CN101042366A - Manufacturing method of plate type oxygen sensor chip - Google Patents
Manufacturing method of plate type oxygen sensor chip Download PDFInfo
- Publication number
- CN101042366A CN101042366A CN 200710051946 CN200710051946A CN101042366A CN 101042366 A CN101042366 A CN 101042366A CN 200710051946 CN200710051946 CN 200710051946 CN 200710051946 A CN200710051946 A CN 200710051946A CN 101042366 A CN101042366 A CN 101042366A
- Authority
- CN
- China
- Prior art keywords
- heating
- sensor chip
- base sheet
- plate type
- oxygen sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 44
- 239000001301 oxygen Substances 0.000 title claims abstract description 44
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 238000010438 heat treatment Methods 0.000 claims abstract description 58
- 238000000034 method Methods 0.000 claims abstract description 33
- 239000000843 powder Substances 0.000 claims abstract description 20
- 239000000919 ceramic Substances 0.000 claims abstract description 17
- 230000008569 process Effects 0.000 claims abstract description 9
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 9
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000005245 sintering Methods 0.000 claims description 21
- 239000002002 slurry Substances 0.000 claims description 21
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 19
- 238000005266 casting Methods 0.000 claims description 16
- 238000009413 insulation Methods 0.000 claims description 9
- 238000003475 lamination Methods 0.000 claims description 9
- 239000003795 chemical substances by application Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 238000000498 ball milling Methods 0.000 claims description 7
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 6
- 238000007731 hot pressing Methods 0.000 claims description 6
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 6
- 238000003892 spreading Methods 0.000 claims description 6
- 230000007480 spreading Effects 0.000 claims description 6
- 238000007766 curtain coating Methods 0.000 claims description 5
- 238000010030 laminating Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 5
- 239000007767 bonding agent Substances 0.000 claims description 4
- 239000000314 lubricant Substances 0.000 claims description 4
- 239000004014 plasticizer Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 4
- 235000019325 ethyl cellulose Nutrition 0.000 claims description 3
- 229920001249 ethyl cellulose Polymers 0.000 claims description 3
- 239000003960 organic solvent Substances 0.000 claims description 3
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 claims description 3
- MQIUGAXCHLFZKX-UHFFFAOYSA-N Di-n-octyl phthalate Natural products CCCCCCCCOC(=O)C1=CC=CC=C1C(=O)OCCCCCCCC MQIUGAXCHLFZKX-UHFFFAOYSA-N 0.000 claims description 2
- 239000001856 Ethyl cellulose Substances 0.000 claims description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical group OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 2
- BJQHLKABXJIVAM-UHFFFAOYSA-N bis(2-ethylhexyl) phthalate Chemical class CCCCC(CC)COC(=O)C1=CC=CC=C1C(=O)OCC(CC)CCCC BJQHLKABXJIVAM-UHFFFAOYSA-N 0.000 claims description 2
- 235000021323 fish oil Nutrition 0.000 claims description 2
- 229920000151 polyglycol Polymers 0.000 claims description 2
- 239000010695 polyglycol Substances 0.000 claims description 2
- 238000005520 cutting process Methods 0.000 abstract description 10
- 238000007639 printing Methods 0.000 abstract description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 42
