CN100511881C - Four-time harmonic solid laser - Google Patents
Four-time harmonic solid laser Download PDFInfo
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- CN100511881C CN100511881C CNB2006100365260A CN200610036526A CN100511881C CN 100511881 C CN100511881 C CN 100511881C CN B2006100365260 A CNB2006100365260 A CN B2006100365260A CN 200610036526 A CN200610036526 A CN 200610036526A CN 100511881 C CN100511881 C CN 100511881C
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- time harmonic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
- H01S3/108—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using non-linear optical devices, e.g. exhibiting Brillouin or Raman scattering
- H01S3/109—Frequency multiplication, e.g. harmonic generation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
Abstract
The invention is concerned with the four times harmonic solid state laser includes twice harmonic creating chamber, the four times harmonic creating chamber are in modularizing independent design, that is, inside the four times harmonic creating chamber, the harmonic passes through the optic device that have electric machine connects the computer. The computer controls the electric machine to move the optic device when the four times harmonic laser passes through the surface of the optic device and is starting degradation, to insure the laser passing through the rest film of the device without degradation. The computerized electric machine controlling technique can include the straight line and the rotation displacement track and can insure the life cycle of the laser equals the sum of the single life time of the optic machine times the movable point.
Description
Affiliated technical field
The present invention relates to a kind of four-time harmonic solid laser.
Background technology
In recent years, along with the high speed development of laser processing industry, laser processing had penetrated into various fields.Particularly aspect the laser retrofit, in contrast to machining equipment, the no material consumption in the laser processing procedure, shockproof, need not cooling fluid, can process advantages such as arbitrary shape, make aspect retrofit laser process equipment step by step the traditional machining equipment of replacement.And short wavelength's high power Ultra-Violet Laser is owing to have high-resolution and high the absorption, and characteristics such as cold working become the important development direction of laser retrofit.
It is that 1～3wNd:YAG transfers Q laser of quadruple device that U.S. Coherent company has researched and developed average laser power, is mainly used in laser marking and TFT cutting; Research and develop the continuous laser of quadruple device of laser power 200mw, be mainly used in the quality inspection and the micro-lithography of semiconductor silicon garden sheet.
U.S. Spectra-Physics company has researched and developed average laser power 1～2w and has transferred Q Nd:YVO
4With the continuous laser of quadruple device of 1w, can be used for the sheet cutting of brilliant garden, the scribing of jewel substrate, brill micropore, FBG manufacturing and DVD laser disc and scribe.
Harmonic wave is focused on the quadruple nonlinear crystal outside laserresonator in order to produce common employing of high power four-time harmonic laser, obtain enough second harmonic power densities and improve shg efficiency, shown in No. 6249371, the United States Patent (USP) US of sony company and the United States Patent (USP) US of Acuhighr company 6741620 B2 numbers, Spectra-Physics company and Coherent company also adopt the method for one way overtones band outside this chamber simultaneously, this method simple and stable, but in order to reach higher quadruple conversion efficiency, must heavily focus on the quadruple nonlinear crystal with second harmonic, therefore the four-time harmonic laser of the high power density that produces on the quadruple nonlinear crystal easily causes nonlinear dielectric to destroy.In addition, the second harmonic that is not converted into four-time harmonic will be wasted through nonlinear crystal, and therefore, the conversion efficiency of four-time harmonic laser also is subjected to certain restriction.
Another kind of laser Q-switching four-time harmonic production method is an overtone crystal series connection method in the first-harmonic resonance chamber.Shown in No. 6229829, United States Patent (USP) US of Lightwave electronics, inc. 6697391 B2 numbers and the United States Patent (USP) US of Photonics IndustriesInternational company.This method has been utilized first-harmonic high power density in the chamber, improved the conversion efficiency of harmonic wave, for fear of the damage of ultraviolet light to element in the chamber, with prism or grind oblique nonlinear crystal end face, outside four-time harmonic laser export cavity, this method is based on unidirectional harmonic wave effect, exists the second harmonic laser that is not converted into four-time harmonic still to be wasted, thereby has limited the four-time harmonic power output.Reach high power output in order to raise the efficiency, Kigre company United States Patent (USP) US5278852 number and the United States Patent (USP) US of Quantronix company have proposed sub-chamber and multiple echo method in the chamber for No. 5943351 respectively.Utilize secondary harmonizing wave multiple frequency light repeatedly round frequency multiplication on the four-time harmonic crystal in the chamber, produce high efficiency, the output of high power four-time harmonic laser, the problem of this method is that Ultra-Violet Laser is output as dual-beam, makes power output and zlasing mode limited.
