CN100527340C - Planar display device with explosive star-typed cathode structure and its production - Google Patents
Planar display device with explosive star-typed cathode structure and its production Download PDFInfo
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- CN100527340C CN100527340C CNB2007100546097A CN200710054609A CN100527340C CN 100527340 C CN100527340 C CN 100527340C CN B2007100546097 A CNB2007100546097 A CN B2007100546097A CN 200710054609 A CN200710054609 A CN 200710054609A CN 100527340 C CN100527340 C CN 100527340C
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Abstract
This is a flat displayer of star shape grid cathode structure and its production process. It includes a sealed vacuum chamber formed by a anodic glass panel, a cathode glass panel and surrounded glass frame; on the anodic glass panel is a conducting layer coated with fluorescent; on the cathode glass panel are a grid down-lead layer, carbon nanotube and star shape grid structure; a supporting wall between the anodic and cathode panel and a getter; which is capable of increasing electron ejecting efficiency of the nanotube and decreasing the working voltage of the rid and increasing the display quality.
Description
Technical field
The invention belongs to the mutual crossing domain in technical field of flat panel display, microelectronics science and technology field, vacuum science and technical field and nanometer science and technology field, relate to the element manufacturing of panel field emission display, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, particularly a kind of flat-panel monitor and manufacture craft thereof that breaks out star-like cathode construction.
Background technology
Field-emission plane display is a kind of novel flat panel display equipment, it has made full use of the field emission principle of carbon nanotube cathod, combine the luminescence mechanism of cathode-ray tube display simultaneously, back at each pixel all has considerable electron source, after energized, electronics just directly excites needs luminescent fluorescent powder, thereby sends visible light.Such result has utilized a very thin screen to show to have the same high-quality display image of cathode-ray tube display.This display is with the high image quality of cathode-ray tube display, and the large tracts of land of plasma scope and the advantages such as ultrathin type of LCD roll into one, and have become the developing direction of international flat panel display of new generation already.
In order to reduce the total device cost, so that interrelate with conventional integrated drive electronics, the field-emission plane display of making three-stage structure has become a kind of inevitable choice.At present, in the middle of most carbon nanotube cathod field emission display device, all adopted grid structure to be positioned at the control model of carbon nanotube cathod superstructure, the grid control action of this version is more remarkable, the brightness ratio of display device is higher, and display effect is relatively good, but its grid operating voltage is high, also can not satisfy the quality system requirement of low pressure flat-panel display device far away, this also needs further improvement.So, reduce the distance between grid structure and the carbon nanotube cathod structure as much as possible, the most direct seemingly a kind of effective method, but equally also to be subjected to the class of insulation of insulating material, the restriction of manufacture craft of insulating material or the like factor.In addition, as the macroshape change to carbon nanotube cathod, make carbon nanotube cathod just can launch a large amount of electronics under lower operating voltage, this also is to have reduced operating voltage of grid structure from indirect angle.Certainly also having other way exists.So, in the manufacturing process of practical devices, how further to reduce operating voltage of grid, how to improve the electronic transmitting efficiency of carbon nanotube cathod, or the like problem, all be worth pondering deeply and solving.
In addition, in the middle of the panel field emission display spare of three-stage structure, guaranteeing that grid structure has carbon nanotube cathod under the prerequisite of good control action, also need to reduce as much as possible the total device cost, carry out reliable and stable, with low cost, function admirable, high quality devices is made.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect that exists in the above-mentioned flat-panel display device and provide a kind of with low cost, manufacturing process is reliable and stable, be made into the power height, the flat-panel monitor and the manufacture craft thereof of the star-like cathode construction of outburst simple in structure.
The object of the present invention is achieved like this, comprise by anode glass panel, cathode glass faceplate and all around glass enclose the sealed vacuum chamber that frame constitutes; Anode conductive layer and the phosphor powder layer of preparation on anode conductive layer are arranged on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate and getter subsidiary component, cathode glass faceplate are provided with grid lead layer, carbon nano-tube and break out star-like cathode construction.