- 239000000543 intermediate Substances 0.000 description 28
- 229910052697 platinum Inorganic materials 0.000 description 21
- 238000012360 testing method Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 12
- 239000000446 fuel Substances 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 239000000047 product Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010304 firing Methods 0.000 description 3
- 238000011056 performance test Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 206010013786 Dry skin Diseases 0.000 description 1
- 240000004859 Gamochaeta purpurea Species 0.000 description 1
- 206010058490 Hyperoxia Diseases 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- ISSXKNWTCLRPJY-UHFFFAOYSA-N O.O.[O-2].[Zr+4].[O-2] Chemical compound O.O.[O-2].[Zr+4].[O-2] ISSXKNWTCLRPJY-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000006555 catalytic reaction Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000000222 hyperoxic effect Effects 0.000 description 1
- 208000018875 hypoxemia Diseases 0.000 description 1
- 238000009863 impact test Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000010416 ion conductor Substances 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007784 solid electrolyte Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
Images
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Description
Test event | The plate type oxygen sensor test result | |
DC current 12V | Room temperature | After connecting heating |
Resistance value (Ω) | 12.6±1.0 | 24.7±1.9 |
Temperature (℃) | 23 | 273 |
Heating-up time (s) | 30~45 |
Exhaust temperature | 350℃ | 800℃ |
Output voltage values (mV) λ=0.96 | 890 | 860 |
Output voltage values (mV) λ=1.04 | 80 | 90 |
The 300-600mV response time (ms) | 41 | 36 |
The 600-300mV response time (ms) | 98 | 67 |
Umax(mV) | 960 | 950 |
Umin(mV) | 15 | 20 |
ΔU(mV) | 945 | 930 |
Intensification activationary time (s) | 18 |
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2007100519460A CN100487444C (en) | 2007-04-24 | 2007-04-24 | Manufacturing method of plate type oxygen sensor chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2007100519460A CN100487444C (en) | 2007-04-24 | 2007-04-24 | Manufacturing method of plate type oxygen sensor chip |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101042366A true CN101042366A (en) | 2007-09-26 |
CN100487444C CN100487444C (en) | 2009-05-13 |
Family
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Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2007100519460A Expired - Fee Related CN100487444C (en) | 2007-04-24 | 2007-04-24 | Manufacturing method of plate type oxygen sensor chip |
Country Status (1)
Country | Link |
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CN (1) | CN100487444C (en) |
Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101836109A (en) * | 2007-10-24 | 2010-09-15 | 罗伯特·博世有限公司 | Method for peripheral contacting in ceramic components |
CN101878422A (en) * | 2007-11-27 | 2010-11-03 | 丰田自动车株式会社 | Air-fuel ratio sensor and internal combustion engine control device |
CN101315824B (en) * | 2008-06-30 | 2011-01-12 | 广东风华高新科技股份有限公司 | Production method of ceramic substrate resistor plate, and resistor plate acquired by this |
CN102140953A (en) * | 2010-12-30 | 2011-08-03 | 西藏瑞阳科技发展有限公司 | Method for manufacturing oxygen sensor chip |
CN102157346A (en) * | 2010-12-29 | 2011-08-17 | 常州星海电子有限公司 | Method for demoulding chip |
CN102235994A (en) * | 2010-04-23 | 2011-11-09 | 比亚迪股份有限公司 | Plate oxygen sensor and preparation method thereof |
