CN103776871B - A kind of oxygen sensor used in vehicle based on oxide casting slurry and manufacture method thereof - Google Patents
A kind of oxygen sensor used in vehicle based on oxide casting slurry and manufacture method thereof Download PDFInfo
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Abstract
The invention discloses a kind of oxygen sensor used in vehicle based on oxide casting slurry, wherein, sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix are made up of casting slurry, casting slurry includes the material of following weight portion: Zirconium powder 5-7 part, organic solvent 3-5 part, auxiliary agent 0.5-1.5 part.Each layer matrix of this oxygen sensor used in vehicle all adopts zirconia material to make, in sintering process, the sinter bonded degree that each base layer has had, especially air duct layer, without filling the Organic substance such as carbon dust, starch in air duct, it is to avoid affect the sensitivity of sensor because residue is present in air duct.
Description
Technical field
The present invention relates to sensor, particularly relate to a kind of oxygen sensor used in vehicle based on oxide casting slurry and manufacture method thereof.
Background technology
Development recently as automobile market, it has been a kind of trend that automobile enters every household, but vehicle exhaust has become one of main source of atmospheric pollution, especially at the beginning of 2013, the fog thick weather of meet with many days, Beijing area, PM2.5 exceeds standard three times more than, the quality of the life making the people has suffered very big threat, fog weather can cause rhinitis, bronchitis, is in this environment for a long time and also can bring out pulmonary carcinoma.On January 1st, 2013, China has started state four discharge standard comprehensively and has controlled the vehicle exhaust pollution to air, and oxygen sensor used in vehicle is the sensing element that waste gas is detected by only one.The preparation of existing chip oxygen sensor mainly adopts butanone, dimethylbenzene system curtain coating obtains cast sheet, the Organic substance such as carbon dust or starch is used to fill air duct chamber, after burning till, obtain air passage body, but have residue and exist, affect the sensitivity of sensor, simultaneously, the organic solvent majority used in sensor production process is the toxic solvent such as butanone, dimethylbenzene, it is easy to contaminated environment, and health is worked the mischief.
Summary of the invention
The technical problem to be solved in the present invention is in that, for the deficiencies in the prior art, a kind of oxygen sensor used in vehicle based on oxide casting slurry and manufacture method thereof are provided, each layer matrix of this oxygen sensor used in vehicle all adopts oxide material to make, in sintering process, the sinter bonded degree that each base layer has had, especially air duct layer, without filling the Organic substance such as carbon dust, starch in air duct, it is to avoid affect the sensitivity of sensor because residue is present in air duct.
For solving above-mentioned technical problem, the present invention adopts the following technical scheme that.
A kind of oxygen sensor used in vehicle based on oxide casting slurry, it includes the sensitive layer matrix that stacking from top to bottom is arranged, air duct layer, air duct supporter and zone of heating matrix, the upper surface of described sensitive layer matrix is printed with outer working electrode and porous protective layer successively, the lower surface of this sensitive layer matrix is printed with interior working electrode, on described air duct layer, corresponding described interior working electrode offers air duct, the upper surface of described zone of heating matrix is printed with the first insulating barrier successively, add thermode and the second insulating barrier, the lower surface of described zone of heating matrix is printed with the 3rd insulating barrier and heating conductive pin successively, described outer working electrode draws hole with interior working electrode by conduction and is electrically connected, the described thermode that adds draws hole electric connection with heating conductive pin by conduction, wherein, described sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix are made up of casting slurry, described casting slurry includes the material of following weight portion: Zirconium powder 5-7 part, organic solvent 3-5 part, auxiliary agent 0.5-1.5 part.
Preferably, described casting slurry includes the material of following weight portion: Zirconium powder 6 parts, organic solvent 4 parts, auxiliary agent 1 part, the particle diameter < 1um of described Zirconium powder, wherein, described organic solvent includes the material of following weight portion: analytical pure acetic acid fat and/or 7 parts of acetic acid the third fat, analytical pure ethanol and/or isobutanol 3 parts；Described auxiliary agent includes the material of following weight portion: dispersant 1 part, binding agent 7 parts, plasticizer 1 part.
