CN100527342C - Flat-panel display device with gate-modulated multi-tilt cathode structure and its preparing process - Google Patents
Flat-panel display device with gate-modulated multi-tilt cathode structure and its preparing process Download PDFInfo
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- CN100527342C CN100527342C CNB2007100546152A CN200710054615A CN100527342C CN 100527342 C CN100527342 C CN 100527342C CN B2007100546152 A CNB2007100546152 A CN B2007100546152A CN 200710054615 A CN200710054615 A CN 200710054615A CN 100527342 C CN100527342 C CN 100527342C
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Abstract
The invention relates to a flat-panel display of a grid-controlled multiple-tilted cathode structure and the making process thereof, comprising: sealed vacuum cavity composed of anode glass panel, cathode glass panel, and peripheral glass frame; anode conducting layer on the anode glass panel and fluorescent powder layer prepared on the anode conducting layer; grid lead layer, carbon nanotube and grid-controlled multiple-tilted cathode structure on the cathode glass panel; supporting wall structure and degassing agent auxiliary component between the anode glass panel and cathode glass panel, and it can further raise electron emission efficiency of carbon nanotube cathode and number of emitted electrons, improve control function of grid, helps to improve display resolution and image quality, and has advantages of stable and reliable making course, simple making process, low making cost, and simple structure.
Description
Technical field
The invention belongs to the mutual crossing domain in technical field of flat panel display, microelectronics science and technology field, vacuum science and technical field and nanometer science and technology field, relate to the element manufacturing of panel field emission display, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, particularly a kind of flat-panel monitor of gate-modulated multi-tilt cathode structure and manufacture craft thereof.
Background technology
In light weight, characteristics such as power consumption is little, volume is little, large-screen that the field emission flat-panel display that utilizes carbon nano-tube to make as cathode material has, its operation principle is almost completely identical with cathode-ray tube display, therefore has the high image quality of conventional cathode ray tube display.At present, the research and development of field-emitter display and production have all obtained swift and violent development, begin practical application in relevant departments such as military affairs.Following field-emission plane display will develop to high brightness, high-resolution, full color and large scale direction.
In order to reduce the total device cost, so that interrelate with conventional integrated drive electronics, the field-emitter display of making three-stage structure has become a kind of inevitable choice.At present, in most display, all adopt grid structure to be positioned at the version of carbon nanotube cathod superstructure.The manufacture craft of this version is relatively simple, and the control action of grid structure is remarkable, but formed grid current is bigger, and the grid operating voltage need be improved also than higher.Further reduce operating voltage of grid structure, this is that the quality system that meets the low pressure flat device requires.To reduce the distance between grid structure and the carbon nanotube cathod structure on the one hand as much as possible, reach the purpose that reduces grid voltage, also can be improved on the other hand the surface configuration of carbon nanotube cathod, so that can just can launch a large amount of electronics under lower electric field strength, what this was also indirect can reduce operating voltage of grid structure.In addition, in order further to improve the display brightness of integral device, this just needs carbon nanotube cathod as much as possible to come emitting electrons, need to increase the electron emission area of carbon nanotube cathod and the electronic transmitting efficiency that improves carbon nano-tube, these all need take solid measure to reach in practical devices manufacturing process.So, in the manufacturing process of practical devices, how further to reduce operating voltage of grid, how further to strengthen the electric field strength on top, carbon nanotube cathod surface, these all are the problems that is worthy of attentive consideration.
In addition, in the middle of the panel field emission display spare of three-stage structure, guaranteeing that grid structure has carbon nanotube cathod under the prerequisite of good control action, also need to reduce as much as possible the total device cost, carry out reliable and stable, with low cost, function admirable, high quality devices is made.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect that exists in the above-mentioned flat-panel display device and provide a kind of with low cost, manufacturing process is reliable and stable, be made into the power height, the flat-panel monitor and the manufacture craft thereof of gate-modulated multi-tilt cathode structure simple in structure.
The object of the present invention is achieved like this, comprise by anode glass panel, cathode glass faceplate and all around glass enclose the sealed vacuum chamber that frame constitutes; Anode conductive layer and the phosphor powder layer of preparation on anode conductive layer are arranged on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate and getter subsidiary component, cathode glass faceplate is provided with grid lead layer, carbon nano-tube and gate-modulated multi-tilt cathode structure.