Above-mentioned four-time harmonic crystal commonly used is BBO, second harmonic laser on BBO again frequency multiplication obtain ultraviolet band.The United States Patent (USP) US of sony company also obtains four-time harmonic laser with first-harmonic and triple-frequency harmonics at the lbo crystal uppermixing No. 6249371 and exports; New in addition nonlinear crystal CLBO has very high harmonic conversion efficient and good deep ultraviolet light transmission, and Japanese Research Development utilizes CLBO to produce four-time harmonic and quintuple harmonics deep ultraviolet laser.But easy deliquescence of CLBO and material are soft frangible, can be used for industrial products after needing to improve gradually.
Domestic four-time harmonic Ultra-Violet Laser still is in the basic research stage, and Nanjing University and Shandong Normal University's joint study obtain 63mw/266nm laser output with chamber exterior focusing frequency multiplication method (" Acta Physica Sinica ", what capital very wait the people to show, the 49th volume, the 10th phase, 2000, the 2106th～2108 page).Ray machine used external cavity resonance method in Xi'an detects continuous 266nm laser signal (" photon journal ", people such as Chen Guofu work, the 28th volume, the 8th phase,, the 684th～687 page in 1999).Tsing-Hua University and Peking University's associating joint research obtain 78mw/266nm laser (" artificial lens journal ", people such as Sun Tongqing work, the 33rd volume, the 2nd phase,, the 133rd～135 page in 2004) with CLBO nonlinear crystal frequency multiplication.
Summary of the invention
The technical problem that institute of the present invention desire solves provides a kind of four-time harmonic Solid State Laser output that can obtain to stablize, and light conversion efficiency height, four-time harmonic cavity become standalone module with the second harmonic cavity design, conveniently debug the four-time harmonic solid laser of replacement and ultraviolet device long service life.
The technical solution adopted for the present invention to solve the technical problems is: a kind of four-time harmonic solid laser, comprise that second harmonic produces cavity, four-time harmonic produces cavity, second harmonic produces cavity and four-time harmonic produces cavity modularization independent design, in four-time harmonic produces cavity four-time harmonic the optics correspondence of process motor is installed, these motors link to each other with computer, when four-time harmonic laser makes the rete of the surface optical device of its process begin to degrade, computer control motor moves each optics, makes not degraded place of four-time harmonic laser by all the other retes of optics.
The second harmonic cavity comprises pump module, Q switching, two frequency multiplication nonlinear crystals, terminal reflector, angled mirrors and orthopedic systems, pump module produces the high power density fundamental wave, fundamental wave is incident to two frequency multiplication nonlinear crystals after the terminal reflector reflection, produce second harmonic laser through angled mirrors and orthopedic systems transmission output.
The four-time harmonic cavity comprises angled mirrors, terminal reflector, the non-linear crystalline substance of quadruple, injected the four-time harmonic Solid State Laser of under the repeatedly reflection of terminal reflector, repeatedly accumulating on the quadruple nonlinear crystal by angled mirrors output by the second harmonic laser after the orthopedic systems shaping.
Employed two frequency multiplication nonlinear crystals can be LBO, BBO or CLBO nonlinear crystal.
Employed quadruple nonlinear crystal can be I class LBO, I class BBO or I class CLBO nonlinear crystal.
Pump module employed first-harmonic solid laser medium can be Nd:YAG, Nd:YVO4, Nd:YLF, Nd:Glass, Yb:YAG or Er:YAG.
