CN100460214C - Membrane donator apparatus for laser induction heat imaging - Google Patents
Membrane donator apparatus for laser induction heat imaging Download PDFInfo
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- CN100460214C CN100460214C CNB2006101219859A CN200610121985A CN100460214C CN 100460214 C CN100460214 C CN 100460214C CN B2006101219859 A CNB2006101219859 A CN B2006101219859A CN 200610121985 A CN200610121985 A CN 200610121985A CN 100460214 C CN100460214 C CN 100460214C
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- magnetosphere
- transferable
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- rete
- magnet
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
- H10K71/421—Thermal treatment, e.g. annealing in the presence of a solvent vapour using coherent electromagnetic radiation, e.g. laser annealing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
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Abstract
A laser induced thermal imaging (LITI) apparatus and a method of making an electronic device using the same are disclosed. The LITI apparatus includes a chamber, a substrate support, a contact frame, and a laser source or oscillator. The LITI apparatus transfers a transferable layer from a film donor device onto a surface of an intermediate electronic device. The LITI apparatus uses a magnetic force to provide a close contact between the transferable layer and the surface of the intermediate device. The magnetic force is generated by magnetic materials formed in two components of the LITI apparatus that are spaced apart interposing transferable layer and the surface of the intermediate device. Magnets or magnetic materials are formed in the two following components of the LITI apparatus: the intermediate device and the film donor device; the intermediate device and the contact frame; the substrate support and the film donor device; or the substrate support and the contact frame.
Description
The application requires the interests that are submitted to the 10-2005-0080347 of Korea S Department of Intellectual Property and 10-2005-0080349 korean patent application and are submitted to the 10-2005-0109819 korean patent application of Korea S Department of Intellectual Property on November 16th, 2005 on August 30th, 2005, described these applications are incorporated into this, for reference.
Technical field
The present invention relates to a kind of production of electronic installation, more particularly, relate to a kind of laser induced thermal imaging (LITI) technology of utilizing and in electronic installation, form organic material layer.
Background technology
Some electronic installation comprises organic layer.For example, organic light emitting apparatus (OLED) comprises various organic layers.Having made ins all sorts of ways forms such organic layer.For example, such method comprises deposition process, ink ejecting method and laser induced thermal imaging (LITI) method.
In the LITI method, use film donor (film donor) device that transferable layer is provided.Donator apparatus is placed on the electronic installation of partly making (semi-finished product device), thus the surface (receiving surface) of transferable this semi-finished product device of layer contact, and transferable layer is transferred on this semi-finished product device.Then, laser beam is applied on the selected zone of donator apparatus, and this laser beam produces heat in the selected zone of donator apparatus.This heat partly separates the expectation of transferable layer.When donator apparatus was removed, transferable layer separated portions stayed on the surface of semi-finished product device.
Usually, LITI equipment uses suction that transferable layer is contacted with the described surface of semi-finished product device during above-mentioned technology and keeps this contact.Fig. 1 is the viewgraph of cross-section of LITI equipment 100.LITI equipment 100 comprises chamber 110, substrate support part 120 and lasing light emitter or laser oscillator 130.Substrate support part 120 comprises: semi-finished product device pockets 121 will partly become electronic installation 140 to hold wherein; Donator apparatus pockets 123 holds membrane donator apparatus 150 wherein.
For high accuracy and less defective ground partly being transferred on the semi-finished product device by organic material, need closely contact between transferable layer and receiving surface.LITI equipment 100 comprises that suction mechanism is to form so closely contact.Suction mechanism comprises pipe 161 and 163 and vavuum pump P.Suction by pipe 161 makes semi-finished product device (not shown) be arranged in groove 121 downwards and it is maintained.Suction by pipe 163 makes the donator apparatus (not shown) be arranged in groove 123 downwards and contacts with this semi-finished product device, and it is maintained like this.In order to produce such suction mode, in chamber, need air or other gaseous medium.
Because the technology of carrying out in before the LITI technology or then LITI technology realizes under vacuum condition usually, realizes so utilize the LITI arts demand of suction mode to break vacuum condition in whole technology.
This part problem is to provide the background information of correlation technique and does not constitute admitting of prior art.
Summary of the invention
An aspect of of the present present invention is to provide a kind of membrane donator apparatus that uses in laser induced thermal imaging.Described device comprises: substrate; Transferable rete is configured to when the heat of q.s is applied on it, and its part is transferred, and described transferable rete comprises organic material; Magnetosphere comprises magnet, and wherein, described magnetosphere is between described substrate and described transferable rete, and perhaps described substrate is between described magnetosphere and described transferable rete.
Described magnetosphere can be overlapping substantially with the entire portion of described transferable rete.Described magnet can comprise electromagnet, permanent magnet or described electromagnet and permanent magnet the two.Described magnet can comprise electromagnet, and wherein, described device also comprises the electrode that is electrically connected to described electromagnet and is configured to be attached to external power source.
Described magnet can comprise the permanent magnet of selecting from the group of being made of alnico magnet, ferrite lattice, rare-earth magnet, rubber magnet and plastic magnet.Described magnet can comprise one or more forms of selecting from the group that is made of plate shape, bar shaped, rod and graininess.
Described device also can comprise light-heat conversion layer, and described light-heat conversion layer is configured to produce heat when the light of predetermined wavelength is applied on it, and described light-heat conversion layer is between described substrate and described transferable rete.Described magnetosphere can be between described substrate and described light-heat conversion layer.Described magnetosphere can be between described light-heat conversion layer and described transferable rete.Described substrate can be between described magnetosphere and described transferable rete, and described magnetosphere also can be between the material of described substrate and described substrate, and described seemingly magnetosphere is the same in described substrate.
