CN103776888B - A kind of oxygen sensor used in vehicle based on insulated by oxide slurry and manufacture method thereof - Google Patents
A kind of oxygen sensor used in vehicle based on insulated by oxide slurry and manufacture method thereof Download PDFInfo
- Publication number
- CN103776888B CN103776888B CN201410017101.XA CN201410017101A CN103776888B CN 103776888 B CN103776888 B CN 103776888B CN 201410017101 A CN201410017101 A CN 201410017101A CN 103776888 B CN103776888 B CN 103776888B
- Authority
- CN
- China
- Prior art keywords
- parts
- thickness
- layer
- air channel
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000002002 slurry Substances 0.000 title claims abstract description 57
- 229910052760 oxygen Inorganic materials 0.000 title claims abstract description 22
- 239000001301 oxygen Substances 0.000 title claims abstract description 22
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000000034 method Methods 0.000 title description 6
- 239000000126 substance Substances 0.000 claims abstract description 43
- 239000012752 auxiliary agent Substances 0.000 claims abstract description 40
- 238000009413 insulation Methods 0.000 claims abstract description 22
- 239000011159 matrix material Substances 0.000 claims abstract description 11
- 239000010410 layer Substances 0.000 claims description 166
- 238000010438 heat treatment Methods 0.000 claims description 58
- 239000000758 substrate Substances 0.000 claims description 56
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 36
- 239000000843 powder Substances 0.000 claims description 32
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 27
- 238000005245 sintering Methods 0.000 claims description 21
- 239000003795 chemical substances by application Substances 0.000 claims description 20
- 239000002270 dispersing agent Substances 0.000 claims description 17
- 239000011230 binding agent Substances 0.000 claims description 15
- 238000007639 printing Methods 0.000 claims description 15
- 239000001856 Ethyl cellulose Substances 0.000 claims description 12
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims description 12
- 229920001249 ethyl cellulose Polymers 0.000 claims description 12
- 235000019325 ethyl cellulose Nutrition 0.000 claims description 12
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 claims description 11
- 238000000498 ball milling Methods 0.000 claims description 11
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 claims description 11
- 229940116411 terpineol Drugs 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 230000001070 adhesive effect Effects 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 9
- 238000010030 laminating Methods 0.000 claims description 9
- 239000011259 mixed solution Substances 0.000 claims description 9
- 239000013008 thixotropic agent Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 8
- 238000000462 isostatic pressing Methods 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 7
- 230000000704 physical effect Effects 0.000 claims description 6
- 238000001771 vacuum deposition Methods 0.000 claims description 6
- 239000012528 membrane Substances 0.000 claims description 5
- 239000011241 protective layer Substances 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000003854 Surface Print Methods 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- GALOTNBSUVEISR-UHFFFAOYSA-N molybdenum;silicon Chemical compound [Mo]#[Si] GALOTNBSUVEISR-UHFFFAOYSA-N 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- 238000009461 vacuum packaging Methods 0.000 claims description 3
- 238000000227 grinding Methods 0.000 claims description 2
- 238000003760 magnetic stirring Methods 0.000 claims description 2
- 108010025899 gelatin film Proteins 0.000 claims 1
- 239000000741 silica gel Substances 0.000 claims 1
- 229910002027 silica gel Inorganic materials 0.000 claims 1
- 238000010345 tape casting Methods 0.000 claims 1
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 abstract description 12
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 239000002904 solvent Substances 0.000 abstract description 5
- 231100000331 toxic Toxicity 0.000 abstract description 5
- 230000002588 toxic effect Effects 0.000 abstract description 5
- 230000004888 barrier function Effects 0.000 abstract 4
- 239000010954 inorganic particle Substances 0.000 abstract 1
- 230000001473 noxious effect Effects 0.000 abstract 1
- 150000002926 oxygen Chemical class 0.000 abstract 1
- 238000005266 casting Methods 0.000 description 21
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 12
- 239000003960 organic solvent Substances 0.000 description 12
- AOGQPLXWSUTHQB-UHFFFAOYSA-N hexyl acetate Chemical compound CCCCCCOC(C)=O AOGQPLXWSUTHQB-UHFFFAOYSA-N 0.000 description 8
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 8
- 230000001681 protective effect Effects 0.000 description 8
- 239000004014 plasticizer Substances 0.000 description 7
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 6
- 229910001928 zirconium oxide Inorganic materials 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 239000008096 xylene Substances 0.000 description 5
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 229940090181 propyl acetate Drugs 0.000 description 4
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 4
- 229920002472 Starch Polymers 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 230000036541 health Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000008107 starch Substances 0.000 description 3
- 235000019698 starch Nutrition 0.000 description 3
- 238000007766 curtain coating Methods 0.000 description 2
- 238000011049 filling Methods 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
- 229910021392 nanocarbon Inorganic materials 0.000 description 2
- 231100000252 nontoxic Toxicity 0.000 description 2
- 230000003000 nontoxic effect Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 206010058467 Lung neoplasm malignant Diseases 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 201000005202 lung cancer Diseases 0.000 description 1
- 208000020816 lung neoplasm Diseases 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 206010039083 rhinitis Diseases 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229920006268 silicone film Polymers 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000007613 slurry method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
Landscapes
- Measuring Oxygen Concentration In Cells (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
The invention discloses a kind of oxygen sensor used in vehicle based on insulated by oxide slurry, wherein, first insulating barrier, the second insulating barrier and the 3rd insulating barrier are made up of insulation paste, insulation paste includes the material of following weight portion: the inorganic particle being made up of oxide 46 parts, organic carrier 24 parts, auxiliary agent 13 parts.Each layer matrix of this oxygen sensor used in vehicle, especially insulating barrier all use oxide to make, the sinter bonded degree that each base layer has had, and this sensor has preferable sensitivity, simultaneously, it is not necessary to the toxic solvent such as butanone, dimethylbenzene, it is to avoid because human body is worked the mischief by noxious substance.