The backing material of the star-like cathode construction of described outburst is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the negative electrode transition zone; The negative electrode transition zone presents disc face type shape, and its lower surface closely contacts with the cathode leg layer; The silver slurry layer of the printing above the negative electrode transition zone forms negative electrode and promotes layer; Negative electrode promotes layer and presents the star-like shape of a kind of outburst, promptly the center from transversary negative electrode lifting layer is a hollow circular apertures, on every side around many irregular tips, forms the star-like shape of a kind of outburst, from the height of center of vertical structure negative electrode lifting layer, low on every side; The metal level that negative electrode promotes after the top etching of layer forms cathode conductive layer; The insulation paste layer of the printing above the block layer forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant block layer part; There is profiled holes in the wall, be that profiled holes is round of hollow in the formed cross section of wall upper surface, the madial wall of the first half of profiled holes is perpendicular to the barrel surface of cathode glass faceplate, and the madial wall of the latter half then is a round table surface to the wall inner recess; From the top and the bottom intersection, gradually to the wall inner recess, the round platform diameter becomes greatly gradually, till the lower surface position of arrival interval layer in the profiled holes; The height of profiled holes the first half is less than the height of the latter half; Metal level after the etching on the wall upper surface forms the grid lead layer; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer is wanted complete cover grid trace layer, and its fore-end is mutually concordant with the madial wall of profiled holes; Metal level after the etching on profiled holes the first half interior side-wall surface forms the regulation and control grid layer; The regulation and control grid layer depends on the interior side-wall surface of profiled holes, presents a kind of anchor ring type shape; Regulation and control grid layer and grid lead layer are interconnected, and the tie point of grid lead layer and regulation and control grid layer is positioned at the centre position at regulation and control grid layer annulus back; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of the star-like cathode construction of described outburst is for being fixed on the cathode glass faceplate; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin, lead; The negative electrode transition zone can be metallic gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The regulation and control grid layer can be metallic gold, silver, aluminium, molybdenum, chromium; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft that has the flat-panel monitor that breaks out star-like cathode construction, its manufacture craft is as follows:
1) making of cathode glass faceplate: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of cathode leg layer: on block layer, prepare a metal level, form the cathode leg layer after the etching;
4) making of negative electrode transition zone: on the cathode leg layer, prepare a metal level, form the negative electrode transition zone after the etching;
5) negative electrode promotes the making of layer: printed silver slurry on the negative electrode transition zone forms negative electrode and promotes layer behind baking, sintering process;
6) making of cathode conductive layer: on negative electrode promotes layer, prepare a metal level, form cathode conductive layer after the etching;
7) making of wall: on block layer, print insulation paste, behind baking, sintering process, form wall;
8) making of grid lead layer: on wall, prepare a metal level, form the grid lead layer after the etching;
9) the tectal making of grid: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
10) making of regulation and control grid layer: on the madial wall of profiled holes top, prepare a metal level, form the regulation and control grid layer after the etching;
11) cleaning surfaces of the star-like cathode construction of outburst is handled: clean is carried out on the surface of breaking out star-like cathode construction, remove impurity and dust;
12) preparation of carbon nano-tube: with made of carbon nanotubes on cathode conductive layer;
13) making of anode glass panel: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
14) making of anode conductive layer: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
15) making of insulation paste layer: at the non-display area printing insulation paste layer of anode conductive layer;
16) making of phosphor powder layer: the viewing area printing phosphor powder layer on anode conductive layer;
17) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure and all around glass enclose frame and be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point.
18) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 15 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 16 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 18 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The present invention has following good effect:
At first, in the star-like cathode construction of described outburst, above the cathode conductive layer, cathode conductive layer then is to be produced on the surface that presents the negative electrode lifting layer that breaks out star-like shape with the carbon nanotube cathod preparation.Like this, change the shape of carbon nanotube cathod, made full use of the endemism that marginal position is launched a large amount of electronics in the carbon nanotube cathod, improved the electronic transmitting efficiency of carbon nanotube cathod; Increase the electron emission area of carbon nanotube cathod greatly, made more carbon nano-tube all participate in the electronics emission, helped improving the display brightness of device.
