CN102608182A - Oxygen sensor chip and manufacturing method thereof - Google Patents
Oxygen sensor chip and manufacturing method thereof Download PDFInfo
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- CN102608182A CN102608182A CN2012100381926A CN201210038192A CN102608182A CN 102608182 A CN102608182 A CN 102608182A CN 2012100381926 A CN2012100381926 A CN 2012100381926A CN 201210038192 A CN201210038192 A CN 201210038192A CN 102608182 A CN102608182 A CN 102608182A
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Abstract
The invention discloses an oxygen sensor chip and a manufacturing method of the oxygen sensor chip. The oxygen sensor chip sequentially comprises an electrode gradient protective layer, a first signal electrode layer, a sensing dielectric layer, a second signal electrode layer, an air chamber layer, a first gradient insulating layer, a heating electrode layer, a second gradient insulating layer, a base plate layer and a bottom insulating layer, wherein the electrode gradient protective layer, the first gradient insulating layer, the second gradient insulating layer and the bottom insulating layer are all in three-layer structures; three layers of materials are combined into gradient; therefore, the difference on contractibility rate and melting performance, caused by an alloplasm, is prevented, and the combination densification among layers are ensured; a sensing dielectric layer is modified yttrium-doped zirconium oxide, so as to improve the sensitivity and mechanical strength of material signals; a heating layer is a heating electrode structure of the traditional planar sensor; combination manners of casting molding and silk screen printing are adopted to position, laminate and cut in sequence, so that an oxygen sensor chip blank body is manufactured; the organic matters in the chip blank body are removed at low temperature; sintering and compacting are performed at high temperature, so that a compact oxygen sensor chip blank body is manufactured. According to the invention, products with good airtight performance can be acquired, and the rate of finished products is improved.
Description
Technical field
The present invention relates to a kind of lambda sensor label and manufacturing approach thereof, particularly a kind of automobile belongs to features Inorganic Non-metallic Materials and lambda sensor and makes the field with the lambda sensor label and the manufacturing approach thereof of control air-fuel ratio.
Background technology
At present, vehicle exhaust has become one of main source of environmental pollution.Because vehicle exhaust air-fuel ratio deviation theory value is limited to the control of toxic gases such as oxides of nitrogen, carbon monoxide discharging through the purification of three-way catalyst; Now, be control discharging effectively, using three-way catalytic converter to reduce on the engine of exhaust emission, lambda sensor is absolutely necessary.Three-way catalytic converter is installed in the stage casing of gas outlet; Carbon monoxide, hydrocarbon and three kinds of main objectionable constituent of oxides of nitrogen (NOX) in its ability purifying exhaust gas; But only in the narrow scope of air-fuel ratio near chemically correct fuel of combination gas, three-way catalytic converter could play clean-up effect effectively.So in gas outlet, insert lambda sensor, borrow the oxygen concentration that detects in the waste gas to measure air-fuel ratio, and convert thereof into voltage or resistance signal, feed back to electronic control unit control air-fuel ratio and converge on theoretical value.This can be used for controlling combustion engine through what optimize three-way catalyst with regard to meaning, makes the amount of discharging waste gas minimum, optimizes the performance of engine, can save 85%～15% fuel consume.
In China, nearly 10,000,000 automobile assembling be petrol engine, these petrol engines have a lot of above lambda sensors that assembled.Present employed lambda sensor mainly contains two types of tubular type and chips.In fact, production domesticization has only traditional tubular type lambda sensor, and the chip oxygen sensor label then all obtains from external import, and the domestic label large-scale application that does not also have oneself to produce is in the report of automobile.Process of localization is because there is great technical barrier in existing technology aspect material design and each the interlayer joint portion densification of sensor label by the serious reason that hinders; In field of materials, domestic each big lambda sensor manufacturer produces through commercial nanoscale yttrium doped zirconia (YSZ), and it is used in the tubular type lambda sensor and can reaches requirement, and be applied to chip oxygen sensor the limitation on the performance is arranged.In theory, because label sensor information layer is thinner, the catalysis area is relatively little, and the oxygen room that can provide is limited, must carry out modification on this basis, can reach the semaphore request of chip oxygen sensor.The making of each link of chip oxygen sensor all has higher technical requirement, and especially the matching problem between the material is comparatively outstanding.All there is different materials in each of lambda sensor between layer joint portion, because the shrinkage factor of various materials is different, the material of each interlayer is heterogeneous can be occurred shrinking not matching, thereby causes serious layering, cracking or yield rate extremely low; Perhaps because the joint portion material is different; Its high-temperature fusion performance has sizable difference, sintering temperature Tai Gaoyi excessive melting, and too low can occur boning insecure; Cause serious layering, crack even come off, make sensor air leakage failure or yield rate extremely low.For example, alumina material that insulation course is general and label bulk oxidation zirconia material physical property are different fully, and melt temperature is different with shrinkage factor, in the preparation process, occur heterogeneous combination difficulty easily, layering when burning altogether, crooked perhaps not fine and close leakiness gas etc.
Summary of the invention
The object of the invention is intended to overcome the problems referred to above of existing lambda sensor and manufacturing approach existence, and a kind of lambda sensor label and manufacturing approach thereof are provided.The present invention improves signal sensitivity, mechanical property and the yield rate of label through design of lambda sensor critical material and gradient composites technology; The material simplicity of design is practical simultaneously, and cost is lower.
The object of the invention realizes through following technical proposals.
