CN100497665C - 一种真空室软密封装置 - Google Patents
一种真空室软密封装置 Download PDFInfo
- Publication number
- CN100497665C CN100497665C CNB2006100506983A CN200610050698A CN100497665C CN 100497665 C CN100497665 C CN 100497665C CN B2006100506983 A CNB2006100506983 A CN B2006100506983A CN 200610050698 A CN200610050698 A CN 200610050698A CN 100497665 C CN100497665 C CN 100497665C
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- CN
- China
- Prior art keywords
- vacuum chamber
- hermatic door
- floating seal
- hole
- lift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000007667 floating Methods 0.000 claims abstract description 26
- 230000003028 elevating effect Effects 0.000 claims abstract description 11
- 230000006835 compression Effects 0.000 claims description 11
- 238000007906 compression Methods 0.000 claims description 11
- 238000007789 sealing Methods 0.000 abstract description 15
- 238000000137 annealing Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Press Drives And Press Lines (AREA)
- Physical Vapour Deposition (AREA)
- Tunnel Furnaces (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100506983A CN100497665C (zh) | 2006-05-08 | 2006-05-08 | 一种真空室软密封装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100506983A CN100497665C (zh) | 2006-05-08 | 2006-05-08 | 一种真空室软密封装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1847418A CN1847418A (zh) | 2006-10-18 |
CN100497665C true CN100497665C (zh) | 2009-06-10 |
Family
ID=37077158
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CNB2006100506983A Active CN100497665C (zh) | 2006-05-08 | 2006-05-08 | 一种真空室软密封装置 |
Country Status (1)
Country | Link |
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CN (1) | CN100497665C (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105627730B (zh) * | 2016-04-12 | 2018-08-31 | 东莞市超业精密设备有限公司 | 一种真空隧道干燥设备 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3820766A (en) * | 1971-03-01 | 1974-06-28 | Ipsen Ind Int Gmbh | Vacuum furnace |
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2006
- 2006-05-08 CN CNB2006100506983A patent/CN100497665C/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3820766A (en) * | 1971-03-01 | 1974-06-28 | Ipsen Ind Int Gmbh | Vacuum furnace |
Also Published As
Publication number | Publication date |
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CN1847418A (zh) | 2006-10-18 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: JINZHOU TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: HANGZHOU JINZHOU ELECTRIC FURNACE CO., LTD. Effective date: 20111101 Free format text: FORMER OWNER: HAN ZHIGEN |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20111101 Address after: 311113 Liangzhu Industrial Development Zone, Yuhang District, Zhejiang, Hangzhou Patentee after: JINZHOU TECHNOLOGY Co.,Inc. Address before: 311113 Liangzhu Industrial Development Zone, Yuhang District, Zhejiang, Hangzhou Co-patentee before: Han Zhigen Patentee before: HANGZHOU JINZHOU ELECTRIC FURNACE Co.,Ltd. |
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ASS | Succession or assignment of patent right |
Owner name: HANGZHOU JINZHOU TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: JINZHOU TECHNOLOGY CO., LTD. Effective date: 20140506 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20140506 Address after: Yuhang District of Hangzhou City, Zhejiang province 311113 Liangzhu Street Moganshan Road No. 2039 Patentee after: HANGZHOU JINZHOU TECHNOLOGY Co.,Inc. Address before: 311113 Liangzhu Industrial Development Zone, Yuhang District, Zhejiang, Hangzhou Patentee before: JINZHOU TECHNOLOGY Co.,Inc. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220818 Address after: 211700 east of Yulan Avenue and south of Jinyuan Road, Xuyi county economic development zone, Huai'an City, Jiangsu Province Patentee after: Jiangsu Jingzhou Bearing Co.,Ltd. Address before: 311113 2039 Moganshan Road, Liangzhu street, Yuhang District, Hangzhou, Zhejiang Patentee before: HANGZHOU JINZHOU TECHNOLOGY Co.,Inc. |
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EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20061018 Assignee: Jiangsu Jinzhou General Machinery Co.,Ltd. Assignor: Jiangsu Jingzhou Bearing Co.,Ltd. Contract record no.: X2024980015767 Denomination of invention: A vacuum chamber soft sealing device Granted publication date: 20090610 License type: Common License Record date: 20240919 |