Preferably, the thickness of described sensitive layer matrix is: 0.5-0.7mm, and the thickness of described air duct layer is 0.3-0.4mm, and the thickness of described air duct supporter is 0.2-0.3mm, and the thickness of described zone of heating matrix is 0.5-0.7mm.
Preferably, described in add the thickness of thermode be 10-15um, the thickness of described outer working electrode and interior working electrode is 10-15um, and the thickness of described first insulating barrier, the second insulating barrier and the 3rd insulating barrier is 30-35um, and porous protective layer thickness is 70-80um.
A kind of oxygen sensor used in vehicle manufacture method based on oxide casting slurry, it comprises the steps: step S1, prepare casting slurry, described casting slurry includes the material of following weight portion: Zirconium powder 5-7 part, organic solvent 3-5 part, auxiliary agent 0.5-1.5 part, utilize planetary ball mill ball milling casting slurry, carry out curtain coating with casting machine afterwards, form zirconium oxide curtain coating green compact, make sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix with zirconium oxide curtain coating green compact；Step S2, utilizes blanking die, and by sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix respectively by preset thickness cut-parts, then stamping-out hole, location and conduction draw hole respectively, afterwards to air duct layer stamping-out air duct；Step S3; utilize screen printing apparatus; upper surface at zone of heating matrix prints the first insulating barrier successively, adds thermode and the second insulating barrier; lower surface at zone of heating matrix prints the 3rd insulating barrier and heating conductive pin successively; upper surface at sensitive layer matrix prints outer working electrode and porous protective layer successively, working electrode in the lower surface of sensitive layer matrix prints；Step S4, stacks gradually sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix, utilizes temperature isostatic pressing machine under vacuum with preset pressure static pressure, becomes pre-set dimension with stamping-out grinding tool stamping-out afterwards, obtain sensor green compact；Step S5, sensor green compact covers porous and holds burning pressing plate, sinter with sintering furnace.
Preferably, in described step S1, described casting slurry includes the material of following weight portion: Zirconium powder 6 parts, organic solvent 4 parts, auxiliary agent 1 part, the particle diameter < 1um of described Zirconium powder, wherein, described organic solvent includes the material of following weight portion: analytical pure acetic acid fat and/or 7 parts of acetic acid the third fat, analytical pure ethanol and/or isobutanol 3 parts；Described auxiliary agent includes the material of following weight portion: dispersant 1 part, binding agent 7 parts, plasticizer 1 part；In this step, first by Zirconium powder, organic solvent and dispersant by the mixing of above-mentioned weight, utilize planetary ball mill with rotating speed for 250r/min ball milling 15 hours, add binding agent and plasticizer afterwards successively, with rotating speed for 250r/min ball milling 12 hours, by casting slurry froth in vacuum after ball milling, utilize casting machine to carry out curtain coating, obtain zirconium oxide curtain coating green compact.
Preferably, in described step S2, first with vacuum packing machine, corrosion resistant plate is added in the upper and lower both sides of each zirconium oxide curtain coating green compact, recycling pellosil carries out vacuum coater, utilize temperature isostatic pressing machine with pressure be 8-15MPa, temperature is pressurize 10 minutes under 70 DEG C of conditions, more respectively sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix carried out cut-parts.
Preferably, in described step S2, the thickness of described sensitive layer matrix is: 0.5-0.7mm, and the thickness of described air duct layer is 0.3-0.4mm, and the thickness of described air duct supporter is 0.2-0.3mm, and the thickness of described zone of heating matrix is 0.5-0.7mm.
Preferably; in described step S3; the described thickness adding thermode is 10-15um, and the thickness of described outer working electrode and interior working electrode is 10-15um, and it is 70-80um that the thickness of described first insulating barrier, the second insulating barrier and the 3rd insulating barrier is 30-35um. porous protective layer.