Description
Technical Field
The invention relates to a sensor, in particular to an oxygen sensor for a vehicle based on oxide insulating slurry and a manufacturing method thereof.
Background
In recent years, with the development of the automobile market, automobiles entering every household have been a trend, but automobile exhaust has become one of the main air pollution sources, particularly in the early 2013, in the foggy and cloudy weather of multiple days encountered in Beijing, the PM2.5 exceeds the standard by three times, so that the living quality of people is greatly threatened, the rhinitis is caused in the foggy weather, and the lung cancer is also induced in the environment for a long time. In 2013, 1 month and 1 day, China has started the four emission standards of China comprehensively to control the pollution of automobile exhaust to the atmosphere, and the automobile oxygen sensor is the only sensing element for detecting exhaust gas. The preparation of current piece formula oxygen sensor mainly adopts butanone, and xylene system curtain coating obtains the curtain coating piece and uses the insulating nature of transition layer control sensor, uses the foreign matter to fill and obtains the air passage, has the residue to exist in sintering process, influences the sensitivity of sensor, and simultaneously, the organic solvent that uses mostly in the sensor manufacturing process is toxic solvents such as butanone, xylene, the easy polluted environment to cause harm to human health.
Disclosure of Invention
The technical problem to be solved by the invention is to provide an oxide insulation slurry-based oxygen sensor for a vehicle and a manufacturing method thereof, aiming at the defects of the prior art, each layer of substrate, especially an insulation layer of the oxygen sensor for the vehicle is made of specially selected oxide, each substrate layer has good sintering combination degree, the sensor has good sensitivity, and the product quality is improved.
In order to solve the technical problems, the invention adopts the following technical scheme.
The utility model provides an automobile-used oxygen sensor based on insulating thick liquids of oxide, its is including sensitive layer base member, air channel layer, air passage supporter and the zone of heating base member from top to bottom range upon range of setting, the upper surface of sensitive layer base member has printed outer working electrode and porous protective layer in proper order, and the lower surface printing of this sensitive layer base member has interior working electrode, correspond on the air channel layer interior working electrode has seted up air passage, the upper surface of zone of heating base member has printed first insulating layer, heating electrode and second insulating layer in proper order, the lower surface printing of zone of heating base member has third insulating layer and heating conductive pin in proper order, outer working electrode passes through electrically conductive lead hole electric connection with interior working electrode, heating electrode passes through electrically conductive lead hole electric connection with heating conductive pin, wherein, first insulating layer, second insulating layer and third insulating layer are made by insulating thick liquids, the insulating slurry comprises the following substances in parts by weight: 4-6 parts of inorganic powder consisting of oxides, 2-4 parts of organic carriers and 1-3 parts of auxiliary agents.
Preferably, the insulation paste comprises the following substances in parts by weight: 5 parts of inorganic powder, 3 parts of organic carrier and 2 parts of auxiliary agent, wherein the inorganic powder comprises the following substances in parts by weight: 20 parts of alumina and 1 part of zirconia, wherein the alumina is a mixture of 6 parts of alpha-phase low-temperature sintered alumina and 14 parts of gamma-phase alumina with the grain diameter less than 15 nm; the organic carrier is a mixed solution after water bath treatment, and comprises the following substances in parts by weight: 25 parts of terpineol and 1 part of ethyl cellulose; the auxiliary agent comprises the following substances in parts by weight: 6 parts of dispersing agent, 3 parts of binder, 3 parts of flatting agent and 1 part of thixotropic agent.
Preferably, the thickness of the sensitive layer matrix is as follows: 0.5-0.7mm, the thickness of the air channel layer is 0.3-0.4mm, the thickness of the air channel supporting body is 0.2-0.3mm, and the thickness of the heating layer substrate is 0.5-0.7 mm.
Preferably, the thickness of the heating electrode is 10-15 μm, the thickness of the outer working electrode and the thickness of the inner working electrode are 10-15 μm, the thickness of the first insulating layer, the thickness of the second insulating layer and the thickness of the third insulating layer are 30-35 μm, and the thickness of the porous protective layer is 70-80 μm.
A manufacturing method of an oxygen sensor for a vehicle based on oxide insulating slurry comprises the following steps:step S1, preparing insulation slurry, wherein the insulation slurry comprises the following substances in parts by weight: 4-6 parts of inorganic powder, 2-4 parts of organic carrier and 1-3 parts of auxiliary agent, wherein the inorganic powder, the organic carrier and the auxiliary agent are mixed and are ball-milled by a planetary ball mill to obtain insulating slurry, the physical properties of the insulating slurry are that the viscosity is 100 +/-20 Pa.s at the temperature of 25 ℃, and the adhesive force is 12N/mm2Resistivity of 3.1x1012Omega cm; step S2, cutting the sensitive layer substrate, the air channel layer, the air channel support body and the heating layer substrate into pieces according to preset thicknesses by using a blanking die, blanking positioning holes and conductive leading holes respectively, and then blanking air channels on the air channel layer; step S3, sequentially printing a first insulating layer, a heating electrode and a second insulating layer on the upper surface of the heating layer substrate by using screen printing equipment, sequentially printing a third insulating layer and a heating conductive pin on the lower surface of the heating layer substrate, sequentially printing an outer working electrode and a porous protection layer on the upper surface of the sensitive layer substrate, and printing an inner working electrode on the lower surface of the sensitive layer substrate; step S4, sequentially laminating the sensitive layer substrate, the air channel layer, the air channel support body and the heating layer substrate, laminating at a preset pressure under a vacuum condition by using a temperature isostatic pressing machine, and then blanking into preset sizes by using a blanking grinding tool to obtain a sensor green body; and step S5, covering the porous burning bearing pressing plate on the sensor green body, and sintering by using a sintering furnace.
