CN100535711C - LCD glass oven system door and apparatus for controlling the same - Google Patents
LCD glass oven system door and apparatus for controlling the same Download PDFInfo
- Publication number
- CN100535711C CN100535711C CNB2006800008401A CN200680000840A CN100535711C CN 100535711 C CN100535711 C CN 100535711C CN B2006800008401 A CNB2006800008401 A CN B2006800008401A CN 200680000840 A CN200680000840 A CN 200680000840A CN 100535711 C CN100535711 C CN 100535711C
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- Prior art keywords
- air
- filling part
- air filling
- door
- oven system
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
- C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
- C03B29/025—Glass sheets
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/18—Door frames; Doors, lids, removable covers
- F27D1/1858—Doors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Liquid Crystal (AREA)
- Electric Ovens (AREA)
Abstract
The present invention relates to an LCD glass oven system. Particularly, the present invention provides an LCD glass oven system door, which is openably provided on each of oven chambers and cooling chambers of the oven system. The LCD glass oven system door includes a door frame (120a, 120b), two air packings (110), which are respectively provided in upper and lower ends of the door frame, air ports (130), through which air is supplied into or discharged from the respective air packings, and air supply or discharge hoses (140), which are coupled to the respective air ports to supply or discharge air into or from the respective air packings. Therefore, the present invention can provide an LCD glass substrate oven system door and an apparatus for controlling the door which can maintain a sealed state of the oven system and reduce the space required for installation of the doors, thus increasing the number of glass substrates that can be received in the oven system.
Description
Technical field
Present invention relates in general to LCD (LCD) glass substrate oven system door and control device thereof, more particularly, the present invention relates to a kind of like this LCD glass substrate oven system door and control device thereof, this LCD glass substrate oven system door and control device thereof can keep the sealing state of LCD glass substrate oven system reliably and can reduce to install the required space of described door, increase the quantity that can be contained in the glass substrate in the described LCD glass substrate oven system thus.
Background technology
Fig. 1 is the cut-open view that traditional LC D glass oven system is shown.
With reference to Fig. 1, the glass substrate that has stood cleaning before 10 pairs of insertions of traditional LC D glass oven system photoresist coating device heats and preheating.In addition, 10 pairs of glass substrates that are coated with photoresist film of traditional LC D glass oven system heat the schedule time, are cooled to normal temperature to toast this photoresist film, then to make this glass substrate that has stood baking processing.
Traditional LC D glass oven system 10 comprises a plurality of baking ovens chamber 20, cooling chamber 30, travelling belt (not shown) and loading bin (not shown).
By travelling belt the LCD glass substrate is transported to loading bin.The LCD glass substrate that has been transported to loading bin is inserted into baking oven chamber 20, and is heated in this baking oven chamber 20 and drying.In cooling chamber 30, make the glass substrate LCD that in baking oven chamber 20, had toasted be cooled to normal temperature.
As shown in Figure 1, in conventional art, door 40 utilizes hinge to be arranged on each baking oven chamber 20 and the cooling chamber 30 with opening, and opens and closes under control.Yet the relatively large distance because baking oven chamber 20 and cooling chamber 30 separate each other is so the utilization of space in the oven system 10 is lower.
And recently, the size of glass substrate is tending towards increasing, and for example, the 5th generation LCD glass substrate is of a size of 1100 * 1250mm (wide * long), and the 6th generation LCD glass substrate is of a size of 1800 * 2100mm (wide * long).
Therefore, must increase and hold the required space of LCD glass substrate.
Simultaneously, as mentioned above, in order to rotate the door 40 of traditional LC D glass oven system 10, door 40 utilizes hinge 42 to be installed on the main body with opening, so that utilize hinge 42 to open or close door 40 under control.
Yet, under the situation of the conventional apparatus of controlling the LCD glass oven system door, because must increase the distance between the door in order to ensure being used to utilize hinge 42 that the required space of door is installed,, the problem that exists has been reduced so being to be used to hold the space of glass substrate.
And, because conventional door 40 is not used in the device of sealing oven system 10, so oven system 10 also has the problem relevant with function.
Summary of the invention
Technical matters
Therefore, the present invention is devoted to solve the problems referred to above that occur in the prior art, one object of the present invention is to provide a kind of LCD glass substrate oven system door and control device thereof, this LCD glass substrate system door and control device thereof can keep the sealing state of LCD glass substrate oven system reliably and can reduce to install the required space of described door, increase the quantity that can be contained in the glass substrate in the described LCD glass substrate oven system thus.
