CN101024331A - Droplet ejection apparatus, method for recovering droplet ejection head, method for forming thin film, and liquid crystal display - Google Patents
Droplet ejection apparatus, method for recovering droplet ejection head, method for forming thin film, and liquid crystal display Download PDFInfo
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- CN101024331A CN101024331A CN200710005179.XA CN200710005179A CN101024331A CN 101024331 A CN101024331 A CN 101024331A CN 200710005179 A CN200710005179 A CN 200710005179A CN 101024331 A CN101024331 A CN 101024331A
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Abstract
The invention relates to a liquid droplet spurt out arrangement which has a liquid droplet showerhead, hat box, liquid supply device, mobile device. The liquid droplet showerhead mentioned above can blowout liquid which has functional material as liquid droplet from nozzle. The hat box mentioned above is at least provided with a part of liquid droplet accommodate part which has nozzle setting on the plane of air spout. The liquid supplier mentioned above supply liquid to the accommodate part. The mobile device mentioned above, at least moving the hat box or the liquid droplet showerhead which mentioned above relative to the other, the mobile device setting the hat box mentioned above relative to the liquid droplet showerhead, make the formingface of air spout impregnate in the liquid which deposited at the accommodate which mentioned above while the liquid droplet spurt out showerhead is doing recovered action or the liquid droplet showerhead is paused.
Description
Technical field
The present invention relates to possess droplet ejection apparatus, the droplet discharging head of droplet discharging head restoration methods, used the formation method and the liquid crystal indicator of the film of droplet ejection apparatus.
Background technology
As the droplet ejection apparatus that possesses droplet discharging head, be well known that and be sprayed on inkjet recording device on record-paper etc. as the China ink of aqueous body from inkjet head.
In above-mentioned tape deck, owing in the nozzle of inkjet head, make China ink dry,, cause printing not good so can produce that the eyelet of nozzle stops up and the flight bending of China ink when spraying.Therefore, in order to realize stable drawing quality, by being that nozzle that seal member connects airtight inkjet head forms under the state of face and attracts nozzle making cap, thus the China ink of removing dry.In addition, make nozzle form face and friction means butt, remove attached to China ink on the nozzle formation face and impurity etc.These actions are called recovery action, the regeneration action of inkjet head or clean action.
The cap that the spy opens institute's publicity in the 2003-127400 communique has the storage portion that bottom storage at the cap case is used to produce the liquid of steam.When tape deck suspends, make the cap case connect airtight nozzle and form face, thus, can prevent the China ink in the nozzle and the drying of peripheral part thereof.
The spy opens in the device of publicity in the 2003-001839 communique, to surround mode that nozzle forms face the rigidity crown firmly is configured in elastic sealing element on the inkjet head, carries out the recovery action of inkjet head under this state.By making the rigidity crown live elastic sealing element, the sealing when improving sealing nozzle formation face.
Open in the 2003-127400 communique the spy, cap is to make with the synthetic rubber of semi-rigid.Open in the 2003-001839 communique the spy, make with rubber etc. with the elastic sealing element of rigidity cap butt.The cap of rubber system and elastic sealing element are because adhering to of printing ink and may deterioration.The deterioration of cap and elastic sealing element can cause the reduction of sealing property.In addition, may make deterioration cap and elastic sealing element part degrade, and attached on the nozzle formation face.
In recent years, noticeable drop ejection method is, substitutes China ink, and the liquid material that will have functional material is sprayed on the workpiece from droplet discharging head, forms the film that is made of functional material etc. on the surface of workpiece.Liquid material contains the special solvent that is fit to functional material.When the pressure cap device of above-mentioned communique institute publicity is used to spray the droplet discharging head of the liquid material that contains functional material, because the characteristic of solvent, thereby the deterioration of the cap of rubber system and elastic sealing element is more obvious.
In addition, under the state that has sealed nozzle formation face with cap, nozzle formation face is exposed in the air that is present in the hermetically sealed space, therefore, has advanced the drying of the liquid material in the nozzle.Therefore, form face at nozzle and after the long sealing, often caused the eyelet obstruction of nozzle and the flight bending of liquid material by cap.
Summary of the invention
The objective of the invention is to, suppress the eyelet obstruction of nozzle and the flight bending of liquid material rightly.
To achieve these goals, first aspect present invention provides a kind of droplet ejection apparatus, this droplet ejection apparatus possesses: droplet discharging head, this droplet discharging head has nozzle and forms face, be formed with nozzle on this nozzle formation face, described droplet discharging head can spray as drop the liquid material that contains functional material from described nozzle; Cap case, this cap case have the accommodation section of the part that can hold the described droplet discharging head that contains nozzle formation face at least; Fluid Supplying apparatus, this fluid Supplying apparatus is to the described accommodation section feed fluid; Mobile device, this mobile device makes that at least one moves with respect to another person in described cap case and the described droplet discharging head, when the recovery of described droplet discharging head action or described droplet discharging head when suspending, this mobile device disposes described cap case so that store the mode that the described nozzle of described liquid infiltration in the described accommodation section forms face with respect to described droplet discharging head.