A kind of lambda sensor label, it is by electrode gradient protective seam, the 1st signal electrode layer, the sensor information layer, the 2nd signal electrode layer, the air chamber layer, the 1st gradient insulation course, heating circuit layer, the 2nd gradient insulation course, substrate layer and bottom insulation layer are stacked to constitute successively;
Wherein, described electrode gradient protective seam is a three-decker, and trilaminate material is formed in gradient, and layers of material comprises zirconia powder and magnesium aluminium spinel powder, thickness in monolayer 10～150 μ m, and wherein first protective seam is on the 1st signal electrode layer;
Described the 1st gradient insulation course, the 2nd gradient insulation course and bottom insulation layer are three-decker; Trilaminate material is formed in gradient; Their first insulation course, second insulation course and the 3rd insulating layer material are formed corresponding identical; The 3rd insulation course of the 3rd insulation course of the 1st gradient insulation course and the 2nd gradient insulation course is printed on respectively on the above and below of heating circuit layer; First insulation course of bottom insulation layer on substrate layer bottom, their layers of materials of three layers by zirconia with aluminium oxide or monox, boron oxide, barium carbonate, zinc paste and sodium carbonate are mixed with thickness in monolayer 10～150 μ m in addition;
It is main material that described sensor information layer, air chamber layer and substrate layer adopt the zirconia (YSZ) of nanoscale stabilized with yttrium oxide; Use the auxiliary material modification; Its auxiliary material are the two or more combinations in manganese oxide, cerium oxide, yttria, aluminium oxide, niobium pentaoxide, magnesium oxide, barium carbonate and the zinc paste, each layer thickness 400～700 μ m of sensor information layer, air chamber layer and substrate layer; Described sensor information layer, air chamber layer and substrate layer have identical thickness, width and length;
Described air chamber layer has U-shaped air chamber groove, well width 0.5～3 μ m, and the terminal U-shaped of groove bottom is not cut logical, has 0.5～3mm to reserve with air chamber layer bottom.
In the technical scheme of the present invention; Three layers of gradation of described electrode gradient protective seam are processed; It is printed, and the percentage composition of solid phase powder quality is in the slip: first protective seam is zirconia powder 70～90wt%, magnesium aluminium spinel powder 5～30wt%, dag 4～5wt%; Second protective seam is zirconia powder 40～55wt%, magnesium aluminium spinel powder 40～70wt%, dag 4～5wt%; The 3rd protective seam is zirconia powder 6～20wt%, magnesium aluminium spinel powder 80～90wt%, dag 4～5wt%; Print in the slip and added organic material; Organic material addition is the basis in said solid phase powder quality: thickening agent ethyl cellulose or rosin 3wt%～8wt%; Spreading agent polyacrylic acid or triethanolamine 2wt%～5wt%; Plasticizer phthalic acid ester 1wt%～6wt%, organic solvent terpinol or terebinthina 15wt%～25wt%; Each layer solid phase powder is all through 300 mesh sieves, and the thickness in monolayer of printing is controlled at 10～150 μ m.
In the technical scheme of the present invention, described the 1st gradient insulation course, the 2nd gradient insulation course and bottom insulation layer three-decker, gradation is processed respectively; It is printed, and the percentage composition of solid phase powder quality is in the slip: first insulation course is zirconia 70～80wt%, aluminium oxide 10～30wt%, monox 0～8wt%; Boron oxide 0～2wt%; Barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; Second insulation course is zirconia 40～50wt%, aluminium oxide 40～60wt%, and monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; The 3rd insulation course is zirconia 10～20wt%, aluminium oxide 70～90wt%, and monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; Print in the slip and added organic material; Organic material addition is the basis in said solid phase powder quality: thickening agent ethyl cellulose or rosin 3wt%～8wt%; Spreading agent polyacrylic acid or triethanolamine 2wt%～5wt%; Plasticizer phthalic acid ester 1wt%～6wt%, organic solvent terpinol or terebinthina 15wt%～25wt%; Each layer solid phase powder is all through 300 mesh sieves, and the thickness in monolayer of printing is controlled at 10～150 μ m.
In the technical scheme of the present invention; In described sensor information layer, air chamber layer and the substrate layer; The zirconia mass ratio that used auxiliary material addition accounts for stabilized with yttrium oxide is: manganese dioxide 0～2wt%, cerium oxide 0～2wt%, monox 0～2wt%, aluminium oxide 0～2wt%, barium carbonate 0～1.5wt%, magnesium oxide 0～2.5wt%, niobium pentaoxide 0～1.5wt%, yttria 0～3wt% and zinc paste 0～2.5wt% wherein have at least two kinds not to be zero simultaneously.
In the technical scheme of the present invention, the electrode of described the 1st signal electrode layer and the 2nd signal electrode layer is a platinum electrode.