The Q switching that uses can be acoustooptic switch, electrooptical switching or saturated sharp receipts type passive Q-switch.
The pump light source that adopts can be high power semiconductor laser diode end pumping, diode side pumped or krypton lamp, xenon lamp profile pump.
Second harmonic produces cavity and adopts 45 refrative cavity structure, low-angle refrative cavity structure or Brewster angle refrative cavity structure.
Four-time harmonic produces cavity and adopts 45 refrative cavity structure, low-angle refrative cavity structure or Brewster angle refrative cavity structure.
The motor of mobile four-time harmonic Laser Devices can be stepping motor, servomotor, piezoelectric motor.
The motion track of mobile four-time harmonic Laser Devices can be straight line or rotation.
Moving of four-time harmonic Laser Devices can be to move separately or move simultaneously.
The skill effect that the present invention produced is: in the four-time harmonic solid laser of the present invention, the infrared fundamental radiation resonator design is and laser medium thermal lens balance high power density stable cavity structure, form high linearly polarized laser vibration, under these two conditions, produced the high power density first-harmonic.
The semiconductor pumped Solid State Laser resonant cavity that adopts optical matrix to design the high power density first-harmonic reaches harmonic conversion efficient efficiently.The high power density first-harmonic affacted on the two frequency multiplication nonlinear crystals produce second harmonic, carrying out beam shaping after the second harmonic output injects on the quadruple nonlinear crystal, adopt in the second harmonic chamber-chamber outside method for reflection repeatedly, make second harmonic constitute closed circuit repeatedly total reflection, produce the four-time harmonic Solid State Laser output of repeatedly accumulation, the second harmonic that is not converted into four-time harmonic repeatedly carries out frequency multiplication by nonlinear crystal, has made full use of second harmonic power, reaches high conversion efficiency; The method of non-focusing light beam prolongs the useful life of four-time harmonic optical component surface single-point rete behind the employing beam shaping.
Four-time harmonic solid laser of the present invention mechanically carries out modularized design to second harmonic and four-time harmonic cavity, makes to debug simply, and maintenance is replaced easily.
Four-time harmonic solid laser of the present invention adopts computer control displacement motor technology to the optical component of all four-time harmonic processes, wherein Machine Design is stablized small and exquisite, computer control precisely, comprise displacement tracks such as straight line, rotation, and have the displacement record function, make the laser terminal life equal the sum that the optical component single-point multiply by removable some useful life.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is a four-time harmonic solid laser light path principle schematic diagram of the present invention.
Fig. 2 is the total principle schematic of four-time harmonic solid laser ray machine electricity of the present invention.
Fig. 3 is in the experiment of four-time harmonic solid laser of the present invention, the experimental result picture (F=14KHZ) of different input currents pairing four-time harmonic Solid State Laser power and pulse width variation curve.
Fig. 4 is in the experiment of four-time harmonic solid laser of the present invention, the experimental result picture (I=34A) of the four-time harmonic Solid State Laser power of different repetition rate correspondences and pulse width variation curve.
Fig. 5 is in the experiment of generation of solid laser with biquadratic harmonic wave of the present invention, and the timing chart of the four-time harmonic Solid State Laser of generation (F=14KHZ, I=34A).
Embodiment
The optical principle of four-time harmonic solid laser of the present invention as shown in Figure 1, adopt fundamental wave oscillator, this oscillator comprises high-power laser diode array end pumping module 3, Q switching 2, end completely reflecting mirror 1,5,10, nonlinear crystal 4,9, angle mirror 6,8 and orthopedic systems 7, and wherein angle mirror 6,8 is 45 degree speculums in the chamber.By calculating and measuring under different pump powers, the thermal lensing effect of pump module 3, and, design the long and end face reflection mirror curvature in chamber with the spatial distribution that Gaussian mode in the optics matrix method calculating chamber transmits, make the infrared laser chamber under the thermal lens wide variation, still keep stable vibration.Placing two frequency multiplication nonlinear crystals 4 near the waist place of end completely reflecting mirror 5.Because the infrared laser chamber is sealing inner total reflection vibration, and with the thermal lensing effect balance of high power pump, therefore can reach very high intracavity power density.