Second aspect present invention is on the basis of first aspect, the liquid material that is used for droplet ejection apparatus is to contain the liquid material that is orientated film formation material, under this situation, described droplet ejection apparatus is sprayed onto on the workpiece as drop as the liquid material that will contain described orientation film formation material, thereby the orientation membrane formation device that forms alignment films on workpiece is used.
A third aspect of the present invention provides a kind of liquid crystal indicator on the basis of second aspect, this liquid crystal indicator has the alignment films that forms by above-mentioned droplet ejection apparatus.
Fourth aspect present invention provides a kind of restoration methods of droplet discharging head, described droplet discharging head can spray as drop the liquid material that contains functional material from nozzle, the restoration methods of this droplet discharging head comprises: in the accommodation section of cap case, store with described liquid material in the contained identical liquid of at least a solvent; Be contained in the described accommodation section containing the part that nozzle forms the described droplet discharging head of face at least, described nozzle formation face is immersed in the liquid in the accommodation section.
Fifth aspect present invention provides a kind of film formation method, use can will contain the liquid material of functional material as the droplet discharging head of drop from the nozzle ejection, come to form the film that is made of functional material on workpiece, this film formation method comprises: in the accommodation section of cap case, store with described liquid in the identical liquid of at least a solvent that contains; To comprise that at least the part that described nozzle forms the described droplet discharging head of face is contained in the described accommodation section, described nozzle formation face is immersed in the liquid in the accommodation section; Behind described dipping, described nozzle formation face is assisted in substantially sealing with described cap case; Under the state that seals described nozzle formation face with described cap case, attract the described liquid material of the inside of described droplet discharging head from described nozzle; After described attraction, described liquid material is sprayed to workpiece from nozzle as drop; Make the droplet drying on the workpiece, on this workpiece, form the film that constitutes by functional material.
Description of drawings
Fig. 1 is the approximate three-dimensional map of the droplet ejection apparatus of expression the present invention the 1st embodiment.
Fig. 2 A is the approximate three-dimensional map of structure of droplet discharging head of the droplet ejection apparatus of presentation graphs 1.
Fig. 2 B is the approximate three-dimensional map of configuration of the droplet discharging head of presentation graphs 2A.
Fig. 3 A is the approximate three-dimensional map of expression cap case.
Fig. 3 B is an expression cap case and the skeleton diagram of parts relevant with this cap case.
Fig. 4 A is the front elevation of the liquid crystal indicator of expression the present invention the 2nd embodiment.
Fig. 4 B is the profile of expression along the 4B-4B of Fig. 4 A.
Fig. 5 A～Fig. 5 D is the skeleton diagram of expression alignment films formation method.
Fig. 6 is the flow chart of the restoration methods of expression droplet discharging head.
Fig. 7 A～Fig. 7 D is the summary section of the restoration methods of expression droplet discharging head.
Fig. 8 is the summary section of the cap case of expression variation.
The specific embodiment
At first, illustrate and used the 1st embodiment of the present invention with reference to Fig. 1～Fig. 3 B.
As shown in Figure 1, in the droplet ejection apparatus 10 of present embodiment, will contain functional liquid material and be sprayed on the workpiece W, on workpiece W, form the film that constitutes by functional material as drop.Droplet ejection apparatus 10 possesses: the mounting table 4 of mounting workpiece W, have the nozzle component 1 of droplet discharging head 20 (with reference to Fig. 2 A).
The nozzle component 1 of the above-mentioned droplet discharging head 20 shown in Fig. 2 A is coated on the workpiece W from nozzle 28 ejection liquid materials.Droplet discharging head 20 is according to the ejection voltage ejection liquid material of supplying with from control part 8.
Directions X drive motors 3 for example is a stepper motor, but is not limited to this.If to directions X drive motors 3 supply drive pulse signals, so, directions X drive motors 3 will make the directions X axis of guide 2 rotate from control part 8, the nozzle component that is fastened on the directions X axis of guide 21 is moved along directions X.
Y direction drive motor 6,11 is the same with directions X drive motors 3, also is stepper motor for example, but is not limited thereto.When from 8 pairs of Y direction drive motors of control part, 6,11 supply drive pulse signals, the drive motors 6,11 that is fastened on the Y direction axis of guide 5 moves mounting table 4 and servicepiston 9a respectively along the Y direction.