CN102297880A (en) * | 2010-06-28 | 2011-12-28 | 先达汽车产品股份有限公司 | Apparatus and method of producing heating oxygen sensor |
CN102346166A (en) * | 2010-07-28 | 2012-02-08 | 比亚迪股份有限公司 | Chip-type oxygen sensor |
CN102608193A (en) * | 2012-04-10 | 2012-07-25 | 无锡隆盛科技有限公司 | Flat oxygen sensor and preparation method thereof |
CN102608182A (en) * | 2012-02-20 | 2012-07-25 | 曾咏平 | Oxygen sensor chip and manufacturing method thereof |
CN103776888A (en) * | 2014-01-15 | 2014-05-07 | 深圳市普利斯通传感科技有限公司 | Oxygen sensor for car based on oxide insulating slurry and manufacturing method thereof |
CN103776871A (en) * | 2014-01-15 | 2014-05-07 | 深圳市普利斯通传感科技有限公司 | Oxide tape-casting slurry-based oxygen sensor for vehicle and manufacture method of sensor |
CN103837575A (en) * | 2013-09-08 | 2014-06-04 | 温州市申吉汽车配件制造有限公司 | Automobile heating type flat plate type oxygen sensor and manufacturing process thereof |
CN103913485A (en) * | 2014-04-17 | 2014-07-09 | 常州联德电子有限公司 | Modular assembly of automotive oxygen sensor and encapsulation method of assembly |
CN104165905A (en) * | 2014-08-25 | 2014-11-26 | 深圳市宏业翔科技有限公司 | Oxygen sensor chip and preparation method thereof |
CN104251876A (en) * | 2014-09-18 | 2014-12-31 | 莱鼎电子材料科技有限公司 | Novel disc type oxygen sensor and preparation method and detection method thereof |
CN104407034A (en) * | 2014-11-14 | 2015-03-11 | 无锡信大气象传感网科技有限公司 | Gas sensor chip |
CN104407035A (en) * | 2014-11-14 | 2015-03-11 | 无锡信大气象传感网科技有限公司 | Gas sensor chip |
CN104597087A (en) * | 2014-11-14 | 2015-05-06 | 无锡信大气象传感网科技有限公司 | Manufacturing method of gas sensor chip |
CN104931559A (en) * | 2015-07-01 | 2015-09-23 | 武汉科技大学 | Nitrogen oxide sensor chip and preparation method thereof |
CN105717185A (en) * | 2016-03-11 | 2016-06-29 | 武汉科技大学 | Method for manufacturing sheet type oxygen sensor chip |
CN111855746A (en) * | 2020-07-27 | 2020-10-30 | 江苏联电电子科技有限公司 | Transition layer-containing insulating layer for oxygen sensor chip and preparation method thereof |
CN112730739A (en) * | 2020-12-11 | 2021-04-30 | 凯晟动力技术(嘉兴)有限公司 | Negative voltage elimination method for chip oxygen sensor with air channel |
-
2007
- 2007-04-24 CN CNB2007100519460A patent/CN100487444C/en not_active Expired - Fee Related
Cited By (33)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101836109A (en) * | 2007-10-24 | 2010-09-15 | 罗伯特·博世有限公司 | Method for peripheral contacting in ceramic components |
CN101836109B (en) * | 2007-10-24 | 2014-03-05 | 罗伯特·博世有限公司 | Method for peripheral contacting in ceramic components |
CN101878422A (en) * | 2007-11-27 | 2010-11-03 | 丰田自动车株式会社 | Air-fuel ratio sensor and internal combustion engine control device |
CN101878422B (en) * | 2007-11-27 | 2013-03-27 | 丰田自动车株式会社 | Air-fuel ratio sensor and internal combustion engine control device |
CN101315824B (en) * | 2008-06-30 | 2011-01-12 | 广东风华高新科技股份有限公司 | Production method of ceramic substrate resistor plate, and resistor plate acquired by this |
CN102235994A (en) * | 2010-04-23 | 2011-11-09 | 比亚迪股份有限公司 | Plate oxygen sensor and preparation method thereof |
CN102235994B (en) * | 2010-04-23 | 2014-12-10 | 比亚迪股份有限公司 | Plate oxygen sensor and preparation method thereof |
CN102297880A (en) * | 2010-06-28 | 2011-12-28 | 先达汽车产品股份有限公司 | Apparatus and method of producing heating oxygen sensor |
CN102346166B (en) * | 2010-07-28 | 2013-08-21 | 比亚迪股份有限公司 | Chip-type oxygen sensor |
CN102346166A (en) * | 2010-07-28 | 2012-02-08 | 比亚迪股份有限公司 | Chip-type oxygen sensor |
CN102157346A (en) * | 2010-12-29 | 2011-08-17 | 常州星海电子有限公司 | Method for demoulding chip |
