KR100700827B1 - Laser induced thermal imaging appratus and preparing method of organic light emitting device using the same - Google Patents

Abstract

The present invention relates to a laser thermal transfer apparatus and a method of manufacturing an organic light emitting device using the same. The laser laser thermal transfer apparatus according to an aspect of the present invention includes an acceptor substrate having a transfer layer and a transfer layer provided on the acceptor substrate, and a donor film including a permanent magnet is sequentially transported and stacked. A substrate stage including an electromagnet forming a permanent magnet and a magnetic force of the donor film; A laser oscillator for irradiating a laser onto the donor film; And a chamber including at least the substrate stage therein.

Laser Thermal Transfer, Laminating, Donor Film, Permanent Magnet, Electromagnet

Description

Laser induced thermal imaging appratus and preparing method of organic light emitting device using the same

1 is a partial cross-sectional view of a laser thermal transfer apparatus according to the prior art.

2A to 2D are cross-sectional views of the laser thermal transfer donor film according to one aspect of the present invention.

3 is a structural diagram of a laser thermal transfer apparatus according to another aspect of the present invention.

4A and 4B are plan views of a substrate stage according to an embodiment of the present invention.

5 is a schematic view of a laser oscillator applied to a laser thermal transfer apparatus according to the present invention.

6A to 6H are cross-sectional views illustrating a method of manufacturing an organic light emitting device according to another aspect of the present invention.

<Description of the symbols for the main parts of the drawings>

200, 300, 400, 500: donor film 600: laser oscillator

610: chamber 620: substrate stage

625: electromagnets 621, 623: mounting groove

670: donor film 680: acceptor substrate

The present invention relates to a laser thermal transfer device and a method for manufacturing an organic light emitting device using the same, and more particularly, to a laser thermal transfer device for laminating an acceptor substrate and a donor film by magnetic force and a method for manufacturing an organic light emitting device using the same. It is about.

The field of application of the present invention is not limited to a specific industrial field and may be applied in various ways, but it is expected to be useful for forming an organic light emitting layer and the like in manufacturing an organic light emitting device. The organic light emitting device is a device which emits self by emitting light by forming a light emitting layer between the first electrode and the second electrode and applying a voltage between the electrodes so that holes and electrons are combined in the light emitting layer. Hereinafter, the prior art of the present invention and the configuration of the present invention will be described based on the laser thermal transfer donor film used in the organic light emitting device, and the laser thermal transfer method and apparatus using the same, but is not limited thereto.

In the laser thermal transfer method, a donor substrate including a base substrate, a photothermal conversion layer, and a transfer layer is irradiated with a laser to transform a laser that has passed through the substrate substrate from a photothermal conversion layer to heat to deform and expand the photothermal conversion layer, thereby forming an adjacent transfer layer. It deforms and expands, and the transfer layer adheres to the acceptor substrate so as to be transferred.

In the case of performing the laser thermal transfer method, it is preferable that a vacuum state is formed in the chamber where the transfer is performed so as to be synchronized with the deposition process at the time of forming the light emitting element, but in the case of the conventional vacuum process, between the donor substrate and the acceptor substrate. There is a problem that the transfer of the transfer layer is not made because foreign matter or space is generated. Therefore, in the laser thermal transfer method, a method of laminating a donor substrate and an acceptor substrate has an important meaning, and various methods for solving the problem have been studied.

1 is a partial cross-sectional view of a laser thermal transfer apparatus according to the prior art for solving the above problems. According to this, the laser thermal transfer apparatus 10 includes a substrate stage 12 positioned inside the chamber 11 and a laser irradiation apparatus 13 positioned above the chamber 11.

The substrate stage 12 is a stage for sequentially positioning the acceptor substrate 14 and the donor film 15 introduced into the chamber 11, respectively.

