WO2007029927A1 - Lcd glass oven system door and apparatus for controlling the same - Google Patents

Lcd glass oven system door and apparatus for controlling the same Download PDF

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Publication number
WO2007029927A1
WO2007029927A1 PCT/KR2006/003249 KR2006003249W WO2007029927A1 WO 2007029927 A1 WO2007029927 A1 WO 2007029927A1 KR 2006003249 W KR2006003249 W KR 2006003249W WO 2007029927 A1 WO2007029927 A1 WO 2007029927A1
Authority
WO
WIPO (PCT)
Prior art keywords
air
lcd glass
door
oven system
packings
Prior art date
Application number
PCT/KR2006/003249
Other languages
French (fr)
Inventor
Yong-Ku Lee
Original Assignee
Vessel Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vessel Co., Ltd. filed Critical Vessel Co., Ltd.
Publication of WO2007029927A1 publication Critical patent/WO2007029927A1/en

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
    • C03B29/025—Glass sheets
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B17/00—Furnaces of a kind not covered by any preceding group
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D1/00—Casings; Linings; Walls; Roofs
    • F27D1/18—Door frames; Doors, lids, removable covers
    • F27D1/1858—Doors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D19/00—Arrangements of controlling devices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Optics & Photonics (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Electric Ovens (AREA)

Abstract

The present invention relates to an LCD glass oven system. Particularly, the present invention provides an LCD glass oven system door, which is openably provided on each of oven chambers and cooling chambers of the oven system. The LCD glass oven system door includes a door frame (120a, 120b), two air packings (110), which are respectively provided in upper and lower ends of the door frame, air ports (130), through which air is supplied into or discharged from the respective air packings, and air supply or discharge hoses (140), which are coupled to the respective air ports to supply or discharge air into or from the respective air packings. Therefore, the present invention can provide an LCD glass substrate oven system door and an apparatus for controlling the door which can maintain a sealed state of the oven system and reduce the space required for installation of the doors, thus increasing the number of glass substrates that can be received in the oven system.