Preferably, in the step S1, the insulation slurry comprises, by weight, 5 parts of inorganic powder, 3 parts of an organic carrier and 2 parts of an auxiliary agent, wherein the inorganic powder comprises, by weight, 20 parts of alumina and 1 part of zirconia, the alumina is a mixture of 6 parts of α -phase low-temperature sintered alumina and 14 parts of alumina with a gamma-phase particle size of less than 15nm, the organic carrier is a mixed solution after water bath treatment, the organic carrier comprises, by weight, 25 parts of terpineol and 1 part of ethyl cellulose, the auxiliary agent comprises, by weight, 6 parts of a dispersing agent, 3 parts of a binder, 3 parts of a leveling agent and 1 part of a thixotropic agent, and in the step, the mixed solution of the terpineol and the ethyl cellulose is prepared firstly under the conditions that the water bath temperature is 80 ℃ and the water bath temperature is 8 hours or the water bath temperature is 3 hours, and the magnetic stirring is carried out for 3 hours, and then the inorganic powder and the ethyl cellulose are addedA dispersing agent, wherein the dispersing agent is ball milled for 12 hours by utilizing a planetary ball mill at the rotating speed of 250r/min, then a binding agent, a flatting agent and a thixotropic agent are sequentially added, and the ball milling is carried out for 24 hours at the rotating speed of 250r/min to obtain the insulating slurry, the physical property of the insulating slurry is that the viscosity is 100 +/-20 Pa.s at the temperature of 25 ℃, the adhesive force is 12N/mm2Resistivity of 3.1x1012Ω·cm。
Preferably, in step S2, a vacuum packaging machine is used to add stainless steel plates on the upper and lower sides of each cast zirconia green body, then a silicone membrane is used to perform vacuum coating, a warm isostatic press is used to maintain the pressure at 8-15MPa and the temperature at 70 ℃ for 10 minutes, and then the sensitive layer substrate, the air channel layer, the air channel support and the heating layer substrate are cut into pieces.
Preferably, in step S2, the thickness of the sensitive layer substrate is: 0.5-0.7mm, the thickness of the air channel layer is 0.3-0.4mm, the thickness of the air channel supporting body is 0.2-0.3mm, and the thickness of the heating layer substrate is 0.5-0.7 mm.
Preferably, in step S3, the thickness of the heating electrode is 10 to 15 μm, the thickness of the outer working electrode and the thickness of the inner working electrode are both 10 to 15 μm, the thickness of the first insulating layer, the thickness of the second insulating layer and the thickness of the third insulating layer are all 30 to 35 μm, and the thickness of the protective layer is 70 to 80 μm; in the step S4, after the sensitive layer substrate, the air channel layer, the air channel support body and the heating layer substrate are sequentially laminated, a stainless steel clamping plate is used for pre-pressing at a pressure of 0.4-0.6Mpa, then a silicon membrane is used for vacuum coating, the parameters of a temperature isostatic pressing machine are set to be a pressure of 8-15Mpa, a temperature is 70 ℃, the pressure maintaining time is 8-15min, and then a blanking die is used for blanking to form a sensor green body, wherein the length of the sensor green body is 60mm, and the width of the sensor green body is 5 mm.
Preferably, in the step S5, the porous burning plate is a porous alumina burning plate with a thickness of 0.5-0.8mm, and the sintering furnace is a silicon-molybdenum rod sintering furnace, and is sintered at 1450-.
In the oxide insulation slurry-based oxygen sensor for the vehicle, the first insulation layer, the second insulation layer and the third insulation layer are made of insulation slurry, and the insulation slurry comprises the following substances in parts by weight: 4-6 parts of inorganic powder consisting of oxides, 2-4 parts of organic carriers and 1-3 parts of auxiliary agents. Each layer of matrix, especially the insulating layer of the oxygen sensor for the vehicle is made of oxide, each matrix layer has good sintering combination degree, the sensor has good sensitivity, and meanwhile, toxic solvents such as butanone and xylene are not needed, so that harm to human bodies caused by toxic substances is avoided.
Drawings
Fig. 1 is an exploded view of an oxygen sensor for a vehicle.
Detailed Description
The invention is described in more detail below with reference to the figures and examples.
The invention discloses an oxygen sensor for a vehicle based on oxide insulation slurry, which comprises a sensitive layer substrate 3, an air channel layer 5, an air channel support body 6 and a heating layer substrate 9 which are arranged in a stacking manner from top to bottom as shown in figure 1, wherein an outer working electrode 2 and a porous protection layer 1 are sequentially printed on the upper surface of the sensitive layer substrate 3, an inner working electrode 4 is printed on the lower surface of the sensitive layer substrate 3, an air channel is arranged on the air channel layer 5 corresponding to the inner working electrode 4, a first insulation layer 12, a heating electrode 8 and a second insulation layer 7 are sequentially printed on the upper surface of the heating layer substrate 9, a third insulation layer 10 and a heating conductive pin 11 are sequentially printed on the lower surface of the heating layer substrate 9, the outer working electrode 2 is electrically connected with the inner working electrode 4 through a conductive lead hole, the heating electrode 8 is electrically connected with the heating conductive pin 11 through a conductive lead hole, wherein,
the sensitive layer substrate 3, the air channel layer 5, the air channel support body 6 and the heating layer substrate 9 are made of casting slurry, and the casting slurry comprises the following substances in parts by weight: 5-7 parts of zirconium oxide powder, 3-5 parts of organic solvent and 0.5-1.5 parts of auxiliary agent;
the first insulating layer 12, the second insulating layer 7 and the third insulating layer 10 are made of insulating paste, and the insulating paste comprises the following substances in parts by weight: 4-6 parts of inorganic powder consisting of oxides, 2-4 parts of organic carriers and 1-3 parts of auxiliary agents;
the porous protection layer 1 is made of protection slurry, and the protection slurry comprises the following substances in parts by weight: 3-5 parts of oxide, 1-3 parts of pore-forming agent, 1-3 parts of organic carrier and 0.5-1.5 parts of auxiliary agent.
