CN100580862C - Flat-panel display device with suspension ring-type cathode structure and its preparing process - Google Patents
Flat-panel display device with suspension ring-type cathode structure and its preparing process Download PDFInfo
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- CN100580862C CN100580862C CN200710054614A CN200710054614A CN100580862C CN 100580862 C CN100580862 C CN 100580862C CN 200710054614 A CN200710054614 A CN 200710054614A CN 200710054614 A CN200710054614 A CN 200710054614A CN 100580862 C CN100580862 C CN 100580862C
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Abstract
The invention relates to a flat-panel display of a suspended annular cathode structure and the making process thereof, comprising: sealed vacuum cavity composed of anode glass panel, cathode glass panel, and peripheral glass frame; anode conducting layer on the anode glass panel and fluorescent powder layer prepared on the anode conducting layer; cathode conducting layer, carbon nanotube and suspended annular cathode structure on the cathode glass panel; supporting wall structure and degassing agent auxiliary component between the anode glass panel and cathode glass panel, and it can further raise electron emission efficiency of carbon nanotube cathode and number of emitted electrons, reduce operating voltage of grid, improve control function of grid structure, helps to improve display brightness, and has advantages of stable and reliable making course, simple making process, low making cost, and simple structure.
Description
Technical field
The invention belongs to the mutual crossing domain in technical field of flat panel display, microelectronics science and technology field, vacuum science and technical field and nanometer science and technology field, relate to the element manufacturing of panel field emission display, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, particularly a kind of flat-panel monitor of suspension ring-type cathode structure and manufacture craft thereof.
Background technology
Field-emitter display has adopted the operation principle of similar conventional cathode ray tube display, promptly sends visible light with the fluorescent material on the beam bombardment screen.This makes field-emitter display to combine the light, thin of the high quality graphic limpid in sight of cathode ray tube and LCD, has high definition, high brightness, high-resolution and advantage such as low in energy consumption, is a kind of novel flat panel display equipment.Carbon nano-tube has little tip curvature radius, can launch a large amount of electronics under the effect of extra electric field intensity, is a kind of quite outstanding cold cathode emissive material, has great application potential aspect the vacuum Display Technique.The carbon nanotube cathod flat-panel display device that utilizes this field emission principle to make has then become the hot issue in present international flat panel display field.
Grid structure is one of crucial control element in three utmost point field-emission plane displays, and can it directly determining carbon nanotube cathod carry out electronics emission, also is one of numerous researchers direction of making great efforts and further reduce operating voltage of grid structure.Wherein the distance between reduction of gate structure and the carbon nanotube cathod structure is the feasible method that relatively takes effect as far as possible, but this method also is subjected to the restriction of the making feasibility such as insulating material, the class of insulation of insulating material or the like factor.And the shape of carbon nanotube cathod also has certain influence to formed electric field strength, obviously, the shape of carbon nanotube cathod is steep more, also just help further strengthening the electric field strength of cathode surface more, make that carbon nanotube cathod can be with regard to emitting electrons under lower voltage, this also is to reduce operating voltage of grid structure from another angle.So, in the manufacturing process of practical devices, how various favorable factors are mutually combined, can produce that quality is higher, the flat device of better effects if, this is the problems that numerous scientific research personnel are worth thinking.
In addition, in the middle of the panel field emission display spare of three-stage structure, guaranteeing that grid structure has carbon nanotube cathod under the prerequisite of good control action, also need to reduce as much as possible the total device cost, carry out reliable and stable, with low cost, function admirable, high quality devices is made.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect that exists in the above-mentioned flat-panel display device and provide a kind of with low cost, manufacturing process is reliable and stable, be made into the power height, the flat-panel monitor and the manufacture craft thereof of suspension ring-type cathode structure simple in structure.
The object of the present invention is achieved like this, comprise by anode glass panel, cathode glass faceplate and all around glass enclose the sealed vacuum chamber that frame constitutes; Be arranged on anode conductive layer and the phosphor powder layer of preparation on anode conductive layer on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate and getter subsidiary component have cathode conductive layer, carbon nano-tube and suspension ring-type cathode structure on cathode glass faceplate.