Description

Description
LCD GLASS OVEN SYSTEM DOOR AND APPARATUS FOR
CONTROLLING THE SAME
Technical Field
[1] The present invention relates, in general, to LCD (liquid crystal display) glass substrate oven system doors and apparatuses for controlling the doors and, more particularly, to an LCD glass substrate oven system door and an apparatus for controlling the door which can reliably maintain a sealed state of an LCD glass substrate oven system and reduce the space required for installation of the doors, thus increasing the number of glass substrates that can be received in the LCD glass substrate oven system. Background Art
[2] FIG. 1 is a sectional view showing a conventional LCD glass oven system.
[3] Referring to FIG. 1, the conventional LCD glass oven system 10 heats and preheats glass substrates, which have undergone cleaning processes, before they are inserted into photoresist coating equipment. Furthermore, the conventional LCD glass oven system 10 heats the glass substrates coated with photoresist films for a predetermined time to bake the photoresist films, and then cools the glass substrates, which have undergone the baking process, to a normal temperature.
[4] The conventional LCD glass oven system 10 includes a plurality of oven chambers
20, a cooling chamber 30, a belt conveyor (not shown) and a loader (not shown).
[5] LCD glass substrates are carried to the loader by the belt conveyor. The LCD glass substrates, which have been carried to the loader, are inserted into the oven chambers 20 and are heated and dried in the oven chambers 20. The LCD glass substrates, which have been baked in the oven chambers 20, are cooled in the cooling chamber 30 to a normal temperature.
[6] As shown in FIG. 1, in the conventional art, doors 40 are openably provided on the respective oven chambers 20 and the cooling chamber 30 using hinges, and are opened and closed under control. However, because the oven chambers 20 and the cooling chamber 30 are spaced apart from each other by a relatively large distance, the efficiency of use of the space inside the oven system 10 is low.
[7] Furthermore, an increase in the size of glass substrates is the recent trend, for example, fifth-generation LCD glass substrates are 1,100 x 1,250mm (width x length), and sixth-generation LCD glass substrates are 1,800 x 2,100mm (width x length).
[8] Therefore, it is necessary to increase the space required for receiving LCD glass substrates. [9] Meanwhile, as described above, to openably rotate the doors 40 of the conventional
LCD glass oven system 10, the doors 40 are mounted to the main body using the hinges 42, so that the doors 40 are opened or closed using the hinges 42 under control.
[10] However, in the case of a conventional apparatus for controlling the LCD glass oven system doors, because the distances between the doors must be increased to ensure space for installation of the doors using the hinges 42, there is a problem in that the space for receiving glass substrates is reduced.
[11] Furthermore, because the conventional doors 40 have no device for sealing the oven system 10, the oven system 10 has related functional problems. Disclosure of Invention Technical Problem
[12] Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of the present invention is to provide an LCD glass substrate oven system door and an apparatus for controlling the door which can reliably maintain a sealed state of an LCD glass substrate oven system and reduce the space required for installation of the doors, thus increasing the number of glass substrates that can be received in the LCD glass substrate oven system. Technical Solution
[13] In an aspect, the present invention provides an LCD glass oven system door, openably provided on each of a plurality of oven chambers or cooling chambers of an LCD glass oven system. The LCD glass oven system door include: a door frame; two air packings respectively provided in upper and lower ends of the door frame; air ports, through which air is supplied into or discharged from the respective air packings; and air supply or discharge hoses coupled to the respective air ports to supply or discharge air into or from the respective air packings.
[14] The door frame may include: a first air packing support, with air packing support protrusions protruding inwards on upper and lower ends of the first air packing support; and a second air packing support provided in and fastened to the first air packing support and supporting the air packings.
[15] The air ports may be formed in the second air packing support.
[16] The air supply or discharge hoses may be coupled to a main air control device, which supplies or sucks air into or from the air supply or discharge hoses, via solenoid valves 150, so that supply and discharge of air are controlled.
[17] Furthermore, when air is supplied into the air packings, the adjacent doors may come into close contact with each other, and, when air is discharged from the air packings, a space may be defined between the adjacent doors.
[18] In another aspect, the present invention provides an apparatus for controlling an LCD glass oven system door, including: doors, each comprising a door frame, two air packings respectively provided in upper and lower ends of the door frame, air ports, through which air is supplied into or discharged from the respective air packings, and air supply or discharge hoses coupled to the respective air ports to supply or discharge air into or from the respective air packings; a first link provided around an end of the door to open and close the door; a second link coupled to the first link; and a cylinder coupled to the second link and moving the second link in a vertical direction.
[19] The door frame may include: a first air packing support, with air packing support protrusions protruding inwards on upper and lower ends of the first air packing support; and a second air packing support provided in and fastened to the first air packing support and supporting the air packings.
[20] The air supply or discharge hoses may be coupled to a main air control device, which supplies or sucks air into or from the air supply or discharge hoses, via solenoid valves, so that supply and discharge of air are controlled.
[21] The first link may be rotated at 90° by the second link, which is vertically moved by the cylinder.
[22] The door may be coupled to the first link so that the door is rotated at 90° by the rotation of the first link at 90°, and be thus opened or closed.
[23] The apparatus for controlling the LCD glass oven system door may further include a control unit controlling the solenoid valves such that, when a desired door is opened, air is discharged from the air packings of the door and adjacent doors through the air supply or discharge hoses, and such that, when the desired door is closed, air is supplied into the air packings of the desired door and the adjacent doors through the air supply or discharge hoses.
Advantageous Effects
[24] The present invention provides an LCD glass substrate oven system door and an apparatus for controlling the door which can reliably maintain the sealed state of an LCD glass substrate oven system and reduce the space required for installation of the doors, thus increasing the number of glass substrates that can be received in the LCD glass substrate oven system. Brief Description of the Drawings
[25] FIG. 1 is a sectional view showing a conventional LCD glass oven system;
[26] FIG. 2 is a front view showing an LCD glass oven system door and an apparatus for controlling the door, according to an embodiment of the present invention;