Technical scheme
In one aspect, the invention provides a kind of LCD glass oven system door, this LCD glass oven system door can be arranged on a plurality of baking ovens chamber of LCD glass oven system or in the cooling chamber each with opening.This LCD glass oven system door comprises: doorframe; Two air filling parts (air packing), these two air filling parts are arranged on respectively in the upper end and bottom of described doorframe; Blow vent is discharged air by this blow vent to corresponding described air filling part supply air or from corresponding described air filling part; And for gas outlet, this confession gas outlet is connected to corresponding described blow vent, to discharge air to corresponding described air filling part supply air or from corresponding described air filling part.
Described doorframe can comprise: the first air filling part supporting member has inwardly outstanding air filling part supporting teat on the upper end of this first air filling part supporting member and bottom; With the second air filling part supporting member, this second air filling part supporting member is arranged in the described first air filling part supporting member and is fastened on the described first air filling part supporting member, thereby supports described air filling part.
Described blow vent can be formed in the described second air filling part supporting member.
Describedly can be connected to the primary air control device for gas outlet, this primary air control device sucks air for gas outlet supply air or from described for gas outlet to described by solenoid valve 150, so that air supply and discharge are controlled.
In addition, when to described air filling part supply air, adjacent described door can closely contact each other, and when when described air filling part is discharged air, can be between adjacent described door qualification one space.
In another aspect, the invention provides a kind of device that is used to control the LCD glass oven system door, this device comprises: door; First connecting rod, this first connecting rod is provided with around an end of described door, to open and close described door; Be connected to the second connecting rod of described first connecting rod; And cylinder (cylinder), this cylinder is connected to described second connecting rod, thereby makes described second connecting rod along movement in vertical direction.Each described door all comprises: doorframe; Two air filling parts, these two air filling parts are arranged on respectively in the upper end and bottom of described doorframe; Blow vent is discharged air by this blow vent to corresponding described air filling part supply air or from corresponding described air filling part; And for gas outlet, this gas outlet is connected to corresponding described blow vent, to discharge air to corresponding described air filling part supply air or from corresponding described air filling part.
Described doorframe can comprise: the first air filling part supporting member has inwardly outstanding air filling part supporting teat on the upper end of this first air filling part supporting member and bottom; With the second air filling part supporting member, this second air filling part supporting member is arranged in the described first air filling part supporting member and is fastened on the described first air filling part supporting member, thereby supports described air filling part.
The described gas outlet that supplies can be connected to the primary air control device, and this primary air control device sucks air for gas outlet supply air or from described for gas outlet to described by solenoid valve, so that the supply of air and discharge are controlled.
Described first connecting rod can rotate 90 ° by described second connecting rod, and described second connecting rod passes through described cylinder and vertical ground motion.
Described door can be connected to described first connecting rod, so that described door 90 ° by described first connecting rod rotate 90 °, thereby opens or closes described.
The described device that is used to control described LCD glass oven system door can also comprise a control module, this control module is controlled described solenoid valve, so that when opening the door of hope, discharge air for gas outlet from the described air filling part of the described air filling part of described door and adjacent door by described, and make in when door of closing described hope, by described for the described air filling part supply air of gas outlet to the described air filling part of the door of described hope and described adjacent door.
Advantageous effects
The invention provides a kind of LCD glass substrate oven system door and control device thereof, this LCD glass substrate oven system door and control device thereof can keep the sealing state of LCD glass substrate oven system reliably and can reduce to install the required space of described door, increase the quantity that can be contained in the glass substrate in the described LCD glass substrate oven system thus.
Description of drawings
Fig. 1 is the cut-open view that traditional LC D glass oven system is shown;
Fig. 2 illustrates according to the LCD glass oven system door of the embodiment of the invention and the front elevation of control device thereof;
Fig. 3 is the Zoom Side cut-open view that illustrates according to LCD glass oven system door of the present invention;
Fig. 4 is the figure for exhaust apparatus that illustrates according to LCD glass oven system door of the present invention; And
Fig. 5 is the enlarged drawing of irising out part A among Fig. 2.
Element explanation among the figure
100: according to the LCD glass oven system door of the embodiment of the invention
110: the air filling part
120a: the first air filling part supporting member
120b: the second air filling part supporting member
122: air filling part supporting teat
130: blow vent
140: for gas outlet
150: solenoid valve
160: the primary air control device
170: the pipe ways
200: be used to control device according to the LCD glass oven system door of the embodiment of the invention
220: first connecting rod
240: second connecting rod
260: cylinder
Embodiment
Below with reference to accompanying drawings to a preferred embodiment of the present invention will be described in detail.