The manufacturing approach of lambda sensor label of the present invention is characterized in that manufacturing step is:
1) preparation casting slurry: be used for sensor information layer, air chamber layer and substrate layer, the zirconia powder that modified oxidized yttrium is stable is put into ball grinder by the proportioning weighing; Be benchmark in the stable zirconia powder quality of modified oxidized yttrium then; Add solvent 60wt%～90wt% successively, spreading agent triethanolamine 3wt%～4wt%, cementing agent polyvinyl butyral 6wt%～15wt%; Plasticizer phthalic acid dibutyl ester and polyglycol 6wt%～10wt%; Its dibutyl phthalate and polyglycol mass ratio are 1: 1, and ball milling is 20～30 hours in the ball grinder, processes casting slurry;
Wherein, The stable zirconia powder proportioning of described modified oxidized yttrium is: the zirconia with the nanoscale stabilized with yttrium oxide is a main material; Add the auxiliary material modification; The auxiliary material addition is the basis in the main material quality; Add two or more among manganese dioxide 0～2wt%, cerium oxide 0～2wt%, monox 0～2wt%, aluminium oxide 0～2wt%, barium carbonate 0～1.5wt%, magnesium oxide 0～2.5wt%, niobium pentaoxide 0～1.5wt%, yttria 0～3wt% and the zinc paste 0～2.5wt%, wherein have at least two kinds not to be zero simultaneously; Described solvent is two or more in absolute ethyl alcohol, butanone, toluene and the xylene;
2) preparation sensor information layer, air chamber layer and substrate layer diaphragm: adopt casting technique; With the slurry of step 1) preparation, adjustment casting machine scraper height is provided with casting machine diaphragm bake out temperature at 60～90 ℃ at 60～300 μ m; Drying time is set 3～10 minutes; Adjustment plays diaphragm equipment automatically, adopts automatic gas cutting machine to cut into the diaphragm of even length, and the monolithic thickness is controlled at 10～300 μ m;
3) tape casting diaphragm that embryo lamella making: with step 2) obtains is laminated to thickness 400～700 μ m, and line of cut and position line are printed in the compacting of presenting a theatrical performance as the last item on a programme respectively on each layer, cut into sensor information synusia, air chamber synusia and substrate synusia with laser knife;
4) the sensor information layer pros and cons in the step 3) preparation stamps platinum electrode, holds electrode lead hole successfully, prints first protective seam of gradient electrode protective seam then successively, second protective seam, the 3rd protective seam;
5) on substrate layer, be docile and obedient first insulation course that preface stamps the 2nd gradient insulation course, second insulation course, the 3rd insulation course; Stamp heating circuit layer then; Be docile and obedient first insulation course that preface stamps bottom gradient insulation course, second insulation course, the 3rd insulation course in the substrate layer bottom; Hold electrode lead hole successfully, on heating circuit layer, be docile and obedient the 3rd insulation course that preface stamps the 1st gradient insulation course again, second insulation course, first insulation course;
6) above-mentioned embryo lamella is located, laminated according to lambda sensor label structural order, put into the compacting of presenting a theatrical performance as the last item on a programme and get idiosome;
7) according to line of cut idiosome is cut, obtain the plain embryo of lambda sensor label;
8) with the plain embryo of label 60-90 ℃ of oven dry 3～10 minutes down, get rid of organism after, sintering 5～10 hours under 1350～1550 ℃ high temperature promptly gets the lambda sensor label again.
In the lambda sensor label of the present invention; The zirconia of described stabilized with yttrium oxide (YSZ); It can be commercially available also and can prepare according to the method for well known to a person skilled in the art; The molar percentage of yttria is 3mol%～8mol% in the zirconia of said stabilized with yttrium oxide, can select the zirconia of suitable stabilized with yttrium oxide as required.
Said auxiliary element manganese dioxide, cerium oxide, monox, aluminium oxide, barium carbonate, magnesium oxide, niobium pentaoxide, yttria and crude zinc oxide materials purity are greater than 99%.
In the lambda sensor sheet core, manufacturing method step 4) of the present invention; Printing gradient electrode protective seam; Adopt silk-screen printing technique, the printing slip is made up of solid phase powder and organic material, and the percentage composition of solid phase powder quality is: first protective seam is zirconia powder 70～90wt%; Magnesium aluminium spinel powder 5～30wt%, dag 4～5wt%; Second protective seam is zirconia powder 40～55wt%, magnesium aluminium spinel powder 40～70wt%, dag 4～5wt%; The 3rd protective seam is zirconia powder 6～20wt%, magnesium aluminium spinel powder 80～90wt%, dag 4～5wt%; Organic material amount accounts for said solid phase powder quality number percent: thickening agent ethyl cellulose or rosin 3～8wt%; Spreading agent polyacrylic acid or triethanolamine 2～5wt%; Plasticizer phthalic acid ester 1～6wt%, organic solvent terpinol or terebinthina 15～25%; Each layer solid phase powder is all through 300 mesh sieves, and the thickness in monolayer of printing is controlled at 10～150 μ m.
In the lambda sensor sheet core, manufacturing method step 5) of the present invention, described the 2nd gradient insulation course that stamps stamps bottom gradient insulation course; Stamp the 1st gradient insulation course, adopt silk-screen printing technique respectively, divide the composition material of on idiosome, printing graded for three times respectively successively; The printing slip is made up of solid phase powder and organic material, and the percentage composition of solid phase powder quality is: first insulation course is zirconia 70～80wt%, aluminium oxide 10～30wt%; Monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%; Zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; Second insulation course is zirconia 40～50wt%, aluminium oxide 40～60wt%, and monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; The 3rd insulation course is zirconia 10～20wt%, aluminium oxide 70～90wt%, and monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; Organic material amount accounts for said solid phase powder quality number percent: thickening agent ethyl cellulose or rosin 3～8wt%; Spreading agent polyacrylic acid or triethanolamine 2～5wt%; Plasticizer phthalic acid ester 1～6wt%, organic solvent terpinol or terebinthina 15～25wt%; Each layer solid phase powder is all through 300 mesh sieves, and the thickness in monolayer of printing is controlled at 10～150 μ m.
In the lambda sensor sheet core, manufacturing method step 3) of the present invention, after described sensor information synusia, air chamber synusia and substrate synusia laminated, each thickness in monolayer was controlled at 400～700 μ m; Described sensor information layer, air chamber layer and substrate layer have identical thickness, width and length for three layers.