The backing material of described gate-modulated multi-tilt cathode structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer that prints on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; The insulation paste layer of the printing above the cathode leg layer forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant block layer part; There is beveled aperture in the wall, be that beveled aperture is a circular face in the formed cross section of wall upper surface, upper surface from wall, its hole madial wall tilts gradually, the diameter of beveled aperture is more and more littler, till the lower surface position of arrival interval layer, big more the closer to the diameter of the upper surface beveled aperture of wall; The beveled aperture bottom will expose the cathode leg layer in the wall; Metal level in the wall after the lip-deep etching of beveled aperture madial wall the latter half forms negative electrode extended line layer; Negative electrode extended line layer depends on the surface of beveled aperture madial wall and the cathode leg layer is interconnected; The silver slurry layer that prints in the wall beveled aperture forms and promotes one deck; Promote one deck and present narrow thin cylinder type, the central axis of its central axis and beveled aperture coincides, and the bottom closely contacts with negative electrode extended line layer; The height that promotes one deck is identical with the upper level of wall; Form two layers of liftings at the silver slurry layer that promotes the printing of one deck side in the wall beveled aperture; The top section that promotes two layers presents the similar trigonometric form shape, be looped around promote one deck around, form cam ring type shape; Promote two layers and be positioned at the centre position that promotes one deck and negative electrode extended line layer, the bottom closely contacts with negative electrode extended line layer; The height that promotes two layers is identical or slightly higher with the height of negative electrode extended line layer, but can not surpass the height that promotes one deck; Promote the upper surface of one deck, the metal level that promotes after the etching of upper surface of two layers upper surface and negative electrode extended line layer forms cathode conductive layer; Cathode conductive layer will cover the whole upper surfaces that promote one deck, two layers of liftings and negative electrode extended line layer, and is interconnected; The insulation paste layer that promotes the upper top printing of one deck forms cathode coating; Cathode coating only is positioned at the upper surface that promotes one deck, and there is not cathode coating in other position; Metal level after the etching in the wall beveled aperture on the madial wall forms the regulation and control grid layer; The regulation and control grid layer is positioned at wall upper surface and beveled aperture madial wall interfaces position, be divided into two parts, a part depends on the surface of beveled aperture madial wall along the direction of beveled aperture madial wall, and another part is directed upwards towards anode direction perpendicular to the upper surface of wall; Metal level after the etching on the wall upper surface forms the grid lead layer; Grid lead layer and regulation and control grid layer are interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer will cover whole grid lead layers, but can not cover the regulation and control grid layer; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described gate-modulated multi-tilt cathode structure is for being fixed on the cathode glass faceplate; The cathode leg layer is metal gold, silver, copper, aluminium, molybdenum, chromium, tin, indium; Negative electrode extended line layer is metal gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The regulation and control grid layer is metal gold, silver, aluminium, molybdenum, chromium; The trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer is metal gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft that has the flat-panel monitor of gate-modulated multi-tilt cathode structure, its manufacture craft is as follows:
1) making of cathode glass faceplate: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form block layer;
3) making of cathode leg layer: on block layer, prepare a metal level, form the cathode leg layer after the etching;
4) making of wall: printing insulation paste on the cathode leg layer forms wall behind baking, sintering process;
5) making of negative electrode extended line layer: the surface preparation in the latter half of wall beveled aperture madial wall goes out a metal molybdenum layer, forms negative electrode extended line layer after the etching;
6) making of lifting one deck: printed silver slurry in the wall beveled aperture forms behind baking, sintering process and promotes one deck;
7) promote two layers making: in the wall beveled aperture, promote the side printed silver slurry of one deck, behind baking, sintering process, form and promote two layers;
8) making of cathode conductive layer: on the upper surface that promotes one deck, two layers of liftings and negative electrode extended line layer, prepare a metal level, form cathode conductive layer after the etching;
9) making of cathode coating:, behind baking, sintering process, form cathode coating promoting the upper top printing insulation paste of one deck;
10) making of regulation and control grid layer: in the wall beveled aperture, prepare a metal level, form the regulation and control grid layer after the etching;
11) making of grid lead layer: on the wall upper surface, prepare a metal level, form the grid lead layer after the etching;
12) the tectal making of grid: printing insulation paste layer on the grid lead layer forms the grid cover layer behind baking, sintering process;
13) cleaning surfaces of gate-modulated multi-tilt cathode structure is handled: clean is carried out on the surface to gate-modulated multi-tilt cathode structure, removes impurity and dust;
14) preparation of carbon nano-tube: with made of carbon nanotubes on cathode conductive layer;
15) reprocessing of carbon nano-tube: carbon nano-tube is carried out reprocessing, improve field emission characteristics;
16) making of anode glass panel: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
17) making of anode conductive layer: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
18) making of insulation paste layer: at the non-display area printing insulation paste layer of anode conductive layer;
19) making of phosphor powder layer: the viewing area printing phosphor powder layer on anode conductive layer;
20) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure and all around glass enclose frame and be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
21) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 18 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 19 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 21 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The present invention has following good effect:
At first, in described gate-modulated multi-tilt cathode structure, carbon nanotube cathod has been produced on the cathode conductive layer that presents a plurality of inclined-planes above.Like this, can greatly increase the electron emission area of carbon nanotube cathod, make that more carbon nanotube cathod all participates in launching a large amount of electronics, improve the electronics emission quantity of carbon nanotube cathod; Make full use of the carbon nanotube cathod endemism that marginal position is launched a large amount of electronics, improved the electronic transmitting efficiency of carbon nanotube cathod, helped further to improve the display brightness of integral device.Simultaneously, under the control action of grid, be positioned at the carbon nano-tube that promotes above one deck and form side emission phenomenon, be positioned at two layers of liftings and the carbon nano-tube above the negative electrode extended line layer and then form high grid emission phenomenon, such combination makes and has made full use of its advantage, can greatly strengthen the emission effciency and the quantity of carbon nanotube cathod.
