CN100549761C - Laser beam shaping optical lens - Google Patents
Laser beam shaping optical lens Download PDFInfo
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- CN100549761C CN100549761C CN 200710073162 CN200710073162A CN100549761C CN 100549761 C CN100549761 C CN 100549761C CN 200710073162 CN200710073162 CN 200710073162 CN 200710073162 A CN200710073162 A CN 200710073162A CN 100549761 C CN100549761 C CN 100549761C
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- lens
- shaping optical
- optical lens
- focal power
- hot spot
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Abstract
The present invention relates to a kind of laser beam shaping optical lens, this shaping optical lens comprises: be used for the cross section for circular parallel incident beam convert to the different outgoing beam of transmission of angle on two orthogonal X, Y direction the cylindrical lens that has at least one cylinder; Be used for outgoing beam is focused on so that produce the spherical lens group of oval hot spot in the precalculated position.By adopting said structure, circular incident beam can be focused into oval hot spot, and axial ratio that should the ellipse hot spot can be controlled at be 4: 1 to 2: 1.In addition, owing to only adopt single cylindrical lens to be convenient to realize the adjusting of major and minor axis direction and concentricity.
Description
[technical field]
The present invention relates to a kind of optical lens, relate in particular to a kind of laser beam shaping optical lens that is applicable to the laser resistor trimming instrument.
[background technology]
Laser beam shaping optical lens has in the laser commercial Application widely to be used, comprising some special applications such as cut, laser drill, laser scribing, laser resistor trimming instrument.In order to satisfy the specific (special) requirements in these fields, the various camera lenses that adopted require and conventional lenses between have certain difference.The laser resistor trimming instrument is one of operation of producing most critical in the precision thin-film resistor device of precision, high stable, low temperature system.At present, two kinds of methods of the general employing of the resistance trimming of precision thin-film resistor device: a kind of is to adopt the machine cuts resistance trimming; Another kind is to adopt the cut resistance trimming.The machine cuts resistance trimming has significant limitation, is mainly used in low-resistance and under the less demanding situation of temperature coefficient.And be to adopt the cut resistance trimming basically for the precision resistor resistance trimming of high resistant and low-temperature coefficient.
At present, the cut resistance trimming generally uses the laser of 1064nm wavelength of YAG solid state laser output as light source, after the optical system of beam expanding lens and focus lamp composition, laser focusing is rule on the resistance of helical motion, marks helicla flute on resistive surface.Because Laser Processing is contactless processing, no cutting force effect, therefore workpiece there is not direct impact, there is not the machinery distortion, no tool wear, little to the working position heat-affected zone, problems such as no mechanical stress concentration, and be easy to cooperate and control, so widespread use laser resistor trimming instrument resistance trimming with digital control system.
At present, the general optical system that adopts common beam expanding lens and focus lamp to constitute of optical system in the laser resistor trimming instrument, the laser facula that is focused on is for circular, intensive the arranging side by side of circular light spot by high-energy-density rule, and removes the metallic diaphragm of resistive surface with this circular light spot combination.Under high-power microscope, observe to find, always exist pointed burr between adjacent two circular light spots, thereby can produce bad phenomenon such as point discharge, and influence the electrical property of resistor.For this reason, the light spot shape of focus need be become ellipticity, and the long axis direction and the ohmically line direction of ellipticity hot spot is consistent.Like this, intensive ellipticity hot spot of arranging side by side will obtain a line of cut that the edge is very smooth, no longer produce pointed burr, thereby improve the electrical property of product.
[summary of the invention]
For the laser facula that optical system focused in the laser resistor trimming instrument that solves prior art is circle, the technical matters that cutting performance is relatively poor the present invention proposes a kind of laser beam shaping optical lens that the laser beam of round section can be focused into oval hot spot.
The present invention solves the laser facula that optical system focused in the laser resistor trimming instrument of prior art for circular, the relatively poor technical scheme that technical matters adopted of cutting performance comprises: a kind of laser beam shaping optical lens is provided, and this shaping optical lens comprises: the cylindrical lens that has at least one cylinder that is used for the cross section is converted to for circular parallel incident beam transmission of angle different outgoing beam on two orthogonal X, Y direction; Be used for outgoing beam is focused on so that produce the spherical lens group of oval hot spot in the precalculated position.
