CN100470697C - 快动式热控开关 - Google Patents

快动式热控开关 Download PDF

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Publication number
CN100470697C
CN100470697C CNB028203062A CN02820306A CN100470697C CN 100470697 C CN100470697 C CN 100470697C CN B028203062 A CNB028203062 A CN B028203062A CN 02820306 A CN02820306 A CN 02820306A CN 100470697 C CN100470697 C CN 100470697C
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CN
China
Prior art keywords
actuator
thermal
layer
movable
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB028203062A
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English (en)
Chinese (zh)
Other versions
CN1568529A (zh
Inventor
G·达维斯
S·贝卡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of CN1568529A publication Critical patent/CN1568529A/zh
Application granted granted Critical
Publication of CN100470697C publication Critical patent/CN100470697C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H37/02—Details
    • H01H37/32—Thermally-sensitive members
    • H01H37/46—Thermally-sensitive members actuated due to expansion or contraction of a solid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/12—Contacts characterised by the manner in which co-operating contacts engage
    • H01H1/14—Contacts characterised by the manner in which co-operating contacts engage by abutting
    • H01H1/20—Bridging contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H37/00—Thermally-actuated switches
    • H01H2037/008—Micromechanical switches operated thermally

Landscapes

  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Electromagnetism (AREA)
  • Micromachines (AREA)
  • Thermally Actuated Switches (AREA)
  • Manufacture Of Switches (AREA)
CNB028203062A 2001-08-20 2002-08-20 快动式热控开关 Expired - Lifetime CN100470697C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US31378901P 2001-08-20 2001-08-20
US60/313,789 2001-08-20

Publications (2)

Publication Number Publication Date
CN1568529A CN1568529A (zh) 2005-01-19
CN100470697C true CN100470697C (zh) 2009-03-18

Family

ID=23217148

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028203062A Expired - Lifetime CN100470697C (zh) 2001-08-20 2002-08-20 快动式热控开关

Country Status (7)

Country Link
US (1) US6768412B2 (enExample)
EP (1) EP1419511B1 (enExample)
JP (1) JP2005500655A (enExample)
KR (1) KR100929601B1 (enExample)
CN (1) CN100470697C (enExample)
DE (1) DE60212857T2 (enExample)
WO (1) WO2003017301A1 (enExample)