Secondly, in described gate-modulated multi-tilt cathode structure, regulation and control grid layer and grid lead layer structure have been made respectively.The grid lead layer is responsible for external voltage is delivered to device inside, and the regulation and control grid layer then is the strong control of electronics emission carrying out to carbon nanotube cathod.When after applying appropriate voltage on the grid, will form powerful electric field strength on top, carbon nanotube cathod surface, force carbon nanotube cathod to launch a large amount of electronics.Regulation and control grid layer part along the beveled aperture madial wall can apply electric field strength to carbon nanotube cathod, regulation and control grid layer part perpendicular to the wall upper surface then is to play simultaneously carbon nano-tube is applied electric field strength and to the dual-use function that electron beam focuses on, helps further to improve the display resolution of integral device.In addition, in described gate-modulated multi-tilt cathode structure, do not adopt special structure fabrication material, do not adopt special device making technics yet, this has just further reduced the cost of manufacture of whole flat-panel display device to a great extent, simplify the manufacturing process of device, can carry out large-area element manufacturing, helped carrying out business-like large-scale production.
Description of drawings
Fig. 1 has provided the vertical structure schematic diagram of gate-modulated multi-tilt cathode structure;
Fig. 2 has provided the transversary schematic diagram of gate-modulated multi-tilt cathode structure;
Fig. 3 has provided and has had the structural representation gate-modulated multi-tilt cathode structure emitting structural, the carbon nanotube field emission flat-panel screens.
Embodiment
Described a kind of flat-panel monitor that has gate-modulated multi-tilt cathode structure, comprise by anode glass panel [14], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [19] is constituted; Anode conductive layer [15] and the phosphor powder layer [17] of preparation on anode conductive layer are arranged on the anode glass panel; Grid lead layer [11], carbon nano-tube [13] and gate-modulated multi-tilt cathode structure are arranged on cathode glass faceplate; Supporting wall structure between anode glass panel and cathode glass faceplate [18] and getter [20] subsidiary component.
Described gate-modulated multi-tilt cathode structure comprises cathode glass faceplate [1], block layer [2], cathode leg layer [3], wall [4], negative electrode extended line layer [5], promotes one deck [6], lifting two layers of [7], cathode conductive layer [8], cathode coating [9], regulation and control grid layer [10], grid lead layer [11], grid cover layer [12] and carbon nano-tube [13] part.
