushiki Kaisha | Laser apparatus and photoacoustic apparatus |
| CN104051936A (en) * | 2014-06-09 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Active mode locking CO2 laser |
| CN104184030A (en) * | 2013-05-21 | 2014-12-03 | 福州高意通讯有限公司 | Tunable laser |
| CN104617474A (en) * | 2013-11-05 | 2015-05-13 | 中国科学院大连化学物理研究所 | Resonant cavity for pulse and line selection output of airflow hydrogen fluoride laser |
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| US20140092932A1 (en) * | 2012-10-02 | 2014-04-03 | Canon Kabushiki Kaisha | Laser apparatus and photoacoustic apparatus |
| CN104184030A (en) * | 2013-05-21 | 2014-12-03 | 福州高意通讯有限公司 | Tunable laser |
| CN104617474A (en) * | 2013-11-05 | 2015-05-13 | 中国科学院大连化学物理研究所 | Resonant cavity for pulse and line selection output of airflow hydrogen fluoride laser |
| CN104051936A (en) * | 2014-06-09 | 2014-09-17 | 中国科学院长春光学精密机械与物理研究所 | Active mode locking CO2 laser |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108736307A (en) * | 2018-05-29 | 2018-11-02 | 中国科学院电子学研究所 | Intracavity frequency doubling mid and far infrared laser |
| WO2020056590A1 (en) * | 2018-09-18 | 2020-03-26 | 广东工业大学 | Method for processing array micro-nano structure using ultrafast laser combined pulse sequence |
| CN115519243A (en) * | 2022-11-25 | 2022-12-27 | 武汉铱科赛科技有限公司 | Laser pulse space-time correlation positioning scanning method, device and system |
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|---|---|
| CN106300000B (en) | 2020-01-14 |
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