CN101038390A - Device for transfer of flat display panel - Google Patents
Device for transfer of flat display panel Download PDFInfo
- Publication number
- CN101038390A CN101038390A CNA2007100882149A CN200710088214A CN101038390A CN 101038390 A CN101038390 A CN 101038390A CN A2007100882149 A CNA2007100882149 A CN A2007100882149A CN 200710088214 A CN200710088214 A CN 200710088214A CN 101038390 A CN101038390 A CN 101038390A
- Authority
- CN
- China
- Prior art keywords
- substrate
- process chamber
- display panel
- transfer
- flat display
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims abstract description 84
- 239000000758 substrate Substances 0.000 claims abstract description 56
- 230000008676 import Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000007599 discharging Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000009931 harmful effect Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S8/00—Lighting devices intended for fixed installation
- F21S8/08—Lighting devices intended for fixed installation with a standard
- F21S8/085—Lighting devices intended for fixed installation with a standard of high-built type, e.g. street light
- F21S8/086—Lighting devices intended for fixed installation with a standard of high-built type, e.g. street light with lighting device attached sideways of the standard, e.g. for roads and highways
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S8/00—Lighting devices intended for fixed installation
- F21S8/003—Searchlights, i.e. outdoor lighting device producing powerful beam of parallel rays, e.g. for military or attraction purposes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
- F21V17/10—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening
- F21V17/12—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening by screwing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V21/00—Supporting, suspending, or attaching arrangements for lighting devices; Hand grips
- F21V21/08—Devices for easy attachment to any desired place, e.g. clip, clamp, magnet
- F21V21/088—Clips; Clamps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V21/00—Supporting, suspending, or attaching arrangements for lighting devices; Hand grips
- F21V21/10—Pendants, arms, or standards; Fixing lighting devices to pendants, arms, or standards
- F21V21/116—Fixing lighting devices to arms or standards
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V33/00—Structural combinations of lighting devices with other articles, not otherwise provided for
- F21V33/006—General building constructions or finishing work for buildings, e.g. roofs, gutters, stairs or floors; Garden equipment; Sunshades or parasols
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21W—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO USES OR APPLICATIONS OF LIGHTING DEVICES OR SYSTEMS
- F21W2131/00—Use or application of lighting devices or systems not provided for in codes F21W2102/00-F21W2121/00
- F21W2131/10—Outdoor lighting
- F21W2131/1005—Outdoor lighting of working places, building sites or the like
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Liquid Crystal (AREA)
- Gas-Filled Discharge Tubes (AREA)
Abstract
The invention relates to a substrate conveying device for flat panel display, and which is acceptable for developing procedure of the panel display substrate manufacturing procedure, and which obtains maximal spatial utility ratio and effectively discharges gas in processing chamber by minimizing mounting space of the substrate developing apparatus. Plural brackets which are internal connected are arranged in the processing chamber, and the plural brackets are connected with each other to form a framework, wherein the brackets have plural holes and are combined with discharge equipment for discharging the gas in the processing chamber.
Description
Technical field
The present invention relates to a kind of device for transfer of flat display panel, relate in particular to a kind of developing procedure that can be applicable to planar display substrates manufacturing process, and minimize the flat-panel monitor base board delivery device that obtains the highest space availability ratio and can discharge inner treatment chamber gas effectively by the installing space that makes the substrate developing apparatus.
Background technology
In the manufacturing process of flat display apparatus, on glass substrate, form the process of circuit pattern, generally comprise the substrate matting, form the operation of light-sensitive surface at the substrate surface coating photoresist that has cleaned, by predetermined pattern the develop operation of (developing) of described light-sensitive surface of exposing.
In the manufacturing process of above-mentioned display device, the general developer liquid supply device of developing procedure utilization is to the coating of substrates developer solution.That is, this operation can perhaps be finished to the mode of substrate spray developing liquid by jetting system by making substrate via the chamber that is loaded with developer solution.Above-mentioned developing procedure needs through just finishing the development of substrate after a while, afterwards by conveying devices such as running rollers to the cleaning device conveying substrate.
This developing apparatus in the past in order to finish development, need wait for a period of time, so the time that developing procedure consumed is longer.In addition, developing apparatus in the past possesses exhaust apparatus, and the gas that developer solution produced in by process chamber in the developing process of substrate, because it accumulates in particular space, the process chamber that may cause the bad of substrate and damage to be made by materials such as PVC.
