CN1956127B - Flat display of water wave type cathode array emission structure and its manufacturing process - Google Patents
Flat display of water wave type cathode array emission structure and its manufacturing process Download PDFInfo
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- CN1956127B CN1956127B CN200610107303A CN200610107303A CN1956127B CN 1956127 B CN1956127 B CN 1956127B CN 200610107303 A CN200610107303 A CN 200610107303A CN 200610107303 A CN200610107303 A CN 200610107303A CN 1956127 B CN1956127 B CN 1956127B
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Abstract
A flat display with cathode array emission structure in ripple form is prepared as enclosing sealed vacuum cavity by cathode glass panel and anode glass panel as well as peripheral glass frame, setting control grid and carbon nanotube as well as cathode array emission structure in ripple form on cathode glass panel, setting anode conductive layer and fluorescent powder layer formed on said conductive layer at anode glass panel, setting support wall structure and degassing agent auxiliary element between two said glass panels.
Description
Technical field
The invention belongs to the mutual crossing domain in technical field of flat panel display, microelectronics science and technology field, vacuum science and technical field and nanometer science and technology field, relate to the element manufacturing of panel field emission display, be specifically related to the content of element manufacturing aspect of the panel field emission display of carbon nanotube cathod, particularly a kind of flat-panel monitor of water wave type cathode array emission structure and manufacture craft thereof.
Background technology
Field-emitter display is a kind of novel flat-panel display devices, have the operation principle similar with cathode-ray tube display, therefore also just inherited the high image quality of cathode-ray tube display, be acknowledged as the best successor of cathode-ray tube display, obtained paying close attention to widely.Carbon nano-tube has little tip curvature radius, under the effect of extra electric field intensity, can launch a large amount of electronics, form awkward silence at a meeting and cause the emission phenomenon, be very suitable for as cold-cathode material, compare with the little sharp structure of Spindt, have remarkable advantages qualitatively in cost of manufacture and making, therefore, the field-emission plane display that utilizes carbon nano-tube to make as cathode material has become the research focus of present international technical field of flat panel display.
In the middle of the field emission flat-panel display of three-stage structure, grid is one of control element of comparison key, it is determining directly whether carbon nanotube cathod can carry out the electronics emission, and the making quality of grid structure also is to estimate the important performance indexes of display device.Under the control of grid voltage, top, carbon nanotube cathod surface can form powerful electric field strength, forces the electronics in the carbon nano-tube to pass through surface potential barrier, escapes in the middle of the vacuum.Wherein grid voltage is the deciding factor that forms top, carbon nanotube cathod surface electric field strength, but the shape of carbon nanotube cathod also has certain influence to formed electric field strength.Obviously, the curvature of the shape of carbon nanotube cathod is more little, helps further to strengthen formed electric field strength more; The emission area of carbon nanotube cathod is big more, just can launch more electronics, and this also helps further to improve the picture quality of integral display spare.Therefore, in the manufacturing process of practical devices, should make full use of these favourable phenomenons, carry out more careful structural design and manufacture craft adjustment, carry out high-quality display device and make, certainly, these also all are urgent problems.
In addition, in the middle of the panel field emission display spare of three-stage structure, guaranteeing that grid structure has carbon nanotube cathod under the prerequisite of good control action, also need to reduce as much as possible the total device cost, carry out reliable and stable, with low cost, function admirable, high quality devices is made.
Summary of the invention
The objective of the invention is to overcome the shortcoming and defect that exists in the above-mentioned flat-panel display device and provide a kind of with low cost, manufacturing process is reliable and stable, be made into the power height, the flat-panel monitor and the manufacture craft thereof of water wave type cathode array emission structure simple in structure.
The object of the present invention is achieved like this, comprise by cathode glass faceplate, anode glass panel and all around glass enclose the sealed vacuum chamber that frame constitutes; On the anode glass panel, have anode conductive layer, preparation on anode conductive layer phosphor powder layer and at the insulation paste layer of the non-display area of anode conductive layer printing; Supporting wall structure between anode glass panel and cathode glass faceplate and getter subsidiary component have control grid, carbon nano-tube and water wave type cathode array emission structure on cathode glass faceplate.