The element that produces second harmonic comprises nonlinear crystal 4, end completely reflecting mirror 1, end completely reflecting mirror 5, angle mirror 6, and wherein, nonlinear crystal 4 is as two frequency-doubling crystals.High reflection of 6 plating first-harmonics of angle mirror and the high transmission Double-color film of second harmonic.Second harmonic constitutes the inner total reflection of sealing low consumption polarization coupled, and forming process is as follows: the fundamental wave from end completely reflecting mirror 5 directions are come, in two frequency-doubling crystals 4, produce horizontal polarization second harmonic light, and second harmonic light is through 6 outputs of angle mirror.
The element that produces four-time harmonic comprises nonlinear crystal 9, angle mirror 8 and end completely reflecting mirror 10, for single-ended open type reflection cavity structure, has low-loss, single beam output characteristic, and wherein, nonlinear crystal 9 is as quadruple frequency crystal.The forming process of four-time harmonic is as follows: the horizontal polarization second harmonic light that comes from angle mirror 6 directions incides on the quadruple frequency crystal 9 after orthopedic systems 7 and 8 transmissions of angle mirror, produce the four-time harmonic laser of vertical polarization, this quadruple harmonic wave laser returns from former road through 10 reflections of end completely reflecting mirror, through 8 outputs of angle mirror, the second harmonic that is not converted is by orthopedic systems 7, angle mirror 6, after reflecting once more, end completely reflecting mirror 5 acts on to quadruple frequency crystal 9, the four-time harmonic light of Chan Shenging is by the 8 coupling outputs of angle mirror once more, like this, repeatedly come and go frequency multiplication in quadruple frequency crystal 9, therefore produce very high efficiency four-time harmonic laser output.
The four-time harmonic solid laser according to the present invention, the quadruple experimental provision is tested in the employing heavy-duty diode laser array end pumped laser chamber.Fig. 3 is the experimental result (F=14KHZ) of pairing four-time harmonic laser power of different input currents and pulse width variation curve, Fig. 4 is the four-time harmonic Solid State Laser power of different repetition rate correspondences and the experimental result picture of pulse width variation curve, Fig. 5 be four-time harmonic laser timing chart (F=14KHZ, I=34A).
Four-time harmonic solid laser ray machine electricity principle of the present invention such as Fig. 2, it comprises the second harmonic laser generation module 11 that produces second harmonic laser, produce the four-time harmonic laser generation module 12 of four-time harmonic, also comprise automatically controlled displacement motor 13,15,16, and the mechanical connection frame 14 that connects quadruple frequency crystal 9 and end completely reflecting mirror 10, industrial computer 17 is controlled moving of automatically controlled displacement motor 13,15,16.
At first 11 outputs of second harmonic laser generation module are by the second harmonic laser after orthopedic systems 7 shapings, four-time harmonic laser generation module 12 is coupling on the second harmonic laser generation module 11 by mechanical device then, just can obtain the output of four-time harmonic laser this moment.
The long-play of four-time harmonic solid laser can cause the superficial film degraded of angle mirror 8, quadruple frequency crystal 9 and end completely reflecting mirror 10, causes that the four-time harmonic laser power descends.Send order to industrial computer 17 by software this moment, industrial computer 17 sends signal and controls automatically controlled displacement motor 13,15,16 operations, make angle mirror 8 and mechanical connection frame 14 move a position, move when wherein mechanical connection frame 14 mobile driven quadruple frequency crystal 9 and end completely reflecting mirror 10.After moving, four-time harmonic laser has passed through the brand-new position of angle mirror 8, quadruple frequency crystal 9 and end completely reflecting mirror 10, avoided the point that rete has been degraded, so the four-time harmonic laser power is gone up to peak power again.