In lambda sensor sheet core, manufacturing method step 3) of the present invention and the step 6), with the compacting of presenting a theatrical performance as the last item on a programme, pressure is 10～50MPa, and the dwell time is 5～15 minutes.
In the lambda sensor sheet core, manufacturing method step 8) of the present invention; Getting rid of organism is, the plain embryo of lambda sensor label heats up with the constant programming rate of 0.1～5 ℃/min, wherein is incubated 10～50 hours down at 500 ℃; And the highest dump temperature is controlled at 500～900 ℃, and organism is all got rid of.
In the lambda sensor sheet core, manufacturing method step 8) of the present invention; The plain embryo of lambda sensor label buries the burning method with the chromatographic aluminium oxide fine powder after getting rid of organism, put into high temperature furnace; Sintering is 5～10 hours under 1350～1550 ℃ high temperature, and programming rate is controlled at 1～3 ℃/minute.
A kind of lambda sensor label provided by the invention and manufacturing approach thereof were compared with former sheet core material and preparation method, had following advantage:
(1) passes through the modification of commercially available YSZ ceramic powder; Guaranteed that the sheet core material still has excellent electric property and sensitivity under the lamelliform situation; And reduced the porosity between the ceramic particle in the zirconia matrix; Thereby increase the intensity and the hardness of zirconia matrix, guaranteed the required mechanical strength of later stage product encapsulation;
(2) the signal electrode protective seam adopts the gradient composites technology, has improved the bond strength of electrode protecting layer, prevents that effectively protective seam from coming off under thermal shock, improved thermal shock resistance and serviceable life;
(3) adopt gradient composites in the insulation course, improved the cohesive strength of insulation course and base layer and air chamber layer; Compare with traditional insulation course; Because traditional insulation course and matrix material component difference are very big, and different materials shrinkage factor and melting behaviour are different fully, and it is not tight to cause insulation course to bond; Thereby with the matrix layering or come off, reduce yield rate and properties of product greatly; Through using gradient composites, relaxed the difference in shrinkage between insulation course and the matrix effectively, improved the cohesive strength of joint portion, can obtain the good product of air-tightness, significantly improve yield rate;
(4) adopt the double insulating layer mode, the gradient insulation course in printing bottom, substrate layer bottom has prevented because of heating electrode outlet voltage disturb sensor voltage waveform signal effectively.
Description of drawings
Fig. 1 is a lambda sensor label structural representation of the present invention
Fig. 2 is the lambda sensor label entrucking test signal voltage squiggle of embodiment 1 preparation
Fig. 3 is a lambda sensor manufacturing process picture of the present invention
Among the figure: 1 electrode gradient protective seam; 1-1 first protective seam; 1-2 second protective seam; 1-3 the 3rd protective seam; 2 the 1st signal electrode layers; 3 sensor information layers; 4 the 2nd signal electrode layers; 5 air chamber layers; 6 the 1st gradient insulation courses; 6-1 first insulation course; 6-2 second insulation course; 6-3 the 3rd insulation course; 7 heating circuit layer; 8 the 2nd gradient insulation courses; 8-1 first insulation course; 8-2 second insulation course; 8-3 the 3rd insulation course; 9 substrate layers; 10 bottom gradient insulation courses; 10-1 first insulation course; 10-2 second insulation course; 10-3 the 3rd insulation course.
Embodiment
Embodiment 1
The preparation of lambda sensor label
(a) tape casting diaphragm preparation: get 1000g nanoscale YSZ; Add 20g manganese dioxide, 10g cerium oxide, 5g monox and 10g aluminium oxide respectively; Put into ball grinder; Add solvent absolute ethyl alcohol 400g successively), xylene 300g, spreading agent triethanolamine 30g, cementing agent polyvinyl butyral 100g plasticizer phthalic acid dibutyl ester 30g and polyglycol agent 50g, went in the ball grinder ball milling 20 hours, process casting slurry; Adopt casting technique, dry under 80 ℃ of temperature in full-automatic casting machine with the even diaphragm of scraper striking 200 μ m thickness, drying time 10 minutes, cutting obtains qualified diaphragm;
(b) germinal layer is made: use the tape casting diaphragm lamination, put into the compacting of presenting a theatrical performance as the last item on a programme, on each layer, print line of cut and position line respectively, cut into sensor information synusia, air chamber synusia and substrate synusia with laser knife;
(c) stamp platinum electrode at sensor information layer pros and cons, go out electrode lead hole with puncher;
(d) on substrate layer, stamp gradient insulation course, heater circuit and bottom gradient insulation course, the gradient insulation course adopts following mode to make:
Solid phase powder prescription is in the gradient insulation course: preparation 300g powder, and first insulation course is zirconia 80g, aluminium oxide 10g, monox 2g, boron oxide 1g, barium carbonate 1g, zinc paste 3g and sodium carbonate 3g; Second insulation course is zirconia 50g, aluminium oxide 40g, monox 2g, boron oxide 1g, barium carbonate 1g, zinc paste 3g and sodium carbonate 3g; The 3rd insulation course is zirconia 20g, aluminium oxide 70g, monox 2g, boron oxide 1g, barium carbonate 1g, zinc paste 3g and sodium carbonate 3g; In above-mentioned 300g powder, be benchmark in the powder quality, add thickening agent ethyl cellulose 3wt%, spreading agent polyacrylic acid 5wt%, plasticizer phthalic acid ester 3wt%, organic solvent terebinthina 15wt% puts into bowl mill and carries out ball milling, ball milling 20 hours.Adopt silk-screen printing technique, divide three layers and be printed on substrate layer respectively; Oven dry republishes heater circuit, holds electrode lead hole successfully, prints three layers of gradient insulation course (pressing order shown in Fig. 1) afterwards once more respectively.The thickness in monolayer of printing is 20 μ m;
