CN100559624C - 高分辨率构图 - Google Patents
高分辨率构图 Download PDFInfo
- Publication number
- CN100559624C CN100559624C CNB2004800095167A CN200480009516A CN100559624C CN 100559624 C CN100559624 C CN 100559624C CN B2004800095167 A CNB2004800095167 A CN B2004800095167A CN 200480009516 A CN200480009516 A CN 200480009516A CN 100559624 C CN100559624 C CN 100559624C
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- CN
- China
- Prior art keywords
- mixture
- organic
- fusing
- phase
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000059 patterning Methods 0.000 title description 6
- 239000000463 material Substances 0.000 claims abstract description 113
- 239000000203 mixture Substances 0.000 claims abstract description 98
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- 238000005516 engineering process Methods 0.000 claims abstract description 24
- 238000007639 printing Methods 0.000 claims abstract description 24
- 239000000758 substrate Substances 0.000 claims abstract description 23
- 230000008021 deposition Effects 0.000 claims abstract description 19
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 239000004065 semiconductor Substances 0.000 claims abstract description 12
- 238000004821 distillation Methods 0.000 claims abstract description 10
- 239000002105 nanoparticle Substances 0.000 claims abstract description 8
- 238000000018 DNA microarray Methods 0.000 claims abstract description 4
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- 238000000151 deposition Methods 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 15
- 239000011368 organic material Substances 0.000 claims description 12
- 230000004888 barrier function Effects 0.000 claims description 9
- 230000005669 field effect Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- -1 biomolecule Substances 0.000 claims description 3
- DDTBPAQBQHZRDW-UHFFFAOYSA-N cyclododecane Chemical compound C1CCCCCCCCCCC1 DDTBPAQBQHZRDW-UHFFFAOYSA-N 0.000 claims description 3
- 239000000155 melt Substances 0.000 claims description 3
- 238000007711 solidification Methods 0.000 claims description 3
- 230000008023 solidification Effects 0.000 claims description 3
- 239000011812 mixed powder Substances 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 abstract description 5
- 230000004927 fusion Effects 0.000 abstract description 3
- 239000012782 phase change material Substances 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 25
- 239000012071 phase Substances 0.000 description 22
- 239000012188 paraffin wax Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
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- 229920000642 polymer Polymers 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000005525 hole transport Effects 0.000 description 2
- 239000000976 ink Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 239000012074 organic phase Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- PLXMOAALOJOTIY-FPTXNFDTSA-N Aesculin Natural products OC[C@@H]1[C@@H](O)[C@H](O)[C@@H](O)[C@H](O)[C@H]1Oc2cc3C=CC(=O)Oc3cc2O PLXMOAALOJOTIY-FPTXNFDTSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000002322 conducting polymer Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
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- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000012804 iterative process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000006193 liquid solution Substances 0.000 description 1
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
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- 238000004528 spin coating Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 229930192474 thiophene Natural products 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/11—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers
- H10K50/125—OLEDs or polymer light-emitting diodes [PLED] characterised by the electroluminescent [EL] layers specially adapted for multicolour light emission, e.g. for emitting white light
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Thin Film Transistor (AREA)
- Electroluminescent Light Sources (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03405403.1 | 2003-06-03 | ||
EP03405403 | 2003-06-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1771614A CN1771614A (zh) | 2006-05-10 |
CN100559624C true CN100559624C (zh) | 2009-11-11 |
Family
ID=33484078
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2004800095167A Expired - Fee Related CN100559624C (zh) | 2003-06-03 | 2004-04-28 | 高分辨率构图 |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR100773014B1 (ko) |
CN (1) | CN100559624C (ko) |
TW (1) | TWI306678B (ko) |
WO (1) | WO2004107472A1 (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7709307B2 (en) | 2006-08-24 | 2010-05-04 | Kovio, Inc. | Printed non-volatile memory |
WO2017096561A1 (zh) * | 2015-12-09 | 2017-06-15 | 杨华卫 | 用于生物芯片的印刷方法及其应用 |
US11211569B2 (en) | 2016-01-29 | 2021-12-28 | Wake Forest University | Laser printable organic semiconductor compositions and applications thereof |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6071333A (en) | 1999-04-27 | 2000-06-06 | Xerox Corporation | Ink compositions |
US20020083858A1 (en) * | 2000-05-15 | 2002-07-04 | Macdiarmid Alan G. | Spontaneous pattern formation of functional materials |
US6773496B2 (en) * | 2001-01-16 | 2004-08-10 | Carey Brothers Limited | Phase change ink composition |
-
2004
- 2004-04-28 CN CNB2004800095167A patent/CN100559624C/zh not_active Expired - Fee Related
- 2004-04-28 WO PCT/IB2004/001379 patent/WO2004107472A1/en active Application Filing
- 2004-04-28 KR KR1020057020990A patent/KR100773014B1/ko not_active IP Right Cessation
- 2004-06-01 TW TW093115703A patent/TWI306678B/zh not_active IP Right Cessation
Non-Patent Citations (4)
Title |
---|
ARE PLASTICS THE FUTURE OF ELECTRONICS? Katherine Derbyshire.SEMICONDUCTOR MAGZINE,Vol.3 No.4. 2002 |
ARE PLASTICS THE FUTURE OF ELECTRONICS? Katherine Derbyshire.SEMICONDUCTOR MAGZINE,Vol.3 No.4. 2002 * |
Hot Melt Ink Technology for Crystalline Silicon Solar Cells. Todd Williams et al.Pre print of Poster 1P2.16 to be presented at 29th IEEE PVSC New Orleans. 2002 |
Hot Melt Ink Technology for Crystalline Silicon Solar Cells. Todd Williams et al.Pre print of Poster 1P2.16 to be presented at 29th IEEE PVSC New Orleans. 2002 * |
Also Published As
Publication number | Publication date |
---|---|
TWI306678B (en) | 2009-02-21 |
TW200511622A (en) | 2005-03-16 |
WO2004107472A1 (en) | 2004-12-09 |
KR20060018830A (ko) | 2006-03-02 |
KR100773014B1 (ko) | 2007-11-05 |
CN1771614A (zh) | 2006-05-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091111 Termination date: 20120428 |