CN100580889C - 氢化物气相外延生长氮化镓膜时氧化铝作为掩膜的应用 - Google Patents
氢化物气相外延生长氮化镓膜时氧化铝作为掩膜的应用 Download PDFInfo
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- CN100580889C CN100580889C CN200510028370A CN200510028370A CN100580889C CN 100580889 C CN100580889 C CN 100580889C CN 200510028370 A CN200510028370 A CN 200510028370A CN 200510028370 A CN200510028370 A CN 200510028370A CN 100580889 C CN100580889 C CN 100580889C
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- aluminium oxide
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- porous anodic
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CN200510028370A CN100580889C (zh) | 2005-07-29 | 2005-07-29 | 氢化物气相外延生长氮化镓膜时氧化铝作为掩膜的应用 |
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CN200510028370A CN100580889C (zh) | 2005-07-29 | 2005-07-29 | 氢化物气相外延生长氮化镓膜时氧化铝作为掩膜的应用 |
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CN1744287A CN1744287A (zh) | 2006-03-08 |
CN100580889C true CN100580889C (zh) | 2010-01-13 |
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CN200510028370A Expired - Fee Related CN100580889C (zh) | 2005-07-29 | 2005-07-29 | 氢化物气相外延生长氮化镓膜时氧化铝作为掩膜的应用 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN100565804C (zh) * | 2008-07-04 | 2009-12-02 | 中国科学院上海微系统与信息技术研究所 | HVPE方法生长氮化镓膜中的SiO2纳米掩膜及方法 |
CN100547735C (zh) * | 2008-09-03 | 2009-10-07 | 中国科学院上海微系统与信息技术研究所 | 利用均匀纳米粒子点阵掩模提高厚膜GaN质量的方法 |
EP3298181A1 (de) * | 2015-05-21 | 2018-03-28 | EV Group E. Thallner GmbH | Verfahren zur aufbringung einer überwuchsschicht auf eine keimschicht |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US6709513B2 (en) * | 2001-07-04 | 2004-03-23 | Fuji Photo Film Co., Ltd. | Substrate including wide low-defect region for use in semiconductor element |
CN1587438A (zh) * | 2004-07-30 | 2005-03-02 | 中国科学院上海微系统与信息技术研究所 | 氢化物气相外延生长氮化镓膜中的低温插入层及制备方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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US6709513B2 (en) * | 2001-07-04 | 2004-03-23 | Fuji Photo Film Co., Ltd. | Substrate including wide low-defect region for use in semiconductor element |
CN1587438A (zh) * | 2004-07-30 | 2005-03-02 | 中国科学院上海微系统与信息技术研究所 | 氢化物气相外延生长氮化镓膜中的低温插入层及制备方法 |
Non-Patent Citations (1)
Title |
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Fabrication and properties of nanoporous GaN films. Y.D.Wang,et al.Applied Physics Letters,Vol.85 No.5. 2004 * |
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CN1744287A (zh) | 2006-03-08 |
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