The backing material of described gate-modulated multi-tilt cathode structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer that prints on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; The insulation paste layer of the printing above the cathode leg layer forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant block layer part; There is beveled aperture in the wall, be that beveled aperture is a circular face in the formed cross section of wall upper surface, upper surface from wall, its hole madial wall tilts gradually, the diameter of beveled aperture is more and more littler, till the lower surface position of arrival interval layer, big more the closer to the diameter of the upper surface beveled aperture of wall; The beveled aperture bottom will expose the cathode leg layer in the wall; Metal level in the wall after the lip-deep etching of beveled aperture madial wall the latter half forms negative electrode extended line layer; Negative electrode extended line layer depends on the surface of beveled aperture madial wall and the cathode leg layer is interconnected; The silver slurry layer that prints in the wall beveled aperture forms and promotes one deck; Promote one deck and present narrow thin cylinder type, the central axis of its central axis and beveled aperture coincides, and the bottom closely contacts with negative electrode extended line layer; The height that promotes one deck is identical with the upper level of wall; Form two layers of liftings at the silver slurry layer that promotes the printing of one deck side in the wall beveled aperture; The top section that promotes two layers presents the similar trigonometric form shape, be looped around promote one deck around, form cam ring type shape; Promote two layers and be positioned at the centre position that promotes one deck and negative electrode extended line layer, the bottom closely contacts with negative electrode extended line layer; The height that promotes two layers is identical or slightly higher with the height of negative electrode extended line layer, but can not surpass the height that promotes one deck; Promote the upper surface of one deck, the metal level that promotes after the etching of upper surface of two layers upper surface and negative electrode extended line layer forms cathode conductive layer; Cathode conductive layer will cover the whole upper surfaces that promote one deck, two layers of liftings and negative electrode extended line layer, and is interconnected; The insulation paste layer that promotes the upper top printing of one deck forms cathode coating; Cathode coating only is positioned at the upper surface that promotes one deck, and there is not cathode coating in other position; Metal level after the etching in the wall beveled aperture on the madial wall forms the regulation and control grid layer; The regulation and control grid layer is positioned at wall upper surface and beveled aperture madial wall interfaces position, be divided into two parts, a part depends on the surface of beveled aperture madial wall along the direction of beveled aperture madial wall, and another part is directed upwards towards anode direction perpendicular to the upper surface of wall; Metal level after the etching on the wall upper surface forms the grid lead layer; Grid lead layer and regulation and control grid layer are interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer will cover whole grid lead layers, but can not cover the regulation and control grid layer; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described gate-modulated multi-tilt cathode structure is for being fixed on the cathode glass faceplate; The cathode leg layer is metal gold, silver, copper, aluminium, molybdenum, chromium, tin, indium; Negative electrode extended line layer is metal gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The regulation and control grid layer is metal gold, silver, aluminium, molybdenum, chromium; The trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer is metal gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft that has the flat-panel monitor of gate-modulated multi-tilt cathode structure, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form block layer;
3) making of cathode leg layer [3]: on block layer, prepare a metal molybdenum layer, form the cathode leg layer after the etching;
4) making of wall [4]: printing insulation paste on the cathode leg layer forms wall behind baking, sintering process;
5) making of negative electrode extended line layer [5]: the surface preparation in the latter half of wall beveled aperture madial wall goes out a metal molybdenum layer, forms negative electrode extended line layer after the etching;
6) making of lifting one deck [6]: printed silver slurry in the wall beveled aperture forms behind baking, sintering process and promotes one deck;
7) making of lifting two layers [7]: in the wall beveled aperture, promote the side printed silver slurry of one deck, behind baking, sintering process, form two layers of liftings;
8) making of cathode conductive layer [8]: on the upper surface that promotes one deck, two layers of liftings and negative electrode extended line layer, prepare a metal nickel dam, form cathode conductive layer after the etching;
9) making of cathode coating [9]:, behind baking, sintering process, form cathode coating promoting the upper top printing insulation paste of one deck;
10) making of regulation and control grid layers [10]: in the wall beveled aperture, prepare a metallic chromium layer, form the regulation and control grid layer after the etching;
11) making of grid lead layer [11]: on the wall upper surface, prepare a metallic chromium layer, form the grid lead layer after the etching;
12) making of grid cover layer [12]: printing insulation paste layer on the grid lead layer forms the grid cover layer behind baking, sintering process;
13) cleaning surfaces of gate-modulated multi-tilt cathode structure is handled: clean is carried out on the surface to gate-modulated multi-tilt cathode structure, removes impurity and dust;
14) preparation of carbon nano-tube [13]: with made of carbon nanotubes on cathode conductive layer;
15) reprocessing of carbon nano-tube: carbon nano-tube is carried out reprocessing, improve field emission characteristics;
16) anode glass panel [14] is made: to the dull and stereotyped soda-lime glass scribing of integral body, make the anode glass panel;
17) making of anode conductive layer [15]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
18) making of insulation paste layer [16]: at the non-display area printing insulation paste layer of anode conductive layer;
19) making of phosphor powder layer [17]: the viewing area printing phosphor powder layer on anode conductive layer;
20) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [18] and all around glass enclose frame [19] and be assembled together, and getter [20] is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip.
21) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 18 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 19 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 21 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Claims (6)
1, a kind of flat-panel monitor of gate-modulated multi-tilt face cathode construction, comprise by anode glass panel [14], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [19] is constituted; Anode conductive layer [15] and the phosphor powder layer [17] of preparation on anode conductive layer are arranged on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate [18] and getter subsidiary component [20]; It is characterized in that:
Cathode glass faceplate is provided with grid lead layer [11], carbon nano-tube [13] and gate-modulated multi-tilt face cathode construction;
The backing material of described gate-modulated multi-tilt face cathode construction is soda-lime glass or Pyrex; The insulation paste layer that prints on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; The insulation paste layer of the printing above the cathode leg layer forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant block layer part; There is beveled aperture in the wall, be that beveled aperture is a circular face in the formed cross section of wall upper surface, upper surface from wall, its hole madial wall tilts gradually, the diameter of beveled aperture is more and more littler, till the lower surface position of arrival interval layer, big more the closer to the diameter of the upper surface beveled aperture of wall; The beveled aperture bottom will expose the cathode leg layer in the wall; Metal level in the wall after the lip-deep etching of beveled aperture madial wall the latter half forms negative electrode extended line layer; Negative electrode extended line layer depends on the surface of beveled aperture madial wall and the cathode leg layer is interconnected; The silver slurry layer that prints in the wall beveled aperture forms and promotes one deck; It is that circular cone and bottom are the assembly of the round platform of back-off that lifting one deck presents top, and the round platform of back-off is meant that top circular section diameter is greater than following circular diameter; Promote the central axis of one deck and the central axis of beveled aperture and coincide, the bottom closely contacts with negative electrode extended line layer; The height that promotes one deck is identical with the upper level of wall; Form two layers of liftings at the silver slurry layer that promotes the printing of one deck side in the wall beveled aperture; The top section that promotes two layers presents the similar trigonometric form shape, be looped around promote one deck around, form cam ring type shape; Promote two layers and be positioned at the centre position that promotes one deck and negative electrode extended line layer, the bottom closely contacts with negative electrode extended line layer; The height that promotes two layers is identical or slightly higher with the height of negative electrode extended line layer, but can not surpass the height that promotes one deck; Promote the upper surface of one deck, the metal level that promotes after the etching of upper surface of two layers upper surface and negative electrode extended line layer forms cathode conductive layer; Cathode conductive layer will cover the whole upper surfaces that promote one deck, two layers of liftings and negative electrode extended line layer, and is interconnected; The insulation paste layer that promotes the upper top printing of one deck forms cathode coating; Cathode coating only is positioned at the upper surface that promotes one deck, and there is not cathode coating in other position; Metal level after the etching in the wall beveled aperture on the madial wall forms the regulation and control grid layer; The regulation and control grid layer is positioned at wall upper surface and beveled aperture madial wall interfaces position, be divided into two parts, a part depends on the surface of beveled aperture madial wall along the direction of beveled aperture madial wall, and another part is directed upwards towards anode direction perpendicular to the upper surface of wall; Metal level after the etching on the wall upper surface forms the grid lead layer; Grid lead layer and regulation and control grid layer are interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer will cover whole grid lead layers, but can not cover the regulation and control grid layer; Made of carbon nanotubes is on cathode conductive layer.
2, the flat-panel monitor of gate-modulated multi-tilt face cathode construction according to claim 1 is characterized in that: the fixed position of described gate-modulated multi-tilt face cathode construction is for being fixed on the cathode glass faceplate; The cathode leg layer is one of metal gold, silver, copper, aluminium, molybdenum, chromium, tin, indium; Negative electrode extended line layer is one of metal gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer is one of metallic iron, cobalt, nickel; The regulation and control grid layer is one of metal gold, silver, aluminium, molybdenum, chromium; The trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer is one of metal gold, silver, aluminium, molybdenum, chromium.