Secondly, in the star-like cathode construction of described outburst, made the circular regulation and control grid layer of sidewall structure.The grid lead layer can be delivered to external voltage above the regulation and control grid layer of device inside, will form powerful electric field strength on top, carbon nanotube cathod surface like this, forces carbon nano-tube to launch a large amount of electronics.Because the end of regulation and control grid layer can approach carbon nanotube cathod as much as possible, can reduce operating voltage of grid structure, strengthens the adjusting function of grid structure.Grid structure and cathode construction height are integrated together, help lend some impetus to the Highgrade integration development of integral device;
In addition, in the star-like cathode construction of described outburst, do not adopt special structure fabrication material, do not adopt special device making technics yet, this has just further reduced the cost of manufacture of whole flat-panel display device to a great extent, simplify the manufacturing process of device, can carry out large-area element manufacturing, helped carrying out business-like large-scale production.
Description of drawings
Fig. 1 has provided the vertical structure schematic diagram that breaks out star-like cathode construction;
Fig. 2 has provided the transversary schematic diagram that breaks out star-like cathode construction;
Fig. 3 has provided the schematic top plan view that breaks out cathode conductive layer in the star-like cathode construction;
Fig. 4 has provided and has had outburst structural representation star-like cathode construction emitting structural, the carbon nanotube field emission flat-panel screens.
Embodiment
Below in conjunction with drawings and Examples the present invention is further specified, but the present invention is not limited to these embodiment.
Described a kind of flat-panel monitor that breaks out star-like cathode construction that has, comprise by anode glass panel [12], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [17] is constituted; Anode conductive layer [13] and the phosphor powder layer [15] of preparation on anode conductive layer are arranged on the anode glass panel; Grid lead layer [8], carbon nano-tube [11] are arranged on cathode glass faceplate and break out star-like cathode construction; Supporting wall structure between anode glass panel and cathode glass faceplate [16] and getter [18] subsidiary component.
The star-like cathode construction of described outburst comprises that cathode glass faceplate [1], block layer [2], cathode leg layer [3], negative electrode transition zone [4], negative electrode promote layer [5], cathode conductive layer [6], wall [7], grid lead layer [8], grid cover layer [9], regulation and control grid layer [10] and carbon nano-tube [11] part.
The backing material of the star-like cathode construction of described outburst is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the negative electrode transition zone; The negative electrode transition zone presents disc face type shape, and its lower surface closely contacts with the cathode leg layer; The silver slurry layer of the printing above the negative electrode transition zone forms negative electrode and promotes layer; Negative electrode promotes layer and presents the star-like shape of a kind of outburst, promptly the center from transversary negative electrode lifting layer is a hollow circular apertures, on every side around many irregular tips, forms the star-like shape of a kind of outburst, from the height of center of vertical structure negative electrode lifting layer, low on every side; The metal level that negative electrode promotes after the top etching of layer forms cathode conductive layer; The insulation paste layer of the printing above the block layer forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant block layer part; There is profiled holes in the wall, be that profiled holes is round of hollow in the formed cross section of wall upper surface, the madial wall of the first half of profiled holes is perpendicular to the barrel surface of cathode glass faceplate, and the madial wall of the latter half then is a round table surface to the wall inner recess; From the top and the bottom intersection, gradually to the wall inner recess, the round platform diameter becomes greatly gradually, till the lower surface position of arrival interval layer in the profiled holes; The height of profiled holes the first half is less than the height of the latter half; Metal level after the etching on the wall upper surface forms the grid lead layer; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer is wanted complete cover grid trace layer, and its fore-end is mutually concordant with the madial wall of profiled holes; Metal level after the etching on profiled holes the first half interior side-wall surface forms the regulation and control grid layer; The regulation and control grid layer depends on the interior side-wall surface of profiled holes, presents a kind of anchor ring type shape; Regulation and control grid layer and grid lead layer are interconnected, and the tie point of grid lead layer and regulation and control grid layer is positioned at the centre position at regulation and control grid layer annulus back; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of the star-like cathode construction of described outburst is for being fixed on the cathode glass faceplate; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin, lead; The negative electrode transition zone can be metallic gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The regulation and control grid layer can be metallic gold, silver, aluminium, molybdenum, chromium; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer can be metallic gold, silver, aluminium, molybdenum, chromium.