According to one preferred embodiment of the present invention, the focal power of cylindrical lens is for negative, and the spherical lens group comprises the first, second, third and the 4th spherical lens, wherein first, second, the focal power of the 4th spherical lens is being for just, the focal power of the 3rd spherical lens is for negative, and shaping optical lens satisfies:
-4.0＜f
1x/f＜-3.0 3.5＜f
2/f＜4.5
0.85＜f
1x/f
1y＜0.95
3.5＜f
21/f
2＜4.5 2.0＜f
22/f
2＜2.5
-6.0＜f
23/f
2＜-5.0 1.5＜f
24/f
2＜2.2，
Wherein, f
1x, f
1yBe respectively the focal power of cylindrical lens on X, Y direction, f is the combined light focal power of shaping optical lens, f
2Be the combined light focal power of spherical lens group, f
21, f
22, f
23, f
24Be respectively the focal power of the first, second, third and the 4th spherical lens.
According to one preferred embodiment of the present invention, the bus of cylindrical lens is by the cylindrical center of cylindrical lens.
According to one preferred embodiment of the present invention, shaping optical lens further comprises and is used for cylindrical lens is regulated so that change the axial adjustment structure of the length of oval hot spot.
According to one preferred embodiment of the present invention, the ratio of the major and minor axis of oval hot spot is 4: 1 to 2: 1.
The technique effect that the present invention reached is: by adopting said structure, circular incident beam can be focused into oval hot spot, and axial ratio that should the ellipse hot spot can be controlled at be 4: 1 to 2: 1.In addition, owing to only adopt single cylindrical lens to be convenient to realize the adjusting of major and minor axis direction and concentricity.
[description of drawings]
The invention will be further described in conjunction with the embodiments with reference to the accompanying drawings.
Fig. 1 is the light path synoptic diagram of laser beam shaping optical lens of the present invention;
Fig. 2 is the light path synoptic diagram of laser beam shaping optical lens shown in Figure 1 at directions X;
Fig. 3 is the light path synoptic diagram of laser beam shaping optical lens shown in Figure 1 in the Y direction;
Fig. 4 is the structural representation of laser beam shaping optical lens one preferred embodiment of the present invention.
[embodiment]
The present invention is described in detail below in conjunction with drawings and Examples
As shown in Figure 1-Figure 3, comprising of laser beam shaping optical lens of the present invention: the cylindrical lens that has at least one cylinder 11 that is used for the cross section is converted to for circular parallel incident beam the different outgoing beam of transmission of angle on two orthogonal X, Y direction; Be used for outgoing beam is focused on so that produce the spherical lens group 12 of oval hot spot in the precalculated position.
Produce and be after circular parallel incident beam passes through cylindrical lens 11 through the cross section of suitably expanding bundle through laser instrument, the light of outgoing is in the transmission of angle of X, Y two mutual vertical direction difference to some extent.And after this emergent light focused on through spherical lens group 12 again, its focal position on X, Y direction is difference to some extent.Different and set suitable aberration target by the focal length on reasonable X, the Y direction, can obtain required oval hot spot.For example, use is cut at the focused light at the focus place of Y direction.At this moment and since light on directions X because of out of focus, and cause hot spot broad on the directions X, be in the focus place on the Y direction and thinner, and the comprehensive hot spot on the Y direction focus just shows as the ellipticity hot spot.Light beam with round section incident becomes the ellipticity hot spot at the focus place after optical lens of the present invention focuses on, the axial ratio of this ellipse light spot is 4: 1 to 2: 1.