At this time, in order to allow the acceptor substrate 14 and the donor film 15 to be laminated without foreign matter or space therebetween, in this case, the substrate stage 12 is not maintained in a vacuum in the chamber 11 where laser thermal transfer is performed. The hose 16 is connected to the lower part and sucked by the vacuum pump P to bond the acceptor substrate 14 and the donor film 15 to each other.

However, even in such a prior art, the foreign matter 1 and the space between the acceptor substrate 14 and the donor film 15 cannot be completely prevented from being generated, and furthermore, the vacuum state inside the chamber 11 can not be maintained. It is known to adversely affect the reliability and longevity of the product.

The present invention has been made to solve the above problems, and an object of the present invention is to provide a laser thermal transfer donor film that does not generate foreign matter or space between the acceptor substrate and the donor substrate while the laser thermal transfer is performed in a vacuum state; It provides a laser thermal transfer method and apparatus using the same.

One aspect of the present invention is a laser thermal transfer donor film including a photothermal conversion layer between a substrate and a transfer layer, characterized in that the donor film includes a permanent magnet.

The thermal transfer device according to another aspect of the present invention includes an acceptor substrate on which a transfer layer is accommodated, and a transfer layer provided on the acceptor substrate, and a donor film including a permanent magnet is sequentially transferred and stacked, A substrate stage including an electromagnet forming a permanent magnet and a magnetic force; A laser oscillator for irradiating a laser onto the donor film; And a chamber including at least the substrate stage therein.

According to another aspect of the present invention, in a laser thermal transfer method in which a donor film having a transfer layer is irradiated with a laser to transfer the transfer layer to an acceptor substrate, the acceptor substrate is provided on a substrate stage containing at least one electromagnet. Acceptor substrate transfer step of positioning; A donor film transfer step of placing the laser thermal transfer donor film of claim 1 on the acceptor substrate; A laminating step of applying power to an electromagnet of the substrate stage to bond the donor film and the acceptor substrate to each other; And a transfer step of transferring the transfer layer to the acceptor substrate by irradiating a laser onto the donor film.

According to another aspect of the present invention, in the method of manufacturing an organic light emitting device in which a light emitting layer is formed between a first electrode and a second electrode by a laser thermal transfer method, a pixel definition region is formed on a substrate stage including at least one electromagnet. An acceptor substrate transfer step of positioning the formed acceptor substrate; A donor film transfer step of transferring a donor film including a permanent magnet on the acceptor substrate and having a light emitting layer; A laminating step of applying power to an electromagnet of the substrate stage to bond the donor film and the acceptor substrate to each other; And transferring a laser to the donor film to transfer the organic light emitting layer to the pixel definition region of the acceptor substrate.

Hereinafter, the present invention will be described in more detail with reference to the various aspects of the present invention.

First, as one aspect of the present invention, a laser thermal transfer donor film including a permanent magnet will be described. The donor film is a film having a transfer layer to be transferred to an acceptor substrate, and includes a substrate substrate, a light-to-heat conversion layer, and a transfer layer that are sequentially stacked. In this case, a buffer layer and an inter layer may be further included between the photothermal conversion layer and the transfer layer to improve performance.

At this time, the laser thermal transfer donor film includes a permanent magnet. In this case, at least one permanent magnet layer may be formed between the various layers constituting the donor film, or a permanent magnet composed of fine particles may be included in at least one of the layers.

Figure 2a is a cross-sectional view of the laser thermal transfer donor film according to an embodiment of the present invention. Accordingly, the donor film includes a photothermal conversion layer 220, a permanent magnet layer 230, a buffer layer 240, an interlayer film 250, and a transfer layer 260 sequentially stacked on the base substrate 210. do.

The base substrate 210 is a substrate that serves as a supporter of the donor film, and is made of a transparent polymer, and has a thickness of 10 to 500 μm. At this time, polyester, polyacryl, polyepoxy, polyethylene, polystyrene, etc. may be used as the transparent polymer, but is not limited thereto.

