CN101078107B - 绝缘多层薄膜制造装置 - Google Patents

绝缘多层薄膜制造装置 Download PDF

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Publication number
CN101078107B
CN101078107B CN2007101121450A CN200710112145A CN101078107B CN 101078107 B CN101078107 B CN 101078107B CN 2007101121450 A CN2007101121450 A CN 2007101121450A CN 200710112145 A CN200710112145 A CN 200710112145A CN 101078107 B CN101078107 B CN 101078107B
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China
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film
film thickness
optical
substrate
transmissivity
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CN2007101121450A
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Chinese (zh)
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CN101078107A (zh
Inventor
高桥晴夫
半沢孝一
松元孝文
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AIHATSUSHINA Co Ltd
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AIHATSUSHINA Co Ltd
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Priority claimed from JP2002317999A external-priority patent/JP4327440B2/ja
Priority claimed from JP2002317998A external-priority patent/JP4327439B2/ja
Application filed by AIHATSUSHINA Co Ltd filed Critical AIHATSUSHINA Co Ltd
Publication of CN101078107A publication Critical patent/CN101078107A/zh
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  • Physical Vapour Deposition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Filters (AREA)
CN2007101121450A 2002-03-25 2003-03-25 绝缘多层薄膜制造装置 Expired - Lifetime CN101078107B (zh)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP083260/2002 2002-03-25
JP2002083260A JP4034979B2 (ja) 2002-03-25 2002-03-25 光学膜厚制御方法及び光学膜厚制御装置並びに該光学膜厚制御方法を用いて作製した誘電体薄膜
JP317998/2002 2002-10-31
JP2002317999A JP4327440B2 (ja) 2002-10-31 2002-10-31 誘電体多層膜の製造装置
JP2002317998A JP4327439B2 (ja) 2002-10-31 2002-10-31 誘電体多層膜の製造装置
JP317999/2002 2002-10-31

Related Parent Applications (1)

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CNB031082297A Division CN100398694C (zh) 2002-03-25 2003-03-25 光学薄膜厚度控制方法及装置，绝缘多层薄膜及制造装置

Publications (2)

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CN101078107A CN101078107A (zh) 2007-11-28
CN101078107B true CN101078107B (zh) 2011-06-01

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CN2007101121446A Expired - Lifetime CN101078106B (zh) 2002-03-25 2003-03-25 绝缘多层薄膜制造装置

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CN (2) CN101078107B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5078813B2 (ja) * 2008-09-09 2012-11-21 株式会社シンクロン 薄膜形成方法及び薄膜形成装置
JP5126909B2 (ja) * 2010-10-08 2013-01-23 株式会社シンクロン 薄膜形成方法及び薄膜形成装置
CN102877026B (zh) * 2012-09-27 2014-12-24 中国科学院长春光学精密机械与物理研究所 多层膜器件真空沉积装置
CN102980522B (zh) * 2012-11-30 2015-06-03 中国科学院上海技术物理研究所 一种快速反演薄膜生长厚度的光学监控追迹方法
WO2014181620A1 (ja) * 2013-05-08 2014-11-13 コニカミノルタ株式会社 光学フィルムの製造方法
CN103673905B (zh) * 2013-12-31 2017-04-12 合波光电通信科技有限公司 一种磁控溅射镀光学膜膜厚监控方法
KR102169017B1 (ko) * 2014-01-10 2020-10-23 삼성디스플레이 주식회사 스퍼터링 장치 및 스퍼터링 방법
CN107726987B (zh) * 2017-10-19 2019-12-13 重庆理工大学 一种光学薄膜的膜厚监控方法
US10138539B1 (en) * 2018-04-03 2018-11-27 Shiping Cheng Method of managing coating uniformity with an optical thickness monitoring system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3664295A (en) * 1970-11-02 1972-05-23 Gte Sylvania Inc Means for achieving a controlled gradient density coating on a light attenuation medium
US4885709A (en) * 1986-01-17 1989-12-05 Infrared Engineering Limited Method and apparatus for sensing or determining one or more properties or the identity of a sample
US6250758B1 (en) * 1997-05-16 2001-06-26 Hoya Corporation Plastic optical devices having antireflection film and mechanism for equalizing thickness of antireflection film

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002014208A (ja) * 2000-04-26 2002-01-18 Sharp Corp 光学フィルム、光反射フィルム、液晶表示パネル、光学フィルム製造方法および装置、型ローラ製造方法、ならびに光学フィルム貼付方法および装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3664295A (en) * 1970-11-02 1972-05-23 Gte Sylvania Inc Means for achieving a controlled gradient density coating on a light attenuation medium
US4885709A (en) * 1986-01-17 1989-12-05 Infrared Engineering Limited Method and apparatus for sensing or determining one or more properties or the identity of a sample
US6250758B1 (en) * 1997-05-16 2001-06-26 Hoya Corporation Plastic optical devices having antireflection film and mechanism for equalizing thickness of antireflection film

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP特开平4-301506A 1992.10.26

Also Published As

Publication number Publication date
CN101078106B (zh) 2010-06-09
JP2003279727A (ja) 2003-10-02
CN101078107A (zh) 2007-11-28
JP4034979B2 (ja) 2008-01-16
CN101078106A (zh) 2007-11-28

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