Described magnetosphere also can comprise light-thermal transition material, and described light-thermal transition material is configured to produce heat when the light of predetermined wavelength is applied on it.Described magnet q.s is to produce the magnetic field of about 5mGT to about 50mGT.
Another aspect of the present invention is to provide a kind of membrane donator apparatus that is used for laser induced thermal imaging, and described device comprises: substrate; Transferable rete is configured to when the heat of q.s is applied on it, and its part is transferred, and described transferable rete comprises organic material; Light-heat conversion layer is configured to produce heat when the light of predetermined wavelength is applied on it, and described light-heat conversion layer is between described substrate and described transferable rete; Magnetosphere, comprising can be by the material of magnetic attraction, wherein, describedly can or be arranged in whole described magnetosphere substantially equably by the material primitive rule of magnetic attraction ground, wherein, described magnetosphere is between described substrate and described transferable rete, and perhaps described substrate is between described magnetosphere and described transferable rete.
Describedly can be comprised one or more forms of from the group that constitutes by plate shape, bar shaped, rod and graininess, selecting by the material of magnetic attraction.Described magnetosphere is between described substrate and described light-heat conversion layer.Described magnetosphere is between described light-heat conversion layer and described transferable rete.What described magnetosphere can comprise q.s can be by the material of magnetic attraction, is used for the motion of described device when being arranged in the magnetic field from about 5mGT to about 50mGT when described device.Described can being comprised from by Fe, Ni, Cr, Fe by the material of magnetic attraction
2O
3, Fe
3O
4, CoFe
2O
4, MnFeO
4And select in the group that constitutes of above-mentioned two kinds or more alloy one or more.Described magnetosphere is overlapping substantially in the entire portion of described transferable rete.
Another aspect of the present invention is to provide a kind of method of making electronic installation, and described method comprises:
The housing apparatus that comprises half one-tenth product and bracing or strutting arrangement is provided, described housing apparatus comprises magnetosphere, describedly partly become product to comprise receiving surface, described bracing or strutting arrangement is configured to make the described product that partly becomes, and the magnetosphere of described housing apparatus comprises magnet or can be by the material of magnetic attraction; Above-mentioned membrane donator apparatus is provided; Be arranged to make transferable rete in the face of described receiving surface described membrane donator apparatus, and the magnetosphere of described housing apparatus and membrane donator apparatus be attached to each other, thereby described transferable rete contact, and does not have bubble between the two substantially with described surface.
Described method also can comprise laser beam is shone at least a portion of described membrane donator apparatus, and at least a portion of described transferable rete is transferred on the described surface.Describedly partly become product can comprise described magnetosphere.Described bracing or strutting arrangement can comprise described magnetosphere.Described method is carried out under the environment of basic vacuum.Described electronic installation comprises OLED.
Description of drawings
By the description of carrying out with reference to the accompanying drawings, each side of the present invention and advantage will become clear and be more readily understood, wherein:
Fig. 1 shows the schematic cross sectional views of laser induced thermal imaging apparatus.
Fig. 2 shows the schematic cutaway view of laser induced thermal imaging apparatus according to an embodiment of the invention.
Fig. 3 shows the schematic decomposition diagram of laser induced thermal imaging apparatus according to an embodiment of the invention.
Fig. 4 A and Fig. 4 B show the schematic cutaway view of the electronic installation of making according to the part of the embodiment of the invention.
Fig. 4 C shows the schematic vertical view of the electronic installation of partly making according to an embodiment of the invention.
Fig. 5 A shows the schematic perspective view of substrate support part according to an embodiment of the invention.
Fig. 5 B shows the schematic cross sectional views of the substrate support part of Fig. 5 A that cuts open along I-I '.
Fig. 6 A to 6C shows the schematic phantom according to the donator apparatus of the embodiment of the invention.
Fig. 7 shows the schematic perspective view of contact frame according to an embodiment of the invention.
Fig. 8 is the flow chart of laser induced thermal imaging method according to an embodiment of the invention.
Fig. 9 A to 9F shows laser induced thermal imaging method according to an embodiment of the invention.
Figure 10 A to 10D shows laser induced thermal imaging method according to an embodiment of the invention.
Figure 11 shows the schematic perspective view of laser oscillator according to an embodiment of the invention.
The specific embodiment
Describe various kinds embodiment of the present invention with reference to the accompanying drawings in detail.In the accompanying drawings, identical label is indicated similar assembly or element on identical or the function.
Laser induced thermal imaging apparatus
In an embodiment, LITI equipment use magnetic force is provided at the tight contact between membrane donator apparatus and the semi-finished product device.Different with suction mode in the LITI equipment of Fig. 1, magnetic force need not have air or fluid in chamber.In an embodiment, can under vacuum or non-vacuum condition, carry out the use membrane donator apparatus of magnetic force and contacting of semi-finished product device.
Fig. 2 shows the LITI equipment 200 according to an embodiment.The LITI equipment that illustrates comprises chamber 210, substrate support part 260, contact frame 230 and lasing light emitter or laser oscillator 220.Chamber 210 provides the space of using membrane donator apparatus 241 to handle semi-finished product (part is made) electronic installation 250.Substrate support part 260 is configured to support semi-finished product device 250 and membrane donator apparatus 241.Contact frame 230 is connected to chamber 210 movably, is used for providing on membrane donator apparatus 241 downward weight.In certain embodiments, can omit contact frame 230.Membrane donator apparatus 241 comprises transferable layer (not shown).Transferable layer will be transferred on the semi-finished product device by laser.Laser oscillator 220 is positioned on the contact frame 230.Laser oscillator 220 is configured to by contact frame 230 laser be shone on the membrane donator apparatus 241.