The backing material of described suspension ring-type cathode structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; The insulation paste layer of the printing above the cathode leg layer forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant block layer part; There is the inverted round table type beveled aperture in the wall, be that the inverted round table type beveled aperture is a circular face in the cross section of the upper surface of wall, diameter maximum herein, then from the upper surface of wall, the madial wall of inverted round table beveled aperture tilts gradually, its diameter is also more and more littler, and till the lower surface position of arrival interval layer, whole beveled aperture is similar to an inverted circular platform type shape; The bottom of inverted round table beveled aperture will expose the cathode leg layer in the wall; Metal level after the etching on the latter half madial wall of wall inverted round table beveled aperture forms negative electrode extended line layer; Negative electrode extended line layer and cathode leg layer are interconnected; The silver slurry layer that prints in the inverted round table beveled aperture forms and promotes layer; Promote layer and present an oblique triangular form shape of class, the base portion major part that promptly promotes layer is seated near above the negative electrode extended line layer of wall lower surface, small part is seated above the block layer, the top of lifting layer obliquely, present a class isoceles triangle type shape, end pools a cusp, but bends in the part near the triangular form cusp, and its wedge angle pointing direction is transformed into perpendicular to cathode glass faceplate and points to anode direction; The whole layer bottom periphery that is looped around the inverted round table beveled aperture that promote forms a ring-like shape; Metal level after the etching on the upper surface of lifting layer forms cathode conductive layer; The insulation paste layer that prints near wall upper surface place in the inverted round table beveled aperture in the wall forms the grid basalis; The grid basalis depends on the madial wall of inverted round table beveled aperture, and its upper surface is a plane inclined, and the angle after it tilts is as the criterion just in time to point to a lifting layer top cusp; Metal level after the etching of grid basalis upper surface forms the regulation and control grid layer; The regulation and control grid layer covers the upper surface of grid basalis, and its front end extends forward, presents unsettled attitude; Metal level after the etching above the wall forms the grid lead layer; Grid lead layer and regulation and control grid layer are interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer will cover the regulation and control grid layer of whole grid lead layers and part, can not cover the regulation and control grid layer that is in unsettled attitude; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described suspension ring-type cathode structure is for being fixed on the cathode glass faceplate; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, lead, tin, indium; Negative electrode extended line layer can be metallic gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The regulation and control grid layer can be metallic gold, silver, aluminium, copper, molybdenum, chromium; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft that has the flat-panel monitor of suspension ring-type cathode structure, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of cathode leg layer [3]: on block layer, prepare a metal level; Form the cathode leg layer after the etching;
4) making of wall [4]: printing insulation paste layer on the cathode leg layer forms wall behind baking, sintering process;
5) making of negative electrode extended line layer [5]: on the madial wall of wall inverted round table beveled aperture, prepare a metal level, form negative electrode extended line layer after the etching;
6) promote the making of layer [6]: in the inverted round table beveled aperture, print silver slurry layer, behind baking, sintering process, form and promote layer;
7) making of cathode conductive layer [7]: on the upper surface that promotes layer, prepare a metal level, form cathode conductive layer after the etching;
8) making of grid basalis [8]: on inverted round table beveled aperture top edge madial wall, print insulation paste, behind baking, sintering process, form the grid basalis;
9) making of regulation and control grid layers [9]: on the grid basalis, prepare a metal level, form the regulation and control grid layer after the etching;
10) making of grid lead layer [10]: on wall, prepare a metal level, form the grid lead layer after the etching;
11) making of grid cover layer [11]: printing insulation paste layer on the grid lead layer forms the grid cover layer behind baking, sintering process;
12) cleaning surfaces of suspension ring-type cathode structure is handled: clean is carried out on the surface to suspension ring-type cathode structure, removes impurity and dust;
13) preparation of carbon nano-tube [12]: with made of carbon nanotubes on cathode conductive layer;
14) reprocessing of carbon nano-tube: carbon nano-tube is carried out reprocessing, improve field emission characteristics;
15) making of anode glass panel [13]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
16) making of anode conductive layer [14]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
17) making of insulation paste layer [15]: at the non-display area printing insulation paste layer of anode conductive layer;
18) making of phosphor powder layer [16]: the viewing area printing phosphor powder layer on anode conductive layer;
19) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [17] and all around glass enclose frame [18] and be assembled together, and getter [19] is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
20) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 17 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 18 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 20 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The present invention has following good effect:
At first, in described suspension ring-type cathode structure, with carbon nanotube cathod preparation present cathode conductive layer above the cathode substrate layer of unsettled setting above.Like this, can make full use of the phenomenon that the marginal position in the emission of carbon nanotube cathod electronics is launched a large amount of electronics, improve the electronic transmitting efficiency of carbon nanotube cathod.Changed the surface configuration of carbon nanotube cathod, this helps producing more powerful electric field strength under lower grid operating voltage, thereby further reduces operating voltage of grid structure.Increase the electron emission area of carbon nanotube cathod, made more carbon nanotube cathod all participate in the electronics emission, helped improving the image quality of integral device.