Preferably, in described step S4, after described sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix stack gradually, with rustless steel clamping plate with 0.4-0.6Mpa pressure precompressed, recycling pellosil carries out vacuum coater, temperature isostatic pressing machine parameter is set to pressure 8-15Mpa, temperature 70 C, the dwell time is 8-15min, becomes sensor green compact with blanking die stamping-out afterwards, the length of these sensor green compact is 60mm, and width is 5mm；In described step S5, described porous holds the Woelm Alumina load bearing board burning pressing plate to be thickness be 0.5-0.8mm, and described sintering furnace is Si-Mo rod sintering furnace, sinters 2 hours with temperature for 1450-1550 DEG C.
In oxygen sensor used in vehicle based on oxide casting slurry disclosed by the invention, sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix are made up of casting slurry, casting slurry includes the material of following weight portion: Zirconium powder 5-7 part, organic solvent 3-5 part, auxiliary agent 0.5-1.5 part.Each layer matrix of this oxygen sensor used in vehicle all adopts zirconia material to make, in sintering process, the sinter bonded degree that each base layer has had, especially air duct layer, without filling the Organic substance such as carbon dust, starch in air duct, it is to avoid affect the sensitivity of sensor because residue is present in air duct.
Accompanying drawing explanation
Fig. 1 is the exploded view of oxygen sensor used in vehicle.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is described in more detail.
The invention discloses a kind of oxygen sensor used in vehicle based on oxide casting slurry, as shown in Figure 1, it includes the sensitive layer matrix 3 that stacking from top to bottom is arranged, air duct layer 5, air duct supporter 6 and zone of heating matrix 9, the upper surface of sensitive layer matrix 3 is printed with outer working electrode 2 and porous protective layer 1 successively, the lower surface of this sensitive layer matrix 3 is printed with interior working electrode 4, on air duct layer 5, corresponding interior working electrode 4 offers air duct, the upper surface of zone of heating matrix 9 is printed with the first insulating barrier 12 successively, add thermode 8 and the second insulating barrier 7, the lower surface of zone of heating matrix 9 is printed with the 3rd insulating barrier 10 and heating conductive pin 11 successively, outer working electrode 2 draws hole with interior working electrode 4 by conduction and is electrically connected, add thermode 8 and draw hole electric connection with heating conductive pin 11 by conduction, wherein,
Sensitive layer matrix 3, air duct layer 5, air duct supporter 6 and zone of heating matrix 9 are made up of casting slurry, and casting slurry includes the material of following weight portion: Zirconium powder 5-7 part, organic solvent 3-5 part, auxiliary agent 0.5-1.5 part；
First insulating barrier the 12, second insulating barrier 7 and the 3rd insulating barrier 10 are made up of insulation paste, and insulation paste includes the material of following weight portion: inorganic particle 4-6 part, organic carrier 2-4 part, auxiliary agent 1-3 part；
Porous protective layer 1 is made up of protective paste, and protective paste includes the material of following weight portion: oxide 3-5 part, pore creating material 1-3 part, organic carrier 1-3 part, auxiliary agent 0.5-1.5 part.