In one embodiment, 200 operations of LITI equipment are as follows.At first, semi-finished product device 250 is put into chamber 210 and being placed on the substrate support part 260.Then, membrane donator apparatus 241 is placed on the semi-finished product device 250.Membrane donator apparatus 241 contacts with semi-finished product device 250 at least a portion.Utilize magnetic force to make membrane donator apparatus 241 press semi-finished product device 250.In this step, transferable layer closely contacts with the semi-finished product device.Laser oscillator 220 is activated, and laser is shone on the membrane donator apparatus 241.Then, transferable layer is transferred to semi-finished product device 250 from membrane donator apparatus 241.
Fig. 3 shows the schematic decomposition view of LITI equipment 200.Dotted line is represented chamber 210.In the illustrated embodiment, laser oscillator 220, contact frame 230 and substrate support part 260 alignment vertically mutually.In LITI technology, semi-finished product device 250 is placed on the substrate support part 260, and membrane donator apparatus 241 is placed on the semi-finished product device 250.In another embodiment, above-mentioned parts can have different arrangements, for example opposite structure.In certain embodiments, the substrate support part can be configured to fix the semi-finished product device from the top.Such substrate support part can be described as substrate holder.
In the illustrated embodiment, laser oscillator 220 is positioned at the crown center part of chamber 210, and on contact frame 230, but the position of laser oscillator 220 is not limited thereto.Laser oscillator 220 is configured to laser beam is shone on the membrane donator apparatus 241.Figure 11 shows an embodiment of laser oscillator 220.The laser oscillator 220 that illustrates can be a CW ND:YAG laser instrument (1604nm).Laser oscillator 220 has two galvanometer scanners (galvanometer scanner) 221 and 222.Laser oscillator 220 also has scanning lens 223 and cylindrical lens 224.The technical staff should be appreciated that various types of laser oscillators can be suitable for being provided for the laser of membrane donator apparatus.
In the illustrated embodiment, contact frame 230 is positioned on the substrate support part 260, but is not limited thereto.Contact frame 230 is connected to the crown center part of chamber 210 movingly through transmission unit 231.Contact frame 230 has the contact plate 232 that is configured to provide weight on membrane donator apparatus 241.Contact plate 232 is patterned, and the part of below membrane donator apparatus 241 is exposed, and blocks other part simultaneously.For the described part of exposed film donator apparatus 241, contact plate 232 comprises a plurality of openings 233.Opening 233 allows laser beam directly on the described part of membrane donator apparatus 241.Such structure is transferred on the semi-finished product device 250 part of transferable layer, and this will describe in detail after a while.In a particular embodiment, LITI equipment can not have contact frame.
In the illustrated embodiment, substrate support part 260 is positioned at the bottom of reaction chamber 210, but is not limited thereto.The substrate support part 260 that illustrates has recess 263 to hold semi-finished product device 250.Substrate support part 260 is gone back support membrane donator apparatus 241.In addition, substrate support part 260 holds substrate elevating lever 265 and membrane donator apparatus elevating lever 266 below.Substrate support part 260 has through hole 261 and 262, by described through hole substrate elevating lever 265 and the motion of membrane donator apparatus elevating lever 266 in the vertical directions.
During LITI technology, semi-finished product device 250 is placed on the substrate support part 260.Term " semi-finished product device " refers to have any device on the surface that utilizes LITI technology formation organic material.Usually, such device is the electronic installation that part is made.In one embodiment, semi-finished product device 250 is organic light emitting apparatus that part is made.Semi-finished product device 250 comprises the surface that transferable layer is transferred thereon.
During LITI technology, membrane donator apparatus 241 is placed on the semi-finished product device 250.In one embodiment, membrane donator apparatus 241 comprises base substrate, light-heat conversion layer and transferable layer, and this will describe after a while.The membrane donator apparatus 241 that illustrates also comprises the membrane donator apparatus pallet 240 around membrane donator apparatus 241.Membrane donator apparatus pallet 240 is the frameworks as the shape that keeps membrane donator apparatus 241.During LITI technology, transferable layer is arranged to face the surface of semi-finished product device.
The LITI equipment 200 use magnetic force of Fig. 3 provide the tight contact between membrane donator apparatus 241 and the semi-finished product device 250.Magnetic force keeps membrane donator apparatus 241 to contact with the tight of semi-finished product device 250, does not have the air gap or bubble between described two devices 241 and 250.
In one embodiment, magnetic force can produce by separately two or more magnetic materials.In an embodiment, magnetic material is formed in two parts that separate of LITI system, and the surface that transferable layer and transferable thereon layer are transferred is between above-mentioned two parts, promptly, parts are positioned on the transferable layer, and another parts are positioned under the described surface.Here, term " parts " refers to the parts and the device that use comprise semi-finished product device 250, membrane donator apparatus 241, contact frame 230 and substrate support part 260 in LITI technology.In an embodiment, magnet or magnetic material are formed in following two parts of LITI system, but are not limited thereto: 1) semi-finished product device 250 and membrane donator apparatus 241; 2) semi-finished product device 250 and contact frame 230; 3) substrate support part 260 and membrane donator apparatus 241; Perhaps 4) substrate support part 260 and contact frame 230.
Preferably, magnetic material can be arranged among following parts combination a kind of of LITI system: 5) substrate support part 260, semi-finished product device 250 and contact frame 230; 6) substrate support part 260, semi-finished product device 250 and membrane donator apparatus 241; 7) substrate support part 260, membrane donator apparatus 241 and contact frame 230; Perhaps 8) semi-finished product device 250, membrane donator apparatus 241 and contact frame 230.Yet in another embodiment, magnetic material can be arranged on 9) in substrate support part 260, semi-finished product device 250, membrane donator apparatus 241 and the contact frame 230.The technical staff should be appreciated that according to the design of LITI equipment, magnetic material can be arranged in other specific parts.