(e) printing signal electrode on the sensor information layer, the gradient that prints electrode then protective seam, electrode gradient protective seam adopts following mode to make:
Solid phase powder prescription is in the electrode gradient protective seam: preparation 300g powder, and the ground floor protective seam consists of zirconia ceramics powder 80g, magnesium aluminate spinel 15g, dag 5g; Second layer protective seam is zirconia ceramics powder 50g, magnesium aluminate spinel 45g, dag 5g; The three-layer protection layer is zirconia ceramics powder 20g, magnesium aluminate spinel 75g, dag 5g; In above-mentioned 300g powder, be benchmark in the powder quality, add thickening agent rosin 5wt%; Spreading agent polyacrylic acid 3wt%, plasticizer phthalic acid ester 4wt%, organic solvent terpinol 20wt%; Ball milling 20 hours; Adopt silk-screen printing technique, print protective seam respectively, the thickness in monolayer of printing is controlled at 20 μ m;
(f) above-mentioned embryo lamella is docile and obedient preface (order shown in Fig. 1) and locatees, laminate, put into the compacting of presenting a theatrical performance as the last item on a programme;
(g) according to line of cut idiosome is cut, obtain the plain embryo sheet of sensor label;
(h) the plain embryo of label is buried burning with the chromatographic aluminium oxide fine powder, be warming up to 600 ℃ of insulations 2 hours with the speed of 0.5 ℃/min, the eliminating organism, sintering is 10 hours under 1500 ℃ high temperature, promptly gets the lambda sensor label.Lambda sensor label entrucking test signal voltage squiggle such as Fig. 2 of preparation.
Embodiment 2
The preparation of lambda sensor label
(a) tape casting diaphragm preparation: get 1000g nanoscale YSZ; Add 10g manganese dioxide, 10g yttria, 5g monox and 10g barium carbonate respectively; Put into ball grinder; Add solvent absolute ethyl alcohol 500g, xylene 400g, spreading agent triethanolamine 35g, cementing agent polyvinyl butyral 80g, plasticizer phthalic acid dibutyl ester 40g and polyglycol 40g successively, went into the interior ball milling of ball grinder 30 hours, process casting slurry; Adopt casting technique, dry under 75 ℃ of temperature in full-automatic casting machine with the even diaphragm of scraper striking 150 μ m thickness, drying time 10 minutes, cutting obtains qualified diaphragm;
(b) germinal layer is made: use the tape casting diaphragm lamination, put into the compacting of presenting a theatrical performance as the last item on a programme, on each layer, print line of cut and position line respectively, cut into sensor information synusia, air chamber synusia and substrate synusia with laser knife;
(c) stamp platinum electrode at sensor information layer pros and cons, go out electrode lead hole with puncher;
(d) on substrate layer, stamp gradient insulation course, heater circuit and bottom gradient insulation course, the gradient insulation course adopts following mode to make:
Solid phase powder prescription is in the gradient insulation course: preparation 300g powder, and first insulation course is zirconia 70g, aluminium oxide 20g, monox 2g, boron oxide 1g, barium carbonate 1g, zinc paste 3g and sodium carbonate 3g; Second insulation course is zirconia 40g, aluminium oxide 50g, monox 2g, boron oxide 1g, barium carbonate 1g, zinc paste 3g and sodium carbonate 3g; The 3rd insulation course is zirconia 10g, aluminium oxide 80g, monox 2g, boron oxide 1g, barium carbonate 1g, zinc paste 3g and sodium carbonate 3g; The organism prescription is a benchmark in the solid phase powder quality in the gradient insulation course: thickening agent rosin 5wt%, spreading agent triethanolamine 4wt%, plasticizer phthalic acid ester 5wt%, organic solvent terpinol 20wt%;
Solid phase powder in the preparation 300g gradient insulation course adds organism by above-mentioned prescription respectively, puts into bowl mill and carries out ball milling, ball milling 20 hours.Adopt silk-screen printing technique, divide three layers on substrate layer; Oven dry republishes heater circuit, holds electrode lead hole successfully, prints three layers of gradient insulation course (pressing order shown in Fig. 1) afterwards once more respectively, and the thickness in monolayer of printing is controlled at 20 μ m;
(e) printing signal electrode on the sensor information layer, the gradient that prints electrode then protective seam, electrode gradient protective seam adopts following mode to make:
Solid phase powder prescription is in the electrode gradient protective seam: preparation 300g powder, and the ground floor protective seam consists of zirconia ceramics powder 80g, magnesium aluminate spinel 15g, dag 5g; Second layer protective seam is zirconia ceramics powder 50g, magnesium aluminate spinel 45g, dag 5g; The three-layer protection layer is zirconia ceramics powder 20g, magnesium aluminate spinel 75g, dag 5g; In above-mentioned 300g powder, be benchmark in the powder quality, add thickening agent rosin 5wt%, spreading agent polyacrylic acid 3wt%, plasticizer phthalic acid ester 4wt%, organic solvent terpinol 20wt%; Ball milling 20 hours adopts silk-screen printing technique, prints protective seam respectively, and the thickness in monolayer of printing is controlled at 20 μ m;
(f) above-mentioned embryo lamella is docile and obedient preface (order shown in Fig. 1) and locatees, laminate, put into the compacting of presenting a theatrical performance as the last item on a programme;
(g) according to line of cut idiosome is cut, obtain the plain embryo sheet of sensor label;
(h) the plain embryo of label is buried burning with the chromatographic aluminium oxide fine powder, be warming up to 600 ℃ of insulations 2 hours with the speed of 1 ℃/min, the eliminating organism, sintering is 10 hours under 1530 ℃ high temperature, promptly gets the lambda sensor label.