Each layer matrix of above-mentioned oxygen sensor used in vehicle all adopts zirconia material to make, in sintering process, the sinter bonded degree that each base layer has had, especially air duct layer, without filling the Organic substance such as carbon dust, starch in air duct, it is to avoid affect the sensitivity of sensor because residue is present in air duct.While said structure can ensure that air duct size, reduce the filling to air duct cavity foreign body when processed sensor green compact, it is to avoid foreign body burns the residual of excess after sintering, extend the service life of sensor.The manufacture method of this oxygen sensor used in vehicle comprises the steps:
Step S1, prepare casting slurry, casting slurry includes the material of following weight portion: Zirconium powder 5-7 part, organic solvent 3-5 part, auxiliary agent 0.5-1.5 part, utilizes planetary ball mill ball milling casting slurry, carries out curtain coating with casting machine afterwards, form zirconium oxide curtain coating green compact, make sensitive layer matrix 3, air duct layer 5, air duct supporter 6 and zone of heating matrix 9 for zirconium oxide curtain coating green compact；
Prepare insulation paste, insulation paste includes the material of following weight portion: inorganic particle 4-6 part, organic carrier 2-4 part, auxiliary agent 1-3 part, inorganic particle, organic carrier and auxiliary agent are mixed, and obtaining insulation paste with after planetary ball mill ball milling, when its physical property is temperature 25 DEG C, viscosity is 100 ± 20Pa s, and adhesive force is 12N/mm2, resistivity is 3.1x1012Ω cm；
Prepare protective paste; protective paste includes the material of following weight portion: oxide 3-5 part; pore creating material 1-3 part; organic carrier 1-3 part; auxiliary agent 0.5-1.5 part, mixes oxide, pore creating material, organic carrier 1-3 part and auxiliary agent, and obtains protective paste with after planetary ball mill ball milling; this protective paste is viscosity when 25 DEG C in temperature is 300 ± 50Pa s, and adhesive force is 12N/mm2；
Step S2, utilizes blanking die, and by sensitive layer matrix 3, air duct layer 5, air duct supporter 6 and zone of heating matrix 9 respectively by preset thickness cut-parts, then stamping-out hole, location and conduction draw hole respectively, afterwards to air duct layer 5 stamping-out air duct；
Step S3; utilize screen printing apparatus; upper surface at zone of heating matrix 9 prints the first insulating barrier 12 successively, adds thermode 8 and the second insulating barrier 7; lower surface at zone of heating matrix 9 prints the 3rd insulating barrier 10 and heating conductive pin 11 successively; upper surface at sensitive layer matrix 3 prints outer working electrode 2 and porous protective layer 1 successively, working electrode 4 in the lower surface of sensitive layer matrix 3 prints；
Step S4, stacks gradually sensitive layer matrix 3, air duct layer 5, air duct supporter 6 and zone of heating matrix 9, utilizes temperature isostatic pressing machine under vacuum with preset pressure static pressure, becomes pre-set dimension with stamping-out grinding tool stamping-out afterwards, obtain sensor green compact；
Step S5, sensor green compact covers porous and holds burning pressing plate, sinter with sintering furnace.
In order to the concrete technical scheme of the present invention is better described, the present invention proposes below embodiment about above-mentioned casting slurry, insulation paste and protective paste:
Embodiment 1:
In the present embodiment, casting slurry includes the material of following weight portion: Zirconium powder 6 parts, organic solvent 4 parts, auxiliary agent 1 part, the particle diameter < 1um of Zirconium powder, wherein,
Organic solvent includes the material of following weight portion: analytical pure acetic acid fat and/or 7 parts of acetic acid the third fat, analytical pure ethanol and/or isobutanol 3 parts, organic solvent in the present invention, have employed avirulent acetic acid fat and/or acetic acid the third fat and ethanol and/or isobutanol, its compared to existing technology in adopt the mode of the toxic solvent such as butanone, dimethylbenzene, it is to avoid the pollution to environment and the harm to health；
Auxiliary agent includes the material of following weight portion: dispersant 1 part, binding agent 7 parts, plasticizer 1 part.
Wherein, curtain coating auxiliary agent imported from America PVB makees binding agent, and its vitrification point is 62-72 DEG C; there is very strong caking property; can reducing green sheet isostatic pressed overlapping pressure and laminate the time, doing dispersant with triethanolamine, the reagent that model is S2075 provided with Shou Nuo company of the U.S. makees plasticizer.
Embodiment 2:
In the present embodiment, insulation paste includes the material of following weight portion: inorganic particle 5 parts, organic carrier 3 parts, auxiliary agent 2 parts, wherein,
Inorganic particle includes the material of following weight portion: aluminium oxide 20 parts, zirconium oxide 1 part, and wherein aluminium oxide is the mixture of the aluminium oxide 14 parts of α phase low-temperature sintered alumina 6 parts and γ phase particle diameter < 15nm；
Organic carrier is the mixed liquor after water bath processing, and this organic carrier includes the material of following weight portion: terpineol 25 parts, ethyl cellulose 1 part；
Auxiliary agent includes the material of following weight portion: dispersant 6 parts, binding agent 3 parts, levelling agent 3 parts, thixotropic agent 1 part.