Summary of the invention
The present invention does in view of the above problems, and its purpose is to provide a kind of device for transfer of flat display panel.This device can reduce the processing time of substrate developing procedure, and can minimize by the installing space that makes developing apparatus and reduce the substrate manufacturing expense.The present invention also in developing process, can keep at the gaseous environment that makes inner treatment chamber and discharge gas under the uniform state rapidly, thereby the protection process chamber reduces bad substrate, and then improve output.
In order to achieve the above object, the invention provides a kind of flat-panel monitor base board delivery device, it comprises: a plurality of process chambers, it is provided for the space of treatment substrate, and with upper and lower to being disposed; A plurality of conveying devices, it is arranged at above-mentioned a plurality of inner treatment chamber, is used for conveying substrate; And drive unit, it moves described process chamber along the vertical direction.Be provided with a plurality of hollow stents that the inner space communicates in the described process chamber, described a plurality of supports interconnect and form a skeleton.Described support is provided with a plurality of holes, and is combined with the exhaust apparatus that is used to discharge inner treatment chamber space gas.
Described process chamber is preferably used in developing procedure.
Described Kongzui is good to be arranged on the described support with predetermined distance.
The present invention can be by a plurality of chambers that move up and down, shorten substrate developing procedure required time, enhance productivity, can also in process chamber, keep under the uniform state its discharge by each several part gas simultaneously, therefore can prevent that the process chamber of being made by the PVC material is out of shape, reduce the generation of bad substrate, thereby improve output.
Description of drawings
Fig. 1 is the structural representation of embodiment of the invention device.
Fig. 2 is the structural representation that is used to illustrate the effect of embodiment of the invention device.
Fig. 3 is a process chamber configurations synoptic diagram among Fig. 1, and it is used to specify the embodiment of the invention.
Fig. 4 is used to illustrate the structure of embodiment of the invention device and the structural representation of effect.
Embodiment
Below, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 is the one-piece construction figure that is used to illustrate the embodiment of the invention, its demonstration be the flat-panel monitor base board delivery device.The flat-panel monitor base board delivery device can comprise: supply unit 1, and it is used for supplying substrate G; First process chamber 3 and second process chamber 5, it is used to receive the substrate G from supply unit 1, and carries out developing procedure; Efferent 7, it is used to export the substrate G in first process chamber 3, second process chamber 5.
In the embodiment of the invention, between supply unit 1 and process chamber, can set up another process chamber of the developer solution jetting system with the substrate that is used to develop.Promptly, though the embodiment of the invention serves as main being illustrated with the structure of the process chamber of temporary transient keeping substrate G in developing process, but the present invention is not limited to this, can adopt developing apparatus all to be set in described first process chamber 3, second process chamber 5, also can adopt and to carry out pretreated development is input to above-mentioned inner treatment chamber with substrate G structure to implement the structure of developing procedure.
Described first process chamber 3, second process chamber 5 to being disposed, and have the first input port 3a, the second input port 5a and the first delivery outlet 3b, the second delivery outlet 5b that is used to import and export substrate with upper and lower.These input ports and delivery outlet are preferably opposed mutually.
Described inner treatment chamber is respectively equipped with the conveying device 9 that is used for conveying substrate G.Conveying device 9 not only can adopt the general structure of continuous configuration conveying roller, and so long as moving substrate G and all can adopt to the structure of process chamber supplying substrate G continuously.
The structure of conveying substrate in described supply unit 1 and the efferent 7 can adopt and the foregoing identical structure of conveying device that is arranged on inner treatment chamber.But supply unit 1 and efferent 7 also can adopt the structure of coming conveying substrate G as other devices such as mechanical arms.
Described first process chamber 3, second process chamber 5 dispose up and down, and can pass through jacking gear 11 liftings.Promptly first process chamber 3, second process chamber 5 are slidably connected on the base 13 that is provided with separately, and can pass through jacking gear 11 liftings.Jacking gear 11 can comprise motor M and the power transmission member that is made of driven wheel 15, follower gear 17, screw rod 19 etc., and described jacking gear 11 and carriage 21 bolts that are used to support process chamber, and it is used for the lifting process chamber.Jacking gear of the present invention is not limited to above-mentioned explanation, so long as structure that can the lifting process chamber all can adopt.