Secondly, in described suspension ring-type cathode structure, gate shapes is carried out conversion, made grid lead layer and regulation and control grid layer two parts respectively, presented the broken line type shape.Wherein, the most advanced carbon nanotube cathod of terminal directly sensing of regulation and control grid layer, can shorten the distance between the two on the one hand effectively, thereby reduce the grid structure operating voltage, can also further strengthen the electric field strength on top, carbon nanotube cathod surface on the other hand, force it to launch a large amount of electronics.Grid structure and cathode construction height are integrated together, help lend some impetus to the Highgrade integration development of integral device;
In addition, in described suspension ring-type cathode structure, do not adopt special structure fabrication material, do not adopt special device making technics yet, this has just further reduced the cost of manufacture of whole flat-panel display device to a great extent, simplify the manufacturing process of device, can carry out large-area element manufacturing, helped carrying out business-like large-scale production.
Description of drawings
Fig. 1 has provided the vertical structure schematic diagram of suspension ring-type cathode structure;
Fig. 2 has provided the transversary schematic diagram of suspension ring-type cathode structure;
Fig. 3 has provided and has had the structural representation suspension ring-type cathode structure emitting structural, the carbon nanotube field emission flat-panel screens.
Embodiment
Below in conjunction with drawings and Examples the present invention is further specified, but the present invention is not limited to these embodiment.
Described a kind of flat-panel monitor that has suspension ring-type cathode structure, comprise by anode glass panel [13], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [18] is constituted; Anode conductive layer [14] and the phosphor powder layer [16] of preparation on anode conductive layer are arranged on the anode glass panel; Cathode conductive layer [7], carbon nano-tube [12] and suspension ring-type cathode structure are arranged on cathode glass faceplate; Supporting wall structure between anode glass panel and cathode glass faceplate [17] and getter [19] subsidiary component.
Described suspension ring-type cathode structure comprises cathode glass faceplate [1], block layer [2], cathode leg layer [3], wall [4], negative electrode extended line layer [5], promotes layer [6], cathode conductive layer [7], grid basalis [8], regulation and control grid layer [9], grid lead layer [10], grid cover layer [11] and carbon nano-tube [12] part.
The backing material of described suspension ring-type cathode structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; The insulation paste layer of the printing above the cathode leg layer forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant block layer part; There is the inverted round table type beveled aperture in the wall, be that the inverted round table type beveled aperture is a circular face in the cross section of the upper surface of wall, diameter maximum herein, then from the upper surface of wall, the madial wall of inverted round table beveled aperture tilts gradually, its diameter is also more and more littler, and till the lower surface position of arrival interval layer, whole beveled aperture is similar to an inverted circular platform type shape; The bottom of inverted round table beveled aperture will expose the cathode leg layer in the wall; Metal level after the etching on the latter half madial wall of wall inverted round table beveled aperture forms negative electrode extended line layer; Negative electrode extended line layer and cathode leg layer are interconnected; The silver slurry layer that prints in the inverted round table beveled aperture forms and promotes layer; Promote layer and present an oblique triangular form shape of class, the base portion major part that promptly promotes layer is seated near above the negative electrode extended line layer of wall lower surface, small part is seated above the block layer, the top of lifting layer obliquely, present a class isoceles triangle type shape, end pools a cusp, but bends in the part near the triangular form cusp, and its wedge angle pointing direction is transformed into perpendicular to cathode glass faceplate and points to anode direction; The whole layer bottom periphery that is looped around the inverted round table beveled aperture that promote forms a ring-like shape; Metal level after the etching on the upper surface of lifting layer forms cathode conductive layer; The insulation paste layer that prints near wall upper surface place in the inverted round table beveled aperture in the wall forms the grid basalis; The grid basalis depends on the madial wall of inverted round table beveled aperture, and its upper surface is a plane inclined, and the angle after it tilts is as the criterion just in time to point to a lifting layer top cusp; Metal level after the etching of grid basalis upper surface forms the regulation and control grid layer; The regulation and control grid layer covers the upper surface of grid basalis, and its front end extends forward, presents unsettled attitude; Metal level after the etching above the wall forms the grid lead layer; Grid lead layer and regulation and control grid layer are interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer will cover the regulation and control grid layer of whole grid lead layers and part, can not cover the regulation and control grid layer that is in unsettled attitude; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described suspension ring-type cathode structure is for being fixed on the cathode glass faceplate; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, lead, tin, indium; Negative electrode extended line layer can be metallic gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The regulation and control grid layer can be metallic gold, silver, aluminium, copper, molybdenum, chromium; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft that has the flat-panel monitor of suspension ring-type cathode structure, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of cathode leg layer [3]: on block layer, prepare a metal molybdenum layer; Form the cathode leg layer after the etching;