Embodiment 3:
In the present embodiment, protective paste includes the material of following weight portion: oxide 4 parts, pore creating material 2 parts, organic carrier 2 parts, auxiliary agent 1 part, wherein,
Oxide includes the mixing of one or more of following weight portion material: aluminium oxide 20 parts, zirconium oxide 1 part, magnesium oxide 1 part, silicon oxide 1 part；
Pore creating material is particle size range is the nano-carbon powder of 0.1um-1um；
Organic carrier includes the material of following weight portion: terpineol 58 parts, ethyl cellulose 25 parts, ethanol 2 parts；
Auxiliary agent includes the material of following weight portion: binding agent 6 parts, dispersant 3 parts, plasticizer 3 parts, levelling agent 1 part.
About the manufacture method of this oxygen sensor used in vehicle, the present invention proposes below embodiment:
Embodiment 4:
In the present embodiment, in step S1, casting slurry includes the material of following weight portion: Zirconium powder 6 parts, organic solvent 4 parts, auxiliary agent 1 part, the particle diameter < 1um of Zirconium powder, wherein,
Organic solvent includes the material of following weight portion: analytical pure acetic acid fat and/or 7 parts of acetic acid the third fat, analytical pure ethanol and/or isobutanol 3 parts；
Auxiliary agent includes the material of following weight portion: dispersant 1 part, binding agent 7 parts, plasticizer 1 part；
In this step, first by Zirconium powder, organic solvent and dispersant by the mixing of above-mentioned weight, utilize planetary ball mill with rotating speed for 250r/min ball milling 15 hours, add binding agent and plasticizer afterwards, with rotating speed for 250r/min ball milling 12 hours, by casting slurry froth in vacuum after ball milling, utilize casting machine to carry out curtain coating, obtain zirconium oxide curtain coating green compact.
Embodiment 5:
In the present embodiment, in step S1, insulation paste includes the material of following weight portion: inorganic particle 5 parts, organic carrier 3 parts, auxiliary agent 2 parts, wherein,
Inorganic particle includes the material of following weight portion: aluminium oxide 20 parts, zirconium oxide 1 part, and wherein aluminium oxide is the mixture of the aluminium oxide 14 parts of α phase low-temperature sintered alumina 6 parts and γ phase particle diameter < 15nm；
Organic carrier is the mixed liquor after water bath processing, and this organic carrier includes the material of following weight portion: terpineol 25 parts, ethyl cellulose 1 part；
Auxiliary agent includes the material of following weight portion: dispersant 6 parts, binding agent 3 parts, levelling agent 3 parts, thixotropic agent 1 part；
In this step, first it is the mixed solution preparing terpineol and ethyl cellulose under 80 DEG C of conditions of temperature in water-bath, add inorganic particle and dispersant afterwards, utilize planetary ball mill with rotating speed for 250r/min ball milling 12 hours, add binding agent, levelling agent, thixotropic agent afterwards, with rotating speed for 250r/min ball milling 24 hours, obtain insulation paste, when its physical property is temperature 25 DEG C, viscosity is 100 ± 20Pa s, and adhesive force is 12N/mm2, resistivity is 3.1x1012Ω·cm。
Embodiment 6
In the present embodiment, in step S1, protective paste includes the material of following weight portion: oxide 4 parts, pore creating material 2 parts, organic carrier 2 parts, auxiliary agent 1 part, wherein,
Oxide includes the mixing of one or more of following weight portion material: aluminium oxide 20 parts, zirconium oxide 1 part, magnesium oxide 1 part, silicon oxide 1 part；
Pore creating material is particle size range is the nano-carbon powder of 0.1um-1um；
Organic carrier includes the material of following weight portion: terpineol 58 parts, ethyl cellulose 25 parts, ethanol 2 parts；
Auxiliary agent includes the material of following weight portion: binding agent 6 parts, dispersant 3 parts, plasticizer 3 parts, levelling agent 1 part；
In this step; by oxide, organic carrier and dispersant; utilize planetary ball mill with rotating speed for 250r/min ball milling 12 hours; it is subsequently adding binding agent, plasticizer and levelling agent afterwards; with rotating speed for 250r/min ball milling 12 hours; obtaining protective paste, this protective paste is viscosity when 25 DEG C in temperature is 300 ± 50Pa s, and adhesive force is 12N/mm2.In the present embodiment; porous protective layer 1 hole aperture reaches 0.5-10um; porosity reaches 5-50%; being a kind of single layer structure, have stronger adhesion with electrode, the corrosion of electrode surface is affected its catalytic action by the harmful substance that its advantage is able to effectively protect in gasoline; and shock resistance is good; life-span is long, and cost supports, and processing technology is simple.