For assurance four-time harmonic laser output light path is constant, the mobile of angle mirror 8 is vertical, rotation or laterally mobile along the angle direction of angle mirror 8 placements.Because the position of quadruple frequency crystal 9 and end completely reflecting mirror 10 is a parallel relation, so automatically controlled displacement motor 15,16 control quadruple frequency crystals 9 move at vertical and horizontal direction with end completely reflecting mirror 10 simultaneously.
The four-time harmonic solid laser principle according to the present invention is not difficult to infer that employed two frequency multiplication nonlinear crystals can be LBO, BBO or CLBO nonlinear crystal; Employed quadruple nonlinear crystal can be I class LBO, I class BBO or I class CLBO nonlinear crystal; Employed first-harmonic solid laser medium can be Nd:YAG, Nd:YVO4, Nd:YLF, Nd:Glass, Yb:YAG or Er:YAG; The Q switching that uses can be acoustooptic switch, electrooptical switching or saturated sharp receipts type passive Q-switch.In addition, the pump light source of employing can be high power semiconductor laser diode end pumping, diode side pumped or krypton lamp, xenon lamp profile pump.Can adopt low-angle refrative cavity structure, 45 refrative cavity structure or Brewster angle refrative cavity structure.Employed displacement motor can be stepping motor, servomotor, piezoelectric motor etc.The mobile of angle mirror is vertical, rotation or laterally mobile along the angle direction of angle mirror placement.Quadruple frequency crystal can move at vertical and horizontal direction simultaneously with the end completely reflecting mirror, or moves separately separately, and independent when mobile, the end completely reflecting mirror is rotatable mobile.
Claims (12)
1, a kind of four-time harmonic solid laser, comprise that second harmonic produces cavity, four-time harmonic produces cavity, it is characterized in that: second harmonic produces cavity and four-time harmonic produces cavity modularization independent design, in four-time harmonic produces cavity four-time harmonic the optics correspondence of process motor is installed, these motors link to each other with computer, when four-time harmonic laser makes the rete of the surface optical device of its process begin to degrade, computer control motor moves each optics, makes not degraded place of four-time harmonic laser by all the other retes of optics.
2, four-time harmonic solid laser according to claim 1, it is characterized in that: second harmonic produces cavity and comprises pump module, Q switching, two frequency multiplication nonlinear crystals, terminal reflector, angled mirrors and orthopedic systems, pump module produces the high power density fundamental wave, fundamental wave is incident to two frequency multiplication nonlinear crystals after the terminal reflector reflection, produce second harmonic laser through angled mirrors and orthopedic systems transmission output.
3, four-time harmonic solid laser according to claim 2, it is characterized in that: four-time harmonic produces cavity and comprises angled mirrors, terminal reflector, quadruple nonlinear crystal, injected the four-time harmonic Solid State Laser of under the repeatedly reflection of terminal reflector, repeatedly accumulating on the quadruple nonlinear crystal by angled mirrors output by the second harmonic laser after the orthopedic systems shaping.
4, four-time harmonic solid laser according to claim 2 is characterized in that: employed two frequency multiplication nonlinear crystals are LBO, BBO or CLBO nonlinear crystal.
5, four-time harmonic solid laser according to claim 3 is characterized in that: employed quadruple nonlinear crystal is I class LBO, I class BBO or I class CLBO nonlinear crystal.
6, four-time harmonic solid laser according to claim 2 is characterized in that: the employed first-harmonic solid laser medium of pump module is: Nd:YAG, Nd:YVO4, Nd:YLF, Nd:Glass, Yb:YAG or Er:YAG.
7, four-time harmonic solid laser according to claim 2 is characterized in that: the Q switching that uses is acoustooptic switch, electrooptical switching or saturated sharp receipts type passive Q-switch.
8, four-time harmonic solid laser according to claim 2 is characterized in that: second harmonic produces cavity and adopts 45 refrative cavity structure, low-angle refrative cavity structure or Brewster angle refrative cavity structure.
9, four-time harmonic solid laser according to claim 3 is characterized in that: four-time harmonic produces cavity and adopts 45 refrative cavity structure, low-angle refrative cavity structure or Brewster angle refrative cavity structure.