The backing material of described water wave type cathode array emission structure is glass, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the negative electrode transition zone; The negative electrode transition zone presents the collar plate shape shape, and its lower surface closely contacts with the cathode leg layer; Metal level after the etching above the negative electrode transition zone forms cathode conductive layer; Cathode conductive layer presents the water wave type shape, is positioned on the upper surface of negative electrode transition zone; Cathode conductive layer presents a plurality of water wave type striateds, do not contact mutually between the adjacent cathode conductive layer, but negative electrode transition zone by the bottom is interconnected; The insulation paste layer of the printing above the block layer forms separator; There is circular apertures in the separator, exposes the negative electrode transition zone and the cathode conductive layer of bottom; The madial wall of circular apertures is perpendicular to the face of cylinder of cathode glass faceplate in the separator; The lower surface of separator is the plane, cover cathode leg layer and vacant block layer part; The upper surface of separator is the plane, but has a slope that is 45 degree inclinations angle in circular apertures and separator upper surface intersection, promptly from the upper surface of separator, tilts to the inner tiltedly below of circular apertures gradually, till the madial wall that arrives circular apertures; The silver slurry layer of the printing above the separator upper surface forms the grid lead layer; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; Metal level after the etching in separator on the madial wall of circular apertures forms the grid tube preparative layer; The grid tube preparative layer depends on the madial wall of circular apertures in the separator, presents the circular ring type shape, and the middle part of its annulus closely contacts mutually with the grid lead layer; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described water wave type cathode array emission structure is for being fixed on the cathode glass faceplate; The cathode leg layer is metal gold, silver, copper, aluminium, molybdenum, chromium, tin; The negative electrode transition zone is metal gold, silver, molybdenum, chromium, tin; Cathode conductive layer is metallic iron, cobalt, nickel; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid tube preparative layer is metal gold, silver, molybdenum, chromium, aluminium.
A kind of manufacture craft of flat-panel monitor of water wave type cathode array emission structure, its manufacture craft is as follows:
1) making of cathode glass faceplate: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form block layer;
3) making of cathode leg layer: on block layer, prepare a metal level, form the cathode leg layer after the etching;
4) making of negative electrode transition zone: on the cathode leg layer, prepare a metal level, form the negative electrode transition zone after the etching;
5) making of cathode conductive layer: on the negative electrode transition zone, prepare a metal level, form cathode conductive layer after the etching;
6) making of separator: printing insulation paste on block layer forms separator behind baking, sintering process;
7) making of grid lead layer: printed silver slurry on separator forms the grid lead layer behind baking, sintering process;
8) the tectal making of grid: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
9) making of grid tube preparative layer: the chromium layer after the etching in separator above the madial wall of circular apertures forms the grid tube preparative layer;
10) cleaning surfaces of water wave type cathode array emission structure is handled: clean is carried out on the surface to water wave type cathode array emission structure, removes impurity and dust;
11) preparation of carbon nano-tube: with made of carbon nanotubes on cathode conductive layer;
12) making of anode glass panel: whole plate glass is carried out scribing, produce the anode glass panel;
13) making of anode conductive layer: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
14) making of insulation paste layer: at the non-display area printing insulation paste layer of anode conductive layer;
15) making of phosphor powder layer: the viewing area printing phosphor powder layer on anode conductive layer;
16) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure and all around glass enclose frame and be assembled together, and getter is put in the middle of the cavity, fix with glass powder with low melting point;
17) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 14 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: after 5 minutes, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes.
Described step 15 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes.
The device that described step 17 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out high temperature sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
The present invention has following good effect:
At first, in described water wave type cathode array emission structure, carbon nanotube cathod is prepared on the cathode conductive layer that presents the water wave type shape.Can greatly increase the field-causing electron emission area of carbon nanotube cathod, make more carbon nano-tube carry out a large amount of electronics emissions; Simultaneously, this cathode array emission structure has also made full use of the endemism that marginal position can be launched a large amount of electronics in the carbon nanotube cathod, can greatly improve the electronic transmitting efficiency of carbon nanotube cathod, improves the display brightness of device.
Secondly, in described water wave type cathode array emission structure, made grid tube preparative layer structure.Like this, utilize grid tube preparative layer lower end can approach the advantage of carbon nanotube cathod as much as possible, can further reduce the distance between grid structure and the carbon nanotube cathod structure, reduce operating voltage of grid structure; Simultaneously the grid lead layer has been produced on the separator more than the slope above, help reducing the capacity effect between the grid and cathode, improve the operating frequency of device.Meanwhile, grid structure and cathode construction height are integrated together, help lend some impetus to the Highgrade integration development of integral device;
In addition, in described water wave type cathode array emission structure, do not adopt special structure fabrication material, do not adopt special device making technics yet, this has just further reduced the cost of manufacture of whole flat-panel display device to a great extent, simplify the manufacturing process of device, can carry out large-area element manufacturing, helped carrying out business-like large-scale production.