The photothermal conversion layer 220 is a layer made of a light absorbing material that absorbs laser light and converts it into heat. The thickness of the photothermal conversion layer 220 depends on the light absorbing material used and the forming method. If it is made of a vacuum film deposition method, electron beam deposition method, or sputtering to 100 to 5000 kPa, when formed into an organic film is preferably formed by 0.1 to 2㎛ by extrusion, gravure, spin, knife coating method.

When the thickness of the light-to-heat conversion layer 220 is formed to be thinner than the above range, the energy absorption rate is low so that the amount of energy converted into light is small, and the expansion pressure is lowered. Edge open failure may occur due to the step that occurs at.

The light absorbing material composed of a metal or metal oxide or the like has an optical concentration of 0.1 to 0.4, and includes aluminum, silver, chromium, tungsten, tin, nickel, titanium, cobalt, zinc, gold copper, tungsten, molybdenum, lead, and the like. There is an oxide.

In addition, the photosynthetic material composed of the organic film includes a polymer to which carbon black, graphite, or infrared dye is added. In this case, examples of the material for forming the polymer binder resin include acrylic (meth) acrylate oligomer, ester (meth) acrylate oligomer, epoxy (meth) acrylate oligomer, urethane (meth) acrylate oligomer, and the like ( Meta) acrylate oligomers, or mixtures of the oligomer (meth) acrylate monomers, but are not limited thereto.

The permanent magnet layer 230 is a layer inserted to form a magnetic force with the electromagnet to be installed on the substrate stage of the laser thermal transfer apparatus to be described later, Alnico magnet (Alnico Magnet), Ferrite Magnet (Ferrite Magnet), rare earth magnet, Rubber magnets, plastic magnets, etc. may be used.

The buffer layer 240 is a layer introduced to improve the transfer characteristics of the transfer layer and the device life after transfer, and a metal oxide, a metal sulfide or a nonmetal inorganic compound, a polymer or a low molecular organic material may be used. At this time, it is preferable to form thickness in 0.01-2 micrometer.

The interlayer 250 is to protect the photothermal conversion layer, and preferably has a high thermal resistance, and may be composed of an organic or inorganic film.

The transfer layer 260 is a layer which is separated from the donor film and transferred to the acceptor substrate. When the transfer layer 260 is used for fabricating an organic light emitting device, the transfer layer 260 may be formed of a polymer or a low molecular weight organic light emitting material. In addition, to form an electron transport layer (ETL), an electron injection layer (EIL), a hole transport layer (HTL), a hole injection layer (HIL) may be made of a material suitable for each. At this time, the material of each transfer layer is not limited, any material that can be easily added by those skilled in the art can be formed, and can be formed by extrusion, gravure, spin, knife coating, vacuum deposition, CVD, or the like.

By inserting the permanent magnet layer 230 into the donor film 200 as described above, the donor film becomes magnetic, and when placed on the acceptor substrate, the donor film is mutually magnetic with the substrate stage of the laser transfer device in which the electromagnet is embedded. Form a workforce. Therefore, the donor film and the acceptor substrate also have an effect of being in close contact by magnetic force.

2B is a cross-sectional view of a laser thermal transfer donor film according to another embodiment of the present invention. Accordingly, in FIG. 2A, unlike the permanent magnet layer 230 formed between the photothermal conversion layer 220 and the buffer layer 240, the permanent magnet layer 320 is disposed between the photothermal conversion layer 330 and the substrate substrate 310. It is formed in. In other respects, since it is the same as FIG. 2A, detailed description thereof will be omitted.

Figure 2c is a cross-sectional view of the laser thermal transfer donor film according to another embodiment of the present invention. Accordingly, unlike the permanent magnets formed as one layer in FIGS. 2A and 2B, the permanent magnets are dispersed as fine particles on the base substrate 410.

That is, in the present embodiment, the donor film 400 has magnetic properties by forming and dispersing the permanent magnet into fine powder in the transparent polymer forming the base substrate 410. At this time, the permanent magnet may be formed of nanoparticles.