Each layer of matrix of the vehicle oxygen sensor is made of zirconia materials, and each matrix layer has good sintering combination degree in the sintering process, particularly an air channel layer, so that organic matters such as carbon powder, starch and the like do not need to be filled in the air channel, and the influence on the sensitivity of the sensor caused by the existence of residues in the air channel is avoided. By the structure, the filling of foreign matters in the cavity of the air channel when the sensor green body is processed is reduced while the size of the air channel is ensured, the residue of foreign matter burned residues after sintering is avoided, and the service life of the sensor is prolonged. The manufacturing method of the oxygen sensor for the vehicle comprises the following steps:
step S1, preparing casting slurry, wherein the casting slurry comprises the following substances in parts by weight: 5-7 parts of zirconia powder, 3-5 parts of organic solvent and 0.5-1.5 parts of auxiliary agent, utilizing a planetary ball mill to ball mill casting slurry, then carrying out casting by using a casting machine to form a zirconia casting green body, and using the zirconia casting green body to manufacture a sensitive layer substrate 3, an air channel layer 5, an air channel support body 6 and a heating layer substrate 9;
preparing insulating slurry, wherein the insulating slurry comprises the following substances in parts by weight: 4-6 parts of inorganic powder, 2-4 parts of organic carrier and 1-3 parts of auxiliary agent, wherein the inorganic powder, the organic carrier and the auxiliary agent are mixed and are ball-milled by a planetary ball mill to obtain insulating slurry, the physical properties of the insulating slurry are that the viscosity is 100 +/-20 Pa.s at the temperature of 25 ℃, and the adhesive force is 12N/mm2Resistivity of 3.1x1012Ω·cm；
Preparing a protective slurry comprisingThe materials in parts by weight: 3-5 parts of oxide, 1-3 parts of pore-forming agent, 1-3 parts of organic carrier and 0.5-1.5 parts of auxiliary agent, wherein the oxide, the pore-forming agent, 1-3 parts of organic carrier and the auxiliary agent are mixed and are subjected to ball milling by a planetary ball mill to obtain protective slurry, the viscosity of the protective slurry at the temperature of 25 ℃ is 300 +/-50 Pa.s, and the adhesive force is 12N/mm2；
Step S2, cutting the sensitive layer substrate 3, the air channel layer 5, the air channel support body 6 and the heating layer substrate 9 into pieces according to preset thicknesses by using a blanking die, then blanking positioning holes and conductive lead holes respectively, and then blanking an air channel on the air channel layer 5;
step S3, sequentially printing a first insulating layer 12, a heating electrode 8 and a second insulating layer 7 on the upper surface of a heating layer substrate 9, sequentially printing a third insulating layer 10 and a heating conductive pin 11 on the lower surface of the heating layer substrate 9, sequentially printing an outer working electrode 2 and a porous protection layer 1 on the upper surface of a sensitive layer substrate 3, and printing an inner working electrode 4 on the lower surface of the sensitive layer substrate 3 by using screen printing equipment;
step S4, sequentially laminating the sensitive layer substrate 3, the air channel layer 5, the air channel support body 6 and the heating layer substrate 9, laminating and laminating at a preset pressure under a vacuum condition by using a warm isostatic pressing machine, and then blanking into a preset size by using a blanking grinder to obtain a sensor green compact;
and step S5, covering the porous burning bearing pressing plate on the sensor green body, and sintering by using a sintering furnace.
In order to better illustrate the specific technical solution of the present invention, the following examples are proposed in the present invention with respect to the above casting slurry, insulating slurry and protective slurry:
example 1:
in this example, the casting slurry included the following materials in parts by weight: 6 parts of zirconia powder, 4 parts of organic solvent, 1 part of auxiliary agent, wherein the grain diameter of the zirconia powder is less than 1 mu m,
the organic solvent comprises the following substances in parts by weight: 7 parts of analytically pure hexyl acetate and/or propyl acetate and 3 parts of analytically pure ethanol and/or isobutanol, wherein the organic solvent adopts nontoxic hexyl acetate and/or propyl acetate and ethanol and/or isobutanol, and compared with a mode of adopting toxic solvents such as butanone and xylene in the prior art, the method avoids environmental pollution and harm to human health;
the auxiliary agent comprises the following substances in parts by weight: 1 part of dispersant, 7 parts of binder and 1 part of plasticizer.
The casting auxiliary agent is American imported PVB serving as an adhesive, the vitrification temperature of the casting auxiliary agent is 62-72 ℃, the casting auxiliary agent has strong adhesive property, the isostatic pressing laminating pressure and laminating time of a green sheet can be reduced, triethanolamine is used as a dispersing agent, and a reagent with the model number of S2075 provided by the American Jenno company is used as a plasticizer.
Example 2:
in this embodiment, the insulating paste includes the following substances in parts by weight: 5 parts of inorganic powder, 3 parts of organic carrier and 2 parts of auxiliary agent, wherein,
the inorganic powder comprises the following substances in parts by weight: 20 parts of alumina and 1 part of zirconia, wherein the alumina is a mixture of 6 parts of alpha-phase low-temperature sintered alumina and 14 parts of gamma-phase alumina with the grain diameter less than 15 nm;
the organic carrier is a mixed solution after water bath treatment, and comprises the following substances in parts by weight: 25 parts of terpineol and 1 part of ethyl cellulose;
the auxiliary agent comprises the following substances in parts by weight: 6 parts of dispersing agent, 3 parts of binder, 3 parts of flatting agent and 1 part of thixotropic agent.