Maintenance mechanism 9 (servicepiston 9a) when handling (recovering to handle) in the maintenance of carrying out droplet discharging head 20, moves to the position relative with nozzle component 1.Maintenance mechanism 9 possesses the cap case 41 that the nozzle that assists in substantially sealing droplet discharging head 20 forms face 26a (with reference to Fig. 2 A) and attracts unwanted liquid material from droplet discharging head.The nozzle that servicepiston 9a possesses wiping has liquid material to adhere to forms the rubbing device (not shown) of face 26a.Cap case 41 carries out the preparation ejection of the ejection of liquid material, when promptly washing, receives the liquid material or unwanted liquid material and the discharge that are ejected at the whole nozzles from droplet discharging head 20.The action of each device that maintenance mechanism 9 possesses is controlled by control part 8.
When droplet ejection apparatus 10 applied liquid material on workpiece W, control part 8 sent the drive pulse signal of regulation to directions X drive motors 3 and Y direction drive motor 6, and nozzle component 1 is moved at sub scanning direction, and mounting table 4 is moved at main scanning direction.In order to make control part 8 and should mobilely to supply with the ejection voltages to droplet discharging head 20 synchronously, spray liquid material to the regulation zone of workpiece W as drop from this droplet discharging head 20.
Can regulate by the ejection voltage that sends from control part 8 from the amount of the drop of droplet discharging head 20 ejection.
Shown in Fig. 2 A, droplet discharging head 20 has: have two liquid material introduction parts 21 that connect pins 22, be layered in printhead substrate 23 on the introduction part 21, be configured in the nozzle body 24 on the printhead substrate 23.Nozzle body 24 inside have liquid material stream (stream in the shower nozzle), connect pin 22 and are connected store jar (omitting diagram) that stores liquid material via pipe arrangement (omitting diagram), and liquid material is supplied with stream in the shower nozzle.On printhead substrate 23, be provided with two connectors 27 that are connected with the shower nozzle drive division of control part 8 via flexible board cable (omitting diagram).
Nozzle body 24 possesses: inside have a plurality of piezoelectric elements and a plurality of inner chambers pressurization part 25, have the nozzle plate 26 that nozzle forms face 26a.On nozzle formation face 26a, be formed with two nozzle row 29 that are parallel to each other.
Each nozzle row 29 has a plurality of for example 180 nozzles 28, and these a plurality of nozzles 28 are shown uniformly-spaced configuration side by side greatly.Two nozzle row 29 are with half the amount at the interval of 28 of the adjacent nozzles of each nozzle row 29, stagger mutually at the extending direction of nozzle 29, and for example, the interval that the adjacent nozzle of each nozzle row 29 is 28 approximately is 140 μ m.Therefore, from direction two nozzle row 29 vertical, see 360 nozzles 28 being spaced with about 70 μ m with nozzle row 29.When actual liquid material sprays, do not use 10 nozzles 28 of the both end sides of each nozzle row 29.This is because compare difficult stable with other nozzles 28 from the spray volume of the nozzle 28 that is positioned at both end sides.
If by the shower nozzle drive division of control part 8 piezoelectric element is applied drive waveforms as the signal of telecommunication, then can make the volume change of corresponding inner chamber.Because the pumping action that this variation causes, the liquid material that is filled to inner chamber is pressurized, thereby this liquid material sprays from nozzle 28 as drop.Though the droplet discharging head of present embodiment has two nozzle row 29, and is not limited thereto, for example also can there be nozzle row 29 to get final product.As long as the type of drive of droplet discharging head 20 can for example can be by with heater liquid material being heated the foaming mode of the bubble liquid towards material pressurization that produces, the type of drive that use has the electrostatic actuators of dynamo-electric conversion element with the type of drive of liquid material as the drop ejection.
Shown in Fig. 2 B, droplet discharging head 20 is by balladeur train plate 30 supportings as the shower nozzle support of being made by stainless steel etc.Nozzle body 24 is outstanding downwards from the surperficial 30a of balladeur train plate 30.Balladeur train plate 30 is installed on the nozzle component 1 by four pillars 31 that are arranged on four angles, makes nozzle form the state that face 26a becomes approximate horizontal.Balladeur train plate 30 is installed on the nozzle component 1, and the nozzle row 29 of droplet discharging head 20 are extended along the direction vertical with main scanning direction (Y direction).
Fig. 3 A and Fig. 3 B are the skeleton diagrams that the cap member 40 on the servicepiston 9a is located in expression.Fig. 3 A represents the cap case 41 of this cap member 40, and Fig. 3 B represents the each several part relevant with cap case 41.
As shown in Figure 3A, cap case 41 is casings of for example being made by hard materials such as stainless steels, the face opening of a side, the accommodation section 41a with the part that can hold the droplet discharging head 20 that contains nozzle formation face 26a at least.Opening edge portion at cap case 41 disposes the seal member of being made by elastomeric element 42.On the bottom surface of accommodation section 41a, be provided with two holes 43,44.