[27] FIG. 3 is an enlarged side sectional view of the LCD glass oven system door according to the present invention;
[28] FIG. 4 is a view showing an air supply and discharge device of the LCD glass oven system door according to the present invention; and
[29] FIG. 5 is an enlarged view of a circled portion A of FIG. 2.
[30] <Description of the elements in the drawings>
[31] 100: LCD glass oven system door according to an embodiment of the present invention
[32] 110: air packing 120a: first air packing support
[33] 120b: second air packing support 122: air packing support protrusion
[34] 130: air port 140: air supply or discharge hose
[35] 150: solenoid valve 160: main air control device
[36] 170: hose guide member
[37] 200: apparatus for controlling LCD glass oven system door according to the embodiment of the present invention
[38] 220: first link 240: second link
[39] 260: cylinder
Best Mode for Carrying Out the Invention
[40] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the attached drawings.
[41] FIG. 2 is a front view showing an LCD glass oven system door and an apparatus for controlling the door, according to an embodiment of the present invention. FIG. 3 is an enlarged side sectional view of the LCD glass oven system door according to the present invention. FIG. 4 is a view showing an air supply device of the LCD glass oven system door according to the present invention. FIG. 5 is an enlarged view of a circled portion A of FIG. 2.
[42] Referring to FIGS. 2 through 4, the LCD glass oven system door 100 according to the embodiment of the present invention includes a door frame (120a, 120b), two air packings 110, which are respectively provided in the upper and lower ends of the door frames 120a and 120b, air ports 130, through which air is supplied into or discharged from the respective air packings 110, and air supply or discharge hoses 140, which are coupled to the respective air ports 130 and thus serve as passages for supplying or discharge air into or from the air packings 110.
[43] The door frame (120a, 120b) includes a first air packing support 120a, which has air packing support protrusions 122 that protrude inwards on upper and lower ends of the first air packing support 120a, and a second air packing support 120b, which is disposed in and fastened to the first air packing support 120a and supports the air packings 110.
[44] Here, the air ports 130 are formed in the second air packing support 120b.
[45] Each air packing 110 has therein slots (not shown) corresponding to the air packing support protrusions 122 provided on the first air packing support 120a. Because the air packing support protrusions 122 and the second air packing support 120b are spaced apart from each other by predetermined distances, the air packing 110 can be reliably supported both by the air packing support protrusions 122, which are provided on the first air packing support 120a, and by the second air packing support 120b.
[46] The air supply or discharge hoses 140 are coupled to a main air control device 160, which supplies or sucks air into or from the air supply or discharge hoses 140, via solenoid valves 150, so that supply and discharge of air are controlled.
[47] When air is supplied into the air packings 110, adjacent LCD glass oven system doors 100 come into close contact with each other. When air is discharged from the air packings 110, a space is defined between the adjacent LCD glass oven system doors 100.
[48] Therefore, when the adjacent LCD glass oven system doors 100 are brought into close contact with each other by the supply of air through the air supply or discharge hoses 140, which are coupled to the respective air ports 130, the LCD glass oven system can maintain the sealed state required for conducting the operation of the LCD glass oven system which includes the operations of drying, preheating or heating LCD glass sheets inserted into the LCD glass oven system.
[49] Here, a hose guide member 170 is preferably provided to prevent the air supply or discharge hose 140 from being tangled in the LCD glass oven system door 100, but no hose guide member 170 need be provided.
[50] FIG. 5 is an enlarged view of a circled portion A of FIG. 2.
[51] Referring to FIG. 5, the apparatus 200 for controlling the LCD glass oven system door according to the embodiment of the present invention includes LCD glass oven system doors 100, first links 220, which are disposed around respective side ends of the LCD glass oven system doors 100 to open and close the LCD glass oven system doors 100, second links 240, which are coupled to the respective first links 220, and cylinders 260, which are coupled to the respective second links 240 to move the second links 240 in vertical directions.
[52] As described above, each LCD glass oven system door 100 includes a door frame
(120a, 120b), two air packings 110, which are provided in the upper and lower ends of the door frames 120a and 120b, air ports 130, through which air is supplied into or discharged from the respective air packings 110, and air supply or discharge hoses 140, which are coupled to the respective air ports 130 and thus serve as passages for supplying or discharging air into or from the air packings 110.
[53] The door frame (120a, 120b) includes a first air packing support 120a, which has air packing support protrusions 122 that protrude inwards on upper and lower ends of the first air packing support 120a, and a second air packing support 120b, which is disposed in and fastened to the first air packing support 120a and supports the air packings 110.
[54] The air supply or discharge hoses 140 are coupled to a main air control device 160, which supplies or sucks air into or from the air supply or discharge hoses 140, via solenoid valves 150, such that the supply and discharge of air are controlled.
[55] Each first link 220 is rotated at 90° by the associated second link 240, which is vertically moved by the associated cylinder 260.
[56] Each LCD glass oven system door 100, which is coupled to the associated first link
220, is rotated at 90° by the rotation of the first link 220 at 90°, thus being opened or closed.
[57] Each cylinder 260 serves to push each second link 240 downwards. That is, the first link 220, which is coupled to one end of the second link 240, is rotated forwards at 90° by the second link 240, which is pushed downwards by the pressure of the cylinder 260. The door 100, which is coupled to one end of the first link 220, is also rotated forwards at 90° by the first link 220, which is rotated forwards at 90°, thus being opened.
[58] Furthermore, the LCD glass oven system control apparatus 200 of the present invention may further include a control unit (not shown), which controls solenoid valves 150 such that, when desired LCD glass oven system doors 100 are opened, air is discharged from the air packings 110 of the LCD glass oven system doors 100 and adjacent LCD glass oven system doors 100 through the air supply or discharge hoses 140, and such that, when the desired LCD glass oven system doors 100 are closed, air is supplied into the air packings 110 of the LCD glass oven system doors 100 and adjacent LCD glass oven system doors 100 through the air supply or discharge hoses 140.
[59] Although the preferred embodiment of the present invention has been disclosed for illustrative purposes, the present invention is not limited to the preferred embodiment. Furthermore, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.