Example 3:
in this example, the protective slurry comprises the following materials in parts by weight: 4 parts of oxide, 2 parts of pore-forming agent, 2 parts of organic carrier and 1 part of auxiliary agent, wherein,
the oxide comprises one or a mixture of the following substances in parts by weight: 20 parts of aluminum oxide, 1 part of zirconium oxide, 1 part of magnesium oxide and 1 part of silicon oxide;
the pore-forming agent is nano carbon powder with the particle size range of 0.1-1 mu m;
the organic carrier comprises the following substances in parts by weight: 58 parts of terpineol, 25 parts of ethyl cellulose and 2 parts of ethanol;
the auxiliary agent comprises the following substances in parts by weight: 6 parts of binder, 3 parts of dispersant, 3 parts of plasticizer and 1 part of flatting agent.
Regarding the method for manufacturing the oxygen sensor for a vehicle based on the oxide insulating paste, the present invention proposes the following embodiments:
example 4:
in the present example, in step S1, the casting slurry includes the following substances in parts by weight: 6 parts of zirconia powder, 4 parts of organic solvent, 1 part of auxiliary agent, wherein the grain diameter of the zirconia powder is less than 1 mu m,
the organic solvent comprises the following substances in parts by weight: 7 parts of analytically pure hexyl acetate and/or propyl acetate and 3 parts of analytically pure ethanol and/or isobutanol;
the auxiliary agent comprises the following substances in parts by weight: 1 part of dispersant, 7 parts of binder and 1 part of plasticizer;
in the step, firstly, zirconium oxide powder, an organic solvent and a dispersing agent are mixed according to the weight part ratio, a planetary ball mill is used for ball milling for 15 hours at the rotating speed of 250r/min, then a binder and a plasticizer are added, the ball milling is carried out for 12 hours at the rotating speed of 250r/min, casting slurry is subjected to vacuum defoaming after the ball milling, and a casting machine is used for casting to obtain a zirconium oxide casting green body.
Example 5:
in this embodiment, in step S1, the insulating paste includes the following components in parts by weight: 5 parts of inorganic powder, 3 parts of organic carrier and 2 parts of auxiliary agent, wherein,
the inorganic powder comprises the following substances in parts by weight: 20 parts of alumina and 1 part of zirconia, wherein the alumina is a mixture of 6 parts of alpha-phase low-temperature sintered alumina and 14 parts of gamma-phase alumina with the grain diameter less than 15 nm;
the organic carrier is a mixed solution after water bath treatment, and comprises the following substances in parts by weight: 25 parts of terpineol and 1 part of ethyl cellulose;
the auxiliary agent comprises the following substances in parts by weight: 6 parts of dispersing agent, 3 parts of binder, 3 parts of flatting agent and 1 part of thixotropic agent;
in the step, firstly, a mixed solution of terpineol and ethyl cellulose is prepared under the condition that the water bath temperature is 80 ℃, then inorganic powder and a dispersing agent are added, a planetary ball mill is used for ball milling for 12 hours at the rotating speed of 250r/min, then a binding agent, a flatting agent and a thixotropic agent are added, the ball milling is carried out for 24 hours at the rotating speed of 250r/min, and the insulating slurry is obtained, wherein the physical property of the insulating slurry is that the viscosity is 100 +/-20 Pa.s and the adhesive force is 12N/mm at the temperature of 25 ℃, the viscosity is 100 +/-20 Pa.2Resistivity of 3.1x1012Ω·cm。
Example 6
In this embodiment, in step S1, the protective slurry includes the following components in parts by weight: 4 parts of oxide, 2 parts of pore-forming agent, 2 parts of organic carrier and 1 part of auxiliary agent, wherein,
the oxide comprises one or a mixture of the following substances in parts by weight: 20 parts of aluminum oxide, 1 part of zirconium oxide, 1 part of magnesium oxide and 1 part of silicon oxide;
the pore-forming agent is nano carbon powder with the particle size range of 0.1-1 mu m;
the organic carrier comprises the following substances in parts by weight: 58 parts of terpineol, 25 parts of ethyl cellulose and 2 parts of ethanol;
the auxiliary agent comprises the following substances in parts by weight: 6 parts of a binder, 3 parts of a dispersant, 3 parts of a plasticizer and 1 part of a flatting agent;
in the step, oxide, organic carrier and dispersant are mixed, a planetary ball mill is used for ball milling for 12 hours at the rotating speed of 250r/min, then binder, plasticizer and flatting agent are added, the ball milling is carried out for 12 hours at the rotating speed of 250r/min, so as to obtain protective slurry, the viscosity of the protective slurry is 300 +/-50 Pa.s at the temperature of 25 ℃, and the adhesive force is 12N/mm2. In the embodiment, the porous protection layer 1 has the pore diameter of 0.5-10 μm and the porosity of 5-50%, is a single-layer structure, has strong binding force with the electrode, and has the advantages of being capable of effectively preventing harmful substances in gasoline from corroding the surface of the electrode to influence the catalytic action of the electrode, good in shock resistance, long in service life, low in cost and simple in manufacturing process.
Example 7:
in this embodiment, in step S2, a vacuum packaging machine is used to add stainless steel plates on the upper and lower sides of each zirconia cast green body, a silicone film is used to perform vacuum coating, a warm isostatic press is used to maintain the pressure at 8-15MPa and the temperature at 70 ℃ for 10 minutes, and then the sensitive layer substrate 3, the air channel layer 5, the air channel support 6, and the heating layer substrate 9 are cut into pieces, wherein the thickness of the sensitive layer substrate 3 is as follows: 0.5-0.7mm, 0.3-0.4mm of the thickness of the air channel layer 5, 0.2-0.3mm of the thickness of the air channel support body 6, and 0.5-0.7mm of the thickness of the heating layer substrate 9.