Shown in Fig. 3 B, cap member 40 possesses: cap case 41, as the pump 47 of fluid Supplying apparatus, as the pump 48 of suction device, make cap case 41 near and leave drive unit, for example hydraulic type hydraulic cylinder (omitting diagram) of the surperficial 30a of balladeur train plate 30.
Pump 47 for example is a bellows pump, is stored in to store the accommodation section 41a that jar 49 interior liquid 50 can be transported to cap case 41 via pipe arrangement, valve 45 and hole 43.Liquid 50 is same substance with at least a solvent that contains from the liquid material of shower nozzle 20 ejections.
Two pumps 47,48 and store jars 49 and be connected on the cap case 41 through pipe arrangements that are fit to each function are provided in the periphery of droplet ejection apparatus 10.The switching of the driving of two pumps 47,48 and two valves 45,46 is controlled by control part 8.
And then control part 8 carries out the attraction action as one of recovery processing that is used for droplet discharging head 20.Particularly, after forming face 26a by liquid 50 dipping nozzles, cap case 41 is retreated a little from the position of Fig. 3 B leave balladeur train plate 30, open valve 46, driving pump 48 is from cap case 41 discharge liquid 50.Afterwards, shut off valve 46 again, make cap case 41 and balladeur train plate 30 butts, and the sealing nozzle forms face 26a.Then, open valve 46, driving pump 48 makes the inside of accommodation section 41a become negative pressure.Thus, containing the liquid material of the liquid 50 that is deposited in droplet discharging head 20 inside and impurity, bubble etc. is attracted by nozzle 28.After attracting the liquid material of official hour or ormal weight, stop pump 48, and valve 46 is opened to the atmosphere opening side, make cap case 41 leave balladeur train plate 30.By carrying out above-mentioned attraction action, can make the crescent normalization in the nozzle 28 of droplet discharging head 20.The back will explain the restoration methods of droplet discharging head 20.
The advantage of above-mentioned the 1st embodiment is as follows.
(1) droplet ejection apparatus 10 of above-mentioned the 1st embodiment possesses cap member 40, and this cap member 40 has the cap case 41 of the liquid 50 of at least a solvent composition that the storing liquid material possessed.When the recovery of droplet discharging head 20 is handled and during maintenance, the nozzle of droplet discharging head 20 forms face 26a by 50 dippings of the liquid in the cap case 41.Therefore, prevent that nozzle from forming face 26a ingress of air, in the inside of nozzle 28 and nozzle form the impurity that the dried liquid material of face 26a constituted and can be dissolved by liquid 50 or disperse.Thus, the eyelet that can reduce nozzle 28 stops up and reduces flight bending when forming the liquid material ejection that the impurity on the face 26a causes attached to nozzle.
(2) control part 8 makes the seal member 42 of cap case 41 and the surperficial 30a butt of balladeur train plate 30, assists in substantially sealing nozzle and forms face 26a.Then, driving pump 48 makes the accommodation section 41a under the air-tight state become negative pressure, carries out attracting from nozzle 28 the attraction action of the liquid material of droplet discharging heads 20 inside and impurity, bubble etc.Thus, can make the crescent normalization of the liquid material in the nozzle 28.And then because cap case 41 does not have direct butt nozzle to form face 26a, so can prevent that being transferred to nozzle attached to the impurity on the cap case 41 forms on the face 26a.That is, can make nozzle form face 26a and keep clean state.
(3) seal member 42 of cap case 41 is to make with the elastomeric material of solvent resistance.Therefore, also be difficult to deterioration even seal member 42 has adhered to liquid 50, thus can guarantee cap case 41 sealing fluid droplet ejection heads 20 time bubble-tight through the time length.
With reference to Fig. 4 A and Fig. 4 B the 2nd embodiment of the present invention is described.In the present embodiment, being that example describes in alignment films formation method as the liquid crystal indicator of electro-optical device.The droplet ejection apparatus 10 that is illustrated at the 1st embodiment uses as the orientation membrane formation device in the present embodiment.Fig. 4 A is the front elevation of liquid crystal indicator 100, and Fig. 4 B is the profile along the 4B-4B line of Fig. 4 A.
Shown in Fig. 4 A and Fig. 4 B, liquid crystal indicator 100 has LCD panel 110, and this LCD panel 110 possesses: have a plurality of TFT (Thin Film Transistor: thin film transistor (TFT)) device substrate 101 of element 103, have the electrode 106 that stands facing each other face-off substrate 102, be filled in the liquid crystal 105 in the gap between the bonding a pair of substrate 101,102 of encapsulant 104.Device substrate 101 is the outwardly directed state on every side from face-off substrate 102 than face-off substrate 102 big circles.Encapsulant 104 uses the epoxies bonding agent that is hardened by light such as heat and ultraviolet ray.