Description of drawings
Fig. 1 has provided the vertical structure schematic diagram of water wave type cathode array emission structure;
Fig. 2 has provided the transversary schematic diagram of water wave type cathode array emission structure;
Fig. 3 has provided the ripples line negative electrode vertical view in the water wave type cathode array emission structure;
Fig. 4 has provided and has had structural representation water wave type cathode array emission structure, the carbon nanotube field emission flat-panel screens.
Embodiment
Below in conjunction with drawings and Examples the present invention is further specified, but the present invention is not limited to these embodiment.
Described a kind of flat-panel monitor that has water wave type cathode array emission structure, comprise by cathode glass faceplate [1], anode glass panel [11] and all around glass enclose the sealed vacuum chamber that frame [15] is constituted; On the anode glass panel, have anode conductive layer [12], preparation on anode conductive layer phosphor powder layer [14] and at the insulation paste layer [13] of the non-display area of anode conductive layer printing; Supporting wall structure between anode glass panel and cathode glass faceplate [17] and getter subsidiary component [16] is characterized in that: control grid [9], carbon nano-tube [10] and water wave type cathode array emission structure are arranged on cathode glass faceplate.
Described water wave type cathode array emission structure comprises cathode glass faceplate [1], block layer [2], cathode leg layer [3], negative electrode transition zone [4], cathode conductive layer [5], separator [6], grid lead layer [7], grid cover layer [8], grid tube preparative layer [9] and carbon nano-tube [10] part.
The backing material of described water wave type cathode array emission structure is a glass, as soda-lime glass, Pyrex, just cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the negative electrode transition zone; The negative electrode transition zone presents the collar plate shape shape, and its lower surface closely contacts with the cathode leg layer; Metal level after the etching above the negative electrode transition zone forms cathode conductive layer; Cathode conductive layer presents the water wave type shape, is positioned on the upper surface of negative electrode transition zone; Cathode conductive layer presents a plurality of water wave type striateds, do not contact mutually between the adjacent cathode conductive layer, but negative electrode transition zone by the bottom is interconnected; The insulation paste layer of the printing above the block layer forms separator; There is circular apertures in the separator, exposes the negative electrode transition zone and the cathode conductive layer of bottom; The madial wall of circular apertures is perpendicular to the face of cylinder of cathode glass faceplate in the separator; The lower surface of separator is the plane, cover cathode leg layer and vacant block layer part; The upper surface of separator is the plane, but has a slope that is 45 degree inclinations angle in circular apertures and separator upper surface intersection, promptly from the upper surface of separator, tilts to the inner tiltedly below of circular apertures gradually, till the madial wall that arrives circular apertures; The silver slurry layer of the printing above the separator upper surface forms the grid lead layer; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; Metal level after the etching in separator on the madial wall of circular apertures forms the grid tube preparative layer; The grid tube preparative layer depends on the madial wall of circular apertures in the separator, presents the circular ring type shape, and the middle part of its annulus closely contacts mutually with the grid lead layer; Made of carbon nanotubes is on cathode conductive layer.
The fixed position of described water wave type cathode array emission structure is for being fixed on the cathode glass faceplate; The cathode leg layer can be metallic gold, silver, copper, aluminium, molybdenum, chromium, tin; The negative electrode transition zone can be metallic gold, silver, molybdenum, chromium, tin; Cathode conductive layer can be metallic iron, cobalt, nickel; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid tube preparative layer can be metallic gold, silver, molybdenum, chromium, aluminium.