Fig. 2 illustrates according to the LCD glass oven system door of the embodiment of the invention and the front elevation of control device thereof.Fig. 3 is the Zoom Side cut-open view according to LCD glass oven system door of the present invention.Fig. 4 is the figure for exhaust apparatus that illustrates according to LCD glass oven system door of the present invention.Fig. 5 is the enlarged drawing of irising out part A among Fig. 2.
With reference to Fig. 2 to 4, comprise according to the LCD glass oven system door 100 of the embodiment of the invention: doorframe 120a, 120b; Be separately positioned on the upper end of doorframe 120a and 120b and two air filling parts 110 in the bottom; Blow vent 130 is discharged air by this blow vent 130 to corresponding air filling part 110 supply air or from corresponding air filling part 110; And for gas outlet 140, this confession gas outlet 140 is connected to corresponding blow vent 130, thereby as to corresponding air filling part 110 supply air or from the passage of corresponding air filling part 110 discharge air.
Here, blow vent 130 is formed among the second air filling part supporting member 120b.
In each air filling part 110, all have be arranged on the first air filling part supporting member 120a on the corresponding groove (not shown) of air filling part supporting teat 122.Because the air filling part supporting teat 122 and the second air filling part supporting member 120b are spaced apart at a predetermined distance from each other, so can come support air filling part 110 reliably by the air filling part supporting teat 122 and the second air filling part supporting member 120b that is arranged on the first air filling part supporting member 120a.
Be connected to primary air control device 160 for gas outlet 140, this primary air control device 160 by solenoid valve 150 to for gas outlet 140 supply air or from sucking air, so that air supply and discharge are controlled for gas outlet 140.
When supply air in air filling part 110, adjacent LCD glass oven system door 100 is closely contact each other.When from air filling part 110 discharge air, between adjacent LCD glass oven system door 100, limit a space.
Therefore, when closely contacting each other when adjacent LCD glass oven system door 100 because by being connected to the supplying gas outlet 140 supply air of corresponding blow vent 130, the LCD glass oven system can keep the LCD glass oven system is operated required sealing state, and described operation comprises that the LCD glass plate to inserting in the LCD glass oven system carries out drying, preheating or heating.
Here, preferably be provided with pipe ways 170, tangle in LCD glass oven system door 100 to prevent confession gas outlet 140, but be not that pipe ways 170 must be set.
Fig. 5 is the enlarged drawing of irising out part A among Fig. 2.
With reference to Fig. 5, the device 200 that is used to control according to the LCD glass oven system door of the embodiment of the invention comprises: LCD glass oven system door 100; First connecting rod 220, this first connecting rod 220 is provided with around the respective side end of LCD glass oven system door 100, to open and close this LCD glass oven system door 100; Be connected to the second connecting rod 240 on the corresponding first connecting rod 220; And cylinder 260, this cylinder 260 is connected to corresponding second connecting rod 240, so that this second connecting rod 240 vertically moves.
As mentioned above, each LCD glass oven system door 100 all comprises: doorframe 120a, 120b; Be arranged on the upper end of doorframe 120a and 120b and two air filling parts 110 in the bottom; Blow vent 130 is discharged air by this blow vent 130 to corresponding air filling part 110 supply air or from corresponding air filling part 110; And for gas outlet 140, this confession gas outlet 140 is connected to corresponding blow vent 130, thus serves as to air filling part 110 supply air or from the passage of air filling part 110 discharge air.
Be connected to primary air control device 160 for gas outlet 140, this primary air control device 160 by solenoid valve 150 to for gas outlet 140 supply air or from sucking air, so that air supply and discharge are controlled for gas outlet 140.
Each first connecting rod 220 all rotates 90 ° by the second connecting rod 240 that is associated, and this second connecting rod is vertical ground motion by the cylinder 260 that is associated.
Each LCD glass oven system door 100 that is connected to the first connecting rod 220 that is associated all rotates 90 ° by 90 ° of first connecting rod, is opened or closed thus.