Face-off substrate 102 is made by the transparent glass substrate that approximately has 1.0mm thickness, is provided with the face-off electrode 106 as common electrode on face-off substrate 102.Face-off electrode 106 is by conducting portion 114 that is arranged on 102 4 jiaos of face-off substrates and the distribution conducting that is arranged on the device substrate 101, and this distribution also is connected on the above-mentioned mounting terminal 111.
Towards the surface of the device substrate 101 of liquid crystal 105 and the surface of face-off substrate 102 be formed with the film made by polyimides etc. respectively, be alignment films 107,108.
Though particularly not shown, liquid crystal indicator 100 possesses the relaying substrate that is electrically connected with external drive circuit, this relaying substrate is connected and installed terminal 111.By will be from the signal input data line drive circuit portion 109 and the scan drive circuit portion 113 of external drive circuit, thereby TFT element 103 switches according to each pixel electrode.Consequently, between pixel electrode and face-off electrode 106, apply the demonstration that driving voltage carries out image.
In addition, though be not shown equally, liquid crystal indicator 100 possesses the lighting device (not shown) that for example has light sources such as cold-cathode tube and LED that LCD panel 110 is thrown light on.With respect to the light incident side and the light emitting side of lighting device Polarizer is set respectively at LCD panel 110.Liquid crystal indicator 100 is as switch element, both can be to have TFD (Thin Film Diode: the element of so-called active (initiatively) type of element thin film diode) also can be the element with passive (passive) type of switch block.
Below, with reference to Fig. 5 A～Fig. 5 D, the formation method of above-mentioned alignment films 107,108 is described.
The formation method of alignment films comprises: the surface to the workpiece W that forms alignment films gives the surface treatment procedure of lyophily, will contain with droplet ejection apparatus 10 liquid material that is orientated film formation material as drop be sprayed on ejection operation on the workpiece W, make the drying process of the liquid material drying of ejection, with dried liquid material roasting, make alignment films and be fixed on sintering circuit on the workpiece W.In the ejection operation, stably spray, also possess the operation of the recovery processing of carrying out droplet discharging head 20 in order to make liquid material.Workpiece W is the face-off substrate 102 that is formed with the device substrate 101 of pixel electrode and TFT element 103 and is formed with face-off electrode 106.
Shown in Fig. 5 A, in surface treatment procedure, carry out with oxygen (O
2) for handling the plasma treatment of gas.Thus, the surperficial Wa to workpiece W carries out the lyophily processing.Surface treatment is not limited to plasma treatment, also can shine the method for the surperficial Wa of workpiece W with ultraviolet ray.In addition, before giving the surface treatment procedure of lyophily, preferred enforcement cleaned workpiece W with pure water, removes attached to the impurity on surface and the operation of spot.
Below, shown in Fig. 5 B, in the ejection operation, the surperficial Wa of the workpiece W that lyophily handled and droplet discharging head 20 are relatively moved with the state that stands facing each other, promptly carry out main scanning and subscan.With this main scanning synchronously from nozzle 28 ejection of droplet discharging head 20 contain be orientated film formation material liquid material L as drop.Thus, shown in Fig. 5 C, at the regulation zone spraying liquid material L of workpiece W.Liquid material L possesses: as the polyimides of the about 1～3wt% that is orientated film formation material, as the γ fourth lactones of main solvent, as other solvents such as NMP and ethylene glycol monobutyl ether.
Then, in drying process, make the liquid material L drying that is coated on the workpiece W.As drying means, use the heater 12 liquid towards material L heating of being located on the droplet ejection apparatus 10, evaporate the solvent that liquid material L contains.
And then in sintering circuit, workpiece W put into be heated to about 180～200 ℃ clean baking oven and placed about 1 hour, burn till dry liquid material L thus.Consequently, shown in Fig. 5 D, obtained being solidificated in the alignment films AL on the surperficial Wa.About 20～the 50nm of the thickness of alignment films AL.
Below, spray the restoration methods of the droplet discharging head 20 of operation with reference to Fig. 6 and Fig. 7 A～Fig. 7 D explanation.
As shown in Figure 6, the restoration methods of droplet discharging head 20 comprises: nozzle is formed face 26a be immersed in dipping operation (step S1) in the liquid 50, assist in substantially sealing and attract nozzle to form the attraction operation (step S2) of face 26a.In addition, above-mentioned restoration methods also comprises: remove attached to nozzle by attraction and form friction (the ワ イ ピ Application グ) operation (step S3) of the liquid material L on the face 26a, execution sprays the preparation ejection of liquid material L from all nozzles 28 flushing operation (Off ラ ッ シ Application グ) (step S4).