To be configured at the magnetic material in a pair of parts attract each other, thereby membrane donator apparatus 241 and semi-finished product device 250 be formed on the tight contact between the surface that transferable layer and transferable layer be transferred thereon.Term " magnetic material " refers to magnet or can be by the material of magnetic attraction as used herein.Unless other appointment is arranged, " magnet " can refer to permanent magnet or electromagnet usually.As used herein term " can by the material of magnetic attraction " refer to not to be magnet but the material that can be attracted by magnet.In certain embodiments, one in two LITI parts comprises magnet, and another can comprise be not magnet can be by the material of magnetic attraction.In further embodiments, two LITI parts can comprise magnet.In a particular embodiment, also can comprise can be by the material of magnetic attraction for the parts that comprise magnet.In all embodiments, parts comprise the magnetic material of some, and the enough magnetic force of the tight contact between membrane donator apparatus 241 and the semi-finished product device 250 is provided with generation.
Different with the suction mode, magnetic force can produce in vacuum environment.Therefore, in certain embodiments, can utilize magnetically to induce to make and carry out LITI technology between membrane donator apparatus 241 and the semi-finished product device 250 in a vacuum contiguously, and not destroy vacuum.In addition, in further embodiments, magnetic force systems can make with the suction system and be used for improving LITI technology.Below, will describe magnet or can be in detail by the position and the structure of the material of magnetic attraction in each parts.
In one embodiment, the magnetic material below transferable layer is arranged in semi-finished product device 250.Fig. 4 A and Fig. 4 B show the cutaway view of semi-finished product device 400A and 400B embodiment.Semi-finished product device 400A that illustrates and 400B are the organic light emitting apparatus (OLED) that part is made.Each of semi-finished product device 400A and 400B all comprises substrate 401, cushion 402, thin film transistor (TFT) 440, passivation layer 409, electrode 420 and pixel partition wall 430.Thin film transistor (TFT) 440 comprises insulating barrier 403 and 404, semiconductor layer 405, source electrode 406, drain electrode 407 and grid 408.Pixel partition wall 430 is formed on the part of passivation layer 409 and electrode 420, the major part of the top surface of exposed electrode 420.Electrode 420 will be as the negative electrode or the anode of Organic Light Emitting Diode.Transferable layer will be formed on the top surface of exposure of electrode 420.
In Fig. 4 A, magnetosphere 401a is attached to the basal surface of substrate 401.In another embodiment shown in Fig. 4 B, magnetosphere 401b is between substrate 401 and cushion 402.Magnetosphere 401a and 401b comprise following with the magnetic material of describing in detail.In one embodiment, magnetosphere 401a or 401b have greatly about 5000
To the thickness between the 1 μ m.
In a particular embodiment, according to the semi-finished product Design of device, the semi-finished product device can comprise the arbitrary parts that are embedded under the electrode 420, for example substrate 401, cushion 402, insulating barrier 403 and 404 and/or passivation layer 409 in magnetic material.Under any circumstance, the semi-finished product device comprises the magnetic material that makes the sufficient amount that closely contacts between membrane donator apparatus and the semi-finished product device.
In another embodiment, the semi-finished product device can be included in the magnetic material strip in the specific region of semi-finished product device.Fig. 4 C shows the vertical view of the embodiment of semi-finished product device 400C.The device that illustrates is the organic light emitting apparatus 400C that part is made.Device 400C comprises viewing area 460, data driver 430, scanner driver 440 and power connector 410 and 420.Viewing area 460 comprises a plurality of pixels 470 of matrix form.The device 400C that illustrates comprises magnetic material strip 450a and 450b.In the illustrated embodiment, described 450a is positioned at the neighboring area in 460 outsides, viewing area.In addition, described 450b is formed in the viewing area 460.The bar 450 that illustrates is parallel to each other substantially.In other embodiments, magnetic material strip is formed in the pixel region, rather than is formed in the neighboring area.The technical staff should be appreciated that, can use the bar of various other structures that magnetic force is provided.
In one embodiment, magnetic material can be the magnet that comprises permanent magnet or electromagnet.Permanent magnet can be alnico magnet, ferrite lattice, rare-earth magnet, rubber magnet or plastic magnet.Permanent magnet can slave plate shape, select at least a form in sheet shape, bar shaped, rod and the graininess.In one embodiment, permanent magnet can be nano level magnetic-particle, plate, sheet, bar or bar.Utilize spin coated (spin coating), electron beam deposition or inkjet deposited with nano level like this particle deposition on the surface of the parts of semi-finished product device.In a further embodiment, plate, sheet, bar, bar and particle can be greater than nano level sizes.
Permanent magnet can be evenly distributed among magnetosphere 401a or the 401b substantially.In another embodiment, magnetosphere 401a or 401b can only have the permanent magnet part on the zone that transferable layer is transferred to.In another embodiment, magnetosphere can be the single plate of being made by permanent magnet.
In another embodiment, magnetic material can be an electromagnet.Electromagnet can have at least a form of selecting from solenoid and annulus.The solenoid finger-type becomes the coil of straight tube shape.The annulus finger-type is the coil of thing shape circlewise.Usually, annulus is that bending is so that the solenoid that the end connects.In certain embodiments, solenoid or annulus can be included in the paramagnetic material of coil inside or the core of ferrimagnet (for example iron).Its magnetization because electromagnet needs electric current is so electromagnet is connected to external power source by lead.In one embodiment, the non-display area of semi-finished product device can comprise that one or more is electrically connected to the electrode of the electromagnet of appointment.Electrode structure is become from the external power source received power.In addition, electrode is connected to electromagnet by lead.In an embodiment, electrode can be formed on the outer surface of the device that comprises electromagnet or main body, to be electrically connected to external power source.In other embodiments, electrode can protrude through the device that comprises electromagnet or the outside of main body.In the electronic installation that is formed by the semi-finished product device, electrode can be non-active and be embedded in the dielectric material.Similar to permanent magnet, electromagnet can distribute substantially equably or unevenly according to the semi-finished product Design of device.