Embodiment 7:
In the present embodiment, in step S2, first with vacuum packing machine, upper at each zirconium oxide curtain coating green compact, lower both sides add corrosion resistant plate, recycling pellosil carries out vacuum coater, utilize temperature isostatic pressing machine with pressure for 8-15MPa, temperature is pressurize 10 minutes under 70 DEG C of conditions, again respectively to sensitive layer matrix 3, air duct layer 5, air duct supporter 6 and zone of heating matrix 9 carry out cut-parts, the thickness of sensitive layer matrix 3 is: 0.5-0.7mm, the thickness of air duct layer 5 is 0.3-0.4mm, the thickness of air duct supporter 6 is 0.2-0.3mm, the thickness of zone of heating matrix 9 is 0.5-0.7mm.
Embodiment 8:
In the present embodiment, in step S3, the thickness adding thermode 8 is 10-15um; the thickness of outer working electrode 2 and interior working electrode 4 is 10-15um; the thickness of first insulating barrier the 12, second insulating barrier 7 and the 3rd insulating barrier 10 is 30-35um, and porous protective layer thickness is 70-80um, and therein printing electrode makes guarantee connect completely; without open circuit; short circuit, slurry prints halo-free dye phenomenon, keeps any surface finish smooth during printing printing insulating barrier, protective layer, electrode layer; flawless, granule foreign；
In step S4, after sensitive layer matrix 3, air duct layer 5, air duct supporter 6 and zone of heating matrix 9 stack gradually, with rustless steel clamping plate with 0.4-0.6Mpa pressure precompressed, recycling pellosil carries out vacuum coater, and temperature isostatic pressing machine parameter is set to pressure 8-15Mpa, temperature 70 C, dwell time is 8-15min, becoming sensor green compact with blanking die stamping-out afterwards, the length of these sensor green compact is 60mm, and width is 5mm；In the present embodiment, use corrosion resistant plate to add pellosil when packaging and support orbicula up and down, it is possible to be effectively ensured air duct size complete, without filling the foreign body such as carbon dust, starch.
In step S5, porous holds the Woelm Alumina load bearing board burning pressing plate to be thickness be 0.5-0.8mm, and sintering furnace is Si-Mo rod sintering furnace, sinters 2 hours with temperature for 1450-1550 DEG C.
In oxygen sensor used in vehicle based on oxide casting slurry disclosed by the invention, sensitive layer matrix 3, air duct layer 5, air duct supporter 6 and zone of heating matrix 9 are made up of casting slurry, casting slurry includes the material of following weight portion: Zirconium powder 5-7 part, organic solvent 3-5 part, auxiliary agent 0.5-1.5 part；First insulating barrier the 12, second insulating barrier 7 and the 3rd insulating barrier 10 are made up of insulation paste, and insulation paste includes the material of following weight portion: inorganic particle 4-6 part, organic carrier 2-4 part, auxiliary agent 1-3 part；Porous protective layer 1 is made up of protective paste, and protective paste includes the material of following weight portion: oxide 3-5 part, pore creating material 1-3 part, organic carrier 1-3 part, auxiliary agent 0.5-1.5 part.Each layer matrix of this oxygen sensor used in vehicle all adopts zirconia material to make, in sintering process, the sinter bonded degree that each base layer has had, especially air duct layer, without filling the Organic substance such as carbon dust, starch in air duct, it is to avoid affect the sensitivity of sensor because residue is present in air duct.Simultaneously, organic solvent in the present invention, have employed avirulent acetic acid fat and/or acetic acid the third fat and ethanol and/or isobutanol, its compared to existing technology in adopt the mode of the toxic solvent such as butanone, dimethylbenzene, it is to avoid the pollution to environment and the harm to health.