Figure 2d is a cross-sectional view of the laser thermal transfer donor film according to another embodiment of the present invention. According to this, unlike the fine particles of the permanent magnet is dispersed on the base substrate 410 in Figure 2c, the fine permanent magnet particles are dispersed in the buffer layer 530. As a result, those skilled in the art will appreciate that the same effects as those of the donor film of FIG. 2C can be obtained.

Next, a laser thermal transfer apparatus according to another aspect of the present invention will be described with reference to the drawings. The laser thermal transfer apparatus according to an aspect of the present invention is a laser thermal transfer apparatus designed to make the above-described laser thermal transfer donor film useful, but is not necessarily limited to the above-mentioned donor film.

3 is a structural diagram of a laser thermal transfer apparatus according to an embodiment. Accordingly, the laser thermal transfer apparatus includes a chamber 610, a substrate stage 620, and a laser oscillator 630.

The chamber 610 may use a chamber used in a conventional laser thermal transfer apparatus, and transfer a donor film (not shown) and an acceptor substrate (not shown) including a permanent magnet to the inside of the chamber outside the chamber 610. The transfer means (not shown) such as a robot arm for the purpose is provided.

The substrate stage 620 is located at the bottom of the chamber 610, and the substrate stage 620 includes at least one electromagnet 625. In this case, the electromagnet may be one large planar magnet or a plurality of array magnets. The type of the electromagnet 625 is not limited, but in order to perform lamination more advantageously, it is preferable that the electromagnet 625 is formed in a plurality of rows of concentric circles or horizontal and vertical. 4A and 4B are perspective plan views showing electromagnets 625 formed in concentric circles and a plurality of rows, respectively, in the substrate stage 620. Although not shown, wires for applying electric power to each electromagnet will be formed.

On the other hand, the substrate stage 620 may further include a driving means (not shown) for moving. For example, when the laser is irradiated in the longitudinal direction, it may further include a driving means for moving the substrate stage in the horizontal direction.

In addition, the substrate stage 620 may be provided with respective mounting means for receiving and mounting the acceptor substrate and the donor film. The mounting means allows the acceptor substrate, which has been transferred into the chamber by the transfer means, to be accurately mounted at a predetermined position of the substrate stage.

In the present embodiment, the mounting means includes through holes 641 and 651, guide bars 643 and 653, moving plates 645 and 655, supports 647 and 657, and mounting grooves 621 and 623. Can be configured. At this time, the guide bars (643, 653) moves up or down with the movable plates (645, 655) and the support (647, 657), the guide bars (643, 653) through the through holes (641, 651) It is a structure that accommodates the acceptor substrate while rising through it, and seats the acceptor substrate in the mounting grooves 621 and 623 while descending. At this time, the mounting groove is preferably formed obliquely the wall surface for accurate mounting of the acceptor substrate and the donor film.

 The laser oscillator 630 may be installed outside or inside the chamber, and the laser oscillator 630 may be installed to allow the laser to shine from above. Further, according to FIG. 5, which is a schematic configuration diagram of the laser oscillator, the laser oscillator in this embodiment uses a CW ND: YAG laser (1604 nm), has two galvanometer scanners 631 and 633, and scans. A lens 635 and a cylinder lens 636 are provided, but are not limited thereto.

Hereinafter, an embodiment of a laser thermal transfer method for transferring a transfer layer of a donor film to an acceptor substrate using the donor film and laser thermal transfer apparatus described above as another aspect of the present invention will be described with reference to FIGS. 6A to 6H. . The laser thermal transfer method in this embodiment applied to the manufacture of the organic light emitting device includes an acceptor substrate transfer step, donor film transfer step, laminating step and transfer step.