In another embodiment, magnetic material can be can be by the material of magnetic attraction rather than magnet.Can be included but not limited to Fe, Ni, Cr, Fe by the examples of material of magnetic attraction
2O
3, Fe
3O
4, CoFe
2O
4, MnFeO
4, their alloy or the mixture of two or more above-mentioned materials.Can also be comprised plastics and ceramic magnet material by other example of the material of magnetic attraction.Similar to permanent magnet, can by the material of magnetic attraction can slave plate shape, select at least a form in sheet shape, bar shaped, rod and the graininess.These materials can be nanoscale or bigger particle.Can be evenly distributed in the magnetosphere by the material of magnetic attraction.In another embodiment, can be only have on the zone that transferable layer is transferred can be by the material part of magnetic attraction for magnetosphere.In another embodiment, magnetosphere can be by the single plate that can be made by the material of magnetic attraction.
In another embodiment, the magnetic material under the transferable layer can be arranged in the substrate support part.Fig. 5 A and Fig. 5 B show an embodiment of the substrate support part 260 that comprises magnetic material.The substrate support part 260 that illustrates is included in the electromagnet 264 in the zone 263 (being illustrated by the broken lines) under the recess that is used for holding the semi-finished product device.Electromagnet 264 in the vertical directions that illustrate are aligned.Yet electromagnet can be arranged as other various structures according to the design of substrate support part.Electromagnet can also have with respect to aforesaid different shape of semi-finished product device and structure.In certain embodiments, magnetic material can be an aforesaid permanent magnet or can be by the material of magnetic attraction with respect to the semi-finished product device.
In one embodiment, the magnetic material on the transferable layer can be arranged in membrane donator apparatus.Fig. 6 A to Fig. 6 C is the partial sectional view according to the membrane donator apparatus 600A-600C of these embodiment.
Each membrane donator apparatus 600A-600C comprises base substrate 601, overlay on light-heat conversion layer 602 on the base substrate 601, overlay on the intermediate layer 603 on light-heat conversion layer 602 and overlay on transferable layer 604 on the intermediate layer 603.Preferably, membrane donator apparatus can comprise the cushion (not shown) between intermediate layer 603 and the transferable layer 604.
Light-heat conversion layer 602 is configured to absorb laser and laser is changed into heat.Conversion coating 602 comprises light absorbing material.Light absorbing material can have about optical density of 0.1 to 0.4.Light absorbing material can comprise metal, metal oxide and/or organic material.The example of metal/metal oxide includes but not limited to, the oxide of aluminium, silver, chromium, tin, nickel, titanium, cobalt, zinc, gold, copper, tungsten, molybdenum, lead and above-mentioned metal.Organic material can comprise photosynthetic material (photosynthetic material).The example of organic material comprises the polymer of being made by (methyl) acrylate monomer or oligomer, the polymer of making by acrylic (methyl) acrylate oligomer, ester (methyl) acrylate oligomer, epoxy (methyl) acrylate oligomer, polyurethane (methyl) acrylate oligomer or the like for example, the perhaps polymer of making by two or more mixture of above-mentioned substance.In addition, conversion coating 602 can also comprise other additive, for example, and carbon black, graphite or infrared ray dyestuff (infrared dye).
According to light-hot material and manufacture method, the thickness of light-heat conversion layer 602 can change.For example, when using vacuum deposition method, laser beam deposition process or sputtering method, conversion coating can have about 100
To 5000
Thickness.In another embodiment, when using extrusion coating method, gravure coating method, rotary coating method and scraping coating method, conversion coating can have the thickness of about 0.1 μ m to 2 μ m.
The cushion (not shown) is used to improve the transfer performance of transferable layer 604.Cushion can comprise one or more in metal oxide, metal sulfide, nonmetal inorganic compound and the organic material.The example of inorganic compound comprises Al and Au.The example of organic material comprises polyimides.
With reference to Fig. 6 A, light-heat conversion layer 602 comprises magnetic material.For example, light-heat conversion layer 602 can comprise permanent magnet and/or electromagnet.In other embodiments, can comprise can be by the material of magnetic attraction for conversion coating 602.Magnetic material can have the various structures above-mentioned with respect to the semi-finished product device.In other embodiments, magnetic material can be embedded in base substrate 601 or the intermediate layer 603.In a particular embodiment, magnetic material can be embedded in two-layer at least in base substrate 601, light-heat conversion layer 602 and the intermediate layer 603.In other embodiments, magnetic material can only embed in the specific part of one or more layer in base substrate 601, light-heat conversion layer 602 and the intermediate layer 603, but is not whole layer.For example, one or more layer in base substrate 601, light-heat conversion layer 602 and the intermediate layer 603 can comprise the only magnetic material under the part of the transferable layer that will be transferred to the semi-finished product device.
With reference to Fig. 6 B and Fig. 6 C, membrane donator apparatus 600B and 600C comprise magnetosphere 605.Magnetosphere 605 comprises magnetic material, for example permanent magnet, electromagnet and/or can be by the material of magnetic attraction.Magnetic material can have with respect to the aforesaid various structures of semi-finished product device.