Each cylinder 260 all is used for promoting each second connecting rod 240 downwards.That is, be connected to the first connecting rod 220 of an end of second connecting rod 240 by because the second connecting rod 240 that the pressure of cylinder 260 is pushed down and rotate 90 ° forward.The door 1 00 that is connected to an end of first connecting rod 220 also rotates 90 ° forward by the first connecting rod 220 that rotates 90 ° forward, thus, opens this door 100.
In addition, LCD glass oven system control device 200 of the present invention can also comprise a control module (not shown), this control module control electromagnetic valve 150, so that when opening the LCD glass oven system door 100 of hope, by discharging air from the air filling part 110 of the air filling part 110 of LCD glass oven system door 100 and adjacent LCD glass oven system door 100 for gas outlet 140, and make when closing the LCD glass oven system door 100 of hope, by for the air filling part 110 supply air of gas outlet 140 to the air filling part 110 of LCD glass oven system door 100 and adjacent LCD glass oven system door 100.
Although for illustrative purposes the preferred embodiments of the present invention are described, the invention is not restricted to described preferred embodiment.And, it will be appreciated by those skilled in the art that, under the situation that does not break away from the disclosed scope and spirit of the present invention of claims, various modifications of the present invention, increase and displacement all are fine.
Claims (10)
1, a kind of LCD glass oven system door, this LCD glass oven system door can be arranged on a plurality of baking ovens chamber of LCD glass oven system or in the cooling chamber each with opening, and this LCD glass oven system door comprises:
Doorframe;
Two air filling parts, these two air filling parts are arranged on respectively in the upper end and bottom of described doorframe;
Blow vent is discharged air by this blow vent to corresponding described air filling part supply air or from corresponding described air filling part; And
For gas outlet, this confession gas outlet is connected to corresponding described blow vent, to discharge air to corresponding described air filling part supply air or from corresponding described air filling part;
Wherein, when to described air filling part supply air, the closely contact each other of adjacent described door, and when when described air filling part is discharged air, qualification one space between adjacent described door.
2, LCD glass oven system door according to claim 1, wherein, described doorframe comprises:
The first air filling part supporting member (120a) has inwardly outstanding air filling part supporting teat (122) on the upper end of this first air filling part supporting member (120a) and bottom; With
The second air filling part supporting member (120b), this second air filling part supporting member (120b) is arranged in the described first air filling part supporting member (120a) and is fastened on the described first air filling part supporting member (120a), thereby supports described air filling part.
3, LCD glass oven system door according to claim 2, wherein, described blow vent is formed in the described second air filling part supporting member.
4, LCD glass oven system door according to claim 1, wherein, the described gas outlet that supplies is connected to the primary air control device, this primary air control device sucks air for gas outlet supply air or from described for gas outlet to described by solenoid valve (150), so that the supply of air and discharge are controlled.
5, a kind of device that is used to control the LCD glass oven system door, this device comprises:
Door, each door all comprises: doorframe; Two air filling parts, these two air filling parts are arranged on respectively in the upper end and bottom of described doorframe; Blow vent is discharged air by this blow vent to corresponding described air filling part supply air or from corresponding described air filling part; And for gas outlet, this confession gas outlet is connected to corresponding described blow vent, to discharge air to corresponding described air filling part supply air or from corresponding described air filling part;
First connecting rod, this first connecting rod is provided with around the end of described door, to open and close described door;
Second connecting rod, this second connecting rod is connected to described first connecting rod; And
Cylinder, this cylinder is connected to described second connecting rod, and described second connecting rod is vertically moved;
Wherein, when to described air filling part supply air, the closely contact each other of adjacent described door, and when when described air filling part is discharged air, qualification one space between adjacent described door.
6, the device that is used to control the LCD glass oven system door according to claim 5, wherein, described doorframe comprises:
The first air filling part supporting member has inwardly outstanding air filling part supporting teat on the upper end of this first air filling part supporting member and bottom; With
The second air filling part supporting member, this second air filling part supporting member are arranged in the described first air filling part supporting member and are fastened on the described first air filling part supporting member, thereby support described air filling part.
7, according to claim 5 or the 6 described devices that are used to control the LCD glass oven system door, wherein, the described gas outlet that supplies is connected to the primary air control device, this primary air control device sucks air for gas outlet supply air or from described for gas outlet to described by solenoid valve, so that the supply of air and discharge are controlled.
8, according to claim 5 or the 6 described devices that are used to control the LCD glass oven system door, wherein, described first connecting rod rotates 90 ° by described second connecting rod.