The acceptor substrate transfer step is to position the acceptor substrate 670 into the chamber 610 of the laser thermal transfer apparatus, wherein the acceptor substrate 670 is a chamber 610 by a transfer means such as a robot arm 690. ) Can be transferred (Fig. 6a). The acceptor substrate 670 transferred into the chamber 610 is supported by the guide bar 643 raised through the through hole (FIG. 6B). The guide bar 643 supporting the acceptor substrate 670 descends again, thereby accurately positioning the acceptor substrate 670 on the mounting groove 621 of the substrate stage 620 (FIG. 6C).

The donor film transfer step is transferred into the chamber 610 by a transfer means such as the robot arm 690 as in the acceptor substrate transfer step (FIG. 6D). At this time, the donor film 680 is preferably conveyed by the film tray 681 at the time of conveyance. The donor film 680 transferred into the chamber 610 is supported by the guide bar 653 raised through the through hole 651 (FIG. 6E). The guide bar 653 which supported the donor film 680 descends again, and correctly places the donor film 680 on the mounting groove 623 of the substrate stage 620 (FIG. 6F).

In the laminating step, an appropriate power is applied to the electromagnet 625 of the substrate stage 620 so that the permanent magnet included in the donor film 680 forms a magnetic attraction force with the electromagnet of the substrate stage. It is a step to bond between the acceptor substrate 670. At this time, since the inside of the chamber 610 is maintained in a vacuum state, the occurrence of foreign matter or space between the donor film 680 and the acceptor substrate 670 is minimized, and the transfer efficiency is increased (FIG. 6G).

The lamination of the donor substrate 680 and the acceptor substrate 670 may be performed in various ways, depending on the shape of the electromagnet embedded in the substrate stage. For example, when the electromagnet of the substrate stage is arranged concentrically, as shown in FIG. 4A, power is first applied to the innermost concentric electromagnet, and then power is applied to the next concentric outer electromagnet. In this state, by applying electric power to the concentric electromagnets, the lamination can be performed while minimizing the generation of foreign matter or space between the donor substrate and the acceptor substrate.

In addition, when the electromagnet of the substrate stage is arranged while forming a plurality of rows horizontally and vertically as shown in FIG. By laminating, the lamination can be performed while reducing the formation of foreign matter or space.

The transfer step is a step of transferring the organic light emitting layer formed on the donor film 680 to the pixel definition region of the acceptor substrate by irradiating a laser on the acceptor substrate 670 and the laminated donor film 680 by a laser irradiation apparatus. When irradiating a laser, the light-to-heat conversion layer of the donor film 680 swells, so that the adjacent organic light emitting layer also swells in the direction of the acceptor substrate, and the organic light emitting layer contacts the acceptor substrate, thereby transferring. 6h).

Although the present invention has been described primarily with reference to embodiments, many other possible modifications and variations can be made without departing from the spirit and scope of the invention. For example, a method of including a permanent magnet in a donor film, further forming an additional organic layer or an inorganic layer, including a permanent magnet in one of them, or the shape, shape, position, etc. of the substrate plate containing the electromagnet The change may be a change that can be easily obtained by those skilled in the art.

According to the laser thermal transfer donor film and the laser thermal transfer method and apparatus using the same according to the present invention, there is an effect that the donor film and the acceptor substrate can be laminated without foreign substances or voids therebetween. In addition, since lamination is performed between the donor film and the acceptor substrate even in a vacuum state, when the previous process requires a vacuum state, all the processes may be performed in a vacuum.

The scope of the above-described invention is defined in the following claims, and is not bound by the description in the text of the specification, all modifications and variations belonging to the equivalent scope of the claims will fall within the scope of the present invention.