Claims (10)
1. lambda sensor label is characterized in that: it is by electrode gradient protective seam (1), the 1st signal electrode layer (2); Sensor information layer (3); The 2nd signal electrode layer (4), air chamber layer (5), the 1st gradient insulation course (6); Heating circuit layer (7), the 2nd gradient insulation course (8), substrate layer (9) and bottom insulation layer (10) are stacked to constitute successively;
Described electrode gradient protective seam is a three-decker, and trilaminate material is formed in gradient, and layers of material comprises zirconia powder and magnesium aluminium spinel powder, thickness in monolayer 10～150 μ m, and wherein first protective seam (1-1) is on the 1st signal electrode layer (2);
Described the 1st gradient insulation course, the 2nd gradient insulation course and bottom insulation layer are three-decker; Trilaminate material is formed in gradient; Their first insulation course, second insulation course and the 3rd insulating layer material are formed corresponding identical; The 3rd insulation course (6-3) of the 1st gradient insulation course is printed on respectively on the above and below of heating circuit layer (7) with the 3rd insulation course (8-3) of the 2nd gradient insulation course; First insulation course (10-1) of bottom insulation layer is on substrate layer (9) bottom, and their layers of materials of three layers are by zirconia and aluminium oxide or also have monox, boron oxide, barium carbonate, zinc paste and sodium carbonate to be mixed with thickness in monolayer 10～150 μ m;
It is main material that described sensor information layer, air chamber layer and substrate layer adopt the zirconia of nanoscale stabilized with yttrium oxide; Use the auxiliary material modification; Its auxiliary material are the two or more combinations in manganese oxide, cerium oxide, yttria, aluminium oxide, niobium pentaoxide, magnesium oxide, barium carbonate and the zinc paste, each layer thickness 400～700 μ m of sensor information layer, air chamber layer and substrate layer; Described sensor information layer, air chamber layer and substrate layer have identical thickness, width and length;
Described air chamber layer has U-shaped air chamber groove, well width 0.5～3 μ m, and the terminal U-shaped of groove bottom is not cut logical, has 0.5～3mm to reserve with air chamber layer bottom.
2. lambda sensor label as claimed in claim 1; It is characterized in that; (1) three layer of gradation of described electrode gradient protective seam processed; It is printed, and the percentage composition of solid phase powder quality is in the slip: first protective seam (1-1) is zirconia powder 70～90wt%, magnesium aluminium spinel powder 5～30wt%, dag 4～5wt%; Second protective seam (1-2) is zirconia powder 40～55wt%, magnesium aluminium spinel powder 40～70wt%, dag 4～5wt%; The 3rd protective seam (1-3) is zirconia powder 6～20wt%, magnesium aluminium spinel powder 80～90wt%, dag 4～5wt%; Print in the slip and added organic material; Organic material addition is the basis in said solid phase powder quality: thickening agent ethyl cellulose or rosin 3wt%～8wt%; Spreading agent polyacrylic acid or triethanolamine 2wt%～5wt%; Plasticizer phthalic acid ester 1wt%～6wt%, organic solvent terpinol or terebinthina 15wt%～25%; Each layer solid phase powder is all through 300 mesh sieves, and the thickness in monolayer of printing is controlled at 10～150 μ m.
3. lambda sensor label as claimed in claim 1 is characterized in that: described the 1st gradient insulation course (6), the 2nd gradient insulation course (8) and bottom insulation layer (10) three-decker, and gradation is processed respectively; It is printed, and the percentage composition of solid phase powder quality is in the slip: first insulation course is zirconia 70～80wt%, aluminium oxide 10～30wt%, monox 0～8wt%; Boron oxide 0～2wt%; Barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; Second insulation course is zirconia 40～50wt%, aluminium oxide 40～60wt%, and monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; The 3rd insulation course is zirconia 10～20wt%, aluminium oxide 70～90wt%, and monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; Print in the slip and added organic material; Organic material addition is the basis in said solid phase powder quality: thickening agent ethyl cellulose or rosin 3wt%～8wt%; Spreading agent polyacrylic acid or triethanolamine 2wt%～5wt%; Plasticizer phthalic acid ester 1wt%～6wt%, organic solvent terpinol or terebinthina 15wt%～25wt%; Each layer solid phase powder is all through 300 mesh sieves, and the thickness in monolayer of printing is controlled at 10～150 μ m.
4. a kind of lambda sensor label as claimed in claim 1; It is characterized in that: in described sensor information layer (3), air chamber layer (5) and the substrate layer (9); The zirconia mass ratio that used auxiliary material addition accounts for stabilized with yttrium oxide is: manganese dioxide 0～2wt%, cerium oxide 0～2wt%, monox 0～2wt%, aluminium oxide 0～2wt%, barium carbonate 0～1.5wt%, magnesium oxide 0～2.5wt%, niobium pentaoxide 0～1.5wt%, yttria 0～3wt% and zinc paste 0～2.5wt% wherein have at least two kinds not to be zero simultaneously.
5. a kind of lambda sensor label as claimed in claim 1 is characterized in that: the electrode of described the 1st signal electrode layer and the 2nd signal electrode layer is a platinum electrode.