A kind of manufacture craft that breaks out the flat-panel monitor of star-like cathode construction, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of cathode leg layer [3]: on block layer, prepare a metal molybdenum layer, form the cathode leg layer after the etching;
4) making of negative electrode transition zone [4]: on the cathode leg layer, prepare a metallic chromium layer, form the negative electrode transition zone after the etching;
5) negative electrode promotes the making of layer [5]: printed silver slurry on the negative electrode transition zone forms negative electrode and promotes layer behind baking, sintering process;
6) making of cathode conductive layer [6]: on negative electrode promotes layer, prepare a metal nickel dam, form cathode conductive layer after the etching;
7) making of wall [7]: on block layer, print insulation paste, behind baking, sintering process, form wall;
8) making of grid lead layer [8]: on wall, prepare a metallic chromium layer, form the grid lead layer after the etching;
9) making of grid cover layer [9]: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
10) making of regulation and control grid layers [10]: on the madial wall of profiled holes top, prepare a metallic chromium layer, form the regulation and control grid layer after the etching;
11) cleaning surfaces of the star-like cathode construction of outburst is handled: clean is carried out on the surface of breaking out star-like cathode construction, remove impurity and dust;
12) preparation of carbon nano-tube [11]: with made of carbon nanotubes on cathode conductive layer;
13) reprocessing of carbon nano-tube: carbon nano-tube is carried out reprocessing, improve field emission characteristics;
14) making of anode glass panel [12]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
15) making of anode conductive layer [13]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
16) making of insulation paste layer [14]: at the non-display area printing insulation paste layer of anode conductive layer;
17) making of phosphor powder layer [15]: the viewing area printing phosphor powder layer on anode conductive layer;
18) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [16] and all around glass enclose frame [17] and be assembled together, and getter [18] is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
19) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 16 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace.
Described step 17 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes).
The device that described step 19 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Claims (6)
1, a kind of flat-panel monitor that breaks out star-like cathode construction, comprise by anode glass panel [12], cathode glass faceplate [1] and all around glass enclose the sealed vacuum chamber that frame [17] is constituted; Anode conductive layer [13] and the phosphor powder layer [15] of preparation on anode conductive layer are arranged on the anode glass panel; Supporting wall structure between anode glass panel and cathode glass faceplate [16] and getter subsidiary component [18] is characterized in that:
Cathode glass faceplate is provided with grid lead layer [8], carbon nano-tube [11] and breaks out star-like cathode construction;
The backing material of the star-like cathode construction of described outburst is soda-lime glass or Pyrex; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the negative electrode transition zone; The negative electrode transition zone presents disc face type shape, and its lower surface closely contacts with the cathode leg layer; The silver slurry layer of the printing above the negative electrode transition zone forms negative electrode and promotes layer; Negative electrode promotes layer and presents the star-like shape of a kind of outburst, promptly the center from transversary negative electrode lifting layer is a hollow circular apertures, on every side around many irregular tips, forms the star-like shape of a kind of outburst, from the height of center of vertical structure negative electrode lifting layer, low on every side; The metal level that negative electrode promotes after the top etching of layer forms cathode conductive layer; The insulation paste layer of the printing above the block layer forms wall; The lower surface of wall is the plane, cover cathode leg layer and vacant block layer part; There is profiled holes in the wall, be that profiled holes is round of hollow in the formed cross section of wall upper surface, the madial wall of the first half of profiled holes is perpendicular to the barrel surface of cathode glass faceplate, and the madial wall of the latter half then is a round table surface to the wall inner recess; From the top and the bottom intersection, gradually to the wall inner recess, the round platform diameter becomes greatly gradually, till the lower surface position of arrival interval layer in the profiled holes; The height of profiled holes the first half is less than the height of the latter half; Metal level after the etching on the wall upper surface forms the grid lead layer; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; The grid cover layer is wanted complete cover grid trace layer, and its fore-end is mutually concordant with the madial wall of profiled holes; Metal level after the etching on profiled holes the first half interior side-wall surface forms the regulation and control grid layer; The regulation and control grid layer depends on the interior side-wall surface of profiled holes, presents a kind of anchor ring type shape; Regulation and control grid layer and grid lead layer are interconnected, and the tie point of grid lead layer and regulation and control grid layer is positioned at the centre position at regulation and control grid layer annulus back; Made of carbon nanotubes is on cathode conductive layer.