It is more than preferred embodiment of the present invention, is not limited to the present invention, all amendment, equivalent replacement or improvement etc. made in the technical scope of the present invention, should be included in the scope that the present invention protects.
Claims (2)
1. the oxygen sensor used in vehicle based on oxide casting slurry, it is characterized in that, include the sensitive layer matrix that stacking from top to bottom is arranged, air duct layer, air duct supporter and zone of heating matrix, the upper surface of described sensitive layer matrix is printed with outer working electrode and porous protective layer successively, the lower surface of this sensitive layer matrix is printed with interior working electrode, on described air duct layer, corresponding described interior working electrode offers air duct, the upper surface of described zone of heating matrix is printed with the first insulating barrier successively, add thermode and the second insulating barrier, the lower surface of described zone of heating matrix is printed with the 3rd insulating barrier and heating conductive pin successively, described outer working electrode draws hole with interior working electrode by conduction and is electrically connected, the described thermode that adds draws hole electric connection with heating conductive pin by conduction, wherein,
Described sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix are made up of casting slurry, described casting slurry includes the material of following weight portion: Zirconium powder 6 parts, organic solvent 4 parts, auxiliary agent 1 part, the particle diameter < of described Zirconium powder 1 μm, wherein, described organic solvent includes the material of following weight portion: analytical pure acetic acid fat and/or 7 parts of acetic acid the third fat, analytical pure ethanol and/or isobutanol 3 parts；Described auxiliary agent includes the material of following weight portion: dispersant 1 part, binding agent 7 parts, plasticizer 1 part；The thickness of described sensitive layer matrix is: 0.5-0.7mm, and the thickness of described air duct layer is 0.3-0.4mm, and the thickness of described air duct supporter is 0.2-0.3mm, and the thickness of described zone of heating matrix is 0.5-0.7mm；The described thickness adding thermode is 10-15 μm, and the thickness of described outer working electrode and interior working electrode is 10-15 μm, and the thickness of described first insulating barrier, the second insulating barrier and the 3rd insulating barrier is 30-35 μm, and porous protective layer thickness is 70-80 μm.
2. the oxygen sensor used in vehicle manufacture method based on oxide casting slurry, it is characterised in that comprise the steps:
Step S1, prepares casting slurry, utilizes planetary ball mill ball milling casting slurry, carries out curtain coating with casting machine afterwards, forms zirconium oxide curtain coating green compact, makes sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix with zirconium oxide curtain coating green compact；
Step S2, utilizes blanking die, and by sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix respectively by preset thickness cut-parts, then stamping-out hole, location and conduction draw hole respectively, afterwards to air duct layer stamping-out air duct；
Step S3; utilize screen printing apparatus; upper surface at zone of heating matrix prints the first insulating barrier successively, adds thermode and the second insulating barrier; lower surface at zone of heating matrix prints the 3rd insulating barrier and heating conductive pin successively; upper surface at sensitive layer matrix prints outer working electrode and porous protective layer successively, working electrode in the lower surface of sensitive layer matrix prints；
Step S4, stacks gradually sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix, utilizes temperature isostatic pressing machine under vacuum with preset pressure lamination pressing, becomes pre-set dimension with stamping-out grinding tool stamping-out afterwards, obtain sensor green compact；