In Fig. 6 B, membrane donator apparatus 600B comprises the magnetosphere 605 between base substrate 601 and the light-heat conversion layer 602.In Fig. 6 C, membrane donator apparatus 600C comprises the magnetosphere 605 between light-heat conversion layer 602 and the intermediate layer 603.In another embodiment, membrane donator apparatus comprises the magnetosphere 605 between intermediate layer 603 and transferable layer 604.In another embodiment, membrane donator apparatus is included in the magnetosphere on the basal surface of base substrate 601, and this magnetosphere is remotely in the face of light-heat conversion layer 602.In a particular embodiment, membrane donator apparatus can have two or more magnetospheres between two pantostrats in base substrate 601, light-heat conversion layer 602, intermediate layer 603 and transferable layer 604.In such embodiments, magnetic material can also embed in base substrate 601, light-heat conversion layer 602 and the intermediate layer 603 at least one the layer in.The technical staff should be appreciated that magnetospheric structure and combination can change according to the design of membrane donator apparatus.
In another embodiment, the magnetic material on the transferable layer can be arranged in contact frame.Fig. 7 shows an embodiment of contact frame 230.The contact frame 230 that illustrates comprises the magnetic material that embeds in the framework.Magnetic material can be aforesaid permanent magnet or the electromagnet with respect to the semi-finished product device.In another embodiment, magnetic material can be aforesaid can be by the material of magnetic attraction.
In certain embodiments, contact frame 230 can comprise independent magnetosphere.Magnetosphere comprises the aforesaid magnetic material with respect to the semi-finished product device.Magnetosphere can be attached on the top surface of contact frame 230 and in the basal surface at least one.In another embodiment, magnetosphere can embed in the contact frame 230.In such embodiments, described layer pattern is changed into have and the corresponding opening of the opening of contact frame.The opening of contact frame and described layer allows laser beam to shine directly on the part of membrane donator apparatus 241.Such structure allows transferable film optionally to transfer on the semi-finished product device 250.In another embodiment, contact frame itself can be made by magnetic material.In all the above embodiments, contact frame comprises that the magnetic material of q.s thinks that membrane donator apparatus presses the semi-finished product device magnetic force is provided.
Laser induced thermal imaging technology
Provide tight contact between membrane donator apparatus and the semi-finished product device according to laser induced thermal imaging (LITI) the process using magnetic force of embodiment.Fig. 8 is the flow chart that an embodiment of LITI technology is shown.
At first, in step 810, semi-finished product device 250 is placed on the substrate support part 260.In this step, semi-finished product device 250 is by any suitable motion, and for example robot mechanism makes its motion.Next, in step 820, membrane donator apparatus 241 is placed on the semi-finished product device 250.At first, membrane donator apparatus 241 aligns vertically with semi-finished product device 250, under the transferable course of this membrane donator apparatus 241.Then, membrane donator apparatus 241 is moved down on the semi-finished product device 250.At least a portion of transferable layer contacts with semi-finished product device 250.Similar to step 810, membrane donator apparatus 241 can move by motion.
In step 830, magnetic force is provided to membrane donator apparatus 241 is pressed this semi-finished product device 250.Magnetic can be produced by the aforesaid magnetic material that is arranged in two LITI parts, wherein, parts on transferable layer and another parts under the surface that described transferable layer will be transferred to.In certain embodiments, one in two LITI parts can comprise magnet, and another can comprise be not magnet can be by the material of magnetic attraction.In further embodiments, described two LITI parts all comprise magnet.Magnet can comprise permanent magnet and/or electromagnet.Comprise among the embodiment of electromagnet that at magnet magnetic force can optionally produce in time according to the needs of LITI technology.In certain embodiments, can also comprise can be by the material of magnetic attraction for the parts that comprise magnet.
In this step, magnetic force makes membrane donator apparatus 241 backups to semi-finished product device 250, and this makes transferable layer more closely contact the surface that described transferable layer will be transferred to.In this process, can eliminate all or at least some the air gap or bubble gap between membrane donator apparatus 241 and semi-finished product device 250.This step is convenient to transferable layer and is transferred on the semi-finished product device 250.
In step 840, laser shines on the membrane donator apparatus 241.Laser provides transferable layer to transfer to heat required on the semi-finished product device 250.In this step, laser oscillator 220 is activated so that laser is shone on the top surface of membrane donator apparatus 241.Have among the embodiment of contact frame 230 of opening in employing, laser passes the top surface that opening shines membrane donator apparatus 241 then.In this process, laser shines directly into membrane donator apparatus 241 selecteed zones.Laser arrives the light-heat conversion layer of membrane donator apparatus 241 by base substrate.Light-heat conversion layer changes into heat energy with luminous energy, produces heat.Described heat is transferred to the selecteed zone of transferable layer.In this process, the described part of transferable layer breaks away from and transfers on the semi-finished product device 250 from membrane donator apparatus 241.In not using another embodiment of contact frame, shine on the specific part of top surface of membrane donator apparatus 241 laser selective.
Next, in step 850, membrane donator apparatus 241 is removed from semi-finished product device 250, and the described part of transferable layer is stayed on the semi-finished product device.Can use with step 820 in the identical motion that uses membrane donator apparatus 241 is removed.
With reference to Fig. 9 A to 9F, semi-finished product device 250 is introduced into transfer chamber 900.Semi-finished product device 250 is placed on the end effector 910 of the mechanical arm 920 in the transfer chamber 900.Next, shown in Fig. 9 B, semi-finished product device 250 is transported in the LITI chamber 210.Then, shown in Fig. 9 C, semi-finished product device 250 is placed on the substrate support part 260.
Then, shown in Fig. 9 C, membrane donator apparatus 241 is placed on the end effector 910.Next, shown in Fig. 9 D, membrane donator apparatus 241 is introduced in the LITI chamber 210.Membrane donator apparatus 241 semi-finished product devices 250 align vertically.Then, shown in Fig. 9 E, membrane donator apparatus 241 moves downward on the semi-finished product device 250.End effector 910 is withdrawn from from LITI chamber 210 then.Next, close sluice valve 930 so that the reaction chamber of sealing to be provided.In one embodiment, during these steps, can keep transfer chamber and LITI chamber to be in vacuum environment all the time.