3, a kind of manufacture craft of flat-panel monitor of gate-modulated multi-tilt face cathode construction is characterized in that, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form block layer;
3) making of cathode leg layer [3]: on block layer, prepare a metal level, form the cathode leg layer after the etching;
4) making of wall [4]: printing insulation paste on the cathode leg layer forms wall behind baking, sintering process;
5) making of negative electrode extended line layer [5]: the surface preparation in the latter half of wall beveled aperture madial wall goes out a metal level, forms negative electrode extended line layer after the etching;
6) making of lifting one deck [6]: printed silver slurry in the wall beveled aperture forms behind baking, sintering process and promotes one deck;
7) making of lifting two layers [7]: in the wall beveled aperture, promote the side printed silver slurry of one deck, behind baking, sintering process, form two layers of liftings;
8) making of cathode conductive layer [8]: on the upper surface that promotes one deck, two layers of liftings and negative electrode extended line layer, prepare a metal level, form cathode conductive layer after the etching;
9) making of cathode coating [9]:, behind baking, sintering process, form cathode coating promoting the upper top printing insulation paste of one deck;
10) making of regulation and control grid layers [10]: in the wall beveled aperture, prepare a metal level, form the regulation and control grid layer after the etching;
11) making of grid lead layer [11]: on the wall upper surface, prepare a metal level, form the grid lead layer after the etching;
12) making of grid cover layer [12]: printing insulation paste layer on the grid lead layer forms the grid cover layer behind baking, sintering process;
13) cleaning surfaces of gate-modulated multi-tilt face cathode construction is handled: clean is carried out on the surface to gate-modulated multi-tilt face cathode construction, removes impurity and dust;
14) preparation of carbon nano-tube [13]: with made of carbon nanotubes on cathode conductive layer;
15) making of anode glass panel [14]: plate glass is carried out scribing, make the anode glass panel;
16) making of anode conductive layer [15]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
17) making of insulation paste layer [16]: at anode conductive layer non-display area printing insulation paste layer;
18) making of phosphor powder layer [17]: the viewing area printing phosphor powder layer on anode conductive layer;
19) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [18] and all around glass enclose frame [19] and be assembled together, and getter subsidiary component [20] is put in the middle of the cavity, fix with glass powder with low melting point;
20) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
4, the manufacture craft of the flat-panel monitor of gate-modulated multi-tilt face cathode construction according to claim 3 is characterized in that: described step 17 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: 5 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes.
5, the manufacture craft of the flat-panel monitor of gate-modulated multi-tilt face cathode construction according to claim 3 is characterized in that: described step 18 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes.
6, the manufacture craft of the flat-panel monitor of gate-modulated multi-tilt face cathode construction according to claim 3 is characterized in that: the device that described step 20 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter subsidiary component [20] of device inside bake and disappears, install pin formation finished parts at last additional.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100546152A CN100527342C (en) | 2007-06-19 | 2007-06-19 | Flat-panel display device with gate-modulated multi-tilt cathode structure and its preparing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100546152A CN100527342C (en) | 2007-06-19 | 2007-06-19 | Flat-panel display device with gate-modulated multi-tilt cathode structure and its preparing process |
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| Publication Number | Publication Date |
|---|---|
| CN101071732A CN101071732A (en) | 2007-11-14 |
| CN100527342C true CN100527342C (en) | 2009-08-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2007100546152A Expired - Fee Related CN100527342C (en) | 2007-06-19 | 2007-06-19 | Flat-panel display device with gate-modulated multi-tilt cathode structure and its preparing process |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106128920B (en) * | 2016-07-07 | 2017-08-29 | 金陵科技学院 | Branch's silver gates the active display for many faceted pebble composite cathode structures that interlock |
| CN106783461B (en) * | 2017-01-03 | 2018-01-30 | 金陵科技学院 | Type of being dehisced on flat lower arc solely gates the active display of the more edge cathode constructions of ring concave surface probe |
| CN106847654B (en) * | 2017-01-03 | 2018-04-17 | 金陵科技学院 | Curved surface circle necking solely gates active display of the beveling rotation mountain ring along cathode construction |
| CN106847646B (en) * | 2017-01-03 | 2018-02-16 | 金陵科技学院 | Small arc mixes the active display of the tilting long fan chimb cathode construction straggly of silver gate |
| CN106847644B (en) * | 2017-01-03 | 2018-01-30 | 金陵科技学院 | Flat rear Qu Zhengyuan solely gates the active display of two ribs point side straggly cathode construction before double |
| CN106847647B (en) * | 2017-01-03 | 2018-03-30 | 金陵科技学院 | With the active display of the double convex arc surface cathode structures of the concave surface of gradient four silver gate height |
| CN106783482B (en) * | 2017-01-03 | 2018-02-16 | 金陵科技学院 | The double active displays for hanging round platform conical ring face cathode construction of different radian curved surface simple gate control |
| CN106783481B (en) * | 2017-01-03 | 2018-01-30 | 金陵科技学院 | Tilt the active display of the big side cathode construction of clamp type simple gate control class anise pyramid |
-
2007
- 2007-06-19 CN CNB2007100546152A patent/CN100527342C/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN101071732A (en) | 2007-11-14 |
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