2, the flat-panel monitor of the star-like cathode construction of outburst according to claim 1 is characterized in that: the fixed position of the star-like cathode construction of described outburst is for being fixed on the cathode glass faceplate; The cathode leg layer is one of metal gold, silver, copper, aluminium, molybdenum, chromium, tin, lead; The negative electrode transition zone is one of metal gold, silver, aluminium, molybdenum, chromium, tin; Cathode conductive layer is one of metallic iron, cobalt, nickel; The regulation and control grid layer is one of metal gold, silver, aluminium, molybdenum, chromium; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid lead layer is one of metal gold, silver, aluminium, molybdenum, chromium.
3, the manufacture craft of the flat-panel monitor of the star-like cathode construction of a kind of outburst as claimed in claim 1, it is characterized in that: its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: printing insulation paste layer on cathode glass faceplate forms block layer behind baking, sintering process;
3) making of cathode leg layer [3]: on block layer, prepare a metal level, form the cathode leg layer after the etching;
4) making of negative electrode transition zone [4]: on the cathode leg layer, prepare a metal level, form the negative electrode transition zone after the etching;
5) negative electrode promotes the making of layer [5]: printed silver slurry on the negative electrode transition zone forms negative electrode and promotes layer behind baking, sintering process;
6) making of cathode conductive layer [6]: on negative electrode promotes layer, prepare a metal level, form cathode conductive layer after the etching;
7) making of wall [7]: on block layer, print insulation paste, behind baking, sintering process, form wall;
8) making of grid lead layer [8]: on wall, prepare a metal level, form the grid lead layer after the etching;
9) making of grid cover layer [9]: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
10) making of regulation and control grid layers [10]: on the madial wall of profiled holes top, prepare a metal level, form the regulation and control grid layer after the etching;
11) cleaning surfaces of the star-like cathode construction of outburst is handled: clean is carried out on the surface of breaking out star-like cathode construction, remove impurity and dust;
12) preparation of carbon nano-tube [11]: with made of carbon nanotubes on cathode conductive layer;
13) making of anode glass panel [12]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
14) making of anode conductive layer [13]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
15) making of insulation paste layer [14]: at the non-display area printing insulation paste layer of anode conductive layer;
16) making of phosphor powder layer [15]: the viewing area printing phosphor powder layer on anode conductive layer;
17) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [16] and all around glass enclose frame [17] and be assembled together, and getter subsidiary component [18] is put in the middle of the cavity, fix with glass powder with low melting point;
18) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
4, the manufacture craft of the flat-panel monitor of the star-like cathode construction of outburst according to claim 3 is characterized in that: described step 15 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: 5 minutes, afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes.
5, the manufacture craft of the flat-panel monitor of the star-like cathode construction of outburst according to claim 3 is characterized in that: described step 16 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes.
6, the manufacture craft of the flat-panel monitor of the star-like cathode construction of outburst according to claim 3 is characterized in that: the device that described step 18 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter subsidiary component [18] of device inside bake and disappears, install pin formation finished parts at last additional.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2007100546097A CN100527340C (en) | 2007-06-19 | 2007-06-19 | Planar display device with explosive star-typed cathode structure and its production |
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| CNB2007100546097A CN100527340C (en) | 2007-06-19 | 2007-06-19 | Planar display device with explosive star-typed cathode structure and its production |
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| CN100527340C true CN100527340C (en) | 2009-08-12 |
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