As shown in Figure 4, Fig. 4 is the structural representation of laser beam shaping optical lens one preferred embodiment of the present invention.In the present embodiment, by cylindrical lens 11 preceding group as laser beam shaping optical lens, and by back group of forming spherical lens group 12 as camera lens of 121,122,123,124 of the first, second, third and the 4th spherical lenses.Wherein, the focal power of cylindrical lens 11 is for negative, and its focal power in X, Y two directions is respectively f
1x, f
1yThe combined light focal power of spherical lens group 12 is f
2, and the focal power of first, second and the 4th spherical lens 121,122,124 just is, and be respectively f
21, f
22, f
24, the focal power f of the 3rd spherical lens 123
23For negative, the focal power of whole optical lens is f.This optical lens satisfies:
-4.0＜f
1x/f＜-3.0 3.5＜f
2/f＜4.5
0.85＜f
1x/f
1y＜0.95
3.5＜f
21/f
2＜4.5 2.0＜f
22/f
2＜2.5
-6.0＜f
23/f
2＜-5.0 1.5＜f
24/f
2＜2.2，
According to above design feature, we have designed the shaping camera lens of a focal distance f=7.7mm, and its each parameter is as follows:
Light wavelength lambda=1064nm system focal distance f=7.7mm numerical aperture D/f=1: 4
f
1x/f＝-33 f
2/f＝3.9
f
1x/f
1y＝0.91
f
21/f
2＝4.1 f
21/f
2＝2.2
f
23/f
2＝-5.4 f
24/f
2＝1.8
Wherein, cylindrical lens 11 comprises two face S
1, S
2, face S
1Radius-of-curvature be R
1=-12.6mm, cylinder S
2Radius-of-curvature be R
2=-157.04mm, the center thickness d on its optical axis
1=3mm, material are Nd
1: Vd
1=1.51/64; The spacing that the cylindrical lens 11 and first spherical lens are 121 is d
2=96mm; First spherical lens 121 comprises two face S
3, S
4, face S
3Radius-of-curvature be R
3=0mm, face S
4Radius-of-curvature be R4=-96.8mm, the center thickness d on its optical axis
3=5mm, material are Nd
3: Vd
3=1.8/25.4; Spacing on first spherical lens 121 and second spherical lens, 122 optical axises is d
4=2mm; Second spherical lens 122 comprises two face S
5, S
6, face S
5Radius-of-curvature be R
5=57.54mm, face S
6Radius-of-curvature be R
6=-586.1mm, the center thickness d on its optical axis
5=2.5mm, material are Nd
5: Vd
5=1.8/25.4; Spacing on second spherical lens 122 and the 3rd spherical lens 123 optical axises is d
6=2mm; The 3rd spherical lens 123 comprises two face S
7, S
8, face S
7Radius-of-curvature be R
7=-80.5mm, face S
8Radius-of-curvature be R
8=0mm, the center thickness d on its optical axis
7=2mm, material are Nd
3: Vd
3=1.51/64; Spacing on the 3rd spherical lens 123 and the 4th spherical lens 124 optical axises is d
8=1.5mm; The 4th spherical lens 124 comprises two face S
9, S
10, face S
9Radius-of-curvature be R
9=24.86mm, face S
10Radius-of-curvature be R
10=57.2mm, the center thickness d on its optical axis
9=3mm, material are Nd
9: Vd
9=1.8/25.4; And be listed as follows:
Through the actual result test, the ellipse light spot axial ratio after the focusing is 3: 1, and the minor axis of ellipse light spot is 0.03～0.06mm.
When using laser beam shaping optical lens of the present invention, because cylindrical lens has only one side, thereby as long as pass through its cylindrical center by the bus that guarantees cylindrical lens in the process, governor motion structurally further is set in addition, just can easily regulates the major and minor axis direction of oval focal spot by the machine direction requirement.Simultaneously because cylindrical lens guarantees bus by its cylindrical center in the eyeglass process, when being assembled into whole camera lens and the concentricity of other eyeglass be easy to assurance, can guarantee reliably that just bus passes through optical axis center.
Compare laser beam shaping of the present invention with the focus that is used for the laser resistor trimming instrument for the focus lamp of circle hot spot Optical lens has effectively been eliminated and has been connected the pointed burr that the place produces between round dot and the round dot and the tip that causes The discharge problem is so that the line edge that cuts is very smooth. Owing to thoroughly solved owing to pointed burr causes The point discharge problem, and the utmost point has improved the electrical performance indexes of product on ground, and has improved the non-defective unit of product Rate and the market competitiveness.