Claims

Claims
[1] An LCD glass oven system door, openably provided on each of a plurality of oven chambers or cooling chambers of an LCD glass oven system, the LCD glass oven system door comprising: a door frame; two air packings respectively provided in upper and lower ends of the door frame; air ports, through which air is supplied into or discharged from the respective air packings; and air supply or discharge hoses coupled to the respective air ports to supply or discharge air into or from the respective air packings.
[2] The LCD glass oven system door according to claim 1, wherein the door frame comprises: a first air packing support (120a), with air packing support protrusions (122) protruding inwards on upper and lower ends of the first air packing support
(120a); and a second air packing support (120b) provided in and fastened to the first air packing support (120a) and supporting the air packings.
[3] The LCD glass oven system door according to claim 2, wherein the air ports are formed in the second air packing support.
[4] The LCD glass oven system door according to claim 1, wherein the air supply or discharge hoses are coupled to a main air control device, which supplies or sucks air into or from the air supply or discharge hoses, via solenoid valves 150, so that supply and discharge of air are controlled.
[5] The LCD glass oven system door according to claim 1 or 2, wherein, when air is supplied into the air packings, the adjacent doors come into close contact with each other, and, when air is discharged from the air packings, a space is defined between the adjacent doors.
[6] An apparatus for controlling an LCD glass oven system door, comprising: doors, each comprising a door frame, two air packings respectively provided in upper and lower ends of the door frame, air ports, through which air is supplied into or discharged from the respective air packings, and air supply or discharge hoses coupled to the respective air ports to supply or discharge air into or from the respective air packings; a first link provided around an end of the door to open and close the door; a second link coupled to the first link; and a cylinder coupled to the second link and moving the second link in a vertical direction.
[7] The apparatus for controlling the LCD glass oven system door according to claim 6, wherein the door frame comprises: a first air packing support, with air packing support protrusions protruding inwards on upper and lower ends of the first air packing support; and a second air packing support provided in and fastened to the first air packing support and supporting the air packings.
[8] The apparatus for controlling the LCD glass oven system door according to claim 6 or 7, wherein the air supply or discharge hoses are coupled to a main air control device, which supplies or sucks air into or from the air supply or discharge hoses, via solenoid valves, so that supply and discharge of air are controlled.
[9] The apparatus for controlling the LCD glass oven system door according to claim 6 or 7, wherein the first link is rotated at 90° by the second link, which is vertically moved by the cylinder.
[10] The apparatus for controlling the LCD glass oven system door according to claim 6 or 7, wherein the door is coupled to the first link so that the door is rotated at 90° by the rotation of the first link at 90°, and is thus opened or closed.
[11] The apparatus for controlling the LCD glass oven system door according to claim 8, further comprising: a control unit controlling the solenoid valves such that, when a desired door is opened, air is discharged from the air packings of the door and adjacent doors through the air supply or discharge hoses, and such that, when the desired door is closed, air is supplied into the air packings of the desired door and the adjacent doors through the air supply or discharge hoses.
PCT/KR2006/003249 2005-09-09 2006-08-18 Lcd glass oven system door and apparatus for controlling the same WO2007029927A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2005-0084043 2005-09-09
KR1020050084043A KR100718330B1 (en) 2005-09-09 2005-09-09 LCD Glass Oven System Door and The Controlling Apparatus Thereof