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TW200728605A (en) * 2006-01-20 2007-08-01 Univ Tamkang Thermo-buckled micro-actuator unit made of polymer with high thermal expansion coefficient
US7486854B2 (en) * 2006-01-24 2009-02-03 Uni-Pixel Displays, Inc. Optical microstructures for light extraction and control
US7621190B2 (en) * 2006-02-21 2009-11-24 Cisco Technology, Inc. Method and apparatus for strain monitoring of printed circuit board assemblies
US20070205473A1 (en) * 2006-03-03 2007-09-06 Honeywell International Inc. Passive analog thermal isolation structure
US7401515B2 (en) * 2006-03-28 2008-07-22 Honeywell International Inc. Adaptive circuits and methods for reducing vibration or shock induced errors in inertial sensors
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US8120133B2 (en) * 2006-09-11 2012-02-21 Alcatel Lucent Micro-actuator and locking switch
KR100837741B1 (ko) 2006-12-29 2008-06-13 삼성전자주식회사 미세 스위치 소자 및 미세 스위치 소자의 제조방법
US7626484B2 (en) 2007-09-26 2009-12-01 Honeywell International Inc. Disc seat for thermal switch
JP5001129B2 (ja) * 2007-12-17 2012-08-15 ホーチキ株式会社 熱センサ
US7920037B2 (en) * 2008-05-08 2011-04-05 Cooper Technologies Company Fault interrupter and load break switch
US7952461B2 (en) * 2008-05-08 2011-05-31 Cooper Technologies Company Sensor element for a fault interrupter and load break switch
US8004377B2 (en) * 2008-05-08 2011-08-23 Cooper Technologies Company Indicator for a fault interrupter and load break switch
US7936541B2 (en) 2008-05-08 2011-05-03 Cooper Technologies Company Adjustable rating for a fault interrupter and load break switch
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
US8153916B2 (en) * 2008-08-14 2012-04-10 Cooper Technologies Company Tap changer switch
US8013263B2 (en) * 2008-08-14 2011-09-06 Cooper Technologies Company Multi-deck transformer switch
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US8173915B2 (en) * 2008-12-10 2012-05-08 Honeywell International Inc. Ignition key switch apparatus with improved snap action mechanism
EP2282320A1 (de) * 2009-08-01 2011-02-09 Limitor GmbH Bimetall-Schnappscheibe
US20110063068A1 (en) * 2009-09-17 2011-03-17 The George Washington University Thermally actuated rf microelectromechanical systems switch
US8779886B2 (en) * 2009-11-30 2014-07-15 General Electric Company Switch structures
US8547626B2 (en) * 2010-03-25 2013-10-01 Qualcomm Mems Technologies, Inc. Mechanical layer and methods of shaping the same
JP6024269B2 (ja) * 2011-09-20 2016-11-16 株式会社デンソー 光走査装置
US9010409B2 (en) * 2011-11-18 2015-04-21 Palo Alto Research Center Incorporated Thermal switch using moving droplets
US9349558B2 (en) * 2011-12-06 2016-05-24 Palo Alto Research Center Incorporated Mechanically acuated heat switch
KR20140107430A (ko) 2011-12-23 2014-09-04 사노피-아벤티스 도이칠란트 게엠베하 약제 포장용기용 센서 장치
FR2998417A1 (fr) * 2012-11-16 2014-05-23 St Microelectronics Rousset Procede de realisation d'un element pointu de circuit integre, et circuit integre correspondant
DE202013012412U1 (de) * 2013-02-21 2016-10-18 Phoenix Contatct GmbH & Co. KG DC-geeignete thermische Schaltvorrichtung (S) zur Absicherung von einem oder mehreren elektronischen Bauteilen (EC)
CN103258686A (zh) * 2013-05-20 2013-08-21 东南大学 基于微机械悬臂梁结构的温度保护器件
US10643810B2 (en) * 2015-08-20 2020-05-05 Northeastern University Zero power plasmonic microelectromechanical device
DE102015221123A1 (de) * 2015-10-29 2017-05-04 Bayerische Motoren Werke Aktiengesellschaft Bedienelement
US10145906B2 (en) 2015-12-17 2018-12-04 Analog Devices Global Devices, systems and methods including magnetic structures
US10865000B2 (en) 2017-08-28 2020-12-15 Harris Corporation Satellite with a thermal switch and associated methods
EP3748318B1 (en) * 2019-06-06 2022-07-27 Mitsubishi Electric R&D Centre Europe B.V. Device for protecting an electronic switch from an over-temperature event
US12055927B2 (en) 2021-02-26 2024-08-06 Honeywell International Inc. Thermal metamaterial for low power MEMS thermal control
IT202300007161A1 (it) * 2023-04-14 2024-10-14 Humar Tiziano Attuatore elettromeccanico a matrice polimerica

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US5065978A (en) * 1988-04-27 1991-11-19 Dragerwerk Aktiengesellschaft Valve arrangement of microstructured components
FR2772512A1 (fr) * 1997-12-16 1999-06-18 Commissariat Energie Atomique Microsysteme a element deformable sous l'effet d'un actionneur thermique

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US5065978A (en) * 1988-04-27 1991-11-19 Dragerwerk Aktiengesellschaft Valve arrangement of microstructured components
FR2772512A1 (fr) * 1997-12-16 1999-06-18 Commissariat Energie Atomique Microsysteme a element deformable sous l'effet d'un actionneur thermique

Also Published As

Publication number Publication date
US6768412B2 (en) 2004-07-27
US20030034870A1 (en) 2003-02-20
DE60212857D1 (de) 2006-08-10
KR20040032950A (ko) 2004-04-17
DE60212857T2 (de) 2006-12-28
CN1568529A (zh) 2005-01-19
WO2003017301A1 (en) 2003-02-27
EP1419511B1 (en) 2006-06-28
KR100929601B1 (ko) 2009-12-03
JP2005500655A (ja) 2005-01-06
EP1419511A1 (en) 2004-05-19

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Granted publication date: 20090318