6. the manufacturing approach of lambda sensor label as claimed in claim 1 is characterized in that manufacturing step is followed successively by:
1) preparation casting slurry: be used for sensor information layer (3), air chamber layer (5) and substrate layer (9); The zirconia powder that modified oxidized yttrium is stable is put into ball grinder, is benchmark in the stable zirconia powder quality of modified oxidized yttrium then, adds solvent 60wt%～90wt% successively; Spreading agent triethanolamine 3wt%～4wt%; Cementing agent polyvinyl butyral 6wt%～15wt%, plasticizer phthalic acid dibutyl ester and polyglycol 6wt%～10wt%, its dibutyl phthalate and polyglycol mass ratio are 1: 1; Ball milling is 20～30 hours in the ball grinder, processes casting slurry;
Wherein, The stable zirconia powder proportioning of described modified oxidized yttrium is: the zirconia with the nanoscale stabilized with yttrium oxide is a main material; Add the auxiliary material modification; The auxiliary material addition is the basis in the main material quality; Add two or more among manganese dioxide 0～2wt%, cerium oxide 0～2wt%, monox 0～2wt%, aluminium oxide 0～2wt%, barium carbonate 0～1.5wt%, magnesium oxide 0～2.5wt%, niobium pentaoxide 0～1.5wt%, yttria 0～3wt% and the zinc paste 0～2.5wt%, wherein have at least two kinds not to be zero simultaneously; Described solvent is two or more in absolute ethyl alcohol, butanone, toluene and the xylene;
2) preparation sensor information layer (3), air chamber layer (5) and substrate layer (9) diaphragm: adopt casting technique; With the slurry of step 1) preparation, adjustment casting machine scraper height is provided with casting machine diaphragm bake out temperature at 60～90 ℃ at 60～300 μ m; Drying time is set 3～10 minutes; Adjustment plays diaphragm equipment automatically, adopts automatic gas cutting machine to cut into the diaphragm of even length, and the monolithic thickness is controlled at 10～300 μ m;
3) tape casting diaphragm that embryo lamella making: with step 2) obtains is laminated to thickness 400～700 μ m, puts into the compacting of presenting a theatrical performance as the last item on a programme, and on each layer, prints line of cut and position line respectively, cuts into sensor information synusia, air chamber synusia and substrate synusia with laser knife; Sensor information layer, air chamber layer and substrate layer have identical thickness, width and length;
4) the sensor information layer pros and cons in the step 3) preparation stamps platinum electrode, holds electrode lead hole successfully, prints first protective seam (1-1) of gradient electrode protective seam (1) then successively, second protective seam (1-2), the 3rd protective seam (1-3);
5) on substrate layer, be docile and obedient first insulation course (8-1) that preface stamps the 2nd gradient insulation course (8), second insulation course (8-2), the 3rd insulation course (8-3) stamps heating circuit layer (7) then; Be docile and obedient first insulation course (10-1) that preface stamps bottom gradient insulation course (10), second insulation course (10-2), the 3rd insulation course (10-3) in the substrate layer bottom; Hold electrode lead hole successfully, on heating circuit layer (7), be docile and obedient the 3rd insulation course (6-3) that preface stamps the 1st gradient insulation course (6), second insulation course (6-2), first insulation course (6-1) again;
6) above-mentioned embryo lamella is located, laminated according to lambda sensor label structural order, put into the compacting of presenting a theatrical performance as the last item on a programme and get idiosome;
7) according to line of cut idiosome is cut, obtain the plain embryo of lambda sensor label;
8) with the plain embryo of label 60-90 ℃ of oven dry 3～10 minutes down, get rid of organism after, sintering 5～10 hours under 1350～1550 ℃ high temperature promptly gets the lambda sensor label again.
7. the manufacturing approach of lambda sensor label as claimed in claim 6 is characterized in that: the molar percentage of yttria is 3mol%～8mol% in the zirconia of described stabilized with yttrium oxide, selects the zirconia of suitable stabilized with yttrium oxide as required.
8. the manufacturing approach of lambda sensor label as claimed in claim 6; It is characterized in that: printing gradient electrode protective seam (1) in the step 4); Adopt silk-screen printing technique, the printing slip is made up of solid phase powder and organic material, and the percentage composition of solid phase powder quality is: first protective seam (1-1) is zirconia powder 70～90wt%; Magnesium aluminium spinel powder 5～30wt%, dag 4～5wt%; Second protective seam (1-2) is zirconia powder 40～55wt%, magnesium aluminium spinel powder 40～70wt%, dag 4～5wt%; The 3rd protective seam (1-3) is zirconia powder 6～20wt%, magnesium aluminium spinel powder 80～90wt%, dag 4～5wt%; Organic material amount accounts for said solid phase powder quality number percent: thickening agent ethyl cellulose or rosin 3～8wt%; Spreading agent polyacrylic acid or triethanolamine 2～5wt%; Plasticizer phthalic acid ester 1～6wt%, organic solvent terpinol or terebinthina 15～25%; Each layer solid phase powder is all through 300 mesh sieves, and the thickness in monolayer of printing is controlled at 10～150 μ m.