Example 8:
in this embodiment, in step S3, the thickness of the heating electrode 8 is 10 to 15 μm, the thickness of the outer working electrode 2 and the thickness of the inner working electrode 4 are both 10 to 15 μm, the thickness of the first insulating layer 12, the thickness of the second insulating layer 7 and the thickness of the third insulating layer 10 are all 30 to 35 μm, and the thickness of the porous protection layer is 70 to 80 μm, wherein the printing electrode ensures complete connection, no open circuit or short circuit, no halation phenomenon in paste printing, and the surface is kept smooth and flat, no crack, and no particle impurity when printing the insulating layer, the protection layer and the electrode layer;
in the step S4, after the sensitive layer substrate 3, the air channel layer 5, the air channel support body 6 and the heating layer substrate 9 are sequentially laminated, a stainless steel clamping plate is used for pre-pressing at the pressure of 0.4-0.6Mpa, then a silicon membrane is used for vacuum coating, the parameters of a temperature isostatic press are set to be the pressure of 8-15Mpa, the temperature is 70 ℃, the pressure maintaining time is 8-15min, and then a blanking die is used for blanking to form a sensor green body, wherein the length of the sensor green body is 60mm, and the width of the sensor green body is 5 mm; in the embodiment, the stainless steel plate and the silicon membrane are used for loading and unloading the base sheet, so that the size integrity of the air channel can be effectively ensured without filling foreign matters such as carbon powder, starch and the like.
In step S5, the porous burning plate is a porous alumina burning plate with a thickness of 0.5-0.8mm, the sintering furnace is a silicon-molybdenum rod sintering furnace, and the porous burning plate is sintered for 2 hours at the temperature of 1450-.
In the oxygen sensor for the vehicle disclosed by the invention, the sensitive layer substrate 3, the air channel layer 5, the air channel support body 6 and the heating layer substrate 9 are made of casting slurry, and the casting slurry comprises the following substances in parts by weight: 5-7 parts of zirconium oxide powder, 3-5 parts of organic solvent and 0.5-1.5 parts of auxiliary agent; the first insulating layer 12, the second insulating layer 7 and the third insulating layer 10 are made of insulating paste, and the insulating paste comprises the following substances in parts by weight: 4-6 parts of inorganic powder, 2-4 parts of organic carrier and 1-3 parts of auxiliary agent; the porous protection layer 1 is made of protection slurry, and the protection slurry comprises the following substances in parts by weight: 3-5 parts of oxide, 1-3 parts of pore-forming agent, 1-3 parts of organic carrier and 0.5-1.5 parts of auxiliary agent. Each layer of matrix of the oxygen sensor for the vehicle is made of zirconia materials, and in the sintering process, each matrix layer has good sintering combination degree, particularly an air channel layer, organic matters such as carbon powder and starch do not need to be filled in the air channel, and the influence on the sensitivity of the sensor caused by the existence of residues in the air channel is avoided. Meanwhile, the organic solvent in the invention adopts nontoxic hexyl acetate and/or propyl acetate and ethanol and/or isobutanol, and compared with the mode of adopting toxic solvents such as butanone and xylene in the prior art, the organic solvent avoids the pollution to the environment and the harm to the human health.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents or improvements made within the technical scope of the present invention should be included in the scope of the present invention.
Claims (2)
1. The utility model provides an automobile-used oxygen sensor based on oxide insulation thick liquids, its characterized in that, including sensitive layer base member, air channel layer, air passage supporter and the zone of heating base member from top to bottom range upon range of setting, the upper surface of sensitive layer base member has printed outer working electrode and porous protective layer in proper order, and the lower surface printing of this sensitive layer base member has interior working electrode, correspond on the air channel layer interior working electrode has seted up air passage, the upper surface of zone of heating base member has printed first insulating layer, heating electrode and second insulating layer in proper order, the lower surface printing of zone of heating base member has third insulating layer and heating conductive pin in proper order, outer working electrode and interior working electrode pass through electrically conductive lead hole electric connection, heating electrode and heating conductive pin pass through electrically conductive lead hole electric connection, wherein,
the first insulating layer, the second insulating layer and the third insulating layer are made of insulating slurry, and the insulating slurry comprises the following substances in parts by weight: 5 parts of inorganic powder, 3 parts of organic carrier and 2 parts of auxiliary agent, wherein,
the inorganic powder comprises the following substances in parts by weight: 20 parts of alumina and 1 part of zirconia, wherein the alumina is a mixture of 6 parts of alpha-phase low-temperature sintered alumina and 14 parts of gamma-phase alumina with the grain diameter less than 15 nm;
the organic carrier is a mixed solution after water bath treatment, and comprises the following substances in parts by weight: 25 parts of terpineol and 1 part of ethyl cellulose;
the auxiliary agent comprises the following substances in parts by weight: 6 parts of dispersing agent, 3 parts of binder, 3 parts of flatting agent and 1 part of thixotropic agent;
the thickness of the sensitive layer matrix is as follows: 0.5-0.7mm, the thickness of the air channel layer is 0.3-0.4mm, the thickness of the air channel support body is 0.2-0.3mm, and the thickness of the heating layer substrate is 0.5-0.7 mm;
the thickness of the heating electrode is 10-15 μm, the thickness of the outer working electrode and the thickness of the inner working electrode are 10-15 μm, the thickness of the first insulating layer, the thickness of the second insulating layer and the thickness of the third insulating layer are 30-35 μm, and the thickness of the protective layer is 70-80 μm.