Claims (3)
1. laser beam shaping optical lens, it is characterized in that: described shaping optical lens comprises: the cylindrical lens that has at least one cylinder that is used for the cross section is converted to for circular parallel incident beam the different outgoing beam of transmission of angle on two orthogonal X, Y direction; Be used for described outgoing beam is focused on so that produce the spherical lens group of oval hot spot in the precalculated position, the focal power of described cylindrical lens is for negative, described spherical lens group comprises the first, second, third and the 4th spherical lens, wherein said first, second, the focal power of the 4th spherical lens is being for just, the focal power of described the 3rd spherical lens is for negative, and described shaping optical lens satisfies:
-4.0＜f
1x/f＜-3.0 3.5＜f
2/f＜4.5
0.85＜f
1x/f
1y＜0.95
3.5＜f
21/f
2＜4.5 2.0＜f
22/f
2＜2.5
-6.0＜f
23/f
2＜-5.0 1.5＜f
24/f
2＜2.2，
Wherein, f
1x, f
1yBe respectively the focal power of described cylindrical lens on described X, Y direction, f is the combined light focal power of described shaping optical lens, f
2Be the combined light focal power of described spherical lens group, f
21, f
22, f
23, f
24Be respectively described first, second, third and the focal power of the 4th spherical lens.
2. laser beam shaping optical lens as claimed in claim 1 is characterized in that: described shaping optical lens further comprises and is used for described cylindrical lens is regulated so that change the axial adjustment structure of the length of described oval hot spot.
3. laser beam shaping optical lens as claimed in claim 1 is characterized in that: the ratio of the major and minor axis of described oval hot spot is 4: 1 to 2: 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710073162 CN100549761C (en) | 2007-01-30 | 2007-01-30 | Laser beam shaping optical lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200710073162 CN100549761C (en) | 2007-01-30 | 2007-01-30 | Laser beam shaping optical lens |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101236302A CN101236302A (en) | 2008-08-06 |
| CN100549761C true CN100549761C (en) | 2009-10-14 |
Family
ID=39920038
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200710073162 Active CN100549761C (en) | 2007-01-30 | 2007-01-30 | Laser beam shaping optical lens |
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| CN (1) | CN100549761C (en) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101840070B (en) * | 2009-03-18 | 2011-10-12 | 中国科学院半导体研究所 | LD (laser diode) mono-tube light beam shaping module |
| CN102109678B (en) * | 2009-12-24 | 2013-05-15 | 深圳市大族激光科技股份有限公司 | Laser beam expanding device and demonstration system |
| CN102109679B (en) * | 2009-12-24 | 2013-10-23 | 深圳市大族激光科技股份有限公司 | Beam expanding device and laser demonstration system |
| CN103048790B (en) * | 2013-01-11 | 2015-07-08 | 哈尔滨工业大学 | Single-color laser beam-expanding collimation system |
| TWI530750B (en) * | 2014-08-05 | 2016-04-21 | 中強光電股份有限公司 | Projector |
| CN105892046B (en) * | 2016-03-24 | 2018-08-31 | 武汉华工激光工程有限责任公司 | Infrared two-dimensional scan microscope group |
| CN107450187B (en) * | 2017-09-29 | 2024-03-22 | 腾景科技股份有限公司 | Collimation shaping device applied to large elliptical light spots |
| CN108227169A (en) * | 2018-03-19 | 2018-06-29 | 深圳市恩兴实业有限公司 | A kind of laser welding lens construction and laser welding apparatus |
| CN108761982B (en) * | 2018-04-28 | 2021-01-12 | 毅丰显示科技（深圳）有限公司 | Projection light collecting system |
| CN115166986B (en) * | 2022-06-28 | 2023-09-08 | 福建光旭科技有限公司 | Clear facula plastic optical system in boundary |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6322958B1 (en) * | 1998-11-26 | 2001-11-27 | Sumitomo Heavy Industries Ltd. | Laser marking method and apparatus, and marked member |
-
2007
- 2007-01-30 CN CN 200710073162 patent/CN100549761C/en active Active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6322958B1 (en) * | 1998-11-26 | 2001-11-27 | Sumitomo Heavy Industries Ltd. | Laser marking method and apparatus, and marked member |
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|---|---|
| CN101236302A (en) | 2008-08-06 |
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Address after: 518051 Dazu laser building, 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Address before: No. 5 road 518057 in Guangdong province Shenzhen city Nanshan District high tech park of Pine Hill Factory District No. 8 Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen |