KR20040092000A - Oven chamber position adjusting Apparatus for LCD glass substrate oven system - Google Patents

Abstract

PURPOSE: An apparatus for controlling the position of an oven chamber of an LCD glass substrate oven system is provided to selectively raise the oven chamber to prepare a space for maintenance. CONSTITUTION: An apparatus for controlling the positions of oven chambers(110) of an LCD glass substrate oven system(100) includes a column(120), a plate(130), a driver, combining members(160), and a cylinder(170). One side of the column is combined with the oven chambers vertically slidably. The plate is vertically slidably combined with the other side of the column. The driver drives the plate. The combining members are placed on both sides of each of the oven chambers. The cylinder is included in the plate and selectively combined with the combining members in order to vertically move the oven chambers.

Description

Oven chamber position adjusting Apparatus for LCD glass substrate oven system

The present invention relates to an oven chamber positioning device of a liquid crystal display (LCD) glass substrate oven system, and more particularly, to an oven system having a plurality of oven chambers for a large LCD glass substrate. By selectively raising the oven chamber to provide a space for maintenance, a compact process line can be constructed by minimizing the separate work space required for the maintenance of an enlarged LCD glass substrate, and stable operation of the oven system. And an oven chamber positioning device of an LCD glass substrate oven system that enables maintenance and maintenance.

In thin film transistor (TFT) LCD, a thin film transistor, a pixel electrode, an RGB pixel, and a common electrode include a thin film deposition process, a photoresist coating process, a baking process, an exposure process, a developing process, and an etching process. It is formed while repeating the process.

FIG. 1 shows that the glass substrate, which has been cleaned in the photoresist process of the TFT production process, is dried and preheated by applying heat to the photoresist coating facility before being put into the photoresist coating equipment, or the photoresist film is coated on the glass substrate. The oven system 10 which hardens a photoresist film | membrane by applying heat for some time (baking), and cools the baked glass substrate to room temperature is shown.

As shown in FIG. 1, the oven system 10 includes one or more oven chambers 20, a cooling chamber 30, a belt conveyor 40, and a loader 50. The LCD glass substrate 2 transferred from the belt conveyor 40 to the loader 50 is gripped by a robot (not shown) and stored in the oven chamber 20 to be dried and heated. After the baking is completed in the oven chamber 20, the LCD glass substrate 2 is cooled to room temperature in the cooling chamber 30.

In the oven system 10 as described above, since the photoresist is dried inside the oven chamber 20 and impurities are accumulated, it is necessary to perform regular or irregular maintenance, such as cleaning or function check.

To this end, a guide 14 and a slider 22, which are called "LM guides (Linear motion guides)", are conventionally provided between both columns 12 and the chambers 20 and 30, and the chamber 20 The drawer 30 was pulled out to perform maintenance work.

That is, as shown in FIG. 2, the oven chamber 20 requiring maintenance is drawn out to the front of the oven system 10 using the guide 14 and the slider 22, and then the oven chamber 20 is removed. Opening the upper cover 24 at a predetermined angle was performed to clean or repair the interior.

However, in order to draw out the oven chamber 20 as described above, a very long length L of a minimum working space is required in front of the oven system 10, so that a lot of space must be secured in the LCD manufacturing process line. There is this.

Furthermore, the TFT LCD glass has to be secured for maintenance as, for example, the fifth generation of LCD glass is 1,100 × 1,250mm (width × length) and the 6th generation is gradually enlarged to 1,800 × 2,100mm. The space had to grow gradually.

In particular, as the size of the LCD glass increases, the weight of one oven chamber 20 exceeds 1 ton, and thus, when the draw length of the oven chamber 20 becomes longer as described above, the guide 14 and the slider 22 are unreasonable. The load is applied, thereby causing a problem of deformation or shortening of life. Therefore, in the related art, in order to prevent this, there is a closed end to design the guide 14 and the slider 22 to be larger.

The present invention was developed in order to solve the conventional problems as described above, by selectively raising the oven chamber to provide a space for maintenance, a separate workspace required for maintenance of the LCD glass substrate to be enlarged It is an object of the present invention to provide an oven chamber positioning device of an LCD glass substrate oven system that enables the construction of a compact process line by minimizing the number of parts and enables stable operation and maintenance of the oven system.

1 is a front view of a conventional oven system

FIG. 2 is a side view of FIG. 1 illustrating a state in which one oven chamber is taken out for maintenance of an oven chamber in a conventional oven system. FIG.

Figure 3a is a front view showing the overall structure of the oven system according to the present invention

Figure 3b is a perspective view of the main portion showing in detail the oven chamber position adjusting apparatus according to the present invention

Figure 3c shows an oven chamber position adjusting device according to the present invention, an enlarged view of the main portion of Figure 3a

Figure 3d shows an oven chamber position adjusting device according to the present invention, a plan view of Figure 3a

Figure 3e is a cross-sectional view taken along the line A-A of Figure 3d, showing an oven chamber position adjusting apparatus according to the present invention.

Figure 3f shows the oven chamber position adjusting device according to the present invention, the main right side view of Figure 3a

4A is a view showing a state in which the oven chamber is moved using the oven chamber positioning device in the state of FIG. 3E to maintain the oven chamber according to the present invention.

4B is a right side view of FIG. 4A

<Explanation of symbols for the main parts of the drawings>

100: oven system 101: frame

110: oven chamber 111: top cover

112,121,122: guide 120: column

130: elevating plate 131,141,142: slider

150: drive device 151: screw shaft

152: bidirectional motor 160: coupling sphere

161: coupling hole 170: working cylinder

171: piston rod 172: coupling pin

In order to achieve the above object, the oven chamber position adjusting device of the LCD glass substrate oven system according to the present invention, in the LCD glass substrate oven system having a plurality of oven chambers, the upper cover is hinged rotatably open and close, Columns which are placed in front of and behind the left and right sides of the plurality of oven chambers, and wherein the plurality of oven chambers are coupled to one side thereof so as to slide upward and downward; An elevating plate coupled to the opposite side of the column so as to slide upward and downward; A driving device for elevating and driving the elevating plate; Couplers provided on both sides of each of the plurality of oven chambers; And an actuating cylinder provided on the elevating plate to elevate the oven chamber and having a piston rod selectively coupled to the coupler.

According to such a structure, the space required for maintenance can be secured by lifting the oven chamber of the upper end of the oven chamber requiring maintenance in the vertical direction. When performing the maintenance work, it is possible to perform the operation by opening the top cover through the space secured above as the oven chamber is maintained as it is without moving.

Here, both sides of each oven chamber is provided with an intermediate plate coupled to the column so as to slide up and down, the inner surface of each intermediate plate is coupled to each oven chamber so as to slide in a horizontal direction, By providing the coupler on both sides of each of the intermediate plates, the oven chamber can be pulled out in the horizontal direction.

The drive device for elevating and driving the elevating plate may be constituted by a screw shaft and a bidirectional motor for rotating the screw shaft.

In addition, the coupling hole may be provided with a coupling hole, the end of the piston rod may be provided with a coupling pin that can be inserted into the coupling hole.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying exemplary drawings.

3A to 3F show an oven chamber position adjusting device of an LCD glass substrate oven system according to a preferred embodiment of the present invention. FIG. 3A shows a front view of the entire structure, and FIG. 3B shows a main part of the position adjusting device. A perspective view is shown, FIG. 3C shows an enlarged view of the main part of FIG. 3A, FIG. 3D shows a plan view of FIG. 3A, FIG. 3E shows a cross-sectional view taken along line AA of FIG. 3D, and FIG. 3F shows the main part of FIG. 3A. The right side view is shown.

3A to 3F, the oven system 100 according to the present invention includes a plurality of oven chambers 110 in which an upper cover 111 is rotatably hinged. The left and right sides of the oven chamber 110, the front and rear of the column 120 is installed, one side (inner side) of the column 120, the plurality of oven chambers 110, the upper and lower sliding movement Possibly combined. In addition, the lifting plate 130 is coupled to the opposite side (outer side) of the column 120 so as to slide upward and downward.

In the embodiment shown in the figure, the oven chamber 110 is configured to be pulled out also in the horizontal direction, for this purpose is provided with an intermediate plate 140 between the oven chamber 110 and the column 120. . The oven chamber 110 is slidably coupled to the inner surface of the intermediate plate 140 in a horizontal direction, and the intermediate plate 140 is slidably coupled to the column 120 in an up and down manner. Therefore, the oven chamber 110 is capable of linear movement in the vertical direction and linear movement in the horizontal direction.

In the embodiment shown in the drawings, the front and rear horizontal sliding movement of the oven chamber 110 and the intermediate plate 140, the inner surface of the intermediate plate 140 and the outside of the oven chamber 110. Each side is provided with a guide 112 and a slider 141. In addition, the up and down sliding movement of the intermediate plate 140 with respect to the column 120, the guide 121 and the slider (on the inner surface of the column 120 and the outer surface of the intermediate plate 140, respectively) 142) is implemented.

In addition, the up and down sliding movement of the elevating plate 130 with respect to the column 120, the guide 122 and the slider (on the outer surface of the column 120 and the inner surface of the elevating plate 130, respectively) 131 is implemented.

The guide and the sliders 112, 141, 121, 142, 122, 131 are in the form of so-called 'dove tail coupling' type LM guides.

In addition, the present invention, the drive device 150 for elevating and driving the elevating plate 130 in order to elevate the oven chamber 20, and the coupler 160 provided on both sides of each oven chamber 110 and It is provided on the elevating plate 130 includes a working cylinder 170 that is operated to be coupled to the coupler 160.

The driving device 150 includes a screw shaft 151 and a bidirectional motor 152 for rotating the screw shaft 151 thereof. The screw shaft 151 is screwed to one side of the elevating plate 130, the upper and lower ends thereof are rotatably supported while being axially immovable to the frame 101 of the oven system.

In this embodiment, the upper and lower ends of the screw shaft 151 are supported by the bearing 153, the boss plate 132 is formed on the elevating plate 130, the screw shaft 151 is screwed. The motor 152 has a pulley 152a connected to the pulley 151a of the screw shaft 151 by a belt 154.

Accordingly, when the bidirectional motor 152 is driven, the screw shaft 151 rotates in place, and the lifting plate 130 screwed to the screw shaft 151 moves up and down. The vertical movement of the elevating plate 130 is made stable by moving the slider 131 along the guide 122 of the column 120.

In the embodiment shown in the drawings, the drive device 150 has been described in a configuration including a motor 152 and a screw shaft 151. However, the present invention is not limited to such a configuration, and may be configured to elevate the elevating plate 130 with a hydraulic / pneumatic cylinder. In addition, in the present embodiment, the configuration in which the motor 152 and the screw shaft 151 are connected by the belt 154 has been described. However, the connection between the motor 512 and the screw shaft 151 is excluded, except for the connection of the belt 154. It can also be set as the structure which installed a reducer.

The coupler 160 is provided at both sides of the oven chamber 110, and a coupling hole 161 is formed in the middle thereof. As described above, when the intermediate plate 140 is provided between the oven chamber 100 and the column 120, the coupler 160 is provided at the intermediate plate 140.

The tip of the piston rod 171 of the operation cylinder 170 is fixed to the elevating plate 130 toward the coupling hole 160. A coupling pin 172 that is insertable into the coupling hole 161 is formed at the tip of the piston rod 171 of the operation cylinder 170.

Therefore, when the coupling pin 172 of the operation cylinder 170 is inserted into the coupling hole 160, the elevating plate 130, the intermediate plate 140 and the oven chamber 110 are integrated.

Therefore, when the bidirectional motor 152 is driven, the oven chamber 110 is raised and lowered together with the lifting plate 130.

4A and 4B show the state in which the oven chamber is moved in order to maintain the oven chamber in the present invention made as described above. The accompanying drawings will be described with reference to FIG. 3B.

In FIG. 4A and FIG. 4B, the oven chamber 110 which requires maintenance set the oven chamber 110 which is 3rd from the top as an example. In order to maintain the oven chamber 110 in the third from above, it is necessary to lift the second oven chamber 110 from above.

To this end, when the bidirectional motor 152 is driven in the upward direction of the elevating plate 130, the screw shaft 151 connected by the motor 152 and the belt 154 and the pulleys 152a and 151a rotates. Since the screw shaft 151 can only rotate in place and is screwed to the elevating plate 130 at the same time, the elevating plate 130 is raised by the rotation of the screw shaft 151. In this case, since the elevating plate 130 is slidably connected to the column 120 by the guide 122 and the slider 131, the elevating plate 130 may linearly move in the upward direction.

The oven chamber 110 (the third one from above in the illustrated example) to be maintained by the elevating plate 130 on both sides is thus placed in the oven chamber 110 (the second one from above in the illustrated example). When matched, both operating cylinders 170 are operated and their piston rods 171 are advanced so that coupling pins 172 at the tip of the piston rods 171 are provided on both sides of the second oven chamber 110. It is inserted into the coupling hole 161 of the coupler 160, respectively.

When the bidirectional motor 152 is further rotated in the upward direction in the above state, the lifting plate 130 screwed to the screw shaft 151 is raised, and the working cylinder 170 is raised in accordance with the lifting of the lifting plate 130. Coupling pin 172 of the) will lift the coupling sphere (160). The coupler 160 is provided in the intermediate plate 140 to raise the intermediate plate 140, which is the guide plate 112 and the slider 141 with respect to the oven chamber 110. As it is connected to the slide only in the horizontal direction, the oven chamber 110 of the immediately above is required to be lifted according to the rise of the intermediate plate 140 is lifted.

At this time, the intermediate plate 140 provided in the oven chamber 110 immediately above the maintenance is possible to slide up and down in the column 120 as the guide 121 and the slider 142. And intermediate plate 140 connected directly to the oven chamber 110, that is, to the oven chamber 110 at the top end of the drawing, in the same manner as the oven chamber 110 described above. Since the upper and lower slides are coupled to each other, the oven chamber 110 is lifted by the oven chamber 110 below.

When the oven chamber 110 is lifted as described above, the oven chamber 110 is opened between the oven chamber 110 and the oven chamber 110 immediately below, which requires maintenance, to secure an appropriate space for maintenance.

When performing maintenance, the oven chamber 110 may be maintained without moving, as shown in FIG. 4B, the upper cover 111 may be opened and the operation may be performed.

Therefore, it is not necessary to draw out the oven chamber 110 as in the prior art, thereby eliminating the need to provide a space for maintenance of the oven chamber in front of the oven system, thereby enabling the construction of a compact process line. . In addition, since the oven chamber 110 does not need to be excessively drawn out during maintenance, the weight of the oven chamber 110 is prevented from being applied to the frame or the system equipment, thereby enabling stable operation of the oven system.

On the other hand, if the need arises to open the top cover 111 of the oven chamber 110 more than the maintenance work, if necessary, the oven chamber 110 may be withdrawn to the front. In this case, the horizontal sliding motion of the oven chamber 110 is enabled by the combination of the guide 112 and the slider 141 of the oven chamber 110 and the intermediate plate 140. However, even at this time, the drawing length L 'of the oven chamber 110 can be minimized by the space provided between the oven chambers 110.

In FIG. 4A and FIG. 4B, the third oven chamber 110 is maintained from the top. However, as described above, when the oven chamber 110 of the uppermost part is maintained, the upper cover 111 of the oven chamber 110 is maintained. Open it as is. At this time, the top of the oven system 100 should be provided in an open state. In addition, if you maintain the second one, lift the first one. If you maintain the third one, lift the first one and the second one at a time. The process can be performed regardless of the number of oven chambers, such as lifting the third one at a time.

On the other hand, in the embodiment shown in the figure has been described as the cooling chamber 30 at the bottom, this is an example of an oven system having a combination of the oven function and the cooling function, the form of the present invention is It doesn't have to be influenced. If the cooling function is not required, the cooling chamber 30 becomes the oven chamber 110.

As described above, the present invention by selectively raising the oven chamber to provide a space for maintenance, it is not necessary to provide a separate work space for the maintenance of the oven chamber in front of the equipment to build a compact process line This is possible.

In addition, since the oven chamber does not need to be excessively drawn out during maintenance, the weight of the oven chamber is prevented from being applied to the frame or the system equipment, thereby enabling stable operation of the oven system.

Claims (6)

In the LCD glass substrate oven system 100 having a plurality of oven chamber 110, the upper cover 111 is hinged rotatably on the upper side, Columns 120 are placed in the left, right, front, rear of the plurality of oven chamber 110, the plurality of oven chamber 110 is coupled to one side thereof so as to slide up and down; An elevating plate 130 coupled to the opposite side of the column 120 to be slidable up and down; A driving device 150 for elevating and driving the elevating plate 130; Couplers 160 provided on both sides of each of the plurality of oven chamber 110; And In order to elevate the oven chamber 110, the lifting plate 130 is provided, characterized in that it comprises an operating cylinder 172 having a piston rod 171 is selectively coupled to the coupler 160 Oven chamber positioning device of the LCD glass substrate oven system. The method of claim 1, In order to be able to withdraw the upper and lower elevating oven chamber 110 in the horizontal direction, Both sides of each oven chamber 110 are provided with an intermediate plate 140 coupled to the column 120 so as to be slidably up and down, and the inner side surfaces of the respective intermediate plates 140 each oven chamber ( 110 is slidably coupled in the horizontal direction, the oven chamber position control device of the LCD glass substrate oven system, characterized in that the coupling sphere 160 is provided on both sides of each intermediate plate (140). The method of claim 1, Drive device 150 for elevating and driving the elevating plate 130, Screw shaft 151 is screwed to one side of the elevating plate 130, the upper and lower ends are rotatably supported while not axially movable to the frame 101 of the oven system, Oven chamber position control device of the LCD glass substrate oven system, characterized in that it comprises a bidirectional motor (152) connected to one end of the screw shaft (151) for rotating the screw shaft (151). The method according to claim 1 or 2, The coupling hole 160 is provided with a coupling hole 161, the end of the piston rod 171 is provided with a coupling pin 172 that can be inserted into the coupling hole 161, the LCD glass substrate oven Oven chamber positioning device in the system. The method of claim 1, The oven chamber 110 is coupled to the column 120 so as to be capable of sliding up and down, is made of an EL guide by the dovetail coupling, The elevating plate 130 is coupled to the column 120 to be configured to slide up and down, the oven chamber position control of the LCD glass substrate oven system, characterized in that consisting of a guide 122 and the slider 131. Device. The method of claim 2, The intermediate plate 140 is coupled to the column 120 to be configured to slide up and down, the guide 121 and the slider 142 is composed of, The oven chamber 110 is slidably coupled in the horizontal direction to the intermediate plate 140, the oven chamber position of the LCD glass substrate oven system, characterized in that consisting of a guide 112 and the slider 141. Regulating device.