9, according to claim 5 or the 6 described devices that are used to control the LCD glass oven system door, wherein, described door is connected to described first connecting rod, so that described door 90 ° by described connecting rod rotate 90 °, thereby opens or closes described.
10, the device that is used to control the LCD glass oven system door according to claim 7, wherein, described device also comprises:
Control module, this control module is controlled described solenoid valve, so that when opening the door of hope, discharge air for gas outlet from the described air filling part of described door and described adjacent described air filling part by described, and make when closing the door of described hope, supply air for gas outlet to the described air filling part of the door of described hope and described adjacent described air filling part by described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050084043A KR100718330B1 (en) | 2005-09-09 | 2005-09-09 | LCD Glass Oven System Door and The Controlling Apparatus Thereof |
| KR1020050084043 | 2005-09-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101120279A CN101120279A (en) | 2008-02-06 |
| CN100535711C true CN100535711C (en) | 2009-09-02 |
Family
ID=37836019
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006800008401A Active CN100535711C (en) | 2005-09-09 | 2006-08-18 | LCD glass oven system door and apparatus for controlling the same |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR100718330B1 (en) |
| CN (1) | CN100535711C (en) |
| TW (1) | TW200714955A (en) |
| WO (1) | WO2007029927A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103299148A (en) * | 2010-11-02 | 2013-09-11 | 伊娃·施瓦兹 | Multi-deck chamber furnace |
| TWI601914B (en) * | 2016-03-28 | 2017-10-11 | 盟立自動化股份有限公司 | Oven |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009129862A1 (en) * | 2008-04-25 | 2009-10-29 | Agc Flat Glass Europe Sa | Equipment for thermal processing of a coated substrate and polymerizer |
| CN102628651B (en) * | 2012-04-28 | 2015-07-08 | 深圳市华星光电技术有限公司 | Both-way circulating cooling system of furnace body in liquid crystal manufacturing |
| CN103293981B (en) * | 2013-05-31 | 2016-03-02 | 京东方科技集团股份有限公司 | The managing and control system of the monitoring method of sheet material quantity and device, drying oven in drying oven |
| KR101492937B1 (en) * | 2013-09-17 | 2015-02-12 | (주) 디바이스이엔지 | Heat treatment apparatus for lcd panel |
| JP2015108664A (en) * | 2013-12-03 | 2015-06-11 | 住友化学株式会社 | Apparatus for manufacturing optical member laminate |
| JP6409665B2 (en) * | 2015-04-14 | 2018-10-24 | 株式会社デンソー | Heating device |
| KR101949191B1 (en) * | 2017-11-07 | 2019-02-18 | 주식회사 버즈프리 | Door opening and closing device for swing and push type pressure chamber that can be individually opened and closed |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09306978A (en) * | 1996-05-15 | 1997-11-28 | Dainippon Screen Mfg Co Ltd | Temp. control of substrate, substrate heat treating apparatus and substrate supporting apparatus |
| JP2004205144A (en) * | 2002-12-26 | 2004-07-22 | Matsushita Electric Ind Co Ltd | Substrate drying apparatus for plasma display panel |
| KR100473993B1 (en) * | 2003-04-23 | 2005-03-10 | 주식회사 제우스 | Oven chamber position adjusting Apparatus for LCD glass substrate oven system |
| KR100558606B1 (en) * | 2003-08-12 | 2006-03-13 | 주식회사 제우스 | Fume eliminating apparatus for LCD glass oven chamber |
-
2005
- 2005-09-09 KR KR1020050084043A patent/KR100718330B1/en active IP Right Grant
-
2006
- 2006-08-18 CN CNB2006800008401A patent/CN100535711C/en active Active
- 2006-08-18 WO PCT/KR2006/003249 patent/WO2007029927A1/en active Application Filing
- 2006-09-06 TW TW095132864A patent/TW200714955A/en unknown
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103299148A (en) * | 2010-11-02 | 2013-09-11 | 伊娃·施瓦兹 | Multi-deck chamber furnace |
| CN103299148B (en) * | 2010-11-02 | 2015-11-25 | 伊娃·施瓦兹 | Multi-deck chamber furnace |
| TWI601914B (en) * | 2016-03-28 | 2017-10-11 | 盟立自動化股份有限公司 | Oven |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101120279A (en) | 2008-02-06 |
| WO2007029927A1 (en) | 2007-03-15 |
| KR100718330B1 (en) | 2007-05-16 |
| TW200714955A (en) | 2007-04-16 |
| KR20070029354A (en) | 2007-03-14 |
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