Preferably, contact frame can be arranged on the membrane donator apparatus.In Fig. 9 F, contact frame 230 moves downward on the membrane donator apparatus 241.Contact frame 230 provides weight on membrane donator apparatus 241.Contact frame 230 can be convenient to the tight contact between membrane donator apparatus 241 and the semi-finished product device 250.In other embodiments, can omit contact frame.
Then, provide magnetic force to make closely contact between semi-finished product device and the membrane donator apparatus.Magnetic force can be produced by the magnetic material that is arranged in two of the LITI part of appliance, aforesaid one under transferable layer and another is on transferable layer.The technical staff should be appreciated that magnetic material can be arranged on according to the design of LITI equipment in other specific parts.In all the above embodiments, magnetic force is applied between semi-finished product device and the membrane donator apparatus with enough intensity, is used for producing between semi-finished product device and membrane donator apparatus the contact of the air gap useless or bubble.Detail location and structure with respect to LITI equipment magnetic material have more than been described.
Figure 10 A to 10D illustrates the transferable layer of cutaway view of how transferring on the semi-finished product device.The semi-finished product device that illustrates is the organic light emitting apparatus 400 that part is made.In the illustrated embodiment, magnetic material is arranged in semi-finished product device and membrane donator apparatus.In other embodiments, magnetic material can be arranged in other parts of LITI equipment as described above.
With reference to Figure 10 A, semi-finished product device 400 comprises thin film transistor (TFT) (TFT) structure 411, magnetosphere 410, electrode 420 and pixel separate layer 430.The part 412 of electrode 420 exposes by pixel separate layer 430.Organic layer will be formed on the expose portion 412, this fine from the following description understanding.
Next, shown in Figure 10 B, membrane donator apparatus 600 is placed on the semi-finished product device 400.According to Fig. 6 B, membrane donator apparatus 600 comprises base substrate 601, magnetosphere 605, light-heat conversion layer 602, intermediate layer 603 and transferable layer 604 as mentioned above.Shown in Figure 10 B, transferable layer 604 contacts at least in part with the top surface of pixel separate layer 430.In this step, magnetic force is applied between membrane donator apparatus 600 and the semi-finished product device 400.
Then, laser is irradiated on the selecteed part of membrane donator apparatus 600.Selecteed part is positioned on the expose portion 412 of electrode 420.Laser passes base substrate and magnetosphere 605, shines on light-heat conversion layer 602.Light-heat conversion layer 602 changes into heat energy with luminous energy, produces heat.Described heat is transferred on the transferable layer 604 through intermediate layer 603.
Then, shown in Figure 10 C, owing to receive heat, the part of transferable layer 604 contacts from membrane donator apparatus 600 separation and with the expose portion 412 of electrode 420.In the illustrated embodiment, the part of conversion coating 602, intermediate layer 603 and transferable layer 604 is separated with magnetosphere 605.In other embodiments, only there is transferable layer 604 to separate with membrane donator apparatus 600.
Next, shown in Figure 10 D, membrane donator apparatus 600 is removed on semi-finished product device 400.After this step, only there is the part 604a of transferable layer 604 to be retained on the semi-finished product device 400.
In aforesaid embodiment, magnetic force is used to provide make between membrane donator apparatus and the semi-finished product device and closely contacts.Different with the suction mode like this being configured in do not need air pressure in the LITI chamber.Thereby LITI technology can be carried out in vacuum environment.Since before the LITI technology or the technology of next carrying out in vacuum environment, realize usually, so LITI technology can not be performed with not destroying vacuum in whole technology.Depositing operation from the depositing operation of hole injection layer (HIL) to the second electrode lay (cathode layer) keeps vacuum environment.In addition, LITI technology has reduced the impurity between film donor and semi-finished product device or the appearance in gap.Finished product life-span, the output reliability of electronic installation have been improved like this.
Though shown and described various embodiment of the present invention, it should be appreciated by those skilled in the art, under the situation that does not break away from the spirit of the present invention that limits by claim and equivalent thereof and principle, can change these embodiments.
Claims (24)
1. membrane donator apparatus that is used for laser induced thermal imaging, described device comprises:
Substrate;
Transferable rete is configured to when the heat of q.s is applied on it, and its part is transferred, and described transferable rete comprises organic material;
Light-heat conversion layer is configured to produce heat when the light of predetermined wavelength is applied on it, and described light-heat conversion layer is between described substrate and described transferable rete;
Magnetosphere comprises magnet,
Wherein, described magnetosphere is between described substrate and described transferable rete, and perhaps described substrate is between described magnetosphere and described transferable rete.
2. device as claimed in claim 1, wherein, the entire portion of described magnetosphere and described transferable rete is overlapping substantially.
3. device as claimed in claim 1, wherein, described magnet comprise electromagnet, permanent magnet or described electromagnet and permanent magnet the two.
4. device as claimed in claim 1, wherein, described magnet comprises electromagnet, wherein, described device also comprises the electrode that is electrically connected to described electromagnet and is configured to be attached to external power source.
5. device as claimed in claim 1, wherein, described magnet comprises the permanent magnet of selecting from the group of being made up of alnico magnet, ferrite lattice, rare-earth magnet, rubber magnet and plastic magnet.
6. device as claimed in claim 1, wherein, described magnet comprises one or more forms of selecting from the group of being made up of plate shape, bar shaped, rod and graininess.
7. device as claimed in claim 1, wherein, described magnetosphere is between described substrate and described light-heat conversion layer.
8. device as claimed in claim 1, wherein, described magnetosphere is between described light-heat conversion layer and described transferable rete.
9. device as claimed in claim 1, wherein, described substrate is between described magnetosphere and described transferable rete, and described magnetosphere is also between the material of described substrate and described substrate, described seemingly magnetosphere is the same in described substrate.
