CN100468690C - 高深宽比自对准接触刻蚀中减低接触电阻的方法 - Google Patents
高深宽比自对准接触刻蚀中减低接触电阻的方法 Download PDFInfo
- Publication number
- CN100468690C CN100468690C CNB2006100287774A CN200610028777A CN100468690C CN 100468690 C CN100468690 C CN 100468690C CN B2006100287774 A CNB2006100287774 A CN B2006100287774A CN 200610028777 A CN200610028777 A CN 200610028777A CN 100468690 C CN100468690 C CN 100468690C
- Authority
- CN
- China
- Prior art keywords
- etching
- contact hole
- fluorocarbons
- ratio
- fluorine carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100287774A CN100468690C (zh) | 2006-07-10 | 2006-07-10 | 高深宽比自对准接触刻蚀中减低接触电阻的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB2006100287774A CN100468690C (zh) | 2006-07-10 | 2006-07-10 | 高深宽比自对准接触刻蚀中减低接触电阻的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101106100A CN101106100A (zh) | 2008-01-16 |
CN100468690C true CN100468690C (zh) | 2009-03-11 |
Family
ID=38999919
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB2006100287774A Expired - Fee Related CN100468690C (zh) | 2006-07-10 | 2006-07-10 | 高深宽比自对准接触刻蚀中减低接触电阻的方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN100468690C (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101651116B (zh) * | 2008-08-14 | 2011-10-05 | 中芯国际集成电路制造(北京)有限公司 | 接触孔的形成方法 |
CN101777491B (zh) * | 2009-01-09 | 2011-10-05 | 中芯国际集成电路制造(上海)有限公司 | 开启接触孔的方法 |
CN102487002B (zh) * | 2010-12-03 | 2014-03-12 | 中芯国际集成电路制造(北京)有限公司 | 连接件的制造方法 |
CN103247526B (zh) * | 2013-05-08 | 2015-07-29 | 中国电子科技集团公司第五十五研究所 | 一种适合于亚微米栅长半导体器件制造的栅介质刻蚀方法 |
CN106206421B (zh) * | 2016-07-27 | 2019-06-28 | 上海华虹宏力半导体制造有限公司 | 自对准接触孔的制备方法 |
CN111009459B (zh) * | 2019-12-26 | 2022-08-16 | 北京北方华创微电子装备有限公司 | 含氟残留物去除方法、刻蚀方法和氧化层清洗方法 |
-
2006
- 2006-07-10 CN CNB2006100287774A patent/CN100468690C/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN101106100A (zh) | 2008-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5685951A (en) | Methods and etchants for etching oxides of silicon with low selectivity in a vapor phase system | |
US5619064A (en) | III-V semiconductor gate structure and method of manufacture | |
CN100468690C (zh) | 高深宽比自对准接触刻蚀中减低接触电阻的方法 | |
EP0167136A2 (en) | Selective anisotropic reactive ion etching process for polysilicide composite structures | |
KR20010063852A (ko) | 반도체소자의 자기정렬적인 콘택 형성방법 | |
US20080121619A1 (en) | Method of cleaning wafer after etching process | |
US20140187050A1 (en) | Method for isotropic etching | |
US6376384B1 (en) | Multiple etch contact etching method incorporating post contact etch etching | |
KR20080060376A (ko) | 반도체 소자의 제조방법 | |
TWI652368B (zh) | 去除晶片上的二氧化矽的方法及積體電路製造製程 | |
CN101459071B (zh) | 去除硅衬底表面氧化硅层及形成接触孔的方法 | |
KR100695484B1 (ko) | 반도체 소자의 콘택 형성 방법 | |
US20080045032A1 (en) | Method for producing semiconductor device | |
US20070045227A1 (en) | Method of stripping photoresist | |
CN104979275A (zh) | 接触插塞的形成方法 | |
CN101330019B (zh) | 通孔刻蚀方法及通孔区内钝化层去除方法 | |
US6660642B2 (en) | Toxic residual gas removal by non-reactive ion sputtering | |
CN109037040B (zh) | 提高双大马士革刻蚀次沟槽工艺窗口的方法 | |
KR101711647B1 (ko) | 도전성 라인 사이의 유전 물질 제거 방법 | |
KR20060122578A (ko) | 반도체 메모리 소자의 하드 마스크 형성방법 | |
CN102082090B (zh) | 自对准硅化物膜的蚀刻方法 | |
CN104701242A (zh) | 接触孔的刻蚀方法 | |
US6716760B2 (en) | Method for forming a gate of a high integration semiconductor device including forming an etching prevention or etch stop layer and anti-reflection layer | |
US8642475B2 (en) | Integrated circuit system with reduced polysilicon residue and method of manufacture thereof | |
CN101826460B (zh) | 半导体元器件的干蚀刻方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING Effective date: 20111230 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20111230 Address after: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Co-patentee after: Semiconductor Manufacturing International (Beijing) Corporation Patentee after: Semiconductor Manufacturing International (Shanghai) Corporation Address before: 201203 Shanghai City, Pudong New Area Zhangjiang Road No. 18 Patentee before: Semiconductor Manufacturing International (Shanghai) Corporation |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090311 Termination date: 20180710 |