The inside of process chamber is provided with a plurality of supports 31, and it is configured to clathrate, forms a skeleton.Therefore among the present invention, the structure of first process chamber 3 and second process chamber 5 is identical, for the purpose of the convenience, only illustrates the structure of first process chamber 3 among the present invention.The a plurality of supports 31 that are arranged on first process chamber, 3 inside interconnect and form a pipeline.That is, support 31 can be made of hollow quadrangular tube or the hollow circular tube that inside communicates.That is, the inside of a plurality of supports 31 forms the pipe-like space and interconnects, and preferably can keep the shape of process chamber 3.On described support 31, be provided with a plurality of hole 31a (as shown in Figure 4) with a determining deviation or with suitable spacing.And a side of support 31 links to each other with exhaust apparatus 33, therefore can discharge process chamber 3 gas inside.Exhaust apparatus 33 can adopt the exhaust apparatus that in the past was used to discharge process chamber 3 internal gas.In addition, the marginal portion of support 31 is combined with the casing that constitutes process chamber 3, and this casing can be made by the PVC material of chemical resistance excellence.
Below, describe the course of work of the related device for transfer of flat display panel of the embodiment of the invention in detail with reference to Fig. 1, Fig. 2 and Fig. 4.
Fig. 1 shows that the substrate G that will handle through developer solution supplies to first process chamber 3 that is configured in upside, and Fig. 2 shows that the substrate G that will handle through developer solution supplies to second process chamber 5 that is configured in downside.At first, after the substrate G that is coated with developer solution is transported to first process chamber 3 that is configured in upside by supply unit 1, through developing process after a while.That is, after the conveying device of substrate G by supply unit 1 moves to the first input port 3a of first process chamber 3 that is configured in upside, be temporarily stored in first process chamber 3.By the action of jacking gear 11, promote first process chamber 3 and second process chamber 5 afterwards.Second process chamber 5 that is positioned at downside like this will move on the receiving position of the substrate G that supply unit 1 supplied with.Then, another substrate G is transported to second process chamber 5 that is arranged in downside by supply unit 1.Certainly, this substrate G also can be by being coated with the state input (as shown in Figure 2) of developer solution.In this state, the substrate G in described first process chamber 3 is carrying the process of another substrate G to second process chamber 5 that is positioned at downside and by jacking gear 11, is finishing development treatment in the process that described first process chamber 3 descends, and by efferent 7 outputs.Its course of conveying is as follows: by the conveying device 9 conveying substrate G that are located at described first process chamber 3, and by the conveying device 9 of efferent 7 substrate G is delivered to cleaning device (not shown) etc., to carry out subsequent handling.In the said process,, be necessary evenly and promptly to discharge this gas this moment because chemical substances such as developer solution form gaseous environment in process chamber.At this moment, if drive exhaust apparatus 33, support 31 inner spaces then produce negative pressure, and the gas in the process chamber 3 then can obtain evenly by a plurality of hole 31a on the support 31 and discharge rapidly.Can in chemical gas, protect the casing of the process chamber of making by materials such as PVC 3 thus; and owing to the gas of discharging equably by the hole 31a on the support 31 in the process chamber 3; gas also just becomes evenly to the effect of substrate G, thereby can reduce the harmful effect to substrate.That is, the gas in the process chamber can not accumulate in particular space, and is discharged from homodisperse dress attitude, therefore can prevent the harmful effect to substrate, thereby improves output.
Then, described first process chamber 3 is introduced by supply unit 1 once more by as above method needs another substrate G of developing.The present invention carries out said process so repeatedly and finishes the development of substrate.The present invention can fully ensure in the development required time in the substrate developing process, can also realize minimizing of developing apparatus installing space, and can be evenly and promptly discharge gas in the process chamber, therefore can prevent that the specific part of substrate and chemical gas from concentrating reacts, thereby prevents the generation of bad substrate and improve output.
Claims (3)
1, a kind of device for transfer of flat display panel is characterized in that, comprising:
A plurality of process chambers, it is provided for the space of treatment substrate, and with upper and lower to being disposed;
A plurality of conveying devices, it is configured in the inside of described a plurality of process chambers, and is used for conveying substrate; And
Drive unit, it moves described process chamber along the vertical direction;
Wherein, be provided with a plurality of hollow stents that inside communicates in the described process chamber, described a plurality of supports interconnect and form a skeleton;
Described support is provided with a plurality of holes;
On described support, be combined with the exhaust apparatus that is used to discharge inner treatment chamber gas.