CN102140953A (en) * | 2010-12-30 | 2011-08-03 | 西藏瑞阳科技发展有限公司 | Method for manufacturing oxygen sensor chip |
CN102608182A (en) * | 2012-02-20 | 2012-07-25 | 曾咏平 | Oxygen sensor chip and manufacturing method thereof |
CN102608193B (en) * | 2012-04-10 | 2013-09-25 | 无锡隆盛科技股份有限公司 | Flat oxygen sensor and preparation method thereof |
CN102608193A (en) * | 2012-04-10 | 2012-07-25 | 无锡隆盛科技有限公司 | Flat oxygen sensor and preparation method thereof |
CN103837575A (en) * | 2013-09-08 | 2014-06-04 | 温州市申吉汽车配件制造有限公司 | Automobile heating type flat plate type oxygen sensor and manufacturing process thereof |
CN103776871B (en) * | 2014-01-15 | 2016-06-29 | 深圳市普利斯通传感科技有限公司 | A kind of oxygen sensor used in vehicle based on oxide casting slurry and manufacture method thereof |
CN103776888A (en) * | 2014-01-15 | 2014-05-07 | 深圳市普利斯通传感科技有限公司 | Oxygen sensor for car based on oxide insulating slurry and manufacturing method thereof |
CN103776871A (en) * | 2014-01-15 | 2014-05-07 | 深圳市普利斯通传感科技有限公司 | Oxide tape-casting slurry-based oxygen sensor for vehicle and manufacture method of sensor |
CN103776888B (en) * | 2014-01-15 | 2016-08-17 | 深圳市普利斯通传感科技有限公司 | A kind of oxygen sensor used in vehicle based on insulated by oxide slurry and manufacture method thereof |
CN103913485A (en) * | 2014-04-17 | 2014-07-09 | 常州联德电子有限公司 | Modular assembly of automotive oxygen sensor and encapsulation method of assembly |
CN103913485B (en) * | 2014-04-17 | 2017-03-08 | 常州联德电子有限公司 | A kind of oxygen sensor used in vehicle modularity assembly and method for packing |
CN104165905A (en) * | 2014-08-25 | 2014-11-26 | 深圳市宏业翔科技有限公司 | Oxygen sensor chip and preparation method thereof |
CN104251876A (en) * | 2014-09-18 | 2014-12-31 | 莱鼎电子材料科技有限公司 | Novel disc type oxygen sensor and preparation method and detection method thereof |
CN104597087A (en) * | 2014-11-14 | 2015-05-06 | 无锡信大气象传感网科技有限公司 | Manufacturing method of gas sensor chip |
CN104407035A (en) * | 2014-11-14 | 2015-03-11 | 无锡信大气象传感网科技有限公司 | Gas sensor chip |
CN104407034A (en) * | 2014-11-14 | 2015-03-11 | 无锡信大气象传感网科技有限公司 | Gas sensor chip |
CN104931559A (en) * | 2015-07-01 | 2015-09-23 | 武汉科技大学 | Nitrogen oxide sensor chip and preparation method thereof |
CN104931559B (en) * | 2015-07-01 | 2017-12-26 | 武汉科技大学 | A kind of Oxynitride sensor chip and preparation method thereof |
CN105717185A (en) * | 2016-03-11 | 2016-06-29 | 武汉科技大学 | Method for manufacturing sheet type oxygen sensor chip |
CN105717185B (en) * | 2016-03-11 | 2018-01-16 | 武汉锆元传感技术有限公司 | A kind of manufacture method of chip of sheet oxygen sensor |
CN111855746A (en) * | 2020-07-27 | 2020-10-30 | 江苏联电电子科技有限公司 | Transition layer-containing insulating layer for oxygen sensor chip and preparation method thereof |
CN112730739A (en) * | 2020-12-11 | 2021-04-30 | 凯晟动力技术(嘉兴)有限公司 | Negative voltage elimination method for chip oxygen sensor with air channel |
Also Published As
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CN100487444C (en) | 2009-05-13 |
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Effective date of registration: 20150615 Address after: 212009 Zhenjiang high tech Industrial Development Zone, Jiangsu, No. seven, No. 19 Patentee after: Zhenjiang Nernst Automotive Technology Co., Ltd. Address before: 430081 Department of metal materials, School of metallurgical engineering, Wuhan University of Science and Technology, 947 Heping Avenue, Qingshan District, Hubei, Wuhan Patentee before: Xie Guangyuan |
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