4) making of wall [4]: printing insulation paste layer on the cathode leg layer forms wall behind baking, sintering process;
5) making of negative electrode extended line layer [5]: on the madial wall of wall inverted round table beveled aperture, prepare a metal molybdenum layer, form negative electrode extended line layer after the etching;
6) promote the making of layer [6]: in the inverted round table beveled aperture, print silver slurry layer, behind baking, sintering process, form and promote layer;
7) making of cathode conductive layer [7]: on the upper surface that promotes layer, prepare a metal nickel dam, form cathode conductive layer after the etching;
8) making of grid basalis [8]: on inverted round table beveled aperture top edge madial wall, print insulation paste, behind baking, sintering process, form the grid basalis;
9) making of regulation and control grid layers [9]: on the grid basalis, prepare a metallic chromium layer, form the regulation and control grid layer after the etching;
10) making of grid lead layer [10]: on wall, prepare a metallic chromium layer, form the grid lead layer after the etching;
11) making of grid cover layer [11]: printing insulation paste layer on the grid lead layer forms the grid cover layer behind baking, sintering process;
12) cleaning surfaces of suspension ring-type cathode structure is handled: clean is carried out on the surface to suspension ring-type cathode structure, removes impurity and dust;
13) preparation of carbon nano-tube [12]: with made of carbon nanotubes on cathode conductive layer;
14) reprocessing of carbon nano-tube: carbon nano-tube is carried out reprocessing, improve field emission characteristics;
15) making of anode glass panel [13]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
16) making of anode conductive layer [14]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
17) making of insulation paste layer [15]: at the non-display area printing insulation paste layer of anode conductive layer;
11) making of phosphor powder layer [16]: the viewing area printing phosphor powder layer on anode conductive layer;
19) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [17] and all around glass enclose frame [18] and be assembled together, and getter [19] is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
20) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 17 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 18 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 20 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Claims (6)
1, a kind of flat-panel monitor of suspension ring-type cathode structure, comprise by anode glass panel [13], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [18] is constituted; Be arranged on anode conductive layer [14] and the phosphor powder layer [16] of preparation on anode conductive layer on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate [17] and getter subsidiary component [19] is characterized in that:
Cathode conductive layer [7], carbon nano-tube [12] and suspension ring-type cathode structure are arranged on cathode glass faceplate;
As substrate, the material of this cathode glass faceplate is soda-lime glass or Pyrex to described suspension ring-type cathode structure with cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; The insulation paste layer of the printing above the cathode leg layer forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant block layer part; There is the inverted round table type beveled aperture in the wall, be that the inverted round table type beveled aperture is a circular face in the cross section of the upper surface of wall, diameter maximum herein, then from the upper surface of wall, the madial wall of inverted round table beveled aperture tilts gradually, its diameter is also more and more littler, and till the lower surface position of arrival interval layer, whole beveled aperture is an inverted circular platform type shape; The bottom of inverted round table beveled aperture will expose the cathode leg layer in the wall; Metal level after the etching on the latter half madial wall of wall inverted round table beveled aperture forms negative electrode extended line layer; Negative electrode extended line layer and cathode leg layer are interconnected; The silver slurry layer that prints in the inverted round table beveled aperture forms and promotes layer; Promote layer and present an oblique triangular form shape of class, the base portion major part that promptly promotes layer is seated near above the negative electrode extended line layer of wall lower surface, small part is seated above the block layer, the top of lifting layer obliquely, present a class isoceles triangle type shape, the end that promptly promotes layer top pools a cusp, but bends in the part near the triangular form cusp, and its wedge angle pointing direction is transformed into perpendicular to cathode glass faceplate and points to anode direction; The whole layer bottom periphery that is looped around the inverted round table beveled aperture that promote forms a ring-like shape; Metal level after the etching on the upper surface of lifting layer forms cathode conductive layer; The insulation paste layer that prints near wall upper surface place in the inverted round table beveled aperture in the wall forms the grid basalis; The grid basalis depends on the madial wall of inverted round table beveled aperture, and its upper surface is a plane inclined, and the angle after it tilts is as the criterion just in time to point to a lifting layer top cusp; Metal level after the etching of grid basalis upper surface forms the regulation and control grid layer; The regulation and control grid layer covers the upper surface of grid basalis, and its front end extends forward, presents unsettled attitude; Metal level after the etching above the wall forms the grid lead layer; Grid lead layer and regulation and control grid layer are interconnected; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer will cover the regulation and control grid layer of whole grid lead layers and part, can not cover the regulation and control grid layer that is in unsettled attitude; Made of carbon nanotubes is on cathode conductive layer.