In the dipping operation of step S1, shown in Fig. 7 A, control part 8 driving pumps 47 are sent into the liquid 50 of ormal weight the accommodation section 41a of cap case 41.Then, nozzle component 1 and maintenance mechanism 9 are moved, and cap case 41 is configured in the position relative with droplet discharging head 20.In addition, driver rises cap case 41, so that the surperficial 30a butt of seal member 42 and balladeur train plate 30.Thus, just nozzle can be formed face 26a is immersed in the liquid 50.By the liquid 50 of ormal weight is sent into accommodation section 41a, liquid level 50a is positioned at the top slightly that nozzle forms face 26a.With this form mounting a few minutes at least.Liquid 50 is γ fourth lactones of one of multiple solvent of containing among the liquid material L.Therefore, liquid 50 has dissolubility for the polyimides of orientation film formation material.
In the attraction operation of step S2, shown in Fig. 7 B, make cap case 41 and balladeur train plate 30 butts, assist in substantially sealing nozzle and form face 26a.Moreover, the liquid 50 that is stored in the 41a of accommodation section is discharged in advance.Control part 8 driving pumps 48 make in the airtight accommodation section 41a to become negative pressure, contain liquid material L, impurity and the bubble etc. of the liquid 50 of droplet discharging head 20 inside from nozzle 28 attractions.Liquid material L that is attracted and liquid 50 are discharged from cap case 41 by pump 48.
In the friction process of step S3, shown in Fig. 7 C, control part 8 drives the rubbing device that maintenance mechanism 9 possesses.Rubbing device for example possesses the polyester with 100%, the friction plate 52 of the about 0.5mm of thickness as friction means.With pressing component 51 friction plate 52 is pushed down nozzle and form face 26a.Under the state of friction plate 52 being pushed down nozzle formation face 26a, make this friction plate 52 form face 26a and move along nozzle, remove thus attached to liquid material L and impurity on the nozzle formation face 26a.Such abrasive action also can the limit change be pressed in the position that nozzle forms the friction plate 52 of face 26a, Yi Bian repeat.
In the flushing operation of step S4, shown in Fig. 7 D, control part 8 moves maintenance mechanism 9, cap case 41 is configured in the position relative with droplet discharging head 20.Then, all nozzles 28 from droplet discharging head 20 spray liquid material L as drop.The ejection number of times is 200～300 times.The liquid material L that is ejected is held by cap case 41, and the liquid material L that is received is discharged to the outside by pump 48.The flushing of such conduct preparation ejection both can use cap case 41 to carry out as pallet, also can use the purpose-made pallet that is installed in mounting table 4 edges, carried out before being sprayed on liquid material L on the workpiece W.In addition, also can the weight meter for example be set on maintenance mechanism 9, spray as pallet with this.In view of the above, just can pass through the weight of the liquid material L of number of times mensuration ejection according to the rules, determine whether normally to have sprayed liquid material L from all nozzles 28.
According to the restoration methods of such droplet discharging head 20, in dipping operation (step S1), form face 26a not under the state of ingress of air at nozzle, liquid 50 can dissolve nozzle 28 inside and nozzle form face 26a drying the impurity that forms of liquid material.In attracting operation (step S2), can attract the liquid material of droplet discharging heads 20 inside and impurity, bubble etc. from shower nozzle 28.In friction process (step S3), can remove the liquid material L that remains on the nozzle formation face 26a.In flushing operation (step S4), before formal spraying, prepare ejection, can make from the ejection of the liquid material L of each nozzle 28 stable.That is, can make droplet discharging head 20 return to normal condition.
The recovery of such droplet discharging head 20 is handled preferably carrying out and is implemented before the formal spraying.In addition, recover to handle also and can after checking operation, implement.In checking operation, carry out regular preparation ejection, or judge whether normally to have sprayed liquid 50, or observe whether the flight bending has taken place according to weight measurement.In addition, when when long-time keeping is in the droplet discharging head 20 of halted state, (preserve under the state of step 1) in the dipping operation.
The advantage of above-mentioned the 2nd embodiment is as follows.
(1) restoration methods of droplet discharging head 20 comprises: dipping operation (step S1), attraction operation (step S2), friction process (step S3), flushing operation (step S4).Therefore, the liquid material L that can make dry is dissolved by liquid 50, and dry liquid material L is the reason that eyelet stops up and flight is crooked that causes nozzle 28.Can attract the liquid material L of ejection droplet discharging heads 20 inside and impurity, bubble etc. from nozzle 28.Can remove attached to the useless liquid material L on the nozzle formation face with friction plate 52.That is, nozzle can be formed face 26a and keep clean, simultaneously, can also make the crescent maintenance normal state in the nozzle 28.
(2), (preserve droplet discharging head 20 under the state of step 1) in the dipping operation when when remaining in the droplet discharging head 20 of halted state for a long time.Therefore, drying so there are not the unfavorable conditions such as eyelet obstruction of nozzle 28 when re-using droplet discharging head 20, can be preserved droplet discharging head 20 relievedly because nozzle formation face 26a does not have the Long contact time air.