10, four-time harmonic solid laser according to claim 1 is characterized in that: the described motor that moves described optics is stepping motor, servomotor or piezoelectric motor.
11, four-time harmonic solid laser according to claim 1 is characterized in that: described optics mobile is that straight line moves or rotates mobile.
12, four-time harmonic solid laser according to claim 1 is characterized in that: the mobile of described optics is to move separately or move simultaneously.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100365260A CN100511881C (en) | 2006-07-08 | 2006-07-08 | Four-time harmonic solid laser |
| PCT/CN2006/002077 WO2008014640A1 (en) | 2006-07-08 | 2006-08-16 | Fourth harmonic generating solid laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100365260A CN100511881C (en) | 2006-07-08 | 2006-07-08 | Four-time harmonic solid laser |
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| Publication Number | Publication Date |
|---|---|
| CN101102033A CN101102033A (en) | 2008-01-09 |
| CN100511881C true CN100511881C (en) | 2009-07-08 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2006100365260A Expired - Fee Related CN100511881C (en) | 2006-07-08 | 2006-07-08 | Four-time harmonic solid laser |
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| Country | Link |
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| CN (1) | CN100511881C (en) |
| WO (1) | WO2008014640A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110019701A1 (en) * | 2008-01-31 | 2011-01-27 | Nkt Photonics A/S | System, device and method for extending the life-time of an optical system |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB201214856D0 (en) * | 2012-08-21 | 2012-10-03 | Powerlase Ltd | A laser module |
| CN103872567B (en) * | 2014-03-24 | 2016-08-17 | 哈尔滨工业大学 | Laser frequency conversion system and alternative approach outside chamber |
| CN105591274A (en) * | 2016-02-23 | 2016-05-18 | 北京工业大学 | Experimental device used for improving sum frequency conversion efficiency |
| CN106711749B (en) * | 2017-01-10 | 2023-11-10 | 鞍山紫玉激光科技有限公司 | End-pumped ultraviolet laser with long service life |
| CN109142300A (en) * | 2018-09-15 | 2019-01-04 | 海南师范大学 | A kind of Y type 228nm laser beam emitting device |
| CN109830884B (en) * | 2019-03-28 | 2021-05-14 | 上海交通大学 | Modular vacuum ultraviolet laser device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03145777A (en) * | 1989-10-31 | 1991-06-20 | Hoya Corp | Harmonic generating laser device |
| JPH03248588A (en) * | 1990-02-27 | 1991-11-06 | Ushio Inc | Generator of fourth harmonic of yag laser |
| JPH07193310A (en) * | 1993-12-27 | 1995-07-28 | Topcon Corp | Laser adjusting device |
| JP3997450B2 (en) * | 1998-03-13 | 2007-10-24 | ソニー株式会社 | Wavelength converter |
| US7242700B2 (en) * | 2004-10-05 | 2007-07-10 | Coherent, Inc. | Stabilized frequency-converted laser system |
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2006
- 2006-07-08 CN CNB2006100365260A patent/CN100511881C/en not_active Expired - Fee Related
- 2006-08-16 WO PCT/CN2006/002077 patent/WO2008014640A1/en active Application Filing
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20110019701A1 (en) * | 2008-01-31 | 2011-01-27 | Nkt Photonics A/S | System, device and method for extending the life-time of an optical system |
| US8619823B2 (en) * | 2008-01-31 | 2013-12-31 | Nkt Photonics A/S | System, device and method for extending the life-time of an optical system |
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| Publication number | Publication date |
|---|---|
| CN101102033A (en) | 2008-01-09 |
| WO2008014640A1 (en) | 2008-02-07 |
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Address after: 518051 Dazu laser building, 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong Patentee after: HANS LASER TECHNOLOGY INDUSTRY GROUP CO., LTD. Address before: No. 5 road 518057 in Guangdong province Shenzhen city Nanshan District high tech park of Pine Hill Factory District No. 8 Patentee before: Dazu Laser Sci. & Tech. Co., Ltd., Shenzhen |
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Granted publication date: 20090708 Termination date: 20200708 |