Claims (20)

In the laser thermal transfer donor film comprising a photothermal conversion layer between the substrate and the transfer layer, A laser thermal transfer donor film, characterized in that a permanent magnet layer is included in at least one of the substrate and the transfer layer. The method of claim 1, Laser thermal transfer donor film for manufacturing an organic light emitting device further comprises a buffer layer between the photothermal conversion layer and the transfer layer. The method of claim 1, Laser thermal transfer donor film for manufacturing an organic light emitting device further comprises an interlayer film between the photothermal conversion layer and the transfer layer. delete The method of claim 1, The permanent magnet layer is a laser thermal transfer donor film formed between the substrate and the photothermal conversion layer. The method of claim 1, The permanent magnet layer is a laser thermal transfer donor film, characterized in that made of one selected from the group consisting of alico magnets, ferrite magnets, rare earth magnets, rubber magnets, and plastic magnets. The method of claim 1, The permanent magnet layer is a laser thermal transfer donor film containing permanent magnet microparticles in a base layer. The method of claim 7, wherein The fine particles are laser thermal transfer donor film, characterized in that the nanoparticles. The method of claim 1, The transfer layer of the laser thermal transfer donor film is a laser thermal transfer donor film forming a light emitting layer of the organic light emitting device. A donor film having a transfer layer accommodated thereon, and a transfer layer provided on the acceptor substrate, and a donor film including a permanent magnet are sequentially transferred and stacked to form a permanent magnet and a magnetic force of the donor film. A substrate stage including an electromagnet; A laser oscillator for irradiating a laser onto the donor film; And And a chamber including at least the substrate stage therein. The method of claim 10, The electromagnet is a laser thermal transfer apparatus, characterized in that built in concentric circles on the substrate stage. The method of claim 10, The electromagnet is a laser thermal transfer apparatus, characterized in that built in the horizontal and vertical rows and columns on the substrate stage. The method of claim 10, The laser thermal transfer apparatus further comprises an acceptor substrate mounting means and a donor film mounting means for accommodating the acceptor substrate and the donor film to be positioned on the substrate stage. In a laser thermal transfer method in which a donor film having a transfer layer is irradiated with a laser to transfer the transfer layer to an acceptor substrate, An acceptor substrate transfer step of placing the acceptor substrate on a substrate stage containing at least one electromagnet; A donor film transfer step of placing the laser thermal transfer donor film of claim 1 on the acceptor substrate; A laminating step of applying power to an electromagnet of the substrate stage to bond the donor film and the acceptor substrate to each other; And And a transfer step of transferring the transfer layer to the acceptor substrate by irradiating the donor film with a laser. The method of claim 14, The laminating may include applying power sequentially from the inside to the outside of the electromagnet formed in a concentric circle, thereby laminating the donor film and the acceptor substrate from the inside to the outside. The method of claim 14, The laminating step is a laser thermal transfer method characterized in that the laminating the donor film and the acceptor substrate by sequentially applying power in accordance with the path of the laser irradiated to the electromagnet formed in a row and horizontally formed columns. The method of claim 14, In the donor film transfer step, the donor film is laser thermal transfer method, characterized in that mounted on the film tray. In the method of manufacturing an organic light emitting device in which an organic light emitting layer is formed between a first electrode and a second electrode by a laser thermal transfer method, An acceptor substrate transfer step of positioning an acceptor substrate on which a pixel definition region is formed on a substrate stage including at least one electromagnet; A donor film transfer step of transferring a donor film including a permanent magnet on the acceptor substrate and having the organic light emitting layer; A laminating step of applying power to an electromagnet of the substrate stage to bond the donor film and the acceptor substrate to each other; And And a transfer step of transferring the laser to the donor film to transfer the organic light emitting layer to the pixel definition region of the acceptor substrate. The method of claim 18, The laminating step is a method of manufacturing an organic light emitting device, characterized in that by applying power sequentially from the inside to the outer direction to the electromagnet formed in a concentric circle, the donor film and the acceptor substrate from the inside to the outside. The method of claim 18, The laminating step may be performed by sequentially applying electric power in accordance with a path of a laser to be irradiated to the electromagnets formed in rows and columns, thereby laminating the donor film and the acceptor substrate. .

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