9. the manufacturing approach of lambda sensor label as claimed in claim 6 is characterized in that: stamp the 2nd gradient insulation course described in the step 5), stamp bottom gradient insulation course; Stamp the 1st gradient insulation course, adopt silk-screen printing technique respectively, divide the composition material of on idiosome, printing graded for three times respectively successively; The printing slip is made up of solid phase powder and organic material, and the percentage composition of solid phase powder quality is: first insulation course is zirconia 70～80wt%, aluminium oxide 10～30wt%; Monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%; Zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; Second insulation course is zirconia 40～50wt%, aluminium oxide 40～60wt%, and monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; The 3rd insulation course is zirconia 10～20wt%, aluminium oxide 70～90wt%, and monox 0～8wt%, boron oxide 0～2wt%, barium carbonate 0～2wt%, zinc paste 0～4wt% and sodium carbonate 0～6wt%, each component sum is 100%; Organic material amount accounts for said each layer solid phase powder quality number percent: thickening agent ethyl cellulose or rosin 3～8wt%; Spreading agent polyacrylic acid or triethanolamine 2～5wt%; Plasticizer phthalic acid ester 1～6wt%, organic solvent terpinol or terebinthina 15～25wt%; Each layer solid phase powder is all through 300 mesh sieves, and the thickness in monolayer of printing is controlled at 10～150 μ m.
10. the manufacturing approach of lambda sensor label as claimed in claim 6; It is characterized in that: getting rid of organism in the step 8) is; The plain embryo of lambda sensor label heats up with the constant programming rate of 0.1～5 ℃/min; Wherein 500 ℃ of down insulations 10～50 hours, and the highest dump temperature is controlled at 500～900 ℃, and organism is all got rid of.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103454329A (en) * | 2013-09-04 | 2013-12-18 | 朱捷 | Multilayered oxygen sensor with sheet type structure |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002071629A (en) * | 2000-08-31 | 2002-03-12 | Ngk Spark Plug Co Ltd | Layer-built gas sensor element manufacturing method |
| CN1453581A (en) * | 2002-02-05 | 2003-11-05 | 京瓷株式会社 | Oxygen sensor |
| CN101042366A (en) * | 2007-04-24 | 2007-09-26 | 谢光远 | Manufacturing method of plate type oxygen sensor chip |
| US20110120863A1 (en) * | 2009-11-20 | 2011-05-26 | Nottingham Marsha E | Palladium ink exhaust sensor |
| CN102109488A (en) * | 2009-12-25 | 2011-06-29 | 比亚迪股份有限公司 | Chip type oxygen sensor and preparation method thereof |
| CN102109486A (en) * | 2009-12-26 | 2011-06-29 | 比亚迪股份有限公司 | Chip type oxygen sensor and preparation method thereof |
-
2012
- 2012-02-20 CN CN2012100381926A patent/CN102608182A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002071629A (en) * | 2000-08-31 | 2002-03-12 | Ngk Spark Plug Co Ltd | Layer-built gas sensor element manufacturing method |
| CN1453581A (en) * | 2002-02-05 | 2003-11-05 | 京瓷株式会社 | Oxygen sensor |
| CN101042366A (en) * | 2007-04-24 | 2007-09-26 | 谢光远 | Manufacturing method of plate type oxygen sensor chip |
| US20110120863A1 (en) * | 2009-11-20 | 2011-05-26 | Nottingham Marsha E | Palladium ink exhaust sensor |
| CN102109488A (en) * | 2009-12-25 | 2011-06-29 | 比亚迪股份有限公司 | Chip type oxygen sensor and preparation method thereof |
| CN102109486A (en) * | 2009-12-26 | 2011-06-29 | 比亚迪股份有限公司 | Chip type oxygen sensor and preparation method thereof |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103454329B (en) * | 2013-09-04 | 2016-03-23 | 朱捷 | Monolithic multilayer structure lambda sensor |
| CN103454329A (en) * | 2013-09-04 | 2013-12-18 | 朱捷 | Multilayered oxygen sensor with sheet type structure |
| CN103822952A (en) * | 2013-12-12 | 2014-05-28 | 苏州工业园区福特斯汽车电子有限公司 | Wide-band oxygen sensor chip and manufacturing method thereof |
| CN104880500A (en) * | 2014-07-08 | 2015-09-02 | 广东风华高新科技股份有限公司 | Flake-type oxygen sensor and preparation method thereof |
| CN104569106B (en) * | 2014-12-24 | 2017-12-01 | 昆山圣赛诺尔传感技术有限公司 | A kind of sheet type sensor and preparation method thereof |
| CN104569106A (en) * | 2014-12-24 | 2015-04-29 | 昆山圣赛诺尔传感技术有限公司 | Chip sensor and preparation method thereof |
| CN106053308A (en) * | 2016-07-07 | 2016-10-26 | 中国第汽车股份有限公司 | Chip type particulate matter sensor chip for vehicles and method for manufacturing chip type particulate matter sensor chip |
| CN107121473B (en) * | 2017-03-31 | 2020-01-14 | 武汉泽科宁电子科技有限公司 | Oxygen sensor ceramic chip and preparation method thereof |
| CN107121473A (en) * | 2017-03-31 | 2017-09-01 | 武汉泽科宁电子科技有限公司 | A kind of oxygen sensor ceramic piece and preparation method thereof |
| CN108732224A (en) * | 2018-06-06 | 2018-11-02 | 成都科锐传感技术有限公司 | A kind of Novel double-battery matrix formula broad domain oxygen sensor and preparation method thereof |
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| CN109709193A (en) * | 2019-03-13 | 2019-05-03 | 常州君堃电子有限公司 | Nitrogen oxides ammonia gas sensor |
| CN109709194A (en) * | 2019-03-13 | 2019-05-03 | 常州君堃电子有限公司 | Nitrogen oxides ammonia integral sensor |
| CN111521648A (en) * | 2020-04-30 | 2020-08-11 | 莱鼎电子材料科技有限公司 | Oxygen sensor chip with heating circuit wrapped by cast alumina |
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