2. A manufacturing method of an oxygen sensor for a vehicle based on oxide insulating slurry is characterized by comprising the following steps:
step S1, preparing insulation slurry, wherein the insulation slurry comprises the following substances in parts by weight: 5 parts of inorganic powder, 3 parts of organic carrier and 2 parts of auxiliary agent, wherein the inorganic powder, the organic carrier and the auxiliary agent are mixed and are ball-milled by a planetary ball mill to obtain insulating slurry, the physical property of the insulating slurry is that the viscosity is 100 +/-20 Pa.s at the temperature of 25 ℃, and the adhesive force is 12N/mm2Resistivity of 3.1x1012Ω·cm；
Step S2, cutting the sensitive layer substrate, the air channel layer, the air channel support body and the heating layer substrate into pieces according to preset thicknesses by using a blanking die, blanking positioning holes and conductive leading holes respectively, and then blanking air channels on the air channel layer;
step S3, sequentially printing a first insulating layer, a heating electrode and a second insulating layer on the upper surface of the heating layer substrate by using screen printing equipment, sequentially printing a third insulating layer and a heating conductive pin on the lower surface of the heating layer substrate, sequentially printing an outer working electrode and a porous protection layer on the upper surface of the sensitive layer substrate, and printing an inner working electrode on the lower surface of the sensitive layer substrate;
step S4, sequentially laminating the sensitive layer substrate, the air channel layer, the air channel support body and the heating layer substrate, laminating at a preset pressure under a vacuum condition by using a temperature isostatic pressing machine, and then blanking into preset sizes by using a blanking grinding tool to obtain a sensor green body;
step S5, covering a porous burning bearing pressing plate on the sensor green body, and sintering by using a sintering furnace;
in the step S1, the inorganic powder includes the following substances in parts by weight: 20 parts of alumina and 1 part of zirconia, wherein the alumina is a mixture of 6 parts of alpha-phase low-temperature sintered alumina and 14 parts of gamma-phase alumina with the grain diameter less than 15 nm;
the organic carrier is a mixed solution after water bath treatment, and comprises the following substances in parts by weight: 25 parts of terpineol and 1 part of ethyl cellulose;
the auxiliary agent comprises the following substances in parts by weight: 6 parts of dispersing agent, 3 parts of binder, 3 parts of flatting agent and 1 part of thixotropic agent;
in the step, firstly, a mixed solution of terpineol and ethyl cellulose is prepared under the conditions that the water bath temperature is 80 ℃, the time is 8 hours or the magnetic stirring is carried out for 3 hours, then inorganic powder and a dispersing agent are added, a planetary ball mill is used for ball milling for 12 hours at the rotating speed of 250r/min, then a binding agent, a leveling agent and a thixotropic agent are added, the ball milling is carried out for 24 hours at the rotating speed of 250r/min, and the insulating slurry is obtained, wherein the physical property of the insulating slurry is that the viscosity is 100 +/-20 Pa.s and the adhesive force is 12N/mm at the temperature of 25 ℃, the2Resistivity of 3.1x1012Ω·cm；
In the step S2, a vacuum packaging machine is used to add stainless steel plates on the upper and lower sides of each zirconia tape-casting green body, then a silica gel film is used to carry out vacuum coating, a warm isostatic pressing machine is used to maintain the pressure for 10 minutes under the conditions that the pressure is 8-15MPa and the temperature is 70 ℃, and then the sensitive layer matrix, the air channel layer, the air channel support body and the heating layer matrix are cut into pieces respectively;
in step S2, the thickness of the sensitive layer substrate is: 0.5-0.7mm, the thickness of the air channel layer is 0.3-0.4mm, the thickness of the air channel support body is 0.2-0.3mm, and the thickness of the heating layer substrate is 0.5-0.7 mm;
in the step S3, the thickness of the heating electrode is 10 to 15 μm, the thickness of the outer working electrode and the thickness of the inner working electrode are both 10 to 15 μm, the thickness of the first insulating layer, the thickness of the second insulating layer and the thickness of the third insulating layer are all 30 to 35 μm, and the thickness of the porous protection layer is 70 to 80 μm;
in the step S4, after the sensitive layer substrate, the air channel layer, the air channel support body and the heating layer substrate are sequentially laminated, a stainless steel clamping plate is used for pre-pressing at a pressure of 0.4-0.6Mpa, then a silicon membrane is used for vacuum coating, the parameters of a temperature isostatic pressing machine are set to be a pressure of 8-15Mpa, a temperature is 70 ℃, the pressure maintaining time is 8-15min, and then a blanking die is used for blanking to form a sensor green body, wherein the length of the sensor green body is 60mm, and the width of the sensor green body is 5 mm;
in the step S5, the porous burning-bearing pressing plate is a porous alumina burning-bearing plate with the thickness of 0.5-0.8mm, the sintering furnace is a silicon-molybdenum rod sintering furnace, and the sintering is carried out for 2 hours at the temperature of 1450-.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410017101.XA CN103776888B (en) | 2014-01-15 | 2014-01-15 | A kind of oxygen sensor used in vehicle based on insulated by oxide slurry and manufacture method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410017101.XA CN103776888B (en) | 2014-01-15 | 2014-01-15 | A kind of oxygen sensor used in vehicle based on insulated by oxide slurry and manufacture method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103776888A CN103776888A (en) | 2014-05-07 |