(3) in the ejection operation, carry out the recovery of droplet discharging head 20 and handle.Recovery is handled before the formal spraying of droplet discharging head 20 or is regularly carried out.Therefore, the flight bending of obstruction of the eyelet of nozzle 28 and liquid material L etc. is all lacked, and can keep stable spraying state, forms more uniform alignment films on workpiece W.Consequently, can provide the high liquid crystal indicator of display quality 100.
Embodiments of the invention more than have been described, but with regard to the various embodiments described above, in the scope that does not exceed aim of the present invention, can have added following various distortion.
The cap case 41 of above-mentioned the 1st embodiment is not limited to above-mentioned structure.Fig. 8 represents the cap case of variation.For example, cap case 61 also can be the structure at the medial surface configuration seal member 62 of accommodation section 61a.According to this structure, when droplet discharging head 20 was accommodated accommodation section 61a, the side 24a of seal member 62 and nozzle body 24 closely contacted, and can assist in substantially sealing nozzle and form face 26a.According to this structure, the balladeur train plate 30 of supporting droplet discharging head 20 can not be smooth also.That is, can aspect the supporting structure of droplet discharging head 20, keep the free degree.
The droplet ejection apparatus 10 of above-mentioned the 1st embodiment is not limited to only install 1 droplet discharging head 20 on nozzle component 1.Also can be with a plurality of droplet discharging head 20 of proper spacing configuration on balladeur train plate 30, a plurality of cap casees 41 that these and droplet discharging head 20 is corresponding respectively are arranged on the droplet ejection apparatus 10.
At above-mentioned the 1st embodiment, the formation of cap member 40 is not limited to above-mentioned formation.For example, also can special-purpose cap case of maintenance and cap case 41 independent settings of face 26a will be used for forming at the nozzle of liquid 50 maceration extract droplet ejection heads 20.
In above-mentioned the 1st embodiment, cap case 41 and seal member 42 are independently made and are got, but also can be integrally formed with commaterial.
The restoration methods of droplet discharging head 20 is not limited to above-mentioned method.For example, also friction plate 52 can be pressed in nozzle in friction process forms on whole of face 26a.In addition, friction plate 52 is immersed in the solvent.Have, the restoration methods of droplet discharging head 20 can begin to start from attracting operation according to the state of droplet discharging head 20 again.
The formation method of alignment films is not limited to above-mentioned method.For example, by cleaning workpiece W in advance, also can omit surface treatment procedure.In addition, can distinguish drying process and sintering circuit specially, also can carry out with same operation.For example also can be in the cavity that has heaters such as heater, temperature is carried out drying and sintering with stipulated time place work piece W with same operation in accordance with regulations.
The formation method of film is not limited to the formation method of alignment films, for example, if use color component to form material as functional material, then also can be applicable on the formation method as the colour filter of film.Equally, if suitable selection function material then also can be applicable to the formation method of the metallic films such as formation method, circuit board of organic EL luminescent layer, the formation method of micro lens etc.
Claims (12)
1, a kind of droplet ejection apparatus, this droplet ejection apparatus possesses:
Droplet discharging head, this droplet discharging head have nozzle and form face, are formed with nozzle on this nozzle formation face, and described droplet discharging head can spray as drop the liquid material that contains functional material from described nozzle;
Cap case, this cap case have the accommodation section of the part that can hold the described droplet discharging head that contains nozzle formation face at least;
Fluid Supplying apparatus, this fluid Supplying apparatus is to the described accommodation section feed fluid;
Mobile device, this mobile device makes that at least one moves with respect to another person in described cap case and the described droplet discharging head, when the recovery of described droplet discharging head action or described droplet discharging head when suspending, this mobile device disposes described cap case so that store the mode that the described nozzle of described liquid infiltration in the described accommodation section forms face with respect to described droplet discharging head.
2, droplet ejection apparatus as claimed in claim 1, wherein, described liquid is at least a solvent that contains in the described liquid material.
3, droplet ejection apparatus as claimed in claim 1, wherein,
This droplet ejection apparatus also possesses the shower nozzle support, and this shower nozzle support has plane surface, supports described droplet discharging head so that described shower nozzle forms face and mode that be in the approximate horizontal state outstanding from described surface,
The described surface of described cap case and described shower nozzle support or the side butt of described droplet discharging head, thus described nozzle formation face is assisted in substantially sealing.
4, droplet ejection apparatus as claimed in claim 3, wherein, this droplet ejection apparatus also possesses the suction device that is connected with the described accommodation section, makes described suction device action under the state that seals described nozzle formation face by described cap case, thereby makes the inside of described accommodation section become negative pressure.