10. device as claimed in claim 1, wherein, described magnetosphere also comprises light-thermal transition material, described light-thermal transition material is configured to produce heat when the light of predetermined wavelength is applied on it.
11. device as claimed in claim 1, wherein, described magnet q.s is to produce the magnetic field from 5mGT to 50mGT.
12. a membrane donator apparatus that is used for laser induced thermal imaging, described device comprises:
Substrate;
Transferable rete is configured to when the heat of q.s is applied on it, and its part is transferred, and described transferable rete comprises organic material;
Light-heat conversion layer is configured to produce heat when the light of predetermined wavelength is applied on it, and described light-heat conversion layer is between described substrate and described transferable rete;
Magnetosphere, comprising can be by the material of magnetic attraction, wherein, describedly can be arranged in whole described magnetosphere regularly or equably by the material of magnetic attraction,
Wherein, described magnetosphere is between described substrate and described transferable rete, and perhaps described substrate is between described magnetosphere and described transferable rete.
13. device as claimed in claim 12 wherein, describedly can be comprised one or more forms of selecting by the material of magnetic attraction from the group that is made of plate shape, bar shaped, rod and graininess.
14. device as claimed in claim 12, wherein, described magnetosphere is between described substrate and described light-heat conversion layer.
15. device as claimed in claim 12, wherein, described magnetosphere is between described light-heat conversion layer and described transferable rete.
16. device as claimed in claim 12, wherein, what described magnetosphere comprised q.s can be by the material of magnetic attraction, is used for the motion of described device when being arranged in the magnetic field from 5mGT to 50mGT when described device.
17. device as claimed in claim 12, wherein, described can being comprised from by Fe, Ni, Cr, Fe by the material of magnetic attraction
2O
3, Fe
3O
4, CoFe
2O
4, MnFeO
4And select in the group that constitutes of above-mentioned two kinds or more kinds of alloy one or more.
18. device as claimed in claim 12, wherein, the entire portion of described magnetosphere and transferable rete is overlapping.
19. a method of making electronic installation, described method comprises:
The housing apparatus that comprises half one-tenth product and bracing or strutting arrangement is provided, described housing apparatus comprises magnetosphere, describedly partly become product to comprise receiving surface, described bracing or strutting arrangement is configured to support the described product that partly becomes, and the magnetosphere of described housing apparatus comprises magnet or can be by the material of magnetic attraction;
Membrane donator apparatus as claimed in claim 1 is provided;
Be arranged to make transferable rete in the face of described receiving surface described membrane donator apparatus, and the magnetosphere of described housing apparatus and membrane donator apparatus be attached to each other, thereby described transferable rete contact, and does not have bubble between the two with described surface.
20. method as claimed in claim 19 also comprises laser beam is shone at least one part of described membrane donator apparatus, and at least a portion of described transferable rete is transferred on the described surface.
21. method as claimed in claim 19 wherein, describedly partly becomes product to comprise described magnetosphere.
22. method as claimed in claim 19, wherein, described bracing or strutting arrangement comprises described magnetosphere.
23. method as claimed in claim 19, wherein, described method is carried out under the environment of vacuum.
24. method as claimed in claim 19, wherein, described electronic installation comprises OLED.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020050080347 | 2005-08-30 | ||
| KR1020050080347A KR100700822B1 (en) | 2005-08-30 | 2005-08-30 | Laser Heat Transfer Apparatus and the fabrication method of Organic Light Emitting Diode using the same |
| KR1020050080349 | 2005-08-30 | ||
| KR1020050109819 | 2005-11-16 |
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| Publication Number | Publication Date |
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| CN1923530A CN1923530A (en) | 2007-03-07 |
| CN100460214C true CN100460214C (en) | 2009-02-11 |
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| CNB2006101219859A Expired - Fee Related CN100460214C (en) | 2005-08-30 | 2006-08-30 | Membrane donator apparatus for laser induction heat imaging |
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| KR (1) | KR100700822B1 (en) |
| CN (1) | CN100460214C (en) |
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| KR101368392B1 (en) * | 2008-12-12 | 2014-03-04 | 엘지디스플레이 주식회사 | An apparatus for hardening seal of electrophoretic display deivce and method of fabricating electrophoretic display deivce using thereof |
| KR101993285B1 (en) * | 2012-12-10 | 2019-06-26 | 엘지디스플레이 주식회사 | Doner flim, laser induced thermal imaging device and method using the same |
| KR101582369B1 (en) * | 2012-12-27 | 2016-01-04 | 제일모직주식회사 | Thermal transfer film and electroluminescence display device prepared using the same |
| KR102180071B1 (en) | 2017-10-31 | 2020-11-17 | 엘지디스플레이 주식회사 | Ultra Fine Pattern Deposition Apparatus, Ultra Fine Pattern Deposition Method using the same and Light Emitting Display Device by the Ultra Fine Pattern Deposition Method |
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| JPH09174271A (en) * | 1995-12-26 | 1997-07-08 | Nikon Corp | Laser beam process and processing mask |
| US20020033388A1 (en) * | 2000-08-31 | 2002-03-21 | Kuniaki Okada | Laser processing method |
| JP2004296224A (en) * | 2003-03-26 | 2004-10-21 | National Institute Of Advanced Industrial & Technology | Light emitting element |
| JP2004355949A (en) * | 2003-05-29 | 2004-12-16 | Tdk Corp | Manufacturing method of organic el display and manufacturing device of organic el display |
| JP2005152966A (en) * | 2003-11-27 | 2005-06-16 | Fuji Photo Film Co Ltd | Laser beam machining method, and blank transfer method |
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| KR100700822B1 (en) | 2007-03-27 |
| KR20070024822A (en) | 2007-03-08 |
| CN1923530A (en) | 2007-03-07 |
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