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Publication Number Publication Date
WO2007029927A1 true WO2007029927A1 (en) 2007-03-15

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KR (1) KR100718330B1 (en)
CN (1) CN100535711C (en)
TW (1) TW200714955A (en)
WO (1) WO2007029927A1 (en)

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WO2009129862A1 (en) * 2008-04-25 2009-10-29 Agc Flat Glass Europe Sa Equipment for thermal processing of a coated substrate and polymerizer
JP2015108664A (en) * 2013-12-03 2015-06-11 住友化学株式会社 Apparatus for manufacturing optical member laminate
JP2016200378A (en) * 2015-04-14 2016-12-01 株式会社デンソー Heating device

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DE102010043229A1 (en) * 2010-11-02 2012-05-03 Eva Schwartz Multilayer chamber furnace
CN102628651B (en) * 2012-04-28 2015-07-08 深圳市华星光电技术有限公司 Both-way circulating cooling system of furnace body in liquid crystal manufacturing
CN103293981B (en) * 2013-05-31 2016-03-02 京东方科技集团股份有限公司 The managing and control system of the monitoring method of sheet material quantity and device, drying oven in drying oven
KR101492937B1 (en) * 2013-09-17 2015-02-12 (주) 디바이스이엔지 Heat treatment apparatus for lcd panel
TWI601914B (en) * 2016-03-28 2017-10-11 盟立自動化股份有限公司 Oven
KR101949191B1 (en) * 2017-11-07 2019-02-18 주식회사 버즈프리 Door opening and closing device for swing and push type pressure chamber that can be individually opened and closed

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JP2004205144A (en) * 2002-12-26 2004-07-22 Matsushita Electric Ind Co Ltd Substrate drying apparatus for plasma display panel
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KR20050017991A (en) * 2003-08-12 2005-02-23 주식회사 제우스 Fume eliminating method and apparatus for LCD glass oven chamber

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JP2004205144A (en) * 2002-12-26 2004-07-22 Matsushita Electric Ind Co Ltd Substrate drying apparatus for plasma display panel
KR20040092000A (en) * 2003-04-23 2004-11-03 주식회사 제우스 Oven chamber position adjusting Apparatus for LCD glass substrate oven system
KR20050017991A (en) * 2003-08-12 2005-02-23 주식회사 제우스 Fume eliminating method and apparatus for LCD glass oven chamber

Cited By (3)

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Publication number Priority date Publication date Assignee Title
WO2009129862A1 (en) * 2008-04-25 2009-10-29 Agc Flat Glass Europe Sa Equipment for thermal processing of a coated substrate and polymerizer
JP2015108664A (en) * 2013-12-03 2015-06-11 住友化学株式会社 Apparatus for manufacturing optical member laminate
JP2016200378A (en) * 2015-04-14 2016-12-01 株式会社デンソー Heating device

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Publication number Publication date
CN101120279A (en) 2008-02-06
CN100535711C (en) 2009-09-02
KR100718330B1 (en) 2007-05-16
TW200714955A (en) 2007-04-16
KR20070029354A (en) 2007-03-14

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