2, device for transfer of flat display panel according to claim 1 is characterized in that:
The both sides of described process chamber are provided with mutually opposed and are used to import and export the input port and the delivery outlet of substrate.
3, device for transfer of flat display panel according to claim 1 is characterized in that:
Described a plurality of hole is laid on the support with predetermined distance.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020060024053 | 2006-03-15 | ||
| KR1020060024053A KR100717866B1 (en) | 2006-03-15 | 2006-03-15 | Device for transfer of flat display panel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101038390A true CN101038390A (en) | 2007-09-19 |
| CN100481370C CN100481370C (en) | 2009-04-22 |
Family
ID=38270650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007100882149A Expired - Fee Related CN100481370C (en) | 2006-03-15 | 2007-03-15 | Device for transfer of flat display panel |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR100717866B1 (en) |
| CN (1) | CN100481370C (en) |
| TW (1) | TW200802676A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102963694A (en) * | 2012-12-10 | 2013-03-13 | 深圳市立创达自动化设备有限公司 | Double-track NG (narrow gauge) buffer connection transfer table |
| CN103787067A (en) * | 2014-01-23 | 2014-05-14 | 北京京东方显示技术有限公司 | Substrate conveying device |
| CN106629053A (en) * | 2016-09-20 | 2017-05-10 | 信义玻璃(天津)有限公司 | Multi-layer frame and method for adjusting glass transferring sequence |
| CN107357139A (en) * | 2017-08-01 | 2017-11-17 | 深圳市华星光电技术有限公司 | The gas extraction system and its governor motion of developing apparatus |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103605220B (en) * | 2013-11-19 | 2016-01-20 | 友达光电股份有限公司 | The assemble method of display device, display module and the method for making of air bag |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010044058A (en) * | 2000-06-29 | 2001-06-05 | 박용석 | Ashing apparatus for processing glass substrate or waper |
| KR100568838B1 (en) * | 2004-08-03 | 2006-04-10 | 주식회사 디엠에스 | Gas nozzle and exhauster and apparatus for plasma ashing using the same |
-
2006
- 2006-03-15 KR KR1020060024053A patent/KR100717866B1/en active IP Right Grant
-
2007
- 2007-03-12 TW TW096108393A patent/TW200802676A/en unknown
- 2007-03-15 CN CNB2007100882149A patent/CN100481370C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102963694A (en) * | 2012-12-10 | 2013-03-13 | 深圳市立创达自动化设备有限公司 | Double-track NG (narrow gauge) buffer connection transfer table |
| CN103787067A (en) * | 2014-01-23 | 2014-05-14 | 北京京东方显示技术有限公司 | Substrate conveying device |
| CN106629053A (en) * | 2016-09-20 | 2017-05-10 | 信义玻璃(天津)有限公司 | Multi-layer frame and method for adjusting glass transferring sequence |
| CN106629053B (en) * | 2016-09-20 | 2019-09-27 | 信义玻璃(天津)有限公司 | A kind of method of thousand layer frames and adjustment glass transmission order |
| CN107357139A (en) * | 2017-08-01 | 2017-11-17 | 深圳市华星光电技术有限公司 | The gas extraction system and its governor motion of developing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100717866B1 (en) | 2007-05-14 |
| TW200802676A (en) | 2008-01-01 |
| CN100481370C (en) | 2009-04-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Assignor: DMS Co.,Ltd. Contract record no.: 2012990000113 Denomination of invention: Device for transfer of flat display panel Granted publication date: 20090422 License type: Exclusive License Open date: 20070919 Record date: 20120316 |
|
| ASS | Succession or assignment of patent right |
Owner name: WEIHAI DIANMEISHI OPTO-MECHATRONICS CO., LTD. Effective date: 20140225 |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20140225 Address after: Gyeonggi Do, South Korea Patentee after: DMS Co.,Ltd. Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL CO.,LTD. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 264205 No. 88-1, Bekaert Road, Weihai Economic and Technological Development Zone, Weihai City, Shandong Province Patentee after: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. Patentee after: DMS Co.,Ltd. Address before: Gyeonggi Do, South Korea Patentee before: DMS Co.,Ltd. Patentee before: WEIHAI DMS OPTICAL ELECTROMECHANICAL Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090422 |