5, droplet ejection apparatus as claimed in claim 4, wherein, described cap case on the described surface of itself and described shower nozzle support or the position of the side butt of described droplet discharging head possess elastomeric element with solvent resistance.
6, as each described droplet ejection apparatus in the claim 1～5, wherein, the described liquid material that contains described functional material is to contain the liquid material that is orientated film formation material, described droplet ejection apparatus is that the described liquid material that will contain described orientation film formation material is sprayed on the workpiece as drop, thereby forms the orientation membrane formation device of alignment films on workpiece.
7, a kind of liquid crystal indicator, this liquid crystal indicator have the alignment films that is formed by the described droplet ejection apparatus of claim 6.
8, a kind of restoration methods of droplet discharging head, described droplet discharging head can spray as drop the liquid material that contains functional material from nozzle, and the restoration methods of this droplet discharging head comprises:
In the accommodation section of cap case, store with described liquid material in the contained identical liquid of at least a solvent;
Be contained in the described accommodation section containing the part that nozzle forms the described droplet discharging head of face at least, described nozzle formation face is immersed in the liquid in the accommodation section.
9, the restoration methods of droplet discharging head as claimed in claim 8, the restoration methods of this droplet discharging head also comprises:
After in the liquid that described nozzle formation face is immersed in the described accommodation section, by described cap case described nozzle is formed face and assist in substantially sealing;
Sealing by described cap case under the state that described nozzle forms face, attracting the described liquid material of the inside of described droplet discharging head from described nozzle.
10, the restoration methods of droplet discharging head as claimed in claim 8 or 9, wherein, the described liquid material that contains described functional material is to contain the liquid material that is orientated film formation material.
11, a kind of film formation method, use can spray as drop the liquid material that contains functional material from nozzle droplet discharging head comes to form the film that is made of functional material on workpiece, and this film formation method comprises:
In the accommodation section of cap case, store with described liquid in the identical liquid of at least a solvent that contains;
To comprise that at least the part that described nozzle forms the described droplet discharging head of face is contained in the described accommodation section, described nozzle formation face is immersed in the liquid in the accommodation section;
Behind described dipping, described nozzle formation face is assisted in substantially sealing with described cap case;
Under the state that seals described nozzle formation face with described cap case, attract the described liquid material of the inside of described droplet discharging head from described nozzle;
After described attraction, described liquid material is sprayed to workpiece from nozzle as drop;
Make the droplet drying on the workpiece, on this workpiece, form the film that constitutes by functional material.
12, film formation method as claimed in claim 11 wherein, will contain the liquid material that is orientated film formation material and spray to workpiece as the liquid material that contains functional material, thereby form the alignment films that is made of the orientation film formation material on workpiece.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006040492 | 2006-02-17 | ||
| JP2006040492 | 2006-02-17 | ||
| JP2007004799 | 2007-01-12 |
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| Publication Number | Publication Date |
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| CN101024331A true CN101024331A (en) | 2007-08-29 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710005179.XA Pending CN101024331A (en) | 2006-02-17 | 2007-02-15 | Droplet ejection apparatus, method for recovering droplet ejection head, method for forming thin film, and liquid crystal display |
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| CN (1) | CN101024331A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102765251A (en) * | 2011-05-03 | 2012-11-07 | 郑进 | Printing and duplicating equipment capable of generating duplication prevention bearing medium |
| CN103847235A (en) * | 2012-12-05 | 2014-06-11 | 株式会社平安Fa | High-speed digital inkjet printer |
| WO2014180060A1 (en) * | 2013-05-10 | 2014-11-13 | 深圳市华星光电技术有限公司 | Contact-type infiltration tank for photoresist coating device |
| CN109263285A (en) * | 2018-09-28 | 2019-01-25 | 岳阳宝丽纺织品有限公司 | A kind of nozzle sealing unit and spray head |
| CN114599457A (en) * | 2019-10-28 | 2022-06-07 | 京瓷株式会社 | Coating device and wiping method |
-
2007
- 2007-02-15 CN CN200710005179.XA patent/CN101024331A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102765251A (en) * | 2011-05-03 | 2012-11-07 | 郑进 | Printing and duplicating equipment capable of generating duplication prevention bearing medium |
| CN103847235A (en) * | 2012-12-05 | 2014-06-11 | 株式会社平安Fa | High-speed digital inkjet printer |
| WO2014180060A1 (en) * | 2013-05-10 | 2014-11-13 | 深圳市华星光电技术有限公司 | Contact-type infiltration tank for photoresist coating device |
| CN109263285A (en) * | 2018-09-28 | 2019-01-25 | 岳阳宝丽纺织品有限公司 | A kind of nozzle sealing unit and spray head |
| CN114599457A (en) * | 2019-10-28 | 2022-06-07 | 京瓷株式会社 | Coating device and wiping method |
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