Step S5, sensor green compact covers porous and holds burning pressing plate, sinter with sintering furnace；In described step S1, described casting slurry includes the material of following weight portion: Zirconium powder 6 parts, organic solvent 4 parts, auxiliary agent 1 part, the particle diameter < of described Zirconium powder 1 μm, wherein, described organic solvent includes the material of following weight portion: analytical pure acetic acid fat and/or 7 parts of acetic acid the third fat, analytical pure ethanol and/or isobutanol 3 parts；Described auxiliary agent includes the material of following weight portion: dispersant 1 part, binding agent 7 parts, plasticizer 1 part；In this step, first by Zirconium powder, organic solvent and dispersant by the mixing of above-mentioned weight, utilize planetary ball mill with rotating speed for 250r/min ball milling 15 hours, add binding agent and plasticizer afterwards, with rotating speed for 250r/min ball milling 12 hours, by casting slurry froth in vacuum after ball milling, utilize casting machine to carry out curtain coating, obtain zirconium oxide curtain coating green compact；
In described step S2, first with vacuum packing machine, corrosion resistant plate is added in the upper and lower both sides of each zirconium oxide curtain coating green compact, recycling pellosil carries out vacuum coater, utilize temperature isostatic pressing machine with pressure be 8-15MPa, temperature is pressurize 10 minutes under 70 DEG C of conditions, more respectively sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix carried out cut-parts；
In described step S2, the thickness of described sensitive layer matrix is: 0.5-0.7mm, and the thickness of described air duct layer is 0.3-0.4mm, and the thickness of described air duct supporter is 0.2-0.3mm, and the thickness of described zone of heating matrix is 0.5-0.7mm；
In described step S3; the described thickness adding thermode is 10-15 μm; the thickness of described outer working electrode and interior working electrode is 10-15 μm, and the thickness of described first insulating barrier, the second insulating barrier and the 3rd insulating barrier is 30-35 μm, and porous protective layer is 70-80 μm；
In described step S4, after described sensitive layer matrix, air duct layer, air duct supporter and zone of heating matrix stack gradually, with rustless steel clamping plate with 0.4-0.6Mpa pressure precompressed, recycling pellosil carries out vacuum coater, and temperature isostatic pressing machine parameter is set to pressure 8-15Mpa, temperature 70 C, dwell time is 8-15min, becoming sensor green compact with blanking die stamping-out afterwards, the length of these sensor green compact is 60mm, and width is 5mm；
In described step S5, described porous holds the Woelm Alumina load bearing board burning pressing plate to be thickness be 0.5-0.8mm, and described sintering furnace is Si-Mo rod sintering furnace, sinters 2 hours with temperature for 1450-1550 DEG C.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US4977658A (en) * | 1987-10-31 | 1990-12-18 | Kabushiki Kaisha Toshiba | Sensor and method for the production thereof |
| CN101042366A (en) * | 2007-04-24 | 2007-09-26 | 谢光远 | Manufacturing method of plate type oxygen sensor chip |
| CN101995426A (en) * | 2009-08-14 | 2011-03-30 | 比亚迪股份有限公司 | Chip type oxygen sensor and preparation method thereof |
| CN102140953A (en) * | 2010-12-30 | 2011-08-03 | 西藏瑞阳科技发展有限公司 | Method for manufacturing oxygen sensor chip |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE19911867C2 (en) * | 1999-03-17 | 2002-02-21 | T E M Techn Entwicklungen Und | Sensor system for the detection of gases and vapors in air |
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|---|---|---|---|---|
| US4977658A (en) * | 1987-10-31 | 1990-12-18 | Kabushiki Kaisha Toshiba | Sensor and method for the production thereof |
| CN101042366A (en) * | 2007-04-24 | 2007-09-26 | 谢光远 | Manufacturing method of plate type oxygen sensor chip |
| CN101995426A (en) * | 2009-08-14 | 2011-03-30 | 比亚迪股份有限公司 | Chip type oxygen sensor and preparation method thereof |
| CN102140953A (en) * | 2010-12-30 | 2011-08-03 | 西藏瑞阳科技发展有限公司 | Method for manufacturing oxygen sensor chip |
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