A kind of manufacture craft that has the flat-panel monitor of water wave type cathode array emission structure, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form block layer;
3) making of cathode leg layer [3]: on block layer, prepare a metal molybdenum layer, form the cathode leg layer after the etching;
4) making of negative electrode transition zone [4]: on the cathode leg layer, prepare a metallic chromium layer, form the negative electrode transition zone after the etching;
5) making of cathode conductive layer [5]: on the negative electrode transition zone, prepare a layer of metal cobalt, form cathode conductive layer after the etching;
6) making of separator [6]: printing insulation paste on block layer forms separator behind baking, sintering process;
7) making of grid lead layer [7]: printed silver slurry on separator forms the grid lead layer behind baking, sintering process;
8) making of grid cover layer [8]: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
9) making of grid tube preparative layer [9]: the chromium layer after the etching in separator above the madial wall of circular apertures forms the grid tube preparative layer;
10) cleaning surfaces of water wave type cathode array emission structure is handled: clean is carried out on the surface to water wave type cathode array emission structure, removes impurity and dust;
11) preparation of carbon nano-tube [10]: with made of carbon nanotubes on cathode conductive layer;
12) making of anode glass panel [11]: the dull and stereotyped soda-lime glass of integral body is carried out scribing, produce the anode glass panel;
13) making of anode conductive layer [12]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
14) making of insulation paste layer [13]: at the non-display area printing insulation paste layer of anode conductive layer;
15) making of phosphor powder layer [14]: the viewing area printing phosphor powder layer on anode conductive layer;
16) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [17] and all around glass enclose frame [15] and be assembled together, and getter [16] is put in the middle of the cavity, fix with glass powder with low melting point.Around face glass, smeared glass powder with low melting point, fixed with clip;
17) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
Described step 14 is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking (baking temperature: 150 ℃, retention time: 5 minutes) afterwards, be placed on and carry out high temperature sintering (sintering temperature: 580 ℃, retention time: 10 minutes) in the sintering furnace;
Described step 15 is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast (baking temperature: 120 ℃, the retention time: 10 minutes);
The device that described step 17 is specially having assembled carries out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out high temperature sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Claims (6)
1. the flat-panel monitor of a water wave type cathode array emission structure, comprise by cathode glass faceplate [1], anode glass panel [11] and all around glass enclose the sealed vacuum chamber that frame [15] is constituted; On the anode glass panel, have anode conductive layer [12], preparation on anode conductive layer phosphor powder layer [14] and at the insulation paste layer [13] of the non-display area of anode conductive layer printing; Supporting wall structure between anode glass panel and cathode glass faceplate [17] and getter subsidiary component [16] is characterized in that:
The backing material of described water wave type cathode array emission structure is a cathode glass faceplate; The insulation paste layer of the printing on the cathode glass faceplate forms block layer; Metal level after the etching above the block layer forms the cathode leg layer; Metal level after the etching above the cathode leg layer forms the negative electrode transition zone; The negative electrode transition zone presents the collar plate shape shape, and its lower surface closely contacts with the cathode leg layer; Metal level after the etching above the negative electrode transition zone forms cathode conductive layer; Cathode conductive layer presents the water wave type shape, is positioned on the upper surface of negative electrode transition zone; Cathode conductive layer presents a plurality of water wave type striateds, do not contact mutually between the adjacent cathode conductive layer, but negative electrode transition zone by the bottom is interconnected; The insulation paste layer of the printing above the block layer forms separator; There is circular apertures in the separator, exposes the negative electrode transition zone and the cathode conductive layer of bottom; The madial wall of circular apertures is perpendicular to the face of cylinder of cathode glass faceplate in the separator; The lower surface of separator is the plane, cover cathode leg layer and vacant block layer part; The upper surface of separator is the plane, but has a slope that is 45 degree inclinations angle in circular apertures and separator upper surface intersection, promptly from the upper surface of separator, tilts to the inner tiltedly below of circular apertures gradually, till the madial wall that arrives circular apertures; The silver slurry layer of the printing above the separator upper surface forms the grid lead layer; The insulation paste layer of the printing above the grid lead layer forms the grid cover layer; Metal level after the etching in separator on the madial wall of circular apertures forms the grid tube preparative layer; The grid tube preparative layer depends on the madial wall of circular apertures in the separator, presents the circular ring type shape, and the middle part of its annulus closely contacts mutually with the grid lead layer; Made of carbon nanotubes is on cathode conductive layer.
2. the flat-panel monitor of water wave type cathode array emission structure according to claim 1, it is characterized in that: the fixed position of described water wave type cathode array emission structure is for being fixed on the cathode glass faceplate; The cathode leg layer is one of metal gold, silver, copper, aluminium, molybdenum, chromium, tin; The negative electrode transition zone is one of metal gold, silver, molybdenum, chromium, tin; Cathode conductive layer is one of metallic iron, cobalt, nickel; The trend of the trend of grid lead layer and cathode leg layer is orthogonal; The grid tube preparative layer is one of metal gold, silver, molybdenum, chromium, aluminium.