2, the flat-panel monitor of suspension ring-type cathode structure according to claim 1 is characterized in that: the fixed position of described suspension ring-type cathode structure is for being fixed on the cathode glass faceplate; The cathode leg layer is metal gold, silver, copper, aluminium, molybdenum, chromium, lead, tin, indium; Negative electrode extended line layer is metal gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer is metallic iron, cobalt, nickel; The regulation and control grid layer is metal gold, silver, aluminium, copper, molybdenum, chromium; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer is metal gold, silver, aluminium, molybdenum, chromium.
3, a kind of manufacture craft of flat-panel monitor of suspension ring-type cathode structure is characterized in that, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of cathode leg layer [3]: on block layer, prepare a metal level; Form the cathode leg layer after the etching;
4) making of wall [4]: printing insulation paste layer on the cathode leg layer forms wall behind baking, sintering process;
5) making of negative electrode extended line layer [5]: on the madial wall of wall inverted round table beveled aperture, prepare a metal level, form negative electrode extended line layer after the etching;
6) promote the making of layer [6]: in the inverted round table beveled aperture, print silver slurry layer, behind baking, sintering process, form and promote layer;
7) making of cathode conductive layer [7]: on the upper surface that promotes layer, prepare a metal level, form cathode conductive layer after the etching;
8) making of grid basalis [8]: on inverted round table beveled aperture top edge madial wall, print insulation paste, behind baking, sintering process, form the grid basalis;
9) making of regulation and control grid layers [9]: on the grid basalis, prepare a metal level, form the regulation and control grid layer after the etching;
10) making of grid lead layer [10]: on wall, prepare a metal level, form the grid lead layer after the etching;
11) making of grid cover layer [11]: printing insulation paste layer on the grid lead layer forms the grid cover layer behind baking, sintering process;
12) cleaning surfaces of suspension ring-type cathode structure is handled: clean is carried out on the surface to suspension ring-type cathode structure, removes impurity and dust;
13) preparation of carbon nano-tube [12]: with made of carbon nanotubes on cathode conductive layer;
14) making of anode glass panel [13]: whole plate glass is carried out scribing, produce the anode glass panel;
15) making of anode conductive layer [14]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
16) making of insulation paste layer [15]: at the non-display area printing insulation paste layer of anode conductive layer;
17) making of phosphor powder layer [16]: the viewing area printing phosphor powder layer on anode conductive layer;
18) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [17] and all around glass enclose frame [18] and be assembled together, and getter subsidiary component [19] is put in the middle of the cavity, fix with glass powder with low melting point;
19) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
4, the manufacture craft of the flat-panel monitor of suspension ring-type cathode structure according to claim 3 is characterized in that: described step 16 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: 5 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes.
5, the manufacture craft of the flat-panel monitor of suspension ring-type cathode structure according to claim 3 is characterized in that: described step 17 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes.
6, the manufacture craft of the flat-panel monitor of suspension ring-type cathode structure according to claim 3 is characterized in that: the device that described step 19 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
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| Application Number | Priority Date | Filing Date | Title |
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| CN200710054614A CN100580862C (en) | 2007-06-19 | 2007-06-19 | Flat-panel display device with suspension ring-type cathode structure and its preparing process |
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| CN200710054614A CN100580862C (en) | 2007-06-19 | 2007-06-19 | Flat-panel display device with suspension ring-type cathode structure and its preparing process |
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| CN100580862C true CN100580862C (en) | 2010-01-13 |
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