| CN103776888B true CN103776888B (en) | 2016-08-17 |
Family
ID=50569384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410017101.XA Active CN103776888B (en) | 2014-01-15 | 2014-01-15 | A kind of oxygen sensor used in vehicle based on insulated by oxide slurry and manufacture method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103776888B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105448383A (en) * | 2015-11-12 | 2016-03-30 | 广东风华高新科技股份有限公司 | Alumina insulation slurry and preparing method thereof, and alumina insulation layer preparing method |
| CN106706743A (en) * | 2016-12-30 | 2017-05-24 | 莱鼎电子材料科技有限公司 | Novel chip type potentiometric automobile oxygen sensor and preparation method thereof |
| CN110196268B (en) * | 2019-06-24 | 2024-06-07 | 深圳市森世泰科技有限公司 | Gas sensor, ceramic chip thereof, insulating slurry and manufacturing method thereof |
| CN114400106B (en) * | 2021-12-27 | 2024-06-07 | 深圳顺络电子股份有限公司 | Insulating layer slurry preparation material, insulating layer preparation method and gas sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61241658A (en) * | 1985-04-19 | 1986-10-27 | Hitachi Ltd | Oxygen sensor element and its production |
| CN101042366A (en) * | 2007-04-24 | 2007-09-26 | 谢光远 | Manufacturing method of plate type oxygen sensor chip |
| CN101995426A (en) * | 2009-08-14 | 2011-03-30 | 比亚迪股份有限公司 | Chip type oxygen sensor and preparation method thereof |
| CN102235994A (en) * | 2010-04-23 | 2011-11-09 | 比亚迪股份有限公司 | Plate oxygen sensor and preparation method thereof |
| CN102786294A (en) * | 2012-07-16 | 2012-11-21 | 中国科学院宁波材料技术与工程研究所 | Insulating layer slurry of chip-type oxygen sensor and insulating layer preparation method |
-
2014
- 2014-01-15 CN CN201410017101.XA patent/CN103776888B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61241658A (en) * | 1985-04-19 | 1986-10-27 | Hitachi Ltd | Oxygen sensor element and its production |
| CN101042366A (en) * | 2007-04-24 | 2007-09-26 | 谢光远 | Manufacturing method of plate type oxygen sensor chip |
| CN101995426A (en) * | 2009-08-14 | 2011-03-30 | 比亚迪股份有限公司 | Chip type oxygen sensor and preparation method thereof |
| CN102235994A (en) * | 2010-04-23 | 2011-11-09 | 比亚迪股份有限公司 | Plate oxygen sensor and preparation method thereof |
| CN102786294A (en) * | 2012-07-16 | 2012-11-21 | 中国科学院宁波材料技术与工程研究所 | Insulating layer slurry of chip-type oxygen sensor and insulating layer preparation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103776888A (en) | 2014-05-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103776872B (en) | A kind of oxygen sensor used in vehicle based on oxide protective paste and manufacture method thereof | |
| CN103776888B (en) | A kind of oxygen sensor used in vehicle based on insulated by oxide slurry and manufacture method thereof | |
| CN102608193B (en) | Flat oxygen sensor and preparation method thereof | |
| CN207488226U (en) | A kind of nitrogen oxide sensor into gas shielded | |
| CN104569108B (en) | A kind of preparation method of chip oxygen sensor | |
| CN104703307A (en) | Ceramic heating slice | |
| CN108760864B (en) | Chip oxygen sensor and preparation method thereof without extra insulation and bending compensation | |
| CN108414602B (en) | Wide-area linear oxygen sensor and manufacturing method thereof | |
| CN102235994A (en) | Plate oxygen sensor and preparation method thereof | |
| CN103175883A (en) | Manufacture method of chip type wide-domain automotive oxygen sensor chip | |
| CN103822952A (en) | Wide-band oxygen sensor chip and manufacturing method thereof | |
| WO2018064888A1 (en) | Chip type oxygen sensor chip | |
| JP5716008B2 (en) | Method for producing partially stabilized zirconia porcelain | |
| JP2013117381A (en) | Multilayer ceramic exhaust gas sensor element, exhaust gas sensor using the same, and method for manufacturing multilayer ceramic exhaust gas sensor element | |
| CN102376378B (en) | Heating electrode paste, heating electrode and planar oxygen sensor comprising heating electrode | |
| CN111693587A (en) | Integrated oxygen sensor chip for measuring oxygen partial pressure and preparation method thereof | |
| CN103776871B (en) | A kind of oxygen sensor used in vehicle based on oxide casting slurry and manufacture method thereof | |
| CN104142363A (en) | Sheet-type structure oxygen sensor and manufacturing method thereof | |
| CN104034781A (en) | Manufacturing method of piece-type wide-domain oxygen sensor chip | |
| CN202522539U (en) | Flat-plate oxygen sensor | |
| JP2004292242A (en) | Manufacturing method of ceramic composite | |
| CN104098341A (en) | Preparation method of porous yttrium-stabilized zirconium oxide for sensor | |
| CN102109485A (en) | Oxygen sensor electrode slurry and oxygen sensor sensing layer and preparation methods thereof | |
| CN102183567B (en) | Manufacture method for limiting current type oxygen sensor | |
| CN115825193A (en) | Limiting current type oxygen sensor and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C53 | Correction of patent for invention or patent application | ||
| CB03 | Change of inventor or designer information |
Inventor after: Jiang Shu Inventor after: Cai Yuanyuan Inventor before: Jiang Shu Inventor before: Huang Haiqin |
|
| COR | Change of bibliographic data |
Free format text: CORRECT: INVENTOR; FROM: JIANG SHU HUANG HAIQIN TO: JIANG SHU CAI YUANYUAN |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20190826 Address after: No. 6 Haiyang South Road, Chengnan Street, Rugao City, Nantong City, Jiangsu Province Patentee after: LAIDING ELECTRONIC MATERIAL TECHNOLOGY CO., LTD. Address before: 518000 8th Floor, Building 11, Jiangbian Community Industrial Center Avenue, Songgang Street, Baoan District, Shenzhen City, Guangdong Province Co-patentee before: Jiang Shu Patentee before: Shenzhen Bridgestone sensing Science and Technology Ltd. |
|
| TR01 | Transfer of patent right |