3. the manufacture craft of the flat-panel monitor of a water wave type cathode array emission structure as claimed in claim 1 is characterized in that, its manufacture craft is as follows:
1) making of cathode glass faceplate [1]: whole plate glass is carried out scribing, produce cathode glass faceplate;
2) making of block layer [2]: on cathode glass faceplate, print insulation paste, behind baking, sintering process, form block layer;
3) making of cathode leg layer [3]: on block layer, prepare a metal level, form the cathode leg layer after the etching;
4) making of negative electrode transition zone [4]: on the cathode leg layer, prepare a metal level, form the negative electrode transition zone after the etching;
5) making of cathode conductive layer [5]: on the negative electrode transition zone, prepare a metal level, form cathode conductive layer after the etching;
6) making of separator [6]: printing insulation paste on block layer forms separator behind baking, sintering process;
7) making of grid lead layer [7]: printed silver slurry on separator forms the grid lead layer behind baking, sintering process;
8) making of grid cover layer [8]: printing insulation paste on the grid lead layer forms the grid cover layer behind baking, sintering process;
9) making of grid tube preparative layer [9]: the chromium layer after the etching in separator above the madial wall of circular apertures forms the grid tube preparative layer;
10) cleaning surfaces of water wave type cathode array emission structure is handled: clean is carried out on the surface to water wave type cathode array emission structure, removes impurity and dust;
11) preparation of carbon nano-tube [10]: with made of carbon nanotubes on cathode conductive layer;
12) making of anode glass panel [11]: whole plate glass is carried out scribing, produce the anode glass panel;
13) making of anode conductive layer [12]: evaporation one deck tin indium oxide rete on the anode glass panel; Form anode conductive layer after the etching;
14) making of insulation paste layer [13]: at the non-display area printing insulation paste layer of anode conductive layer;
15) making of phosphor powder layer [14]: the viewing area printing phosphor powder layer on anode conductive layer;
16) device assembling: with cathode glass faceplate, anode glass panel, supporting wall structure [17] and all around glass enclose frame [15] and be assembled together, and getter [16] is put in the middle of the cavity, fix with glass powder with low melting point;
17) finished product is made: the device that has assembled is carried out packaging technology form finished parts.
4. the manufacture craft of the flat-panel monitor of water wave type cathode array emission structure according to claim 3, it is characterized in that: the making of described step 14) insulation paste layer is specially the non-display area printing insulation paste layer at anode conductive layer, is used to prevent the parasitic electrons emission; Through overbaking, baking temperature: 150 ℃, the retention time: 5 minutes; Afterwards, be placed on and carry out high temperature sintering in the sintering furnace, sintering temperature: 580 ℃, the retention time: 10 minutes.
5. the manufacture craft of the flat-panel monitor of water wave type cathode array emission structure according to claim 3 is characterized in that: the making of described step 15) phosphor powder layer is specially the viewing area printing phosphor powder layer on anode conductive layer; In the middle of baking oven, toast baking temperature: 120 ℃, the retention time: 10 minutes.
6. the manufacture craft of the flat-panel monitor of water wave type cathode array emission structure according to claim 3 is characterized in that: described step 17) finished product is made the device that is specially having assembled and is carried out following packaging technology: toast in the middle of the sample device is put into baking oven; Carry out high temperature sintering in the middle of putting into sintering furnace; On exhaust station, carry out device exhaust, sealed-off, on the roasting machine that disappears, the getter of device inside bake and disappears, install pin formation finished parts at last additional.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200610107303A CN1956127B (en) | 2006-10-17 | 2006-10-17 | Flat display of water wave type cathode array emission structure and its manufacturing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN200610107303A CN1956127B (en) | 2006-10-17 | 2006-10-17 | Flat display of water wave type cathode array emission structure and its manufacturing process |
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| CN1956127A CN1956127A (en) | 2007-05-02 |
| CN1956127B true CN1956127B (en) | 2010-05-26 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5666024A (en) * | 1995-06-23 | 1997-09-09 | Texas Instruments Incorporated | Low capacitance field emission device with circular microtip array |
| CN1794408A (en) * | 2005-12-27 | 2006-06-28 | 中原工学院 | Panel display having adulterated polycrystal silicon field emission cathode array structure and its manufacturing technology |
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2006
- 2006-10-17 CN CN200610107303A patent/CN1956127B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5666024A (en) * | 1995-06-23 | 1997-09-09 | Texas Instruments Incorporated | Low capacitance field emission device with circular microtip array |
| CN1794408A (en) * | 2005-12-27 | 2006-06-28 | 中原工学院 | Panel display having adulterated polycrystal silicon field emission cathode array structure and its manufacturing technology |
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| CN1956127A (en) | 2007-05-02 |
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